A sine swing spraying structure based on TGV wet spraying equipment

Abstract

The utility model provides a kind of sine swing spray structure based on TGV wet method spray equipment, including spray backplate and the front swing mechanism being set on the spray backplate, the front swing mechanism includes push-pull assembly, swing drive assembly and swing lever assembly, the push-pull assembly is equipped with first slide rail, swing drive assembly is slidably matched on the first slide rail, the output end of push-pull assembly is connected with swing drive assembly, swing drive assembly includes rotary motor, the sine bar group being set to the rotary motor output end, the second slide rail being transversely arranged and the rack drive piece being slidably matched on the second slide rail, the other end of the sine bar group is hinged with the rack drive piece, swing lever assembly includes setting in the spray backplate pivot piece, swing gear being rotatably matched on the pivot piece and front spray pipe being fixedly connected on the swing gear. The utility model relates to the technical field of TGV spray.

Description

Technical Field

[0001] This utility model relates to the technical field of TGV spraying, and in particular to a sinusoidal oscillating spraying structure based on TGV wet spraying equipment. Background Technology

[0002] In the wet manufacturing process of patterns and circuits in semiconductor packaging, TGV (Through Glass Via) technology has developed rapidly to meet the demand for high-density interconnects. Existing technologies mostly employ horizontal or vertical interconnect production line equipment. Among them, Chinese invention patent CN119812064B provides an apparatus and spraying method for wet manufacturing of patterns and circuits. By setting up a rotatable turntable, a front swing mechanism, and a rear swing mechanism, it achieves non-concentric spraying on both sides of the substrate, which improves spray uniformity and reduces the risk of contamination to a certain extent.

[0003] However, the front swing nozzle of the existing device is directly driven by a drive motor to swing. During high-speed reciprocating motion, the motor needs to frequently perform emergency stops and reverse starts at the extreme positions at both ends of the swing trajectory. This causes the mechanical transmission system to be subjected to huge impacts, generating vibration and noise. On the other hand, it also limits the increase of swing speed and may affect the accuracy of the spray trajectory and the life of the nozzle due to inertial impact. At the same time, this rigid drive method also makes the nozzle always in a fixed working range. Operators need to install and disassemble products in a limited space, and maintenance and replacement of fixtures are extremely inconvenient, affecting the overall production efficiency and operability of the equipment.

[0004] Therefore, the inventors urgently need a sinusoidal oscillating spray structure based on TGV wet spray equipment to solve the above problems. Utility Model Content

[0005] To address the shortcomings of the existing technology, this utility model provides a sinusoidal swing spray structure based on a TGV wet scrubbing equipment, aiming to solve the problems of extreme position sudden stop impact, unstable operation, and inconvenient maintenance caused by the direct motor drive of the front swing nozzle in the existing TGV wet scrubbing equipment.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is: a sinusoidal oscillating spray structure based on a TGV wet scrubbing equipment, including a spray back plate and a front oscillating mechanism disposed on the spray back plate. The front oscillating mechanism includes a push-pull assembly, an oscillating drive assembly, and a swing arm assembly. The push-pull assembly is provided with a first slide rail, and the oscillating drive assembly is slidably engaged with the first slide rail. The output end of the push-pull assembly is connected to the oscillating drive assembly. The oscillating drive assembly includes a rotary motor, a sinusoidal rod assembly with one end disposed at the output end of the rotary motor, a second slide rail disposed laterally, and a rack drive component slidably engaged with the second slide rail. The other end of the sinusoidal rod assembly is hinged to the rack drive component. The swing arm assembly includes a rotating shaft disposed on the spray back plate, an oscillating gear rotatably engaged with the rotating shaft, and a front spray pipe fixedly connected to the oscillating gear. The rack drive component is meshed with the oscillating gear.

[0007] Based on the above, the beneficial effect of a sinusoidal oscillating spray structure based on a TGV wet scrubbing equipment is to solve the problems of extreme position sudden stop impact, unstable operation, and inconvenient maintenance and operation caused by the direct motor drive of the front oscillating nozzle in the existing TGV wet scrubbing equipment; mainly reflected in: 1. This utility model drives the swing drive assembly to move along the first slide rail by pushing and pulling the output end of the assembly, so that the rack drive component disengages or engages with the swing gear. This enables the entire swing drive mechanism to be pushed away from the working position when not in operation, providing operators with a spacious maintenance space and thus solving the problem of inconvenient maintenance operations. 2. This utility model drives one end of a sine bar group to rotate at a constant speed via a rotary motor, and converts the rotational motion into reciprocating linear motion through the hinge point of the other end of the sine bar group. This drives the rack drive component to move back and forth along the second slide rail at a sinusoidal speed, thus realizing the conversion of the uniform circular motion of the motor shaft into the sinusoidal reciprocating oscillation of the actuator. Its speed change is continuous and smooth, fundamentally eliminating the mechanical impact caused by sudden stop and reverse start at the swing end. 3. This utility model uses the meshing connection between the rack and pinion drive and the oscillating gear. The sinusoidal rate displacement of the rack and pinion drive drives the oscillating gear to rotate in both directions, thereby causing the actuator fixedly connected to the oscillating gear to oscillate. This realizes the transformation of smooth linear motion into stable rotational oscillation, avoiding shaking and instability during operation.

