Cache moisturizing device

Abstract

The application relates to a kind of buffer moisturizing devices, including box, multiple spray parts and support assembly. Multiple spray parts are arranged in the box, and sequentially arranged along the height direction of the box. Every two adjacent spray parts are separated to form a spray cavity in the box, and multiple spray openings are arranged on each spray part, which are directed to each spray cavity adjacent to the spray part. Support assembly is arranged in the spray cavity, used for tilting support of workpiece in the spray cavity. The application can greatly reduce liquid consumption, and the workpiece is more uniform in moisture retention.

Description

Technical Field

[0001] This application relates to the field of wafer manufacturing technology, and in particular to buffering and moisturizing devices. Background Technology

[0002] Traditional wafer moisturizing processes employ a full immersion method, which consumes a significant amount of chemical solution and has a high overall cost. Furthermore, the mechanical lifting mechanism it relies on is prone to wear and tear, requiring frequent maintenance and having a limited overall lifespan. Another moisturizing process uses a fixed array nozzle design. However, due to water pressure attenuation along the pipeline and limitations in nozzle spray angle, the spray coverage on the wafer surface varies significantly, easily leading to localized drying and uneven oxide layer thickness on the wafer surface, which in turn affects subsequent processes. Utility Model Content

[0003] Based on this, this application provides a buffering and moisturizing device that can uniformly moisturize the wafer while reducing the consumption of chemical solutions.

[0004] A buffering and moisturizing device, comprising:

[0005] Box;

[0006] Multiple spray units are disposed in the housing and arranged sequentially along the height direction of the housing. Each pair of adjacent spray units is separated within the housing to form a spray chamber. Each spray unit has multiple spray nozzles facing each spray chamber adjacent to it.

[0007] A support assembly is provided in the spray chamber for tilting support of the workpiece located in the spray chamber.

[0008] In some embodiments, the support component includes a support portion that is continuously or intermittently arranged along a preset trajectory. The support height of the support portion has a highest position and a lowest position on the preset trajectory, so that the support portion tilts to support the workpiece located in the spray chamber. The preset trajectory is adapted to the edge contour of the workpiece.

[0009] In some embodiments, the support assembly includes a plurality of support columns spaced apart from each other, each support column having a support surface, and the support surfaces of all the support columns are used together to support the workpiece;

[0010] In the projections of all the support columns onto the first plane, the height of the support surface of each projection is set to vary along the first direction, and the height direction and the first direction are parallel to and intersect the first plane.

[0011] In some embodiments, the plurality of support columns are arranged symmetrically relative to a plane parallel to the first plane.

[0012] In some embodiments, the support assembly further includes limiting protrusions, each of the support surfaces being provided with the limiting protrusions, and all of the limiting protrusions being used to collectively abut against the edge of the workpiece located on the support surface.

[0013] In some embodiments, the spray nozzle includes a large-diameter end and a small-diameter end disposed opposite to each other, the large-diameter end being disposed closer to the spray chamber than the small-diameter end, and the flow area of ​​the spray nozzle increasing from the small-diameter end to the large-diameter end.

[0014] In some embodiments, the buffer humidification device includes a plurality of spray plates, which are arranged vertically and horizontally within the housing, with each spray plate serving as a spray section.

[0015] In some embodiments, the buffer humidification device further includes a position sensor disposed in the housing and including a sensing end located inside the housing, the sensing end being located in the spray chamber; the spray plate has a perforated hole, the perforated hole being disposed through the spray plate along the height direction and arranged opposite to the sensing end along the height direction.

[0016] In some embodiments, the spray plate has a connecting hole, which extends through the spray plate along the height direction, and at least a portion of the connecting hole is arranged between the spray nozzles.

[0017] In some embodiments, the buffer humidification device further includes a door and an opening / closing assembly; one end of the housing in a second direction is an open end, the door is rotatably mounted on the housing, the opening / closing assembly is disposed on the housing and connected to the door, and is capable of controlling the door to rotate to open or close the open end; the second direction is intersecting the height direction.

[0018] In some embodiments, the opening and closing assembly includes a cylinder, a first seat, a second seat, a first connecting rod, and a second connecting rod, wherein the first seat and the second seat are fixedly spaced at the bottom of the housing along the second direction;

[0019] The fixed end of the cylinder is hinged to the first base, one end of the first connecting rod is hinged to the second base, the movable end of the cylinder is hinged to the other end of the first connecting rod, one end of the second connecting rod is hinged to the middle region of the first connecting rod, and the other end is hinged to the box door.

