Pressing jig

Abstract

The utility model belongs to the technical field of semiconductor processing discloses a compression fixture, it includes base and bearing assembly. The base has the accommodating cavity, the cavity bottom wall of accommodating cavity is spaced apart and is provided with multiple groups of different size accommodating grooves to accommodate different size substrates, the bearing assembly is adjustably set in the accommodating cavity and covers the accommodating groove without containing the substrate, the bearing assembly is used for receiving and fixing the product frame and makes the product frame and the substrate in the corresponding accommodating groove compression. Therefore, the compression fixture can select the corresponding size accommodating groove according to the size of the substrate when in use, so that multiple substrates can be fixed in the accommodating cavity, thereby effectively improving the compatibility of the compression fixture for different size substrates, effectively reducing the types of compression fixtures, reducing the management cost, and improving the utilization rate of various compression fixtures and reducing the possibility of resource waste.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to pressing fixtures. Background Technology

[0002] Against the backdrop of the accelerated evolution of semiconductor power devices towards higher power density and miniaturization, DBC (direct copper-clad ceramic substrate) has become a key basic material for core components such as IGBT modules and SiC power devices due to its excellent thermal conductivity and electrical insulation properties. The lamination process between DBC and the metal frame directly determines the mechanical reliability and thermal cycle life of the device, and the lamination fixture, as the core equipment for process implementation, directly affects product yield and production efficiency due to its rational design.

[0003] In existing technologies, DBC lamination adopts a strongly coupled "substrate-fixture" design, and its structure mainly consists of three parts: a dedicated fixture, a pressure transmission module, and a heating module. The dedicated fixture fixes the substrate through precision pin hole fitting or vacuum adsorption, the pressure transmission module relies on a rigid pressure plate or elastic silicone pad to achieve pressure distribution, and the heating module integrates a resistance wire or hot oil circulation system to control the lamination temperature.

[0004] However, in order to match specific DBC parameters and ensure the stability of DBC during the pressing process, special fixtures need to be customized in terms of positioning pin layout, pressure plate slot depth, heating zone power density, and other dimensions. This results in special fixtures being only suitable for DBCs of corresponding sizes. Different sizes of DBCs require different special fixtures, leading to redundant fixture types. This not only increases management costs but also results in low utilization rates of various fixtures and waste of resources. Utility Model Content

[0005] The purpose of this invention is to provide a pressing fixture, which solves the problem that in the prior art, the special fixtures can only be adapted to DBCs of corresponding sizes, resulting in a large number of fixtures, high pipeline costs, low utilization rate and waste of resources.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This utility model provides a pressing fixture, which includes:

[0008] The base has a receiving cavity, and the bottom wall of the receiving cavity is provided with multiple sets of receiving slots of different sizes to accommodate substrates of different sizes;

[0009] A support component is adjustablely disposed within the receiving cavity and covers the receiving groove that does not contain a substrate. The support component is used to receive and fix the product frame and press the product frame against the substrate in the corresponding receiving groove.

[0010] Optionally, the carrier component includes:

[0011] A pad is slidably connected within the receiving cavity to cover part of the receiving groove, and the pad is used to support the side of the product frame away from the substrate;

[0012] A pressure block is pressed onto the upper side of the product frame to secure the product frame to the pad.

[0013] Optionally, the pad has a limiting protrusion that is at least partially inserted into the pressure block.

[0014] Optionally, multiple limiting protrusions are provided at intervals.

[0015] Optionally, the top wall of the pressure block is provided with an installation groove, and a magnetic block that can be attracted to the pad block is provided in the installation groove.

[0016] Optionally, multiple mounting slots are provided at intervals, and each mounting slot is provided with a magnetic block.

[0017] Optionally, the bottom wall of the pressure block is provided with a snap-fit ​​part, which corresponds to the side of the pad block.

[0018] Optionally, the snap-fit ​​portion extends along the length direction of the pressure block.

[0019] Optionally, the top wall of the pad has multiple receiving grooves to accommodate the product frame.

[0020] Optionally, the pad can be detachably connected to the receiving cavity to facilitate replacement of the pad with different heights.

[0021] The beneficial effects of this utility model are:

[0022] By creating multiple receiving slots within the receiving cavity, during the pressing operation, the substrate is placed in the corresponding receiving slot according to its size. The supporting components and product frame are then placed together within the receiving cavity, and the supporting components secure the product frame, pressing it onto the corresponding substrate for subsequent welding and other processes. When the substrate size changes, the position of the supporting components can be adjusted to expose a receiving slot of the appropriate size, allowing the substrate of that size to be placed into that slot. Therefore, this pressing fixture can select the appropriate size receiving slot based on the substrate size, enabling various substrates to be fixed within the receiving cavity. This effectively improves the compatibility of the pressing fixture with substrates of different sizes, reduces the number of pressing fixture types, lowers management costs, increases the utilization rate of various pressing fixtures, and reduces the possibility of resource waste. Attached Figure Description

[0023] Figure 1This is a schematic diagram of the pressing fixture in an embodiment of this utility model;

[0024] Figure 2 This is a schematic diagram of the base of the pressing fixture in an embodiment of this utility model;

[0025] Figure 3 This is an exploded structural diagram of the bearing component of the pressing fixture in this embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the pressing block and snap-fit ​​part of the bearing component of the pressing fixture in this embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of the structure of the pressing block of the pressing fixture in this embodiment of the utility model when the mounting groove is not opened.