[0008] Furthermore, the sine bar assembly includes a rotating short bar and a swinging long bar. One end of the rotating short bar is fixedly connected to the output end of the rotary motor, and the other end of the rotating short bar is hinged to the swinging long bar. The other end of the swinging long bar is hinged to the rack drive component.

[0009] Based on the above, the beneficial effect of the rotating short rod is that it transmits the rotational motion of the output end of the rotary motor to the swinging long rod, realizing the transformation of the circular motion into planar swinging at the hinge point; the beneficial effect of the swinging long rod is that the composite swing obtained by the end of it hinged to the rotating short rod is transmitted to the other end through the lever action of the rod body, realizing the transformation of the circular motion trajectory of the rotating short rod into the linear reciprocating motion of the rack and pinion drive.

[0010] Furthermore, the push-pull assembly includes a mounting base plate, an electric cylinder mounting block disposed on the mounting base plate, a push-pull electric cylinder mounted on the electric cylinder mounting block, and a push-pull telescopic rod that is drively connected to the output end of the push-pull electric cylinder. The output end of the push-pull telescopic rod is connected to the swing drive assembly, and the first slide rail is laterally disposed on the mounting base plate.

[0011] Based on the above, the beneficial effects of the mounting base plate are that it provides a mounting reference and support for the electric cylinder mounting block and the first slide rail; the beneficial effect of the electric cylinder mounting block is that it mounts the push-pull electric cylinder; the beneficial effect of the push-pull electric cylinder is that it drives the swing drive assembly to move along the first slide rail; the beneficial effect of the push-pull telescopic rod is that it realizes pushing or pulling back the swing drive assembly, making it closer to or away from the swing rod assembly.

[0012] Furthermore, the swing drive assembly also includes a base slider that is slidably fitted on the first slide rail, the rotary motor is fixedly mounted on the base slider, and the output end of the push-pull telescopic rod is connected to the base slider.

[0013] Based on the above, the beneficial effect of the base slider is that it can install a rotary motor and transmit the output power of the push-pull telescopic rod to the entire swing drive assembly, thereby enabling the assembly to move smoothly and accurately along the first slide rail.

[0014] Furthermore, the swing arm assembly also includes a hollow gas-liquid conduit, one end of which is connected to the front spray pipe, and the other end of which passes through the rotating shaft and is fixedly connected to the swing gear.

[0015] Based on the above, the beneficial effect of the hollow gas-liquid conduit is that it connects the external supply pipeline with the moving front spray pipe and rotates together with it under the drive of the oscillating gear, so as to continuously and stably deliver chemical liquid or dry gas to the front spray pipe that is oscillating sinusoidally, while ensuring that the pipeline does not get tangled.

[0016] Furthermore, the push-pull telescopic rod includes an internally threaded tube, an externally threaded rod that is threadedly engaged with the internally threaded tube, and a telescopic control gear disposed at the end of the internally threaded tube. The telescopic control gear is connected to the output end of the push-pull electric cylinder via a belt, and the end of the externally threaded rod is connected to the base slider.

[0017] Based on the above, the beneficial effects of the internally threaded tube are that, through its internal threaded structure and cooperation with the externally threaded rod, it converts the rotational motion of the telescopic control gear into linear displacement, thereby transmitting and converting the rotational power of the push-pull electric cylinder into precise linear pushing or retracting motion; the beneficial effect of the externally threaded rod is that, through its threaded cooperation with the internally threaded tube, it converts the rotational motion of the internally threaded tube into its own linear motion, thereby outputting the generated linear displacement to the base slider, thus pushing or pulling the entire swing drive assembly; the beneficial effect of the telescopic control gear is that, being fixedly connected to the end of the internally threaded tube, it forms a transmission connection with the output end of the push-pull electric cylinder via a belt, thereby efficiently and reliably transmitting the rotational power output by the push-pull electric cylinder to the internally threaded tube.