[0020] In practical applications, when the workpiece is buffered in the spray chamber, the spray nozzles on both the upper and lower sides of the spray chamber face the chamber, ensuring that both the upper and lower surfaces of the workpiece are sprayed with moisturizing liquid. Compared to traditional immersion moisturizing, this significantly reduces liquid loss. Furthermore, because the support assembly tilts to support the workpiece, the liquid sprayed onto the workpiece surface flows along the surface under gravity. Even areas not directly sprayed are covered and moisturized by the gravity-flowing liquid. The moisturizing liquid evenly covers the workpiece surface, preventing localized drying due to insufficient spraying. The uniformity of the moisturizing layer thickness on the workpiece surface contributes to improved subsequent processing quality. Attached Figure Description

[0021] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0022] Figure 1 This is a perspective view of a buffer moisturizing device according to some embodiments;

[0023] Figure 2 for Figure 1 The shown is a cross-sectional view of the buffer humidification device in the first plane;

[0024] Figure 3 for Figure 1 The diagram shows the internal structure of the buffer humidification device.

[0025] Figure 4 for Figure 1 The diagram shows a usage state of the buffer humidification device.

[0026] Figure 5 for Figure 4 A magnified view of a portion of the structure shown.

[0027] Figure 6 for Figure 3 The diagram shows another usage state of the buffer humidification device;

[0028] Figure 7 for Figure 6 A magnified view of a portion of the structure shown.

[0029] Figure 8 for Figure 1 The side view of the buffer moisturizing device shown.

[0030] The reference numerals in the detailed embodiments are as follows:

[0031] 100. Buffer and humidification device; 10. Box body; Z, height direction; X, first direction; Y, second direction; 11. Raised edge; D, open end; 12. Water inlet; 13. Water outlet;

[0032] 20. Spray section; S. Spray chamber; 21. Spray plate; 21a. Spray nozzle; a1. Large diameter end; a2. Small diameter end; 21b. Hole; 21c. Inner flow channel; 21d. Connecting hole;

[0033] 30. Support component; 31. Support part; m. Support surface; 31A. First support group; 31B. Second support group; 31a. Support column; 31b. Limiting protrusion; w1. Highest position; w2. Lowest position;

[0034] 40. Position sensor; 41. Sensing terminal;

[0035] 50. Door; 60. Opening and closing assembly; 61. Cylinder; 62. First base; 63. Second base; 64. First connecting rod; 65. Second connecting rod;

[0036] 70. Sealing component; 80. Rotating connector; 200. Workpiece. Detailed Implementation

[0037] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0038] In the description of this application, it should be understood that, where they appear, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0039] Furthermore, where applicable, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0040] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., shall be interpreted broadly. For example, they may refer to a fixed connection, a detachable connection, or an integral part; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; they may refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0041] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0042] It should be noted that, if an element is described as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is described as "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0043] To uniformly moisturize wafers while reducing chemical solution consumption, embodiments of this application provide a buffer moisturizing device. This buffer moisturizing device can be applied to the buffering and moisturizing of wafers, but is not limited to that used for wafer caching and moisturizing.

[0044] In this embodiment, the height direction, the first direction, and the second direction of the box intersect each other but are not coplanar. Generally, these three directions are handled in pairs. The height direction of the box corresponds to the vertical direction. In one embodiment, the first direction corresponds to the length direction of the box, and the second direction corresponds to the width direction of the box.

[0045] The following describes the cache moisturizing device according to an embodiment of this application.

[0046] Please refer to Figure 1 , Figure 2 and Figure 3 The buffer and humidification device 100 proposed in this application includes a housing 10, a plurality of spray sections 20, and a support assembly 30. The plurality of spray sections 20 are disposed in the housing 10 and arranged sequentially along the height direction Z of the housing 10. Each pair of adjacent spray sections 20 separates within the housing 10 to form a spray chamber S. Each spray section 20 has a plurality of spray nozzles 21a openings facing each spray chamber S adjacent to it. The support assembly 30 is disposed in the spray chamber S and is used to tilt and support the workpiece 200 located in the spray chamber S. The housing 10 provides buffer space. Understandably, the housing 10 has an open end D, which is generally located on the front side in the width direction of the housing 10 to facilitate the placement and removal of the workpiece 200. To provide a clean environment, in one embodiment, the buffer and humidification device 100 further includes a door 50, which is capable of opening and closing the open end D of the housing 10.

