A quartz boat and processing apparatus

Abstract

The utility model relates to the technical field of solar cell manufacturing equipment, specifically disclose a quartz boat and processing equipment, the quartz boat includes the main part, the main part includes a plurality of for bearing battery piece piece piece bearing unit, the piece bearing unit includes the first support piece and the second support piece along the first horizontal direction arrangement, be equipped with the containing space for containing battery piece piece between the first support piece with the second support piece, and the first support piece with the second support piece side of facing each other is equipped with the clamping groove that can supply battery piece piece inserts, a plurality of piece bearing unit along the first horizontal direction arrangement, and the fluid flow channel is equipped with between adjacent piece bearing unit, the fluid flow channel with containing space is linked together. The quartz boat of the utility model can be used for bearing battery piece piece, and have higher space utilization and better technological treatment effect.

Description

Technical Field

[0001] This utility model relates to the technical field of solar cell manufacturing equipment, and in particular to a quartz boat and processing equipment. Background Technology

[0002] In solar cell manufacturing, high-temperature processes (such as deposition or diffusion processes) often utilize quartz boats to support silicon wafers. To meet industrial production requirements and achieve high-efficiency, high-power modules, existing cell manufacturing has shifted from whole cells to slabs, with half-cells (where a single cell is divided into two identical slabs) being widely used. However, existing quartz boat support structures are only suitable for supporting whole cells and cannot meet the needs of supporting slab cells. Utility Model Content

[0003] The purpose of this invention is to provide a quartz boat and processing equipment in response to the existing technological status quo.

[0004] The quartz boat of this invention can be used to carry solar cell slabs and has both high space utilization and good processing effect.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] On the one hand, this utility model provides a quartz boat, including a main body, the main body including a plurality of segment carrying units for carrying battery cell segments;

[0007] The segmented support unit includes a first support member and a second support member arranged along a first horizontal direction. A receiving space for accommodating battery cell segments is provided between the first support member and the second support member, and a slot for inserting battery cell segments is provided on the side of the first support member and the second support member facing each other.

[0008] Several of the segmented support units are arranged along the first horizontal direction, and a fluid flow channel is provided between adjacent segmented support units, the fluid flow channel being connected to the accommodating space.

[0009] In some embodiments, in the same segmented bearing unit, the relative distance between the bottom of the slot of the first support member and the bottom of the slot of the second support member is a first horizontal distance.

[0010] The width of the fluid flow channel is less than the first horizontal spacing.

[0011] In some embodiments, the width of the fluid flow channel is:

[0012] 0.05 ≤ W / L1 ≤ 0.3

[0013] In the formula, W is the width of the fluid flow channel, and L1 is the first horizontal spacing.

[0014] In some embodiments, the width of the fluid flow channel is 4mm to 60mm.

[0015] In some embodiments, in the same segmented bearing unit, the relative distance between the bottom of the slot of the first support member and the bottom of the slot of the second support member is a first horizontal distance, and the relative distance between the opening of the slot of the first support member and the opening of the slot of the second support member is a second horizontal distance.

[0016] The first horizontal spacing is greater than or equal to the width of the battery cell segment along the first horizontal direction, and the second horizontal spacing is less than the width of the battery cell segment along the first horizontal direction.

[0017] In some embodiments, the first horizontal spacing is:

[0018] 3mm≤L1-D≤15mm

[0019] In the formula, L1 is the first horizontal spacing, and D is the width of the battery cell segment along the first horizontal direction;

[0020] And / or, the first horizontal spacing is 80mm to 140mm.

[0021] In some embodiments, the segmented support unit includes a first segmented support unit and a second segmented support unit arranged adjacent to each other. The first support member and the second support member of the first segmented support unit are arranged sequentially along the direction close to the second segmented support unit, and the first support member and the second support member of the second segmented support unit are arranged sequentially along the direction away from the first segmented support unit. The gap between the second support member of the first segmented support unit and the first support member of the second segmented support unit forms the fluid flow channel. The segmented support unit has a flow passage on the side close to the fluid flow channel for connecting the fluid flow channel and the accommodating space.

[0022] In some embodiments, the same segmented support unit includes a plurality of first support members and a plurality of second support members, the plurality of first support members being arranged at intervals along a second horizontal direction, the plurality of second support members being arranged at intervals along a second horizontal direction, and the second horizontal direction being intersected with the first horizontal direction.