[0018] To more clearly illustrate the above-mentioned features of this utility model and the objectives it aims to achieve, the present utility model will be further described below in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0019] Figure 1 : This is a three-dimensional schematic diagram of the present invention; Figure 2 : This is a schematic diagram of the structural fit of the front swing mechanism of this utility model.

[0020] Reference numerals: 1-Spray backplate, 2-Front swing mechanism, 3-Push-pull assembly, 31-First slide rail, 32-Mounting base plate, 33-Electric cylinder mounting block, 34-Push-pull electric cylinder, 35-Push-pull telescopic rod, 4-Swing drive assembly, 41-Rotary motor, 42-Sine bar assembly, 421-Rotating short rod, 422-Swing long rod, 43-Second slide rail, 44-Rack and pinion drive, 45-Base slider, 5-Swing rod assembly, 51-Rotating shaft, 52-Swing gear, 53-Hollow gas-liquid conduit, 54-Front spray pipe. Detailed Implementation

[0021] like Figure 1 and Figure 2As shown, a sinusoidal oscillating spray structure based on a TGV wet scrubbing equipment includes a spray back plate 1 and a front oscillating mechanism 2 disposed on the spray back plate 1. The front oscillating mechanism 2 includes a push-pull assembly 3, an oscillating drive assembly 4, and a swing arm assembly 5. The push-pull assembly 3 is provided with a first slide rail 31, and the oscillating drive assembly 4 is slidably fitted on the first slide rail 31. The output end of the push-pull assembly 3 is connected to the oscillating drive assembly 4. The oscillating drive assembly 4 includes a rotary motor 41, one end of which is disposed on... The rotary motor 41 has a sine bar assembly 42 at its output end, a second slide rail 43 arranged laterally, and a rack drive 44 slidably engaged with the second slide rail 43. The other end of the sine bar assembly 42 is hinged to the rack drive 44. The swing arm assembly 5 includes a rotating shaft 51 disposed on the spray back plate 1, a swing gear 52 rotatably engaged with the rotating shaft 51, and a front spray pipe 54 fixedly connected to the swing gear 52. The rack drive 44 is meshed with the swing gear 52.

[0022] The sine bar assembly 42 includes a rotating short bar 421 and a swinging long bar 422. One end of the rotating short bar 421 is fixedly connected to the output end of the rotary motor 41, and the other end of the rotating short bar 421 is hinged to the swinging long bar 422. The other end of the swinging long bar 422 is hinged to the rack drive member 44.

[0023] The push-pull assembly 3 includes a mounting base plate 32, an electric cylinder mounting block 33 disposed on the mounting base plate 32, a push-pull electric cylinder 34 mounted on the electric cylinder mounting block 33, and a push-pull telescopic rod 35 that is drively connected to the output end of the push-pull electric cylinder 34. The output end of the push-pull telescopic rod 35 is connected to the swing drive assembly 4, and the first slide rail 31 is horizontally disposed on the mounting base plate 32.

[0024] The swing drive assembly 4 also includes a base slider 45 that is slidably fitted on the first slide rail 31, the rotary motor 41 is fixedly installed on the base slider 45, and the output end of the push-pull telescopic rod 35 is connected to the base slider 45.

[0025] The swing arm assembly 5 also includes a hollow gas-liquid conduit 53, one end of which is connected to the front spray pipe 54, and the other end of which passes through the rotating shaft 51 and is fixedly connected to the swing gear 52.

[0026] The push-pull telescopic rod 35 includes an internally threaded tube, an externally threaded rod that is threaded into the internally threaded tube, and a telescopic control gear disposed at the end of the internally threaded tube. The telescopic control gear is connected to the output end of the push-pull electric cylinder 34 via a belt. The end of the externally threaded rod is connected to the base slider 45.