[0047] Multiple spray sections 20 are arranged sequentially at intervals along the height direction Z of the housing 10, and spray chambers S are formed inside the housing 10. The number of spray chambers S can be one or more. In order to improve the utilization rate of the buffer humidification device 100, in one embodiment, multiple spray sections 20 are separated to form multiple layers of spray chambers S.

[0048] The spray section 20 is provided with a spray nozzle 21a, which communicates with the spray chamber S and is used to spray a moisturizing liquid onto the workpiece 200 inside the spray chamber S. It is noteworthy that each spray section 20 has a spray nozzle 21a corresponding to each spray chamber S adjacent to it. Specifically, the uppermost and lowermost spray sections 20 are adjacent to only one layer of spray chambers S, so these spray sections 20 only need to have spray nozzles 21a facing that spray chamber S. For example, the uppermost spray section 20 only needs to have spray nozzles 21a facing downwards, and the lowermost spray section 20 only needs to have spray nozzles 21a facing upwards. Furthermore, the spray sections 20 in the middle position are adjacent to spray chambers S on both their upper and lower sides, so these spray sections 20 have spray nozzles 21a facing both upwards and downwards. With this design, each spray chamber S is provided with a spray nozzle 21a above and below, and the buffer humidification device 100 can spray humidifying liquid onto the workpiece 200 from above and below.

[0049] A support assembly 30 is provided inside the spray chamber S, and the specific installation position of the support assembly 30 can be flexibly set. In one embodiment, the support assembly 30 is installed on the spray section 20 below the spray chamber S. In another embodiment, the support assembly 30 is installed on the inner wall of the housing 10.

[0050] The support assembly 30 is used to tilt the workpiece 200, where "tilt" is relative to the horizontal plane (e.g., ...). Figure 4 (As shown). Understandably, the support assembly 30 supports a localized area of ​​contact with the workpiece 200 to avoid obstructing the spraying of the moisturizing liquid onto the workpiece 200.

[0051] In practical application, when the workpiece 200 is buffered in the spray chamber S, the spray nozzles 21a on both the upper and lower sides of the spray chamber S are directed towards the spray chamber S, ensuring that both the upper and lower surfaces of the workpiece 200 are sprayed with moisturizing liquid. Compared to traditional immersion moisturizing, this significantly reduces liquid loss. Furthermore, because the support component 30 supports the workpiece 200 at an angle, the liquid sprayed onto the surface of the workpiece 200 flows along the surface of the workpiece 200 under the action of gravity. Even areas that are not sprayed can be covered and moisturized by the gravity-flowing liquid. The moisturizing liquid can evenly cover the surface of the workpiece 200, preventing localized drying due to insufficient spraying. The uniformity of the moisturizing layer thickness on the surface of the workpiece 200 helps improve the subsequent processing quality of the workpiece 200.

[0052] It is worth mentioning that each spray chamber S is provided with at least one set of support components 30. If multiple sets of support components 30 are provided, each spray chamber S can buffer multiple workpieces 200.

[0053] In some embodiments, the support component 30 includes a support portion 31 that is continuously or intermittently arranged along a preset trajectory. The preset trajectory is adapted to the contour shape of the workpiece 200, and the support height of the support component 30 has a highest position w1 and a lowest position w2 on the preset trajectory, so that the support portion 31 tilts to support the workpiece 200 located in the spray chamber S, and the preset trajectory is adapted to the edge contour of the workpiece 200.

[0054] The preset trajectory matches the edge contour shape of the workpiece 200. When the workpiece 200 is circular, the preset trajectory is circular; when the workpiece 200 is square, the preset trajectory is square.

[0055] In one embodiment, the workpiece 200 is circular, and the support portion 31 may be composed of a support ring (not shown) continuously arranged along a preset trajectory of the circle. The support ring is inclined and has a highest position w1 and a lowest position w2 on the preset trajectory. In practical applications, the edge of the workpiece 200 is supported on the support ring. At this time, the space inside the support ring allows the spray nozzle 21a of the spray portion 20 below to spray moisturizing liquid onto the workpiece 200, reducing the obstruction of the workpiece 200 by the support assembly 30.

