A two-fluid water displacement device
Patent Information
- Application Number
- CN202521777265.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-20
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-08-20
AI Technical Summary
这种方式虽然隔离大部分药液,但是载板表面还附着一层药液,还会污染下一个处理槽药液
1.即可以通过高压空气供给管与压缩空气进气管连通,进而使得高压气体从压缩空气进气管进入分流盒中后同时向上气体风刀和下气体风刀中供入高压气并吹出,从而实现高压空气吹扫的效果;上气体风刀和下气体风刀同时向输送方向反方向吹风,进而吹落载板上下表面的药水,进而保证阻水效果,以防止顺向吹扫导致药水飞溅至下一化学槽中。
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Figure CN224844211U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of PCB board etching conveying devices, and in particular to a two-fluid water-driving device. Background Technology
[0002] During the semiconductor substrate manufacturing process, the substrates need to be treated in chemical baths with different solutions. As the substrate passes through the chemical bath, the chemical solutions adhering to it will enter the next treatment bath, thus contaminating the solutions in that bath. Existing equipment uses solid rollers placed at the junction of the tanks, with these rollers positioned along the conveying direction of the conveyor rollers in the chemical bath. This allows the substrate to pass through the solid rollers during transport, resulting in the substrate being scraped clean by the rollers. While this method isolates most of the chemical solutions, a layer of chemical solution still adheres to the surface of the substrate, which can still contaminate the solutions in the next treatment bath. Utility Model Content
[0003] To solve the above-mentioned technical problems, this application provides a two-fluid water-repelling device, which has the advantage of improving the water-blocking effect.
[0004] To achieve the above objectives, the technical solution of this utility model is as follows: A two-fluid water-driving device includes a two-fluid nozzle disposed above a conveying roller, wherein a plurality of two-fluid nozzles are disposed on the two-fluid nozzle. It also includes an air inlet pipe for supplying compressed air to the two-fluid nozzle and a water supply pipe for supplying cleaning water to the two-fluid nozzle.
[0005] The above technical solution involves supplying cleaning water into the two-fluid nozzle through a water supply pipe, and then using compressed air through an air inlet pipe to atomize the liquid in the two-fluid nozzle. This atomizes the liquid in the nozzle, thereby blocking a large amount of the chemical solution on the PCB substrate at this stage, reducing the amount of chemical solution carried over and contaminating the next stage of the bath solution. While blocking a large amount of chemical solution, the PCB surface is kept moist, which is beneficial for subsequent process stages and improves the product yield and quality reliability of the substrate.
[0006] As a preferred embodiment of this application, the compressed air pressure in the intake pipe is set at 3.0-5.0 kg / cm². 2 .
[0007] To achieve the above technical solution, the pressure of the compressed air is adjusted, typically between 3.0 and 5.0 kg / cm². 2 Within this range, the particle size of the two fluids atomization and the pressure on the PCB board surface are adjusted to select suitable parameters for different board thicknesses in order to achieve the best barrier effect.
[0008] As a preferred embodiment of this application, it also includes an air knife assembly and an air supply assembly for supplying high-pressure air to the air knife assembly; The air knife assembly includes an upper gas air knife for blowing air in the opposite direction to the upper surface of the carrier in the conveying direction and a lower gas air knife for blowing air in the opposite direction to the lower surface of the carrier in the conveying direction. The air supply assembly includes a distribution box, on which a compressed air inlet pipe is provided, and on which a pair of air outlets are provided. The upper gas air knife and the lower gas air knife are both connected to the distribution box.
[0009] To achieve the above technical solution, a high-pressure air supply pipe can be connected to a compressed air inlet pipe, allowing high-pressure gas to enter the distribution box from the compressed air inlet pipe and simultaneously be supplied to the upper and lower gas air knives and blown out, thereby achieving the effect of high-pressure air purging. The upper and lower gas air knives simultaneously blow air in the opposite direction of the conveying direction, thereby blowing off the liquid on the upper and lower surfaces of the carrier plate, thus ensuring the water-blocking effect and preventing the liquid from splashing into the next chemical tank due to forward purging.
[0010] As a preferred embodiment of this application, both the upper gas air knife and the lower gas air knife include an air duct connected to the distribution box, and the air duct is provided with an air outlet.
[0011] The above technical solution is achieved by stabilizing the pressure of high-pressure gas after it enters the air duct and then blowing it out from the air outlet, thereby achieving a uniform air outlet effect and ensuring the air outlet effect.
[0012] As a preferred embodiment of this application, the air duct is connected to the distribution box via a rotary joint, and the air duct is provided with an angle adjustment mechanism for adjusting the tilt angle of the air outlet blade.
[0013] The above technical solution enables the angle adjustment mechanism to rotate the air duct, thereby causing the air outlet blade above it to tilt at an angle, thus adjusting the air outlet angle to meet different usage requirements and ensure water blocking effect.
[0014] As a preferred embodiment of this application, the angle adjustment mechanism includes a positioning plate and an adjusting screw disposed on the air duct, wherein the positioning plate is provided with an arc-shaped adjusting groove for the adjusting screw to rotate.
