X-ray conversion target device and electron accelerator

Abstract

The embodiment of the present application relates to an X-ray conversion target device and an electron accelerator, comprising: an electron window assembly comprising an electron window and an electron window flange, the electron window being fixed on the electron window flange and used for transmitting an electron beam; a conversion target assembly comprising a conversion target and a conversion target flange, the conversion target being fixed on a side of the conversion target flange facing the electron window assembly and used for converting the transmitted electron beam into X-rays; wherein the conversion target flange is sealingly connected with the electron window flange, so that the electron window assembly and the conversion target assembly enclose a sealed cavity, and the cavity is used for providing a vacuum environment.

Description

Technical Field

[0001] This application relates to the field of electron accelerator technology, and in particular to an X-ray conversion target device and an electron accelerator. Background Technology

[0002] An electron accelerator is a device that generates X-rays and is widely used in industrial irradiation, medical radiotherapy, seed breeding, and security imaging. Its core principle lies in the bombardment of a conversion target by a high-energy electron beam generated by the accelerator. The electrons are slowed down in the Coulomb field of the atomic nuclei in the conversion target, and some of their kinetic energy is converted into photon energy, producing a continuous spectrum of X-rays. This process is also known as bremsstrahlung. Therefore, the conversion target, as a key component for energy conversion, determines the output characteristics and operational stability of the X-rays.

[0003] Currently, X-ray conversion targets in electron accelerators mainly employ two configurations: vacuum-internal targets and vacuum-external targets. Vacuum-internal targets are specifically installed directly at the end of the accelerator's vacuum tube, with the electron beam directly bombarding the target. In this configuration, the target is isolated from the atmosphere and less prone to oxidation; however, this also presents a drawback: when the electron beam power is high, the target temperature becomes excessively high, causing adsorbed gases to be released into the vacuum tube, leading to accelerator vacuum failure. Furthermore, the target's position is limited, making it impossible to flexibly adjust its location according to application requirements and changes in electron beam density. Vacuum-external targets are placed outside the accelerator's vacuum tube. After acceleration inside the accelerator, the electron beam first passes through a vacuum window into the atmosphere before bombarding the target located in the atmosphere. While this structure isolates the target from the accelerator, preventing gas outflow from contaminating the vacuum tube and offering flexible target placement, the target temperature can reach hundreds of degrees Celsius under high-power electron beam bombardment, making it highly susceptible to oxidation in the atmosphere and posing a serious safety risk. Utility Model Content

[0004] In view of this, the present application provides an X-ray conversion target device and an electron accelerator to solve at least one problem existing in the prior art.

[0005] In a first aspect, embodiments of this application provide an X-ray conversion target device, comprising: An electronic window assembly includes an electronic window and an electronic window flange, wherein the electronic window is fixed to the electronic window flange and is used for electron beam transmission; A conversion target assembly includes a conversion target and a conversion target flange, the conversion target being fixed to the side of the conversion target flange facing the electron window assembly and used to convert the transmitted electron beam into X-rays; The conversion target flange is sealed to the electronic window flange so that the electronic window assembly and the conversion target assembly form a sealed cavity, which provides a vacuum environment.

[0006] In conjunction with the first aspect of this application, in an optional embodiment, the electronic window assembly further includes an electronic window heat dissipation base, the electronic window heat dissipation base being fixed inside the electronic window flange, and the electronic window being fixed on the electronic window heat dissipation base.

[0007] In conjunction with the first aspect of this application, in an optional embodiment, the electronic window assembly further includes a first water-cooling channel, a first water inlet, and a first water outlet; the first water-cooling channel is disposed within the electronic window flange, and the first water inlet and the first water outlet are opened on the outer wall of the electronic window flange and communicate with the first water-cooling channel.

[0008] In conjunction with the first aspect of this application, in an optional embodiment, the conversion target assembly further includes a conversion target heat dissipation base, which is sealed and fixed to the conversion target flange to seal the cavity; the conversion target is disposed on the side of the conversion target heat dissipation base facing the cavity.