[0028] In the picture:

[0029] 1. Base; 11. Receiving cavity; 12. Receiving groove; 2. Bearing component; 21. Pad; 22. Pressing block; 23. Limiting protrusion; 24. Limiting groove; 25. Mounting groove; 26. Snap-fit ​​part; 3. Base plate; 4. Product frame. Detailed Implementation

[0030] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0031] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0034] like Figures 1 to 5 As shown, this utility model provides a pressing fixture.

[0035] The pressing fixture includes a base 1 and a support component 2. The base 1 has a receiving cavity 11, and the bottom wall of the receiving cavity 11 is provided with multiple sets of receiving grooves 12 of different sizes to accommodate substrates 3 of different sizes. The support component 2 is adjustablely disposed in the receiving cavity 11 and covers the receiving grooves 12 that do not contain substrates 3. The support component 2 is used to support and fix the product frame 4 and press the product frame 4 against the substrates 3 in the corresponding receiving grooves 12.

[0036] By creating multiple sets of receiving slots 12 within the receiving cavity 11, during the pressing operation, the substrate 3 is placed in the corresponding receiving slot 12 according to its size. The supporting component 2 and the product frame 4 are then placed together within the receiving cavity 11, and the supporting component 2 is used to fix the product frame 4, pressing it onto the corresponding substrate 3 to facilitate subsequent processes such as welding. When the size of the substrate 3 changes, the position of the supporting component 2 can be adjusted to expose a receiving slot 12 of the corresponding size, allowing the substrate 3 of that size to be placed into the receiving slot 12. Therefore, when using this pressing fixture, it can select a receiving slot 12 of the appropriate size according to the size of the substrate 3, enabling various substrates 3 to be fixed within the receiving cavity 11. This effectively improves the compatibility of the pressing fixture with substrates 3 of different sizes, effectively reduces the types of pressing fixtures, lowers management costs, increases the utilization rate of various pressing fixtures, and reduces the possibility of resource waste.

[0037] Specifically, the base 1 is cubic in shape, with a receiving cavity 11 formed on its top wall. Multiple sets of receiving grooves 12 are formed on the bottom wall of the receiving cavity 11. Each set of receiving grooves 12 includes multiple grooves, which are spaced apart along the length of the base 1 and spaced apart along the width of the base 1, so that the multiple sets of receiving grooves 12 can be arranged in an array to provide as many sets of receiving grooves 12 of different sizes as possible within the receiving cavity 11. In this embodiment, considering the size and weight of the base 1 itself, two sets of receiving grooves 12 of different sizes are spaced apart within the receiving cavity 11.

[0038] The support component 2 can be slidably connected to the receiving cavity 11 or detachably connected to the receiving cavity 11, thereby adjusting the position of the support component 2 in the receiving cavity 11. The support component 2 can cover the receiving groove 12 that does not contain the substrate 3 so that it has sufficient size to support and fix the product frame 4, while also exposing the corresponding size receiving groove 12 to accommodate the substrate 3.

[0039] Optionally, the support component 2 includes a pad 21 and a pressure block 22. The pad 21 is slidably connected in the receiving cavity 11 to cover part of the receiving groove 12, and the pad 21 is used to support the side of the product frame 4 away from the substrate 3; the pressure block 22 is pressed on the upper side of the product frame 4 to fix the product frame 4 to the pad 21.

[0040] Specifically, the pad 21 is elongated and can be at least partially embedded in the receiving cavity 11. The top wall of the pad 21 is used to support the product frame 4. In order to improve the installation stability of the product frame 4, a receiving groove is provided on the top wall of the pad 21. The receiving groove is adapted to the shape of the product frame 4, so that the side of the product frame 4 away from the substrate 3 can be embedded in the receiving groove.

[0041] The width of the pad 21 is equal to or close to the width of a set of receiving slots 12, so that it can cover only one set of receiving slots 12 after being inserted. The pad 21 can be slidably connected within the receiving slots 12 and can be locked in any position by means of snap-fit, bolt connection, etc., to ensure that the pad 21 remains fixed during the pressing process. In this embodiment, in order to adjust the thickness of the pad 21 according to different product frames 4, the pad 21 is detachably connected to the receiving slots 12 by fasteners such as bolts.

[0042] The pressure block 22 is located above the pad block 21 and is elongated to overlap with multiple receiving grooves. The pressure block 22 and the pad block 21 can be connected by a snap-fit ​​structure with a convex-concave fit, or by a structure such as a pin or a quick-lock structure, thereby fixing the product frame 4 to the pad block 21.

