Display panel etching apparatus

Abstract

The utility model relates to a kind of display panel etching equipment, including etching body, air inlet component, exhaust component, detection component and backflushing component.Etching body has etching chamber inside, air inlet component and exhaust component are communicated with etching chamber, air inlet component is used to input air to etching chamber, exhaust component is used to discharge the air in etching chamber.Detection component is connected with exhaust component, detection component is used to detect the air pressure value of exhaust component, backflushing component is connected with detection component, and backflushing component is used to intermittently input compressed air to detection component.The etching equipment can reduce the risk that liquid drop after vaporization recondenses and external adjacent process drops on display panel, ensure the uniformity of display panel etching, improve the overall etching quality of display panel.

Description

Technical Field

[0001] This utility model relates to the field of display device manufacturing technology, and in particular to a display panel etching device. Background Technology

[0002] Etching is a crucial step in display panel manufacturing. It primarily involves using etching equipment to spray a chemical solution onto the display panel to remove the metal film layer not covered by photoresist, thereby forming the patterned circuitry. Related technologies refer to... Figure 1 As shown, the etching equipment includes a housing 1', a conveying device 2', and a spraying device 3'. An etching chamber for etching processing is formed inside the housing 1'. The conveying device 2' is located at the bottom of the etching chamber and is used to convey the display panel 4'. A first door 11' and a second door 12' are respectively provided at opposite ends of the housing 1' for the display panel 4' to enter and exit. The display panel 4' enters through the first door 11' and exits through the second door 12'. The spraying device 3' is installed above the conveying device 2' and sprays a chemical solution onto the display panel 4' during its movement.

[0003] The existing technology has the following shortcomings: During the spraying process of the spray device 3', a large amount of liquid is vaporized. The vaporized liquid will re-condense into droplets at the top of the etching chamber. The droplets fall onto the display panel 4' below and react with the local metal film layer, which will cause uneven etching in different areas of the display panel 4' and affect the etching quality of the entire display panel 4'. Utility Model Content

[0004] The purpose of this invention is to provide a display panel etching device that can prevent the vaporized liquid from recondensing into droplets and falling onto the display panel, thus ensuring the uniformity of the display panel etching and improving the overall etching quality of the display panel.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A display panel etching apparatus is provided, comprising an etching body, an air intake assembly, an exhaust assembly, a detection assembly, and a backflushing assembly. The etching body has an etching chamber in which the display panel is etched. The air intake assembly and the exhaust assembly are both connected to the etching chamber. The air intake assembly is used to input air into the etching chamber, and the exhaust assembly is used to exhaust air from the etching chamber. The detection assembly is connected to the exhaust assembly and is used to detect the air pressure value of the exhaust assembly. The backflushing assembly is connected to the detection assembly and is used to intermittently input compressed air into the detection assembly to drive the air in the detection assembly toward the exhaust assembly.

[0007] As a preferred embodiment of the display panel etching equipment, the detection component includes an air supply pipe and a pressure gauge. One end of the air supply pipe is connected to the exhaust component, and the other end is connected to the pressure gauge. The backflush component is connected to the air supply pipe, and the connection between the backflush component and the air supply pipe is located at the end of the air supply pipe closer to the pressure gauge.

[0008] As a preferred embodiment of the display panel etching equipment, the gas supply pipe includes a first gas supply pipe, a second gas supply pipe, and two U-shaped pipes. The first gas supply pipe is connected to the exhaust assembly, the second gas supply pipe is connected to the pressure gauge, and the ends of the two U-shaped pipes are connected vertically, with the two ends of the two U-shaped pipes respectively connected to the first gas supply pipe and the second gas supply pipe.

[0009] As a preferred embodiment of the display panel etching equipment, the exhaust assembly includes an exhaust pipe for discharging air, and an air supply pipe is connected to the exhaust pipe, wherein the diameter of the air supply pipe is smaller than the diameter of the exhaust pipe.

[0010] As a preferred embodiment of a display panel etching apparatus, the etching body includes a housing, a conveying assembly, and a spraying assembly. The etching chamber is formed inside the housing. The conveying assembly is disposed inside the etching chamber and is used to convey the display panel. The spraying assembly is disposed above the conveying assembly and is used to spray a chemical solution toward the display panel.

[0011] As a preferred embodiment of the display panel etching equipment, a manhole is provided on the top of the housing, and a cover plate for sealing the manhole is rotatably provided at one end of the manhole.

[0012] As a preferred embodiment of the display panel etching equipment, the top of the housing is provided with an air inlet, a filter is provided inside the air inlet, and the air intake assembly includes an air intake pipe and a fan disposed on the air intake pipe, the air intake pipe being connected to the air intake.