[0009] In conjunction with the first aspect of this application, in an optional embodiment, the conversion target assembly further includes: The second water cooling channel, the second water inlet, and the second water outlet are provided. The second water cooling channel extends radially through the conversion target flange. The second water inlet and the second water outlet are located on the outer side wall of the conversion target flange and are connected to the second water cooling channel. A heat dissipation channel is disposed within the heat dissipation base of the conversion target, and the heat dissipation channel includes a channel inlet and a channel outlet that are connected to the second water-cooling channel.

[0010] In conjunction with the first aspect of this application, in an optional embodiment, the heat dissipation base of the conversion target includes an upper substrate and a lower substrate disposed opposite to each other; wherein, a plurality of first protrusion structures are provided on the side of the upper substrate facing the lower substrate, forming a first flow channel; a plurality of second protrusion structures are provided on the side of the lower substrate facing the upper substrate, forming a second flow channel; the first protrusion structures protrude into the second flow channel, and the second protrusion structures protrude into the first flow channel; the first flow channel and the second flow channel are connected to form a manifold microchannel, and the manifold microchannel is the heat dissipation channel.

[0011] In conjunction with the first aspect of this application, in an optional embodiment, it further includes: A sealing structure is located between the electronic window flange and the conversion target flange to seal the electronic window assembly and the conversion target assembly.

[0012] In conjunction with the first aspect of this application, in an optional embodiment, the vacuum level of the cavity is less than or equal to 0.1 atmospheres.

[0013] In conjunction with the first aspect of this application, in an alternative embodiment, the X-ray conversion target device further includes at least one of the following: A getter, located within the cavity, is used to maintain the vacuum level of the cavity; A titanium pump, connected to the cavity, is used to maintain the vacuum level of the cavity; A vacuum pump, connected to the cavity, is used to evacuate the cavity to maintain the vacuum level of the cavity.

[0014] Secondly, embodiments of this application provide an electron accelerator, comprising: An accelerator for emitting an electron beam includes a vacuum tube and a vacuum window disposed at the end of the vacuum tube. The vacuum window is used to isolate the vacuum environment inside the vacuum tube from the atmospheric environment outside the vacuum tube and to allow the electron beam to be emitted. And an X-ray conversion target device as described in the first aspect, disposed on the side of the vacuum window facing the atmospheric environment, for converting the emitted electron beam into X-rays, wherein the distance between the accelerator and the X-ray conversion target device is adjustable.

[0015] The X-ray conversion target device and electron accelerator provided in this application have the following beneficial effects: In the X-ray conversion target device, the conversion target is fixed to the side of the conversion target flange facing the electron window assembly. The conversion target flange and the electron window flange are sealed together so that the electron window assembly and the conversion target assembly form a closed cavity. This cavity can provide a vacuum environment for the conversion target, thereby effectively improving the high-temperature oxidation problem of the conversion target. Furthermore, the vacuum environment of the conversion target is not provided by the vacuum tube of the accelerator, which can avoid the accelerator vacuum failure caused by high-temperature gas release from the conversion target.

[0016] In an electron accelerator, the vacuum window is located at the end of the vacuum tube, and the X-ray conversion target is positioned on the side of the vacuum window facing the atmospheric environment. This allows the conversion target to be detached from the accelerator, serving as an external vacuum target and effectively preventing any impact on the accelerator. Furthermore, the distance between the accelerator and the X-ray conversion target is adjustable, allowing for flexible adjustments to the distance between them in practical applications and ensuring the flexibility of the conversion target's position. Thus, both the flexibility of the conversion target's position and operational safety are taken into account.

[0017] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0018] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the cross-sectional structure of a vacuum internal target in the prior art; Figure 2 This is a schematic diagram of the cross-sectional structure of a vacuum external target in the prior art; Figure 3 This is a schematic cross-sectional view of the X-ray conversion target device provided in the embodiments of this application; Figure 4 A schematic cross-sectional view of an X-ray conversion target device provided as an optional example; Figure 5 A cross-sectional schematic diagram of an X-ray conversion target device provided as another alternative example; Figure 6 A cross-sectional schematic diagram of an X-ray conversion target device provided as yet another alternative example; Figure 7 This is a cross-sectional structural diagram of an electron accelerator provided in an embodiment of this application. Detailed Implementation

[0019] Exemplary embodiments of the present application will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application may be implemented in various forms and should not be limited to the specific embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope of the disclosure of the present application to those skilled in the art.

