Manual film press and automatic film loading mechanism thereof

Abstract

The utility model relates to a kind of hand-operated film press and its automatic film mounting mechanism, automatic film mounting mechanism, be set on lower cavity, including vacuum suction device, vacuum suction device includes suction hole, first air passage, vacuum generator, suction hole is set on the upper surface of lower cavity, first air passage is set inside lower cavity, vacuum generator is communicated with suction hole by first air passage, suction hole produces suction force adsorption film material when vacuum generator works, wherein, lower cavity is provided with the cavity of chuck placement, suction hole is located at the outside of cavity, the distance between suction hole and cavity is between 5-15 mm.Suction device is set on lower cavity, film material can be laid flat and fixed, ensure that film material is smooth, clean, dust-free, effectively solve the problem of manual film mounting.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor film pressing technology, and in particular to a manual film pressing machine and its automatic film mounting mechanism. Background Technology

[0002] Manual laminating machines are typically used in university laboratories and research institutions for small-batch testing of laminating films. Photolithography films and other similar materials are usually manually cut and laid flat onto the wafer in a chuck located in the lower cavity—a process commonly known as manual film mounting—before the manual laminating process. Manual film mounting often results in edge curling. The usual solution is to use tape to fix the film to the lower cavity to ensure it lies flat on the wafer. However, this method is inefficient and prone to wrinkling and contamination of the film. Utility Model Content

[0003] Therefore, it is necessary to provide a manual film pressing machine and its automatic film-laying mechanism to address the aforementioned technical problems in the existing technology. A vacuum suction device is installed on the lower cavity to lay and fix the film material flat, ensuring that the film material is smooth, clean and dust-free, effectively solving the problem of manual film laying.

[0004] To solve the above technical problems, the technical solution adopted by this utility model is as follows: An automatic film-laying mechanism for a manual film pressing machine is provided on the lower cavity and includes a vacuum suction device. The vacuum suction device includes a suction hole, a first air channel, and a vacuum generator. The suction hole is located on the upper surface of the lower cavity, and the first air channel is located inside the lower cavity. The vacuum generator is connected to the suction hole through the first air channel. When the vacuum generator is working, the suction hole generates suction to adsorb the film material. The lower cavity is provided with a cavity for placing a chuck, and the suction hole is located outside the cavity. The distance between the suction hole and the cavity is between 5-15 mm.

[0005] In one feasible implementation, suction holes are located on at least two sides of the cavity, and each side of the cavity has multiple suction holes.

[0006] In one feasible implementation, suction holes are located on opposite sides of the cavity, and each side of the cavity has multiple suction holes.

[0007] In one feasible implementation, at least two suction components are provided on the upper surface of the lower cavity, and multiple suction holes are arranged in an array on the suction components. Multiple suction membrane components are symmetrical with respect to the center of the lower cavity.

[0008] In one feasible implementation, an installation groove is provided on the upper surface of the lower cavity, the film suction component is located in the installation groove, and the upper surface of the film suction component is flush with the upper surface of the installation groove. A second air passage is provided between the film suction component and the bottom of the installation groove, and the second air passage is connected to the first air passage and the suction hole respectively.

[0009] In one feasible implementation, the diameter of the suction hole is between 1.2 and 2.0 mm.

[0010] In one feasible implementation, the distance between adjacent suction holes is greater than the diameter of the suction holes.

[0011] In one feasible implementation, the length of multiple suction holes on one side of the cavity is longer than the width of the cavity.

[0012] In one feasible implementation, the length of multiple suction holes on one side of the cavity is more than 8 mm longer than the width of the cavity.

[0013] To solve the above technical problems, another technical solution adopted by this utility model is: A manual film pressing machine includes an automatic film-laying mechanism as described above.

[0014] Due to the adoption of the above technical solutions, this utility model has the following advantages compared with the prior art: 1. This utility model adopts a lower cavity with a hidden vacuum channel design. Multiple vacuum suction holes are distributed on the upper surface of the cavity, which can effectively fix the film material without wrinkling and smoothly press the film. 2. This utility model can improve the safety and convenience of manual film pressing. The cleanliness of the cavity surface is guaranteed, and there is no problem of tape contamination or repeated use of tape causing the film pressing machine to be damaged due to forgetting to remove it. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the lower cavity of this utility model; Figure 2 for Figure 1 Top view; Figure 3 for Figure 1 Sectional view along axis AA; Figure 4 This is a schematic diagram of the structure of the film suction component of this utility model.

[0016] Wherein: 10, lower cavity; 11, cavity; 12, mounting groove; 20, suction hole; 30, first air passage; 31, horizontal air passage; 32, vertical air passage; 40, suction film component. Detailed Implementation

[0017] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0018] It should be noted that when a component is said to be "fixed to" another component, it can be directly attached to the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," "up," "down," and similar expressions used in this document are for illustrative purposes only.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified. In this application, " / " means "or".