[0023] In some embodiments, the first support member and / or the second support member includes a support column extending in a vertical direction, the support column having a plurality of teeth spaced apart in a vertical direction, and a slot being formed between adjacent teeth.

[0024] In some embodiments, the main body further includes a top plate and a bottom plate arranged in a vertical direction, and a plurality of the segmented support units are disposed between the top plate and the bottom plate and are respectively connected to the top plate and the bottom plate.

[0025] On the other hand, this utility model provides a processing device, including the quartz boat described above, wherein the fluid flow channel is arranged along the process gas inlet direction of the processing device.

[0026] In some embodiments, the processing equipment is a diffusion device or an LPCVD device.

[0027] The beneficial effects of this utility model are as follows:

[0028] Existing quartz boats only have left and right supports in the first horizontal direction to support a group of whole battery cells arranged at intervals in the vertical direction. In this embodiment of the utility model, several segmented support units are arranged in the quartz boat along the first horizontal direction. Each segmented support unit supports a group of battery cell segments arranged at intervals in the vertical direction through its corresponding first and second supports. While ensuring that the quartz boat can support the battery cell segments, it makes full use of space and improves space utilization.

[0029] Furthermore, unlike the approach of simply adding a shared support between the left and right supports, in this embodiment, each group of battery cell segments arranged vertically is supported by an independent segment carrying unit (i.e., an independent first support and a second support). A fluid flow channel connecting to the accommodating space is provided between adjacent segment carrying units. When the battery cells are being processed in the processing equipment, the process gas is transported in a direction perpendicular to the first horizontal direction. Due to the fluid flow channel in this quartz boat, the process gas can enter the accommodating spaces on both sides through the fluid flow channel, making full contact with the side of the battery cell segment closest to the fluid flow channel in the segment carrying unit. This ensures that the battery cell segment has sufficient process gas contact on that side, effectively avoiding the problem of process gas flow obstruction at that location due to the shared support. This ensures that the process gas can be transported evenly and uniformly cover all areas of the battery cell segment, achieving a better processing effect.

[0030] Therefore, the quartz boat of this invention can be used to carry solar cell slabs, and has both high space utilization and good processing effect. Attached Figure Description

[0031] Figure 1 This is a perspective view of the quartz boat according to an embodiment of the present utility model.

[0032] Figure 2 This is a front view of the quartz boat according to an embodiment of the present utility model.

[0033] Figure 3 for Figure 2 A magnified view of part A.

[0034] Figure 4 for Figure 2 CC-direction cross-section.

[0035] Figure 5 This is a side view of the quartz boat according to an embodiment of the present invention.

[0036] Figure 6 for Figure 2 A schematic diagram of a quartz boat placed in a diffusion device.

[0037] Figure 7 This is a cross-sectional view of a quartz boat that uses a shared support structure.

[0038] In the picture:

[0039] Segmented bearing unit 1, first support member 11, second support member 12, accommodating space 13, slot 14, support column 151, and locking tooth 152;

[0040] 2. Fluid flow channel; 3. Flow passage; 4. Top plate; 5. Bottom plate; 6. Boat ear; 7. Battery cell segment. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this utility model and are not intended to limit this utility model.

[0042] In the description of this utility model, the terms "first," "second," "third," "fourth," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first," "second," "third," "fourth," etc., may explicitly or implicitly include one or more of the stated features. In the description of this utility model, "multiple" or "several" means two or more, unless otherwise explicitly specified.

[0043] In the description of this utility model, unless otherwise expressly specified and limited, the first feature "above" or "below" the second feature may include the first feature and the second feature being in direct contact, or the first feature and the second feature not being in direct contact but being in contact through another feature between them.

[0044] On the one hand, see Figures 1 to 4 As shown, this utility model embodiment discloses a quartz boat, including a main body, the main body including a plurality of segment support units 1 for supporting battery cell segments 7;

[0045] The segmented support unit 1 includes a first support member 11 and a second support member 12 arranged along a first horizontal direction. A receiving space 13 for accommodating the battery cell segment 7 is provided between the first support member 11 and the second support member 12, and a slot 14 for inserting the battery cell segment 7 is provided on the side of the first support member 11 and the second support member 12 facing each other.