[0020] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of this application. However, it will be apparent to those skilled in the art that this application can be practiced without one or more of these details. In other instances, to avoid confusion with this application, some technical features well-known in the art have not been described; that is, not all features of actual embodiments are described herein, nor are well-known functions and structures described in detail.

[0021] In the accompanying drawings, for clarity, the dimensions of layers, areas, and elements, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0022] When an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. Although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this application, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion. And the discussion of a second element, component, area, layer, or portion does not imply that the first element, component, area, layer, or portion necessarily exists in this application.

[0023] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship of one element or feature shown in the figure to other elements or features. In addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0024] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0025] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solution of this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0026] Figure 1 and Figure 2 As shown in the figure, the electron accelerator in the related technology includes an accelerator 1 for emitting an electron beam and a conversion target 210 for converting the emitted electron beam into X-rays. Currently, the conversion target in the electron accelerator mainly adopts two configurations: an inner vacuum target and an outer vacuum target.

[0027] Figure 1 The diagram illustrates the case where the conversion target is a vacuum target. The conversion target 210 is directly positioned at the end of the vacuum tube 60 of accelerator 1, and the electron beam directly bombards the conversion target 210. In this case, the conversion target 210 is in a vacuum environment provided by the vacuum tube 60, isolated from the atmospheric environment and less prone to oxidation. However, this also presents a drawback: when the electron beam power is high, the temperature of the conversion target 210 becomes too high, causing the gas adsorbed by the material itself to be released into the vacuum tube, resulting in a vacuum failure in accelerator 1; furthermore, the position of the conversion target 210 is restricted, making it impossible to flexibly adjust the target position according to the actual application requirements and changes in electron beam density.

[0028] Figure 2 The diagram illustrates the case where the conversion target is a vacuum external target. A vacuum window 710 is located at the end of the vacuum tube 60 of the accelerator 1. The vacuum window 710 isolates the vacuum environment inside the vacuum tube 60 from the atmospheric environment outside and allows for electron beam emission. Thus, after the electron beam is accelerated inside the accelerator 1, it first passes through the vacuum window 710 into the atmospheric environment and then bombards the conversion target 210 placed in the atmosphere. While this structure isolates the conversion target from the accelerator, allows for flexible target selection, and avoids contamination of the vacuum tube by gas escaping from the conversion target, the conversion target temperature can reach several hundred degrees Celsius when subjected to high-power electron beam bombardment. This makes it highly susceptible to oxidation in the atmospheric environment, posing a serious safety risk.

[0029] In view of this, embodiments of this application provide an X-ray conversion target device, please refer to... Figure 3 The X-ray conversion target device includes: The electronic window assembly 10 includes an electronic window 110 and an electronic window flange 120. The electronic window 110 is fixed to the electronic window flange 120 and is used for electron beam transmission. The conversion target assembly 20 includes a conversion target 210 and a conversion target flange 220. The conversion target 210 is fixed to the side of the conversion target flange 220 facing the electron window assembly 10 and is used to convert the transmitted electron beam into X-rays. The conversion target flange 220 is sealed to the electronic window flange 120 so that the electronic window assembly 10 and the conversion target assembly 20 form a closed cavity 30, which is used to provide a vacuum environment.

[0030] Understandably, the conversion target 210 is fixed to the side of the conversion target flange 220 facing the electronic window assembly 10. The conversion target flange 220 is sealed to the electronic window flange 120 so that the electronic window assembly 10 and the conversion target assembly 20 form a closed cavity 30. This cavity 30 can provide a vacuum environment for the conversion target 210, thereby effectively improving the high-temperature oxidation problem of the conversion target 210. Furthermore, the vacuum environment of the conversion target 210 is not provided by the vacuum tube of the accelerator, which can avoid the high-temperature outgassing of the conversion target 210 causing accelerator vacuum failure.

[0031] Please refer to Figure 3 The electron window assembly 10 includes an electron window 110 and an electron window flange 120. The electron window 110 is fixed to the electron window flange 120 and is used for electron beam transmission. The electron window 110 is specifically a metal foil sheet; the electron window can also be referred to as a metal foil window. The material of the electron window 110 includes, but is not limited to, beryllium, titanium, and titanium alloys. In some examples, the thickness of the electron window 110 ranges from 5 μm to 100 μm.