[0015] To achieve the above technical solution, the adjusting screw is loosened, allowing the air duct to rotate the adjusting screw in the arc-shaped adjusting groove. When it rotates to a suitable angle, the adjusting screw is tightened, pressing it against the positioning plate, thereby fixing the air duct and adjusting the angle of the air outlet blade on the air duct.
[0016] In summary, this application includes at least one of the following beneficial technical effects: 1. The high-pressure air supply pipe can be connected to the compressed air inlet pipe, so that the high-pressure gas enters the distribution box from the compressed air inlet pipe and is simultaneously supplied to the upper and lower gas air knives and blown out, thereby achieving the effect of high-pressure air purging. The upper and lower gas air knives blow air in the opposite direction of the conveying direction, thereby blowing off the liquid on the upper and lower surfaces of the carrier plate, thus ensuring the water blocking effect and preventing the liquid from splashing into the next chemical tank due to the forward purging. Attached Figure Description
[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.
[0019] Figure 2 This is a side view of an embodiment of this application.
[0020] Figure 3 This is a structural schematic diagram of the air knife assembly in an embodiment of this application.
[0021] Figure 4 This is a top view of the air knife assembly in an embodiment of this application.
[0022] Figure 5 This is a side view of the air knife assembly portion in an embodiment of this application.
[0023] Reference numerals in the attached drawings: 1. Air supply assembly; 11. Diverter box; 12. Compressed air inlet pipe; 13. Rotary joint; 2. Air knife assembly; 21. Upper gas air knife; 22. Lower gas air knife; 23. Air duct; 24. Air outlet; 3. Angle adjustment mechanism; 31. Positioning plate; 32. Adjusting screw; 33. Arc-shaped adjustment groove; 4. Water baffle; 5. Two-fluid nozzle; 6. Two-fluid nozzle; 7. Air inlet pipe; 8. Water supply pipe; 9. Conveying roller. Detailed Implementation
[0024] The following is in conjunction with the appendix Figures 1 to 5 This application will be described in further detail.
[0025] This application discloses a two-fluid water-driving device. (Refer to...) Figure 1-2The gas-water-blocking device includes a two-fluid nozzle 5 positioned above the conveyor roller 9, with several two-fluid nozzles 6 mounted on it; it also includes an air inlet pipe 7 for supplying compressed air to the two-fluid nozzles 6 and a water supply pipe 8 for supplying cleaning water to the two-fluid nozzle 5. Specifically, cleaning water is supplied to the two-fluid nozzles via the water supply pipe 8, and then compressed air is supplied through the air inlet pipe 7 to atomize the liquid in the two-fluid nozzle 5. This effectively blocks a large amount of liquid from the PCB substrate at this stage, reducing the amount of liquid carried over and contaminating the next stage of the bath solution. While blocking a large amount of liquid, it also keeps the PCB surface moist, facilitating subsequent processing stages and improving the product yield and quality reliability of the substrate. The compressed air pressure in the air inlet pipe 7 is set at 3.0-5.0 kg / cm². 2 Adjust the compressed air pressure, typically between 3.0-5.0 kg / cm². 2 Within this range, the particle size of the two fluids atomization and the pressure on the PCB board surface are adjusted to select suitable parameters for different board thicknesses in order to achieve the best barrier effect.
[0026] To ensure water-blocking effect, combined with Figure 3-5 The water-blocking device also includes an air knife assembly 2 and an air supply assembly 1 for supplying high-pressure air to the air knife assembly 2. The air knife assembly is located at the end of the conveying direction of the carrier plate, that is, on the side of the discharge direction of the solid roller. High-pressure air is supplied into the air knife through the air supply assembly 1, and then the high-pressure air is blown out from the air knife assembly 2, thereby blowing the liquid medicine on the carrier plate off and achieving the effect of blocking water.
[0027] The air knife assembly 2 includes an upper gas air knife 21 for blowing air in the opposite direction to the upper surface of the carrier in the conveying direction and a lower gas air knife 22 for blowing air in the opposite direction to the lower surface of the carrier in the conveying direction. This allows the upper gas air knife 21 and the lower gas air knife 22 to blow air in the opposite direction to the conveying direction at the same time, thereby blowing off the liquid on the upper and lower surfaces of the carrier plate, thus ensuring the water-blocking effect and preventing the liquid from splashing into the next chemical tank due to forward blowing.
[0028] The air supply assembly 1 includes a distribution box 11, on which a compressed air inlet pipe 12 is provided. The distribution box 11 also has a pair of air outlets. Both the upper gas knife 21 and the lower gas knife 22 are connected to the distribution box 11. This means that the high-pressure air supply pipe can be connected to the compressed air inlet pipe 12, allowing high-pressure gas to enter the distribution box 11 from the compressed air inlet pipe 12 and simultaneously supply high-pressure gas into the upper gas knife 21 and the lower gas knife 22, thus achieving a high-pressure air purging effect. Both the upper gas knife 21 and the lower gas knife 22 include an air duct 23 connected to the distribution box 11. The air duct 23 has an air outlet 24, meaning that after the high-pressure gas enters the air duct 23 and is stabilized, it is blown out from the air outlet 24, thus achieving a uniform airflow effect and ensuring effective airflow.