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0021] Manual membrane mounting often results in edge curling. A common solution is to use tape to secure the membrane to the lower cavity to ensure it lies flat on the wafer. However, this method is inefficient and can lead to wrinkles and contamination of the membrane.

[0022] Based on this, the present invention provides an automatic film-laying mechanism for a manual film pressing machine, which is set on the lower cavity and includes a vacuum suction device. The vacuum suction device includes a suction hole, a first air channel, and a vacuum generator. The suction hole is set on the upper surface of the lower cavity, and the first air channel is set inside the lower cavity. The vacuum generator is connected to the suction hole through the first air channel. When the vacuum generator is working, the suction hole generates suction to adsorb the film material. The lower cavity is provided with a cavity for placing a chuck, and the suction hole is located outside the cavity. The distance between the suction hole and the cavity is between 5-15 mm.

[0023] This invention features a vacuum suction device installed on the lower cavity, which can lay the membrane material flat and fix it, ensuring that the membrane material is smooth, clean, and dust-free, effectively solving the problem of manual membrane installation.

[0024] In this embodiment, the distance between the suction hole and the cavity can be between 5-12 mm, 8-12 mm, and more specifically, 6 mm, 7 mm, 8 mm, 9 mm, 10 mm, 11 mm, 12 mm, or 13 mm. If the distance between the suction hole and the cavity is too close, it will lead to excessive membrane tension, which may damage the membrane structure. If the distance between the suction hole and the cavity is too far, the smoothness of the membrane material cannot be guaranteed.

[0025] In this embodiment, suction holes are located on at least two sides of the cavity, and multiple suction holes are provided on each side of the cavity. This arrangement can better ensure the smoothness of the film material.

[0026] In this embodiment, suction holes are located on opposite sides of the cavity, and multiple suction holes are provided on each side of the cavity, which can save costs.

[0027] In this embodiment, at least two suction components are provided on the upper surface of the lower cavity, and multiple suction holes are arranged in an array on the suction components; Multiple suction membrane components are symmetrical about the center of the lower cavity, making it easy to accommodate membrane widths of different sizes (such as 6, 8, and 12 inches).

[0028] In this embodiment, an installation groove is provided on the upper surface of the lower cavity, the film suction component is disposed in the installation groove, and the upper surface of the film suction component is flush with the upper surface of the installation groove. A second air passage is provided between the film suction component and the bottom of the installation groove, and the second air passage is connected to the first air passage and the suction hole respectively.

[0029] In this embodiment, the diameter of the suction hole is between 1.2-2.0 mm, and can also be between 1.2-1.9 mm, 1.2-1.8 mm, or 1.4-1.8 mm. More specifically, it can be 1.4 mm, 1.5 mm, 1.6 mm, 1.7 mm, or 1.8 mm. If the diameter of the suction hole is too large, it will wrinkle the membrane material, making it impossible to ensure the smoothness of the membrane material. If the diameter of the suction hole is too small, it will easily become clogged and will be difficult to process.

[0030] In this embodiment, the distance between adjacent suction holes is greater than the diameter of the suction holes, which can save costs and ensure the smoothness of the membrane material.

[0031] In this embodiment, the length of the multiple suction holes on one side of the cavity is longer than the width of the cavity.

[0032] In this embodiment, the length of multiple suction holes on one side of the cavity is more than 8 mm longer than the width of the cavity. Specifically, the length can be 9 mm, 10 mm, 11 mm, 12 mm, 13 mm, or 14 mm, which ensures the smoothness of the film material and saves costs.

[0033] The following is in conjunction with the appendix Figure 1-4 The present invention will be described in detail below with reference to specific embodiments.

[0034] This embodiment describes an automatic film-laying mechanism for a manual film pressing machine, which is installed on the lower cavity 10 and includes a vacuum suction device. The vacuum suction device includes a suction hole 20, a first air passage 30, and a vacuum generator.

[0035] A suction hole 20 is disposed on the upper surface of the lower cavity 10, and a first air passage 30 is disposed inside the lower cavity 10. The vacuum generator communicates with the suction hole 20 through the first air passage 30. When the vacuum generator is working, the suction hole 20 generates suction to adsorb the film material. The lower cavity 10 is provided with a cavity 11 for placing a chuck. In this embodiment, the cavity 11 is cylindrical. The suction hole 20 is located outside the cavity 11, and the distance between the suction hole 20 and the cavity 11 is between 5-15 mm, preferably 10 mm.

[0036] For better adsorption effect, the suction holes 10 can be located on at least two sides of the cavity 11, and each side of the cavity 11 is provided with multiple suction holes 20.

[0037] In this embodiment, suction holes 20 are located on opposite sides of the cavity 10, and each side of the cavity is provided with multiple suction holes.

[0038] In this embodiment, to facilitate processing and ensure uniform suction distribution, two suction components 40 are provided on the upper surface of the lower cavity 10, and multiple suction holes 20 are arranged in an array on the suction components 40. In this embodiment, the multiple suction holes 20 are arranged in a single row on the suction components 40, and the two suction components 40 are symmetrical with respect to the center of the lower cavity 10.