[0032] In some embodiments, the electronic window assembly 10 further includes an electronic window heat dissipation base 130, which is fixed within the electronic window flange 120, and the electronic window 110 is fixed on the electronic window heat dissipation base 130. Under high-power conditions, during the transmission of the electron beam through the electronic window 110, some of its energy is deposited in the window material, converting into a large amount of heat, which may cause the electronic window 110 to overheat and become damaged or fail. By introducing the electronic window heat dissipation base 130, an efficient heat conduction path is provided for the electronic window 110, which can quickly conduct and dissipate the deposited heat, thereby improving the thermal durability and reliability of the electronic window 110 when facing high-power electron beam bombardment, and ensuring the long-term stability of the electron beam channel.

[0033] The electronic window 110 is hermetically welded to the electronic window heat dissipation base 130; the electronic window heat dissipation base 130 is brazed to the electronic window flange 120 as a whole; this helps to ensure the airtightness of the cavity 30.

[0034] Optionally, the material of the electronic window heat dissipation base 130 includes copper.

[0035] In some embodiments, the electronic window assembly 10 further includes a first water-cooling channel 140, a first water inlet 141, and a first water outlet 142. The first water-cooling channel 140 is disposed within the electronic window flange 120, and the first water inlet 141 and the first water outlet 142 are located on the outer wall of the electronic window flange 120 and communicate with the first water-cooling channel 140. Through the first water-cooling channel 140 integrated inside the electronic window flange 120, coolant can circulate therein, thereby efficiently cooling the electronic window 110 and the electronic window heat dissipation base 130, improving their heat load capacity and service life.

[0036] Optionally, the projection of the first water-cooling channel 140 along the axial direction of the electronic window flange 120 is annular. This allows the coolant to circulate around the entire electronic window flange 120, further improving the cooling effect.

[0037] Please refer to Figure 3 The conversion target assembly 20 includes a conversion target 210 and a conversion target flange 220. The conversion target 210 is fixed to the side of the conversion target flange 220 facing the electron window assembly 10 and is used to convert the transmitted electron beam into X-rays. The material of the conversion target 210 includes, but is not limited to, tungsten.

[0038] In some embodiments, the conversion target assembly 20 further includes a conversion target heat dissipation base 230, which is sealed and fixed to the conversion target flange 220 to seal the cavity 30; the conversion target 210 is disposed on the side of the conversion target heat dissipation base 230 facing the cavity 30.

[0039] The conversion target 210 is positioned on the side of the conversion target heat dissipation base 230 facing the cavity 30. The conversion target heat dissipation base 230 is sealed and fixed to the conversion target flange 220. The conversion target heat dissipation base 230 forms part of the boundary of the cavity 30 and completely covers the side of the conversion target 210 facing away from the electronic window assembly 10, isolating the conversion target 210 from the atmospheric environment. The entire conversion target 210 is in a vacuum environment, which is more conducive to suppressing the oxidation of the conversion target 210. The conversion target heat dissipation base 230 can also efficiently conduct away the large amount of heat generated by the conversion target 210 during operation.

[0040] The heat dissipation base 230 of the conversion target is brazed into one piece with the flange 220 of the conversion target.

[0041] In some embodiments, the conversion target assembly 20 further includes: a second water-cooling channel 240, a second water inlet 241, and a second water outlet 242. The second water-cooling channel 240 extends radially through the conversion target flange 220. The second water inlet 241 and the second water outlet 242 are located on the outer side wall of the conversion target flange 220 and communicate with the second water-cooling channel 240. A heat dissipation channel 250 is disposed within the conversion target heat dissipation base 230. The heat dissipation channel 250 includes a channel inlet 251 and a channel outlet 252 that communicate with the second water-cooling channel 240.

[0042] Through the second water-cooling channel 240 and the heat dissipation channel 250, the coolant can fully exchange heat with the conversion target 210, which directly bears the massive heat generated by the electron beam bombardment, and quickly remove the heat. This enables it to cope with the heat load generated under high power, ensuring the structural stability and service life of the conversion target assembly 20. Specifically, the coolant enters the second water-cooling channel 240 inside the conversion target flange 220 through the second inlet 241, then flows through the heat dissipation channel 250 through the channel inlet 251, and finally returns to the second water-cooling channel 240 inside the conversion target flange 220 through the channel outlet 252 and is discharged from the second outlet 242.