[0056] In another embodiment, combined Figure 4 and Figure 6 It is understood that the support portion 31 can be composed of a plurality of support columns 31a (hereinafter referred to as support columns 31a), which are arranged at intervals along a preset trajectory to form a support portion 31 that is intermittently arranged along the preset trajectory. In practical applications, the edge of the workpiece 200 is supported on all the support columns 31a. At this time, the support portion 31 contacts the workpiece 200 through each support column 31a, which greatly reduces the contact area with the workpiece 200, and the workpiece 200 is moisturized more evenly.

[0057] At this time, since the setting of the support part 31 is adapted to the edge contour shape of the workpiece 200, the support part 31 provides multi-point support for the edge of the workpiece 200, which not only provides stable support, but also disperses the support stress, thus avoiding the problem of hidden cracks inside the workpiece 200 caused by stress concentration.

[0058] In one specific embodiment, please refer to Figure 2 and Figure 3 The support assembly 30 includes a plurality of support columns 31a spaced apart from each other. Each support column 31a has a support surface m, and the support surfaces m of all the support columns 31a are used together to support the workpiece 200. In the projection of all the support parts 31 onto a first plane, the height of the support surface m of each projection is set to vary along a first direction X. The first plane is parallel to and intersects the height direction Z and the first direction X.

[0059] In practical applications, the multiple support columns 31a collectively support the edge of the workpiece 200. The arrangement trajectory of the support surfaces m of the multiple support columns 31a is adapted to the edge contour of the workpiece 200. Here, the arrangement trajectory can be understood as the aforementioned preset trajectory. The arrangement of the support columns 31a along the preset trajectory can be understood as the projection of the support surface m of the support column 31a along the height direction Z intersecting with the projection of the preset trajectory along the height direction Z.

[0060] Figure 2 This is a cross-sectional view of the buffer humidification device 100 in some embodiments in a first plane. (In conjunction with...) Figure 2It is understood that the number of projections of all support columns 31a onto the first plane is less than or equal to the number of support columns 31a. It is also understood that all support columns 31a are arranged around the workpiece 200. If the workpiece 200 has a symmetrical structure, and some support columns 31a are symmetrically arranged on both sides of the workpiece 200 along a plane parallel to the first plane, then the projections of the two symmetrically arranged support columns 31a onto the first plane can coincide, and the number of projections is less than the number of support columns 31a. If the support columns 31a are not symmetrically arranged along the plane, then the projections of each support column 31a onto the first plane do not coincide, and the number of projections is equal to the number of support columns 31a.

[0061] Understandably, at least two projections exist within the first plane, and the height of the supporting surface m of these projections increases or decreases along the first direction X. The lowest position of the supporting surface m is the lowest support height position w2 of the aforementioned supporting part 31, and the highest position of the supporting surface m is the highest support height position w1 of the aforementioned supporting part 31. Combined with... Figure 4 It is understood that when the workpiece 200 is supported on each support column 31a, the workpiece 200 is tilted with one end higher than the other end in the first direction X.

[0062] At this time, by using multiple support columns 31a to support the workpiece 200 together, the contact area with the workpiece 200 can be effectively reduced, and the moisturizing liquid can cover the surface of the workpiece 200 more evenly.

[0063] In one embodiment, the support surface m is a plane. On the one hand, the planar feature is easy to process, reducing processing costs. On the other hand, when the support surface m is a plane, since the workpiece 200 is inclined, the workpiece 200 and the support surface m are often in line contact or point contact, with a very small contact area, allowing the moisturizing liquid to more evenly wet and cover all parts of the workpiece 200.

[0064] Of course, in other embodiments, the support surface m can also be an arc surface, a curved surface, etc.

[0065] In one specific embodiment, combined with Figure 3 and Figure 4 It is understood that the multiple support columns 31a are arranged symmetrically relative to the plane parallel to the first plane. On the one hand, the symmetrical arrangement can simplify the design cost, and on the other hand, the workpiece 200 is subjected to uniform and symmetrical forces on both sides, making the support of the workpiece 200 more stable.