[0013] As a preferred embodiment of a display panel etching apparatus, the top surface of the etching chamber is inclined relative to the horizontal plane, and the lower end of the top surface is connected to the side wall of the etching chamber.

[0014] As a preferred embodiment of a display panel etching apparatus, the top surface of the etching chamber is provided with a plurality of guide plates spaced apart, one end of the guide plate extending to a relatively higher end of the top surface, and the other end of the guide plate extending to a relatively lower end of the top surface.

[0015] As a preferred embodiment of the display panel etching equipment, the etching body further includes a liquid collection tank, which is disposed below the relatively lower end of the top surface, and is used to collect droplets falling from the top surface.

[0016] The advantages of this utility model compared to the prior art are:

[0017] This invention relates to a display panel etching apparatus. By incorporating an air intake component and an exhaust component on the etching body, the exhaust component removes air from the etching chamber, thereby expelling the vaporized chemical solution and reducing the risk of it re-condensing into droplets and falling onto the display panel. The air intake component supplies air to maintain pressure balance within the etching chamber and prevents external air from entering through the first or second door, thus preventing different external chemical solutions from falling onto the display panel. Furthermore, by incorporating a detection component and a backflushing component, the exhaust pressure of the exhaust component is accurately detected, allowing for precise adjustment of the pressure within the etching chamber. Therefore, this etching apparatus reduces the risk of re-condensed droplets and droplets from adjacent external processes falling onto the display panel, ensuring uniform etching and improving the overall etching quality of the display panel. Attached Figure Description

[0018] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is a schematic diagram of an etching device in the prior art.

[0020] Figure 2 This is a schematic diagram of a display panel etching apparatus according to an embodiment of the present invention.

[0021] Figure 3 This is a first-view cross-sectional view of the display panel etching apparatus according to an embodiment of the present invention.

[0022] Figure 4 This is a cross-sectional view of the display panel etching apparatus according to an embodiment of the present invention.

[0023] Figure 5 This is a partial schematic diagram of the outer shell of an embodiment of the present utility model.

[0024] Figure 6 This is a schematic diagram of the detection component and the backflush component according to another embodiment of the present invention.

[0025] Figure 1 middle:

[0026] 1′, Outer shell; 11′, First door; 12′, Second door; 2′, Conveying device; 3′, Spraying device; 4′, Display panel.

[0027] Figures 2 to 6 middle:

[0028] 1. Etching body; 11. Outer shell; 110. Etching chamber; 111. Manhole; 112. Cover plate; 113. Air inlet; 114. Top surface; 115. Side wall; 116. First door; 117. Second door; 12. Conveying assembly; 121. Mounting shaft; 122. Roller; 13. Spray assembly; 131. Infusion pipe; 132. Nozzle; 14. Filter; 15. Drainage plate; 16. Collection tank; 2. Air intake assembly; 21. Air intake pipe; 22. Fan; 3. Exhaust assembly; 31. Exhaust pipe; 4. Detection assembly; 41. Air supply pipe; 411. First air supply pipe; 412. Second air supply pipe; 413. U-shaped pipe; 42. Pressure gauge; 5. Backflush assembly; 51. Backflush pipe; 52. Air source; 6. Display panel. Detailed Implementation

[0029] The advantages and features of this invention, as well as methods of implementing them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided merely to complete the disclosure of this invention and to enable those skilled in the art to fully understand its scope, which is defined only by the scope of the claims. The same reference numerals denote the same constituent elements throughout the specification.

[0030] The present invention will now be described in detail with reference to the accompanying drawings.

[0031] like Figure 2 and Figure 3 As shown, this utility model provides a display panel etching apparatus (hereinafter referred to as the etching apparatus) for etching a display panel 6. The etching apparatus includes an etching body 1, an air intake assembly 2, an exhaust assembly 3, a detection assembly 4, and a backflushing assembly 5. The etching body 1 is the main body of the etching apparatus and has an etching chamber 110 within it, where the display panel 6 is etched. The air intake assembly 2 and the exhaust assembly 3 are mounted on the etching body 1 and are both connected to the etching chamber 110. The air intake assembly 2 is used to input air into the etching chamber 110, and the exhaust assembly 3 is used to exhaust the air from the etching chamber 110 to the outside of the etching body 1. The detection assembly 4 is connected to the exhaust assembly 3 and is used to detect the air pressure value within the exhaust assembly 3. The backflushing assembly 5 is connected to the detection assembly 4 and is used to intermittently input compressed air into the detection assembly 4, thereby using the compressed air to drive the air within the detection assembly 4 towards the exhaust assembly 3.