[0043] The bearing assembly 2, consisting of pad 21 and pressure block 22, can quickly fix the product frame 4 in the receiving cavity 11. The pad 21 and pressure block 22 are simple in structure and easy to process. They can be adjusted according to different product frames 4. The pad 21 is detachably connected to the base 1, so that the base 1 can be used after the pad 21 is replaced, thereby further improving the utilization rate of the base 1.

[0044] Optionally, the pad 21 has a limiting protrusion 23, which is at least partially inserted into the pressure block 22.

[0045] Specifically, a limiting protrusion 23 is vertically protruding upward on the top wall of the pad 21. The limiting protrusion 23 can be cylindrical or square-shaped, and this utility model does not limit it in this way. The limiting protrusion 23 and the pad 21 can be integrally formed, while a limiting groove 24 for the limiting protrusion 23 to be inserted is provided on the side wall of the pressure block 22. The limiting groove 24 can penetrate the pressure block 22. In order to improve the limiting effect, multiple limiting protrusions 23 are provided at intervals. In this embodiment, in order to facilitate the insertion and mating, the height of the limiting protrusion 23 is greater than the thickness of the pressure block 22, and a limiting protrusion 23 is provided on each of the left and right sides of the pressure block 22.

[0046] Optionally, the top wall of the pressure block 22 is provided with a mounting groove 25, and a magnetic block that can be attracted to the pad block 21 is provided in the mounting groove 25.

[0047] Specifically, the pressure block 22 has a solid structure, which can fix the product frame 4 to the pad 21 by its own weight. To improve the fixing effect of the pressure block 22, a mounting groove 25 is provided on the top wall of the pressure block 22. The mounting groove 25 is a circular hole, and a magnetic block is placed in the mounting groove 25. The magnetic block can be attracted to the pad 21, thereby increasing the pressure of the pressure block 22 on the product frame 4 and improving the fixing effect. To enhance the effect, multiple mounting grooves 25 are provided at intervals, and each mounting groove 25 is provided with a magnetic block. Similarly, a magnetic structure can also be provided on the pad 21 to further improve the adsorption effect.

[0048] Optionally, the bottom wall of the pressure block 22 is provided with a snap-fit ​​part 26, which corresponds to the side of the pad block 21.

[0049] Specifically, the bottom wall of the pressure block 22 protrudes downward to form a locking portion 26. The locking portion 26 corresponds to and is spaced from the side of the pad block 21, so that the locking portion 26 can squeeze the product from the side, thereby further improving the product fixing effect. In this embodiment, the locking portion 26 extends along the length direction of the pressure block 22, so that the locking portion 26 can simultaneously correspond and cooperate with multiple product frames 4.

[0050] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A pressing fixture, characterized in that, include: The base (1) has a receiving cavity (11), and the bottom wall of the receiving cavity (11) is provided with multiple sets of receiving grooves (12) of different sizes to accommodate substrates (3) of different sizes. The support component (2) is adjustablely disposed in the receiving cavity (11) and covers the receiving groove (12) which does not contain the substrate (3). The support component (2) is used to receive and fix the product frame (4) and press the product frame (4) against the substrate (3) in the corresponding receiving groove (12).

2. The pressing fixture according to claim 1, characterized in that, The carrier component (2) includes: A pad (21) is slidably connected within the receiving cavity (11) to cover part of the receiving groove (12), and the pad (21) is used to support the side of the product frame (4) away from the substrate (3); A pressure block (22) is pressed onto the upper side of the product frame (4) to fix the product frame (4) to the pad block (21).

3. The pressing fixture according to claim 2, characterized in that, The pad (21) has a limiting protrusion (23) that is at least partially inserted into the pressure block (22).

4. The pressing fixture according to claim 3, characterized in that, The limiting protrusions (23) are arranged at intervals.

5. The pressing fixture according to claim 2, characterized in that, The top wall of the pressure block (22) is provided with an installation groove (25), and a magnetic block that can be attracted to the pad block (21) is provided in the installation groove (25).

6. The pressing fixture according to claim 5, characterized in that, Multiple mounting slots (25) are spaced apart, and each mounting slot (25) is provided with a magnetic block.

7. The pressing fixture according to any one of claims 2 to 6, characterized in that, The bottom wall of the pressure block (22) is provided with a snap-fit ​​part (26), which corresponds to the side of the pad block (21).

8. The pressing fixture according to claim 7, characterized in that, The snap-fit ​​portion (26) extends along the length direction of the pressure block (22).

9. The pressing fixture according to any one of claims 2 to 6, characterized in that, The top wall of the pad (21) is provided with multiple receiving grooves to accommodate the product frame (4).

10. The pressing fixture according to any one of claims 2 to 6, characterized in that, The pad (21) is detachably connected to the receiving cavity (11) to facilitate the replacement of the pad (21) with different heights.

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