[0066] In one embodiment, reference is made to... Figure 3The support assembly 30 includes a first support group 31A and a second support group 31B. Both the first support group 31A and the second support group 31B include two support columns 31a symmetrically arranged along a plane parallel to a first plane. The height of the support surface m of the support column 31a in the first support group 31A is lower than the height of the support surface m of the support column 31a in the second support group 31B. In this configuration, the support assembly 30 not only provides reliable support but also has a reasonable number of support columns 31a, resulting in low cost.

[0067] In some embodiments, combined with Figure 5 and Figure 7 It is understood that the support assembly 30 also includes a limiting protrusion 31b, and each support surface m is provided with a limiting protrusion 31b. All the limiting protrusions 31b are used to jointly abut against the edge of the workpiece 200 located on the support surface m.

[0068] The limiting protrusion 31b is usually integrally formed with the support column 31a. The limiting protrusion 31b has a certain protrusion height. When the workpiece 200 is supported on the support surface m, the edge of the workpiece 200 is held by the limiting protrusion and will not slide, thus limiting the workpiece 200.

[0069] In some embodiments, combined with Figure 5 It is understood that the spray port 21a includes a large-diameter end a1 and a small-diameter end a2 arranged opposite to each other. The large-diameter end a1 is arranged closer to the spray chamber S than the small-diameter end a2. The flow area of ​​the spray port 21a increases from the small-diameter end a2 to the large-diameter end a1.

[0070] The diameter of the larger diameter end a1 is larger than the diameter of the smaller diameter end a2. At this time, the spray nozzle 21a is shaped like a funnel, expanding outwards towards the spray chamber S. When the moisturizing liquid is sprayed from the spray nozzle 21a, the flow resistance gradually decreases, resulting in a lower flow velocity but a larger spray range. When the moisturizing liquid is sprayed onto the workpiece 200, the impact force on the workpiece 200 is small, preventing damage to the workpiece 200. Furthermore, the large spray range ensures that the area of ​​the workpiece 200 covered by the moisturizing liquid is larger and more uniform.

[0071] In some embodiments, refer to Figure 2 and Figure 4 The buffer humidification device 100 includes multiple spray plates 21. These spray plates 21 are spaced vertically within the housing 10. Each spray plate 21 serves as a spray section 20. By using spray plates 21 as spray sections 20 within the housing 10, a larger number of spray chambers S can be configured, resulting in a stronger buffering capacity for the buffer humidification device 100. Furthermore, the same spray plate 21 can simultaneously spray humidifying liquid into the spray chambers S on both the upper and lower sides, leading to high utilization and low cost.

[0072] It is worth emphasizing again that the entire spray section 20 can be composed of spray plates 21, or a portion of the spray section 20 can be composed of spray plates 21, with the remaining portion of the spray section 20 provided by the housing 10. Those skilled in the art can make conventional settings for this, which will not be described in detail here.

[0073] In some embodiments, refer to Figure 2 and Figure 4 The inner wall of the box body 10 is provided with multiple layers of protruding edges 11 arranged at Z intervals along the height direction, and each layer of protruding edges 11 is provided with a spray plate 21.

[0074] Specifically, protruding edges 11 can be provided on both inner walls of the housing 10 along the first direction X. The protruding edges 11 can be integrally formed with the housing 10 or they can be connected separately. The spray plate 21 can be placed directly on the protruding edges 11 and limited by the inner wall of the housing 10. The spray plate 21 can also be fixedly connected to the protruding edges 11 by bolts, screws, etc.

[0075] At this point, the protruding edge 11 facilitates the installation of the spray plate 21.

[0076] In some embodiments, refer to Figure 3 The buffer humidification device 100 also includes a position sensor 40, which is located in the housing 10 and includes a sensing end 41 located inside the housing 10. The sensing end 41 is located in the spray chamber S. The spray plate 21 is provided with a perforated hole 21b, which is provided through the spray plate 21 along the height direction Z and is arranged opposite to the sensing end 41 along the height direction Z.

[0077] The position sensor 40 can be an infrared sensor, laser sensor, ultrasonic sensor, etc., and its sensing end 41 can emit and receive sensing light / sound rays. In practical applications, the sensing light / sound rays emitted by the sensing end 41 pass through the perforated holes 21b on each spray plate 21. When a workpiece 200 is placed in the spray chamber S, the workpiece 200 blocks the perforated holes 21b and reflects the light / sound rays. After the sensing end 41 receives the reflected light / sound rays, it records one instance. Thus, by counting the number of records by the sensing end 41, the number of workpieces 200 stored in the buffer humidification device 100 can be determined, which helps to visualize and monitor the storage quantity of the buffer humidification device 100.