[0032] Understandably, during the etching process, the display panel 6 is sprayed with a chemical solution in the etching chamber 110. The chemical solution corrodes the metal film layer on the display panel 6 to remove the metal film layer not covered by photoresist. During spraying, some of the chemical solution is vaporized, and the vaporized components disperse into the air within the etching chamber 110. An exhaust assembly 3 is provided to expel the air from the etching chamber 110, simultaneously removing the chemical components from the air and preventing the chemical solution from re-condensing into droplets and falling onto the display panel 6. An air intake assembly 2 is provided to input air into the etching chamber 110, maintaining the air pressure balance within the etching chamber 110. Since the etching body 1 has a first door 116 and a second door 117 for the display panel 6 to enter and exit, the air intake assembly 2 is specifically designed to prevent air from entering through the first door 116 and the second door 117, thus preventing splashed chemical solutions of different compositions from adjacent stations of the etching body 1 from entering the etching chamber 110. By setting up a detection component 4, the air pressure value of the exhaust component 3 is detected, so that the intake air volume can be adjusted in real time according to the air pressure value of the exhaust component 3 to maintain the required air pressure state of the etching chamber 110. By setting up a backflushing component 5, the backflushing component 5 plays a role in backflushing and cleaning the detection component 4, preventing condensed droplets from clogging the detection component 4 and causing inaccurate air pressure detection.

[0033] Specifically, refer to Figures 2 to 4As shown, the etching body 1 includes a housing 11, a conveying assembly 12, and a spraying assembly 13. An etching chamber 110 is formed within the housing 11. A first door 116 and a second door 117 are respectively provided at both ends of the housing 11 along its length (X direction in the diagram). The display panel 6 enters the etching chamber 110 through the first door 116, and the etched display panel 6 is output to the next process through the second door 117. The conveying assembly 12 is disposed within the etching chamber 110, and is located near the bottom of the etching chamber 110. The conveying assembly 12 includes multiple mounting shafts 121 spaced apart along the length direction (X direction in the diagram) of the etching chamber 110, and the length of the mounting shafts 121 extends along the width direction (Y direction in the diagram) of the etching chamber 110. Each mounting shaft 121 is provided with multiple rollers 122, which are spaced apart along the length direction of the mounting shaft 121. The rollers 122 are used to carry the display panel 6. Correspondingly, to drive the display panel 6, the mounting shaft 121 is connected to the driving device, which drives the mounting shaft 121 to rotate around its own axis. The driving device is prior art and can be an existing gear transmission mechanism, sprocket transmission mechanism, or motor, etc. A spray assembly 13 is disposed above the conveying assembly 12, and the spray assembly 13 is used to spray liquid onto the display panel 6. Multiple spray assemblies 13 are distributed at intervals along the length of the etching chamber 110. Each spray assembly 13 includes a delivery pipe 131 and multiple nozzles 132 spaced apart on the delivery pipe 131. The length of the delivery pipe 131 extends along the width of the etching chamber 110, and the multiple nozzles 132 are spaced apart along the length of the delivery pipe 131. The delivery pipe 131 is used to convey the liquid, and the nozzles 132 are used to spray the liquid onto the display panel 6. When the display panel 6 passes under the spray assembly 13, the sprayed liquid can cover the entire area of ​​the display panel 6 in either the length or width direction.

[0034] A manhole 111 is provided on the top of the outer casing 11 for maintenance personnel to inspect and maintain the interior of the etching chamber 110. A cover plate 112 is rotatably mounted on one end of the manhole 111 to seal it. When not under maintenance, the cover plate 112 covers the manhole 111. In this embodiment, two manholes 111 are provided on the top of the outer casing 11. The positions of the manholes 111 can be arranged reasonably according to the maintenance items to facilitate personnel's entry and exit from the etching chamber 110 and quick access to the maintenance position. The two manholes 111 allow personnel to enter the etching chamber 110 from different positions, facilitating maintenance and repair of the equipment from different angles.

[0035] The top surface 114 of the etching chamber 110 is inclined relative to the horizontal plane, and the lower end of the top surface 114 is connected to the side wall 115 of the etching chamber 110. The inclined top surface 114 allows droplets to flow along its surface toward the side wall 115 when droplets condense on it. Since the display panel 6 is spaced from the side wall 115 of the etching chamber 110, even if droplets fall from a position near the side wall 115, they will not fall onto the display panel 6. In this embodiment, there are two top surfaces 114, arranged at an angle. Along the width direction of the outer casing 11 (Y direction in the figure), the higher end of the top surface 114 is located in the middle of the outer casing 11, and the lower end is located at the end of the outer casing 11. This structure allows droplets in the middle to flow toward both sides, reducing the flow distance of the droplets and preventing them from growing too large during flow and prematurely dripping onto the display panel 6.