[0046] Several segmented support units 1 are arranged along the first horizontal direction, and a fluid flow channel 2 is provided between adjacent segmented support units 1, and the fluid flow channel 2 is connected to the accommodating space 13.

[0047] Existing quartz boats only have left and right supports in the first horizontal direction to support a group of whole battery cells arranged at intervals in the vertical direction. In this embodiment of the utility model, several segmented support units 1 are arranged in the quartz boat along the first horizontal direction. Each segmented support unit 1 supports a group of battery cell segments 7 arranged at intervals in the vertical direction through its corresponding first support 11 and second support 12. While ensuring that the quartz boat can support the battery cell segments 7, the space is fully utilized and the space utilization rate is improved.

[0048] In addition, compared with the scheme that only adds a common support between the left and right support members (see...) Figure 7 Unlike other embodiments, in this utility model, each group of battery cell segments 7 arranged vertically at intervals is supported by an independent segment support unit 1 (i.e., an independent first support member 11 and a second support member 12), and a fluid flow channel 2 connected to the accommodating space 13 is provided between adjacent segment support units 1. See also Figure 3 , Figure 4 and Figure 6As shown, when the battery cells are being processed in the processing equipment, the process gas is transported in a direction perpendicular to the first horizontal direction. Since the quartz boat has a fluid flow channel 2, the process gas can enter the corresponding two-sided accommodating space 13 through the fluid flow channel 2 and make full contact with the side of the battery cell segment 7 in the segment carrying unit 1 that is close to the fluid flow channel 2. This ensures that the battery cell segment 7 has sufficient process gas in contact with it on that side, effectively avoiding the problem of process gas flow being blocked at that position due to the setting of a shared support component. This ensures that the process gas can be transported evenly and that the process gas can evenly cover all areas of the battery cell segment 7 to achieve a better processing effect.

[0049] Therefore, the quartz boat of this invention can be used to carry the battery cell segments 7, and has both high space utilization and good processing effect.

[0050] Understandably, the horizontal cross-section of the card slot 14 can be rectangular, semi-circular, trapezoidal, polygonal, etc., but is not limited to these.

[0051] For example, the number of segmented support units 1 in the quartz boat can be two, each segmented support unit 1 is used to support half of the battery cell (a standard whole battery cell is cut into two equal parts); or it can be three, each segmented support unit 1 is used to support three parts of the battery cell (a standard whole battery cell is cut into three equal parts), but is not limited to this.

[0052] In some embodiments, in the same segment carrying unit 1, the slots 14 of the first support member 11 and the slots 14 of the second support member 12 are provided in a one-to-one correspondence and the slots face each other, so as to facilitate the horizontal placement of the battery cell segment 7 and ensure that the battery cell segment 7 is stably placed in the quartz boat.

[0053] In some embodiments, see Figure 2 and Figure 3 As shown, in the same segmented bearing unit 1, the relative distance between the bottom of the slot 14 of the first support member 11 and the bottom of the slot 14 of the second support member 12 is the first horizontal distance L1.

[0054] The width W of the fluid flow channel 2 is less than the first horizontal spacing L1.

[0055] This ensures that the process gas can enter the corresponding containment space 13 on both sides through the fluid flow channel 2 to guarantee the process treatment effect, while also ensuring a high space utilization rate so that the quartz boat of the same size can accommodate more battery cell segments 7.

[0056] In some embodiments, the width W of the fluid flow channel 2 is:

[0057] 0.05 ≤ W / L1 ≤ 0.3

[0058] In the formula, W is the width of the fluid flow channel 2, and L1 is the first horizontal spacing.

[0059] If the width W of the fluid flow channel 2 is too small, it affects the processing effect of the battery cell 7 on the side closest to the fluid flow channel 2 in the slab support unit 1, resulting in low processing consistency in different areas of a single battery cell 7. If the width W of the fluid flow channel 2 is too large, the space utilization rate decreases, affecting product production efficiency.

[0060] In some embodiments, the width of the fluid flow channel 2 is 4 mm to 60 mm.

[0061] Within this range, quartz boats, when used in processing equipment, can achieve both high space utilization and good processing results.

[0062] In some embodiments, see Figure 2 and Figure 3 As shown, in the same segmented bearing unit 1, the relative distance between the bottom of the slot 14 of the first support member 11 and the bottom of the slot 14 of the second support member 12 is the first horizontal distance L1, and the relative distance between the opening of the slot 14 of the first support member 11 and the opening of the slot 14 of the second support member 12 is the second horizontal distance L2.