[0043] In some embodiments, the conversion target heat dissipation base 230 includes an upper substrate 231 and a lower substrate 232 disposed opposite to each other; wherein, a plurality of first protrusions 233 are provided on the side of the upper substrate 231 facing the lower substrate 232, forming a first flow channel 234; a plurality of second protrusions 235 are provided on the side of the lower substrate 232 facing the upper substrate 231, forming a second flow channel 236; the first protrusions 233 protrude into the second flow channel 236, and the second protrusions 235 protrude into the first flow channel 234; the first flow channel 234 and the second flow channel 236 are connected to form a manifold microchannel, which is a heat dissipation channel 250. This manifold microchannel heat dissipation structure provides better heat dissipation effect and reduces the water pressure in the heat dissipation channel 250, ensuring the structural stability and service life of the conversion target assembly 20.

[0044] In some embodiments, the electronic window flange 120 and the conversion target flange 220 are coaxially arranged. This allows for uniform sealing force, which is beneficial for forming a stable and reliable vacuum seal.

[0045] In some embodiments, the electron window 110 is positioned opposite the conversion target 210. This face-to-face arrangement establishes the shortest and most direct electron beam transmission path, allowing the electron beam to directly and concentratedly bombard the effective working area of ​​the conversion target 210 with minimal energy loss and scattering angle after passing through the electron window 110. This improves the conversion efficiency of electron beam energy to X-rays and avoids problems such as energy dispersion and mis-hitting of non-target areas that may occur due to excessively long electron beam paths or angular deviations, thereby ensuring the quality and intensity of X-ray output while reducing the risk of stray radiation and localized overheating.

[0046] In some embodiments, the vacuum level of cavity 30 is less than or equal to 0.1 atmospheres. Controlling the vacuum level within this range can effectively ensure that the concentration of gas molecules in the working environment of the conversion target is sufficiently low, which can effectively suppress the scattering effect of gas molecules on the high-energy electron beam, reduce energy loss, and ensure that the electron beam energy acts on the conversion target efficiently. At the same time, the residual oxygen content is extremely low under this vacuum level, which can fundamentally inhibit the surface oxidation reaction of the conversion target under the high-temperature working conditions of hundreds of degrees Celsius, thereby ensuring the long-term structural stability and working life of the conversion target.

[0047] Furthermore, the vacuum level of cavity 30 is less than or equal to 10 Pa. This facilitates higher energy conversion efficiency and provides a near-ideal oxygen-free working environment for the conversion target.

[0048] Please refer to Figure 3 In some embodiments, the X-ray conversion target device further includes a sealing structure 40 located between the electronic window flange 120 and the conversion target flange 220, for sealing the electronic window assembly 10 and the conversion target assembly 20. In some examples, one end of the sealing structure 40 is hermetically welded to the electronic window flange 120, and the other end of the sealing structure 40 is hermetically welded to the conversion target flange 220. Of course, this application does not exclude the possibility of the electronic window flange 120 and the conversion target flange 220 being directly pressed together.

[0049] In an optional example, please refer to Figure 4 The X-ray conversion target device also includes a getter 51, which is located inside the cavity 30 and is used to maintain the vacuum level of the cavity 30. After activation, the getter 51 can continuously and chemically adsorb active gas molecules (such as O2, N2, H2O, etc.) inside the cavity 30, thus maintaining the static vacuum level of the cavity 30 in a simple and reliable manner without the need for external energy. Figure 4 Specifically, the example shown is that the getter 51 adheres to the inner wall of the sealing structure 40. The position of the getter 51 is not limited in this embodiment.

[0050] In another optional example, please refer to Figure 5 The X-ray conversion target device also includes a titanium pump 52, which is connected to the cavity 30 and used to maintain the vacuum level of the cavity 30. The titanium pump 52 can chemically adsorb active gases through an active titanium film formed by sputtering to maintain the static vacuum level of the cavity 30 for a long period of time. In an example where the X-ray conversion target device also includes a sealing structure 40, the titanium pump 52 is mounted on the sealing structure 40.