[0027] In summary, the specific embodiments of this utility model are as follows: When the equipment needs to enter the maintenance state or the product needs to be replaced, the push-pull assembly 3 is activated. Its push-pull electric cylinder 34 drives the base slider 45 to move along the first slide rail 31 through the push-pull telescopic rod 35, thereby pushing the entire swing drive assembly 4 away from the working position. During this process, the rotary motor 41, sine bar group 42 and rack drive component 44 fixed on the base slider 45 move synchronously, so that the rack drive component 44 slides to the limit position at one end of the second slide rail 43. At the same time, the front spray pipe 54 fixedly connected to the swing gear 52 rotates freely on the rotating shaft 51 to a position perpendicular to the horizontal plane, thereby providing the operator with a wide operating space to facilitate the disassembly and maintenance of the product fixture. When the equipment needs to enter the spraying working state, the push-pull electric cylinder 34 moves in the opposite direction, and pulls the swing drive assembly 4 back to the working position through the push-pull telescopic rod 35. Then, the rotary motor 41 starts and drives the rotating short rod 421 at its output end to rotate at a constant speed. The rotation of the rotating short rod 421 drives the swing long rod 422 to move through its hinge point with the swing long rod 422. The other end of the swing long rod 422 is hinged to the rack drive member 44, thereby converting the circular motion of the rotating short rod 421 into the reciprocating linear motion of the rack drive member 44 along the second slide rail 43, and the motion speed changes in a sine curve. The sinusoidal reciprocating motion of the rack and pinion drive 44 drives the meshing oscillating gear 52 to rotate in both directions. The rotation of the oscillating gear 52 drives the hollow gas-liquid conduit 53 and the front spray pipe 54, which are fixedly connected to it, to reciprocate through the rotating shaft 51. Since the driving source is the continuous uniform rotation of the rotary motor 41, which is converted into sinusoidal motion by the sine bar group 42, the oscillation process of the front spray pipe 54 is free from sudden stops and reverse impacts, and the operation is extremely smooth. External chemical liquid or drying gas is continuously transported to the front spray pipe 54 through the hollow gas-liquid conduit 53 and sprayed onto the product surface to complete the uniform wet treatment or drying process.

[0028] The above description is only the optimal solution embodiment of this utility model and is not intended to limit this utility model. Various modifications or substitutions made by those skilled in the art to this utility model without departing from the essence and protection scope of this utility model should also be within the protection scope of this utility model.

Claims

1. A sinusoidal oscillating spray structure based on a TGV wet scrubbing equipment, comprising a spray back plate (1) and a front oscillating mechanism (2) disposed on the spray back plate (1), characterized in that: The front swing mechanism (2) includes a push-pull assembly (3), a swing drive assembly (4), and a swing rod assembly (5). The push-pull assembly (3) is provided with a first slide rail (31). The swing drive assembly (4) is slidably fitted on the first slide rail (31). The output end of the push-pull assembly (3) is connected to the swing drive assembly (4). The swing drive assembly (4) includes a rotary motor (41), a sine bar assembly (42) with one end set at the output end of the rotary motor (41), and a second slide rod assembly arranged laterally. The second slide rail (43) and the rack drive (44) are slidably fitted on the second slide rail (43). The other end of the sine bar assembly (42) is hinged to the rack drive (44). The swing arm assembly (5) includes a rotating shaft (51) disposed on the spray back plate (1), a swing gear (52) rotatably fitted on the rotating shaft (51), and a front spray pipe (54) fixedly connected to the swing gear (52). The rack drive (44) is meshed with the swing gear (52).

2. The sinusoidal oscillating spray structure based on a TGV wet scrubbing device according to claim 1, characterized in that: The sine bar assembly (42) includes a rotating short bar (421) and a swinging long bar (422). One end of the rotating short bar (421) is fixedly connected to the output end of the rotary motor (41), and the other end of the rotating short bar (421) is hinged to the swinging long bar (422). The other end of the swinging long bar (422) is hinged to the rack drive (44).

3. The sinusoidal oscillating spray structure based on a TGV wet scrubbing device according to claim 1, characterized in that: The push-pull assembly (3) includes a mounting base plate (32), an electric cylinder mounting block (33) disposed on the mounting base plate (32), a push-pull electric cylinder (34) mounted on the electric cylinder mounting block (33), and a push-pull telescopic rod (35) connected to the output end of the push-pull electric cylinder (34). The output end of the push-pull telescopic rod (35) is connected to the swing drive assembly (4), and the first slide rail (31) is horizontally disposed on the mounting base plate (32).

4. The sinusoidal oscillating spray structure based on a TGV wet scrubbing device according to claim 3, characterized in that: The swing drive assembly (4) also includes a base slider (45) that is slidably fitted on the first slide rail (31), the rotary motor (41) is fixedly installed on the base slider (45), and the output end of the push-pull telescopic rod (35) is connected to the base slider (45).

5. The sinusoidal oscillating spray structure based on a TGV wet scrubbing device according to claim 1, characterized in that: The swing arm assembly (5) also includes a hollow gas-liquid conduit (53), one end of which is connected to the front spray pipe (54), and the other end of which passes through the rotating shaft (51) and is fixedly connected to the swing gear (52).

6. A sinusoidal oscillating spray structure based on a TGV wet scrubbing device according to claim 4, characterized in that: The push-pull telescopic rod (35) includes an internally threaded tube, an externally threaded rod that is threaded to the internally threaded tube, and a telescopic control gear located at the end of the internally threaded tube. The telescopic control gear is connected to the output end of the push-pull electric cylinder (34) via a belt. The end of the externally threaded rod is connected to the base slider (45).

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