[0036] To facilitate the smooth flow of droplets to the sidewall 115, a plurality of guide plates 15 are spaced apart on the top surface 114 of the etching chamber 110. The length of the guide plates 15 extends along the width direction of the outer shell 11, and the plurality of guide plates 15 are spaced apart along the length direction of the outer shell 11. One end of the guide plate 15 extends to the relatively higher end of the top surface 114, and the other end of the guide plate 15 extends to the relatively lower end of the top surface 114. By setting the guide plates 15, the droplets can flow along the angle region between the guide plates 15 and the top surface 114. The droplets can contact both the top surface 114 and the guide plates 15 simultaneously, which increases the surface tension of the droplets and reduces the risk of premature dripping during the flow process.

[0037] To prevent droplets from falling freely from the top surface 114, the etching body 1 also includes a collection tank 16 for collecting droplets falling from the top surface 114. The collection tank 16 is installed below the relatively lower end of the top surface 114 so that droplets fall into the collection tank 16.

[0038] Specifically, refer to Figure 2 and Figure 5 As shown, an air inlet 113 is provided on the top of the outer casing 11. The air intake assembly 2 includes an air intake pipe 21 and a fan 22 mounted on the air intake pipe 21. The air intake pipe 21 is mounted on the outer casing 11 and communicates with the air inlet 113. The fan 22 is used to drive air to flow into the air inlet 113. A filter 14 is provided inside the air inlet 113. The filter 14 is a prior art material and is used to filter the incoming air.

[0039] Specifically, refer to Figure 2As shown, the exhaust assembly 3 includes an exhaust pipe 31 and an air pump (not shown). One end of the exhaust pipe 31 is connected to the housing 11 and communicates with the etching chamber 110. The air pump is installed on the exhaust pipe 31 to drive air to flow to the outside of the exhaust pipe 31. The detection assembly 4 includes an air supply pipe 41 and a pressure gauge 42. One end of the air supply pipe 41 is connected to the exhaust pipe 31, and the other end is connected to the pressure gauge 42. Air in the exhaust pipe 31 enters the air supply pipe 41, and the pressure gauge 42 detects the exhaust pressure value of the exhaust pipe 31. The diameter of the air supply pipe 41 is smaller than the diameter of the exhaust pipe 31. The exhaust pipe 31 has a larger diameter to meet the air flow requirements. The air supply pipe 41 has a smaller diameter to facilitate the installation of the pressure gauge 42 and to avoid condensation and the formation of a large number of droplets due to a large amount of gas entering the air supply pipe 41. The backflush assembly 5 is connected to the air supply pipe 41. The connection point between the backflush assembly 5 and the air supply pipe 41 is located at the end of the air supply pipe 41 near the pressure gauge 42. This allows the compressed air output by the backflush assembly 5 to flow through the entire air supply pipe 41, so as to completely clean the droplets generated by condensation inside the air supply pipe 41.

[0040] In another embodiment, reference is made to Figure 6 As shown, the air supply pipe 41 includes a first air supply pipe 411, a second air supply pipe 412, and two U-shaped pipes 413. The first air supply pipe 411 and the second air supply pipe 412 are horizontally arranged. One end of the first air supply pipe 411 is connected to the exhaust pipe 31, and one end of the second air supply pipe 412 is connected to the pressure gauge 42. The two U-shaped pipes 413 are vertically joined together, with one U-shaped pipe 413 positioned above the other. The ends of the two U-shaped pipes 413 are connected to allow them to communicate with each other. The two ends of the two U-shaped pipes 413 are respectively connected to the end of the first air supply pipe 411 facing away from the exhaust pipe 31 and the end of the second air supply pipe 412 facing away from the pressure gauge 42, so that air in the first air supply pipe 411 can be transported to the second air supply pipe 412 through the two U-shaped pipes 413. When a droplet enters the air supply pipe 41 from the exhaust pipe 31, the droplet will travel along the first air supply pipe 411 into the lower U-shaped pipe 413, while the air can still flow normally through the upper U-shaped pipe 413 to the pressure gauge 42. Therefore, even if a droplet enters the detection component 4, it will not affect the pressure value detected by the pressure gauge 42. The backflush component 5 includes a backflush pipe 51 and an air source 52. One end of the backflush pipe 51 is connected to the end of the second air supply pipe 412 near the pressure gauge 42, and the other end is connected to the air source 52. The air source 52 is an air compressor provided in the plant area, which delivers compressed air to the backflush pipe 51 through pipelines. Correspondingly, a valve is also provided on the backflush pipe 51 to control its opening and closing.