[0051] In yet another optional example, please refer to Figure 6The X-ray conversion target device also includes a vacuum pump 53, which is connected to the cavity 30 and used to evacuate the cavity 30 to maintain its vacuum level. In an example where the X-ray conversion target device also includes a sealing structure 40, the vacuum pump 53 is mounted on the sealing structure 40. In some embodiments, the vacuum pump 53 is detachably mounted on the sealing structure 40. By evacuating gas from the cavity 30 using the vacuum pump 53, the vacuum level of the dynamic vacuum cavity can be maintained for a long period of time.

[0052] In some embodiments, the X-ray conversion target device further includes an electrical isolator 54 disposed between the vacuum pump 53 and the cavity 30. Understandably, the vacuum pump 53 requires power to operate, and the electrical isolator 54 can electrically isolate the vacuum pump 53 from the electron window assembly 10 and the conversion target assembly 20 to avoid affecting the electron beam and X-rays.

[0053] Optionally, the electrical isolator 54 includes a bellows.

[0054] Please refer to Figure 7 This application provides an electron accelerator, comprising: Accelerator 1 for emitting electron beams includes a vacuum tube 60 and a vacuum window 710 disposed at the end of the vacuum tube. The vacuum window 710 is used to isolate the vacuum environment inside the vacuum tube 60 from the atmospheric environment outside the vacuum tube 60 and to provide electron beam emission. And the X-ray conversion target device 2 provided in the above embodiment is disposed on the side of the vacuum window 710 facing the atmospheric environment, and is used to convert the emitted electron beam into X-rays. The distance between the accelerator 1 and the X-ray conversion target device 2 is adjustable.

[0055] Therefore, by placing the vacuum window 710 of the accelerator 1 at the end of the vacuum tube 60 and the X-ray conversion target device 2 on the side of the vacuum window 710 facing the atmospheric environment, the conversion target 210 is separated from the accelerator 1 and serves as a vacuum external target, effectively avoiding any impact on the accelerator 1. The cavity 30 in the X-ray conversion target device 2 provides a vacuum environment for the conversion target 210, effectively improving the high-temperature oxidation problem of the conversion target 210. Furthermore, the distance between the accelerator 1 and the X-ray conversion target device 2 is adjustable, allowing for flexible adjustment of the distance between the accelerator 1 and the X-ray conversion target device 2 in practical applications, ensuring the flexibility of the conversion target position. Thus, both the flexibility of the conversion target position and operational safety are taken into account.

[0056] The electron accelerator includes a vacuum window assembly 70, which is sealed and fixed to the end of a vacuum tube 60. The vacuum window assembly 70 includes a vacuum window flange 720, and a vacuum window 710 is fixed to the vacuum window flange 720 and used for electron beam transmission. The vacuum window 710 is specifically a metal foil sheet and can also be referred to as a metal foil window. The materials of the vacuum window 710 include, but are not limited to, beryllium, titanium, and titanium alloys. The vacuum window flange 720 is hermetically fixed to the vacuum window 710; the vacuum window flange 720 is also hermetically fixed to the vacuum tube 60.

[0057] In some embodiments, the vacuum window assembly 70 further includes a vacuum window heat dissipation base 730, which is fixed within the vacuum window flange 720, and the vacuum window 710 is fixed on the vacuum window heat dissipation base 730. Under high-power conditions, during the transmission of the electron beam through the vacuum window 710, some of its energy is deposited in the window material, converting into a large amount of heat, which may cause the vacuum window 710 to overheat and become damaged or fail. By introducing the vacuum window heat dissipation base 730, an efficient heat conduction path is provided, which can quickly conduct and dissipate the deposited heat, thereby improving the thermal durability and reliability of the vacuum window 710 when facing high-power electron beam bombardment, and ensuring the long-term stability of the electron beam channel.

[0058] The vacuum window 710 is hermetically welded to the vacuum window heat dissipation base 730; the vacuum window heat dissipation base 730 is brazed to the vacuum window flange 720 as a whole.

[0059] Optionally, the material of the vacuum window heat dissipation base 730 includes copper.