[0029] The air duct 23 is connected to the diversion box 11 via a rotating joint 13. The air duct 23 is equipped with an angle adjustment mechanism 3 for adjusting the tilt angle of the air outlet 24. This allows the angle adjustment mechanism 3 to rotate the air duct 23, thereby driving the tilt angle of the air outlet 24 above it, and thus adjusting the air outlet angle to meet different usage requirements and ensure water blocking effect.
[0030] The angle adjustment mechanism 3 includes a positioning plate 31 and an adjusting screw 32 mounted on the air duct 23. The positioning plate 31 has an arc-shaped adjusting groove 33 for the adjusting screw 32 to rotate. By loosening the adjusting screw 32, the air duct 23 can drive the adjusting screw 32 to rotate in the arc-shaped adjusting groove 33. When the screw rotates to the appropriate angle, the adjusting screw 32 is tightened, thereby pressing the adjusting screw 32 against the positioning plate 31, thus fixing the air duct 23 and adjusting the angle of the air outlet blade 24 on the air duct 23. Simultaneously, to prevent the chemical solution from flying out from the opening at the top of the chemical tank, a baffle plate 4 is installed at the top of the chemical tank to prevent water droplets from splashing.
[0031] The implementation principle of the two-fluid dewatering device in this application is as follows: Cleaning water is supplied to the two-fluid nozzle through a water supply pipe, and then compressed air is used through an air inlet pipe to atomize the liquid in the two-fluid nozzle. This atomizes the liquid in the nozzle, thereby blocking a large amount of the chemical solution on the PCB substrate at this stage, reducing the amount of chemical solution carried over and contaminating the next stage of the bath solution. While blocking a large amount of chemical solution, the PCB surface remains moist, facilitating subsequent processing stages and improving the product yield and quality reliability of the substrate. The compressed air pressure in the air inlet pipe is set at 3.0-5.0 kg / cm². 2 Adjust the compressed air pressure, typically between 3.0-5.0 kg / cm². 2 Within this system, the particle size of the two-fluid atomization and the pressure on the PCB board surface are adjusted to select suitable parameters for different board thicknesses, achieving the best barrier effect. A high-pressure air supply pipe is connected to a compressed air inlet pipe 12, allowing high-pressure gas to enter the distribution box 11 from the compressed air inlet pipe 12 and simultaneously be supplied to the upper gas air knife 21 and the lower gas air knife 22, thus achieving a high-pressure air purging effect. The upper gas air knife 21 and the lower gas air knife 22 simultaneously blow air in the opposite direction of the conveying direction, thereby blowing off the chemicals on the upper and lower surfaces of the carrier board, ensuring a water-blocking effect and preventing chemicals from splashing into the next chemical tank due to forward blowing.
[0032] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A two-fluid water-driving device, characterized in that: It includes a two-fluid nozzle (5) disposed above the conveying roller (9), and the two-fluid nozzle is provided with a plurality of two-fluid nozzles (6); It also includes an air inlet pipe (7) for supplying compressed air to the two-fluid nozzle (6) and a water supply pipe (8) for supplying cleaning water to the two-fluid nozzle (5).
2. The two-fluid water-driving device according to claim 1, characterized in that: The compressed air pressure in the intake pipe (7) is set at 3.0-5.0 kg / cm². 2 .
3. The two-fluid water-driving device according to claim 1, characterized in that: It also includes an air knife assembly (2) and an air supply assembly (1) for supplying high-pressure air to the air knife assembly (2); The air knife assembly (2) includes an upper gas air knife (21) for blowing air in the opposite direction to the upper surface of the carrier in the conveying direction and a lower gas air knife (22) for blowing air in the opposite direction to the lower surface of the carrier in the conveying direction. The air supply assembly (1) includes a distribution box (11), on which a compressed air inlet pipe (12) is provided, and on which a pair of air outlets are provided, and the upper gas air knife (21) and the lower gas air knife (22) are both connected to the distribution box (11).
4. The two-fluid water-driving device according to claim 3, characterized in that: Both the upper gas air knife (21) and the lower gas air knife (22) include an air duct (23) connected to the diversion box (11), and the air duct (23) is provided with an air outlet (24).
5. A two-fluid water-driving device according to claim 4, characterized in that: The air duct (23) is connected to the diversion box (11) via a rotating joint (13), and the air duct (23) is provided with an angle adjustment mechanism (3) for adjusting the tilt angle of the air outlet blade (24).
6. A two-fluid water-driving device according to claim 5, characterized in that: The angle adjustment mechanism (3) includes a positioning plate (31) and an adjusting screw (32) set on the air duct (23). The positioning plate (31) is provided with an arc-shaped adjusting groove (33) for the adjusting screw (32) to rotate.