[0041] The beneficial effects of this embodiment are as follows: By providing an air intake assembly 2 and an exhaust assembly 3 on the etching body 1, the exhaust assembly 3 is used to discharge air from the etching chamber 110, thereby discharging the vaporized liquid and reducing the risk of the liquid re-condensing into droplets and falling onto the display panel 6. The air intake assembly 2 is used to input air to maintain the air pressure balance within the etching chamber 110, and also to prevent external air from entering through the first door 116 or the second door 117, thus preventing different external liquids from falling onto the display panel 6. Furthermore, by providing a detection assembly 4 and a backflushing assembly 5, the exhaust pressure value of the exhaust assembly 3 is accurately detected, allowing for precise adjustment of the air pressure within the etching chamber 110. Therefore, this etching equipment can reduce the risk of vaporized droplets re-condensing and droplets from adjacent external processes falling onto the display panel 6, ensuring the uniformity of the etching of the display panel 6 and improving the overall etching quality of the display panel 6.

[0042] Although embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be made in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A display panel etching apparatus, characterized in that, The device includes an etching body, an air intake assembly, an exhaust assembly, a detection assembly, and a backflush assembly. The etching body has an etching chamber in which the display panel is etched. The air intake assembly and the exhaust assembly are both connected to the etching chamber. The air intake assembly is used to input air into the etching chamber, and the exhaust assembly is used to exhaust air from the etching chamber. The detection assembly is connected to the exhaust assembly and is used to detect the air pressure value of the exhaust assembly. The backflush assembly is connected to the detection assembly and is used to intermittently input compressed air into the detection assembly to drive the air in the detection assembly toward the exhaust assembly.

2. The display panel etching apparatus according to claim 1, characterized in that, The detection component includes an air supply pipe and a pressure gauge. One end of the air supply pipe is connected to the exhaust component, and the other end is connected to the pressure gauge. The backflush component is connected to the air supply pipe, and the connection between the backflush component and the air supply pipe is located at the end of the air supply pipe closer to the pressure gauge.

3. The display panel etching apparatus according to claim 2, characterized in that, The gas supply pipe includes a first gas supply pipe, a second gas supply pipe, and two U-shaped pipes. The first gas supply pipe is connected to the exhaust assembly, the second gas supply pipe is connected to the pressure gauge, and the ends of the two U-shaped pipes are connected vertically, with the two ends of the two U-shaped pipes respectively connected to the first gas supply pipe and the second gas supply pipe.

4. The display panel etching apparatus according to claim 2, characterized in that, The exhaust assembly includes an exhaust pipe for discharging air, and an air supply pipe connected to the exhaust pipe, wherein the diameter of the air supply pipe is smaller than the diameter of the exhaust pipe.

5. The display panel etching apparatus according to any one of claims 1 to 4, characterized in that, The etching body includes a housing, a conveying assembly, and a spraying assembly. The etching chamber is formed inside the housing. The conveying assembly is disposed inside the etching chamber and is used to convey the display panel. The spraying assembly is disposed above the conveying assembly and is used to spray liquid towards the display panel.

6. The display panel etching apparatus according to claim 5, characterized in that, A manhole is provided on the top of the outer casing, and a cover plate for sealing the manhole is rotatably provided at one end of the manhole.

7. The display panel etching apparatus according to claim 5, characterized in that, An air inlet is provided on the top of the housing, and a filter is provided inside the air inlet. The air intake assembly includes an air intake pipe and a fan mounted on the air intake pipe, and the air intake pipe is connected to the air inlet.

8. The display panel etching apparatus according to any one of claims 1 to 4, characterized in that, The top surface of the etching chamber is inclined relative to the horizontal plane, and the lower end of the top surface is connected to the side wall of the etching chamber.

9. The display panel etching apparatus according to claim 8, characterized in that, The top surface of the etching chamber is provided with several drainage plates at intervals. One end of each drainage plate extends to the relatively higher end of the top surface, and the other end extends to the relatively lower end of the top surface.

10. The display panel etching apparatus according to claim 8, characterized in that, The etching body also includes a liquid collection tank, which is located below the lower end of the top surface and is used to collect droplets falling from the top surface.

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