[0060] In some embodiments, the vacuum window assembly 70 further includes a third water-cooling channel 740, a third water inlet 741, and a third water outlet 742. The third water-cooling channel 740 is disposed within the vacuum window flange 720, and the third water inlet 741 and the third water outlet 742 are located on the outer wall of the vacuum window flange 720 and communicate with the third water-cooling channel 740. Through the third water-cooling channel 740 integrated inside the vacuum window flange 720, coolant can circulate within it, thereby efficiently cooling the vacuum window 710 and the vacuum window heat dissipation base 730, improving their heat load capacity and service life.

[0061] Optionally, the projection of the third water-cooling channel 740 along the axial direction of the vacuum window flange 720 is annular. This allows the coolant to circulate around the entire vacuum window flange 720, further improving the cooling effect.

[0062] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. An X-ray conversion target device, characterized in that, include: An electronic window assembly includes an electronic window and an electronic window flange, wherein the electronic window is fixed to the electronic window flange and is used for electron beam transmission; A conversion target assembly includes a conversion target and a conversion target flange, the conversion target being fixed to the side of the conversion target flange facing the electron window assembly and used to convert the transmitted electron beam into X-rays; The conversion target flange is sealed to the electronic window flange so that the electronic window assembly and the conversion target assembly form a sealed cavity, which provides a vacuum environment.

2. The X-ray conversion target device according to claim 1, characterized in that, The electronic window assembly also includes an electronic window heat dissipation base, which is fixed inside the electronic window flange, and the electronic window is fixed on the electronic window heat dissipation base.

3. The X-ray conversion target device according to claim 1, characterized in that, The electronic window assembly further includes a first water-cooling channel, a first water inlet, and a first water outlet; the first water-cooling channel is disposed inside the electronic window flange, and the first water inlet and the first water outlet are opened on the outer wall of the electronic window flange and communicate with the first water-cooling channel.

4. The X-ray conversion target device according to claim 1, characterized in that, The conversion target assembly also includes a conversion target heat dissipation base, which is sealed and fixed to the conversion target flange to seal the cavity. The conversion target is disposed on the side of the conversion target heat dissipation base facing the cavity.

5. The X-ray conversion target device according to claim 4, characterized in that, The conversion target component also includes: The second water cooling channel, the second water inlet, and the second water outlet are provided. The second water cooling channel extends radially through the conversion target flange. The second water inlet and the second water outlet are located on the outer side wall of the conversion target flange and are connected to the second water cooling channel. A heat dissipation channel is disposed within the heat dissipation base of the conversion target, and the heat dissipation channel includes a channel inlet and a channel outlet that are connected to the second water-cooling channel.

6. The X-ray conversion target device according to claim 5, characterized in that, The heat dissipation base for the conversion target includes an upper substrate and a lower substrate disposed opposite to each other; wherein, the upper substrate has a plurality of first protrusions on the side facing the lower substrate, forming a first flow channel; the lower substrate has a plurality of second protrusions on the side facing the upper substrate, forming a second flow channel; the first protrusions protrude into the second flow channel, and the second protrusions protrude into the first flow channel; the first flow channel and the second flow channel are connected to form a manifold microchannel, which is the heat dissipation channel.

7. The X-ray conversion target device according to claim 1, characterized in that, Also includes: A sealing structure is located between the electronic window flange and the conversion target flange to seal the electronic window assembly and the conversion target assembly.

8. The X-ray conversion target device according to claim 1, characterized in that, The vacuum level of the cavity is less than or equal to 0.1 atmospheres.

9. The X-ray conversion target device according to claim 1, characterized in that, The X-ray conversion target device further includes at least one of the following: A getter, located within the cavity, is used to maintain the vacuum level of the cavity; A titanium pump, connected to the cavity, is used to maintain the vacuum level of the cavity; A vacuum pump, connected to the cavity, is used to evacuate the cavity to maintain the vacuum level of the cavity.

10. An electron accelerator, characterized in that, include: An accelerator for emitting an electron beam includes a vacuum tube and a vacuum window disposed at the end of the vacuum tube. The vacuum window is used to isolate the vacuum environment inside the vacuum tube from the atmospheric environment outside the vacuum tube and to allow the electron beam to be emitted. And the X-ray conversion target device as described in any one of claims 1 to 9, disposed on the side of the vacuum window facing the atmospheric environment, for converting the emitted electron beam into X-rays, wherein the distance between the accelerator and the X-ray conversion target device is adjustable.

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