[0078] In one embodiment, the sensing end 41 is arranged in the uppermost spray chamber S and faces downward. In another embodiment, the sensing end 41 is arranged in the lowermost spray chamber S and faces upward. In this case, only one sensing end 41 needs to be configured, which can reduce hardware costs.

[0079] In some embodiments, combined with Figure 1 and Figure 5The housing 10 is equipped with a water inlet 12 and a water outlet 13. The spray section 20 has an internal flow channel 21c, which connects to the water inlet 12, and the water outlet 13 connects to the spray chamber S. In practical application, the external moisturizing liquid enters the housing 10 through the water inlet 12, and then flows into each spray section 20 within the housing 10. It is then sprayed through the spray nozzles 21a onto the workpiece 200 in the spray chamber S, flowing through the spray chamber S, and finally returning to the water outlet 13, thus enabling the moisturizing liquid to circulate in the spray section 20.

[0080] In a further embodiment, refer to Figure 3 The spray section 20 includes the aforementioned spray plate 21, on which a through hole 21d is provided along the height direction Z, connecting adjacent spray chambers S. The water outlet 13 is connected to the lowermost spray chamber S. Thus, the moisturizing liquid in the upper spray chamber S flows through the through hole 21d to the lower spray chamber S, and finally to the lowermost spray chamber S, achieving the collection of the moisturizing liquid.

[0081] In a further embodiment, at least some of the connecting holes 21d are arranged between the spray nozzles 21a. That is, at least some of the connecting holes 21d are arranged corresponding to the spray area of ​​the workpiece 200. In this way, when the moisturizing liquid flows through the connecting holes 21d to the lower spray chamber S, it simultaneously falls on the workpiece 200, repeatedly moisturizing the workpiece 200, resulting in high utilization of the moisturizing liquid and better moisturizing effect on the workpiece 200.

[0082] In some embodiments, refer to Figure 1 The buffer humidification device 100 also includes a door 50 and an opening and closing component 60. One end of the door 50 in the second direction Y is an open end D. The door 50 is rotatably mounted on the box body 10. The opening and closing component 60 is located on and connected to the box body 10 and can control the door 50 to rotate to open and close the open end D.

[0083] As described above, in some cases, the second direction Y corresponds to the width direction of the housing 10. The opening end D is located on the front side in the width direction of the housing 10. Specifically, the door 50 is mounted to the housing 10 via a rotating connector 80. The rotating connector 80 can be a hinge. The opening and closing assembly 60 is provided on the housing 10 and connected to the door 50, for controlling the rotation of the door 50 to open or close the opening end D, so that the buffer humidification device 100 provides a clean buffer space.

[0084] Specifically, in the embodiments, combined with Figure 1 and Figure 8The opening and closing assembly 60 includes a cylinder 61, a first seat 62, a second seat 63, a first connecting rod 64, and a second connecting rod 65. The first seat 62 and the second seat 63 are fixed to the bottom of the housing 10 at intervals along a second direction Y. The fixed end of the cylinder 61 is hinged to the first seat 62, one end of the first connecting rod 64 is hinged to the second seat 63, the movable end of the cylinder 61 is hinged to the other end of the first connecting rod 64, one end of the second connecting rod 65 is hinged to the middle region of the first connecting rod 64, and the other end is hinged to the door 50.

[0085] The rotation axes at each hinge position are parallel to each other and approximately perpendicular to the second direction Y. The hinge position between the second link 65 and the first link 64 is located between the two ends of the first link 64.

[0086] In practical applications, when the cylinder 61 extends or retracts, it drives the first connecting rod 64 to rotate. The rotation of the first connecting rod 64 drives the second connecting rod 65 to rotate. The second connecting rod 65 drives the door 50 to rotate, thereby realizing the opening and closing of the opening end D of the door 50.

[0087] At this time, the opening and closing component 60 can effectively support the door 50 and drive it to rotate, which improves the reliability of the buffer humidification device 100.

[0088] In a further embodiment, refer to Figure 1 The buffer humidification device 100 also includes a seal 70, which is located at and surrounds the opening end D. When the door 50 closes the opening end D, the seal 70 seals the door 50 and the body 10, ensuring the cleanliness of the spray chamber S.