[0039] A mounting groove 12 is provided on the upper surface of the lower cavity 10. The film suction component 40 is disposed in the mounting groove 12, and the upper surface of the film suction component 40 is flush with the upper surface of the mounting groove 12. A second air passage is provided between the film suction component 40 and the bottom of the mounting groove 12. The second air passage is connected to the first air passage 30 and the suction hole 20. The second air passage extends along the length of the mounting groove 12 and is formed by the film suction component 40 and the bottom of the mounting groove 12.

[0040] In this embodiment, the diameter of the suction hole 20 is between 1.2 and 2.0 mm, preferably 1.5 mm.

[0041] In this embodiment, the distance between adjacent suction holes 20 is greater than the diameter of the suction hole 20.

[0042] In this embodiment, the length of the plurality of suction holes 20 on one side of the cavity 11 is longer than the width of the cavity 11. The length of the plurality of suction holes 20 on one side of the cavity 11 refers to the distance between two suction holes 20 located at either end of the plurality of suction holes 20 on one side of the cavity 11. The width of the cavity 11 refers to the widest point of the cavity 11. For example, if the cavity 11 in this invention is circular, then the width of the cavity 11 refers to the diameter of the circle.

[0043] In this embodiment, the length of the plurality of suction holes 20 on one side of the cavity 11 is more than 8 mm longer than the width of the cavity 11, preferably 10 mm.

[0044] In this embodiment, the vacuum generator can be purchased commercially. The vacuum generator ensures effective adhesion of the membrane material and smooth membrane placement. The vacuum generator can also be equipped with a switch, allowing operators to manually turn the vacuum adsorption function on and off.

[0045] In this embodiment, for ease of processing, while also considering avoiding other components and facilitating the installation of vacuum connectors and hoses, the first air passage 30 includes a horizontal air passage 31 and a vertical air passage 32 that communicate with each other. The horizontal air passage 31 is horizontally arranged, with one end opening onto the side wall of the lower cavity 10, and the other end extending inside the lower cavity 10 towards the cavity 11. The vertical air passage 32 is vertically arranged, with one end opening onto the upper surface of the lower cavity 10 and located within the mounting groove 12, and the other end extending inside the lower cavity 10 towards the bottom of the lower cavity 10. The horizontal air passage 31 and the vertical air passage 32 communicate inside the lower cavity 10.

[0046] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0047] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. An automatic film-laying mechanism for a manual film pressing machine, characterized in that, The device is mounted on the lower cavity and includes a vacuum suction device. The vacuum suction device includes a suction hole, a first air passage, and a vacuum generator. The suction hole is located on the upper surface of the lower cavity, and the first air passage is located inside the lower cavity. The vacuum generator communicates with the suction hole through the first air passage. When the vacuum generator is working, the suction hole generates suction to adsorb the film material. The lower cavity is provided with a cavity for placing a chuck, and the suction hole is located outside the cavity. The distance between the suction hole and the cavity is between 5-15 mm.

2. The automatic film-laying mechanism of the manual film pressing machine according to claim 1, characterized in that, The suction holes are located on at least two sides of the cavity, and each side of the cavity is provided with a plurality of suction holes.

3. The automatic film-laying mechanism of the manual film pressing machine according to claim 2, characterized in that, The suction holes are located on opposite sides of the cavity, and each side of the cavity is provided with multiple suction holes.

4. The automatic film-laying mechanism of the manual film pressing machine according to claim 3, characterized in that, At least two suction components are provided on the upper surface of the lower cavity, and a plurality of suction holes are arranged in an array on the suction components; The plurality of the suction film components are symmetrical with respect to the center of the lower cavity.

5. The automatic film-laying mechanism of the manual film pressing machine according to claim 4, characterized in that, An installation groove is provided on the upper surface of the lower cavity. The film suction component is disposed in the installation groove, and the upper surface of the film suction component is flush with the upper surface of the installation groove. A second air passage is provided between the film suction component and the bottom of the installation groove. The second air passage is connected to the first air passage and the suction hole respectively.

6. The automatic film-laying mechanism of the manual film pressing machine according to claim 2, characterized in that, The diameter of the suction hole is between 1.2 and 2.0 mm.

7. The automatic film-laying mechanism of the manual film pressing machine according to claim 2, characterized in that, The distance between adjacent suction holes is greater than the diameter of the suction holes.

8. The automatic film-laying mechanism of the manual film pressing machine according to claim 2, characterized in that, The length of the plurality of suction holes on one side of the cavity is longer than the width of the cavity.

9. The automatic film-laying mechanism of the manual film pressing machine according to claim 8, characterized in that, The length of the plurality of suction holes on one side of the cavity is more than 8 mm longer than the width of the cavity.

10. A manual film pressing machine, characterized in that, Includes the automatic film-laying mechanism as described in any one of claims 1 to 9.

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