[0089] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0090] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A buffer humidification device (100), characterized in that, include: Box (10); Multiple spray sections (20) are provided in the housing (10) and arranged sequentially along the height direction (Z) of the housing (10). Each pair of adjacent spray sections (20) is separated in the housing (10) to form a spray chamber (S). On each spray section (20), multiple spray nozzles (21a) are provided facing each spray chamber (S) adjacent to the spray section (20). and A support assembly (30) is provided in the spray chamber (S) for tilting support of the workpiece (200) located in the spray chamber (S).

2. The buffer humidification device (100) according to claim 1, characterized in that, The support assembly (30) includes a support part (31) that is continuously or intermittently arranged along a preset trajectory. The support height of the support part (31) has a highest position (w1) and a lowest position (w2) on the preset trajectory, so that the support part (31) tilts to support the workpiece (200) located in the spray chamber (S). The preset trajectory is adapted to the edge contour of the workpiece (200).

3. The buffer humidification device (100) according to claim 1 or 2, characterized in that, The support assembly (30) includes a plurality of support columns (31a) spaced apart from each other, each of the support columns (31a) having a support surface (m), and the support surfaces (m) of all the support columns (31a) are used together to support the workpiece (200). In the projection of all the support columns (31a) onto the first plane (F), the height of the support surface (m) of each projection is set to vary along the first direction (X), and the first plane (F) is parallel to the intersecting height direction (Z) and the first direction (X).

4. The buffer humidification device (100) according to claim 3, characterized in that, The plurality of support columns (31a) are arranged symmetrically relative to the plane parallel to the first plane (F).

5. The buffer humidification device (100) according to claim 3, characterized in that, The support assembly (30) further includes a limiting protrusion (31b), and each of the support surfaces (m) is provided with the limiting protrusion (31b). All of the limiting protrusions (31b) are used to jointly abut against the edge of the workpiece (200) located on the support surface (m).

6. The buffer humidification device (100) according to claim 1, characterized in that, The spray nozzle (21a) includes a large-diameter end (a1) and a small-diameter end (a2) arranged opposite to each other. The large-diameter end (a1) is located closer to the spray chamber (S) than the small-diameter end (a2). The flow area of ​​the spray nozzle (21a) increases from the small-diameter end (a2) to the large-diameter end (a1).

7. The buffer humidification device (100) according to claim 1, characterized in that, The buffer humidification device (100) includes a plurality of spray plates (21), which are arranged vertically at intervals within the housing (10), and each spray plate (21) serves as a spray section (20).

8. The buffer humidification device (100) according to claim 7, characterized in that, The buffer humidification device (100) further includes a position sensor (40), which is disposed in the housing (10) and includes a sensing end (41) located inside the housing (10). The sensing end (41) is located in the spray chamber (S). A perforated hole (21b) is provided on the spray plate (21), which is disposed through the spray plate (21) along the height direction (Z) and is arranged opposite to the sensing end (41) along the height direction (Z). And / or, The spray plate (21) has a connecting hole (21d) which is provided through the spray plate (21) along the height direction (Z), and at least part of the connecting hole (21d) is arranged between the spray nozzles (21a).

9. The buffer humidification device (100) according to claim 1, characterized in that, The buffer humidification device (100) also includes a door (50) and an opening and closing assembly (60); The box body (10) has an open end (D) in the second direction (Y), the box door (50) is rotatably mounted on the box body (10), the opening and closing component (60) is provided on the box body (10) and connected to the box door (50), and can control the rotation of the box door (50) to open and close the open end (D). The second direction (Y) is intersected with the height direction (Z).

10. The buffer humidification device (100) according to claim 9, characterized in that, The opening and closing assembly (60) includes a cylinder (61), a first seat (62), a second seat (63), a first connecting rod (64), and a second connecting rod (65). The first seat (62) and the second seat (63) are fixed to the bottom of the housing (10) at intervals along the second direction (Y). The fixed end of the cylinder (61) is hinged to the first seat (62), one end of the first connecting rod (64) is hinged to the second seat (63), the movable end of the cylinder (61) is hinged to the other end of the first connecting rod (64), one end of the second connecting rod (65) is hinged to the middle region of the first connecting rod (64), and the other end is hinged to the box door (50).

Images