[0063] The first horizontal spacing L1 is greater than or equal to the width D of the battery cell segment 7 along the first horizontal direction, and the second horizontal spacing L2 is less than the width D of the battery cell segment 7 along the first horizontal direction, so that the battery cell segment 7 can be inserted between the slot 14 of the first support member 11 and the slot 14 of the second support member 12 in a manner parallel to the horizontal plane.

[0064] In some embodiments, see Figure 2 and Figure 3 As shown, the first horizontal spacing is:

[0065] 3mm≤L1-D≤15mm

[0066] In the formula, L1 is the first horizontal spacing, and D is the width of the cell segment 7 along the first horizontal direction.

[0067] The first horizontal spacing L1 can be slightly larger than the width D of the cell segment 7 along the first horizontal direction. This helps reduce the difficulty of inserting the cell segment 7 and also reduces the risk of cell edge wear caused by interference between the cell edge and the bottom of the slot 14 during cell insertion. However, the first horizontal spacing L1 should not be too large, as this can easily reduce space utilization.

[0068] In some embodiments, see Figure 2 and Figure 3 As shown, the first horizontal spacing L1 is 80mm to 140mm.

[0069] For example, the first horizontal spacing is 80mm, 85mm, 90mm, 92mm, 95mm, 98mm, 100mm, 105mm, 108mm, 110mm, 115mm, 118mm, 120mm, 125mm, 128mm, 130mm, 135mm, 138mm or 140mm, but is not limited thereto.

[0070] Within this range, the quartz boat is well applicable to various common specifications of battery cells in actual production, demonstrating strong versatility.

[0071] In some embodiments, see Figures 1 to 4 As shown, the segmented support unit 1 includes a first segmented support unit 1A and a second segmented support unit 1B arranged adjacent to each other. The first support member 11 and the second support member 12 of the first segmented support unit 1A are arranged sequentially along the direction close to the second segmented support unit 1B. The first support member 11 and the second support member 12 of the second segmented support unit 1B are arranged sequentially along the direction away from the first segmented support unit 1A. The gap between the second support member 12 of the first segmented support unit 1A and the first support member 11 of the second segmented support unit 1B forms a fluid flow channel 2. The segmented support unit 1 is provided with a flow passage 3 on the side close to the fluid flow channel 2 for connecting the fluid flow channel 2 and the accommodating space 13.

[0072] When the solar cells are being processed in the processing equipment, the process gas is transported in a direction perpendicular to the first horizontal direction. Since the quartz boat has a fluid flow channel 2, the process gas can flow through the fluid flow channel 2 to the flow channels 3 on both sides and enter the corresponding receiving space 13. It can fully contact the side of the solar cell segment 7 in the segment carrying unit 1 that is close to the fluid flow channel 2, ensuring that the solar cell segment 7 has sufficient process gas in contact with it on that side. This effectively avoids the problem of process gas flow being blocked at that position due to the setting of shared support components, and ensures that the process gas can be transported evenly.

[0073] In some embodiments, the same segmented support unit 1 may include a first support member 11 and a second support member 12. Preferably, to ensure the overall stability of the quartz boat, in some embodiments, see [reference needed]. Figure 2 and Figure 4 As shown, the same segmented support unit 1 includes a plurality of first support members 11 and a plurality of second support members 12. The plurality of first support members 11 are arranged at intervals along the second horizontal direction, and the plurality of second support members 12 are arranged at intervals along the second horizontal direction. The second horizontal direction and the first horizontal direction are intersected. Preferably, the second horizontal direction and the first horizontal direction are perpendicular to each other.

[0074] In some embodiments, the first support member 11 and / or the second support member 12 includes a support column 151 extending in a vertical direction. The support column 151 is provided with a plurality of teeth 152 arranged at intervals in a vertical direction, and a groove 14 is formed between adjacent teeth 152.

[0075] It is understandable that the horizontal cross-section of the support column 151 can be rectangular, circular, semi-circular, trapezoidal, polygonal, etc., but is not limited to these.

[0076] It is understandable that the horizontal cross-section of the retaining tooth 152 can be rectangular, semi-circular, trapezoidal, polygonal, etc., but is not limited to these. Preferably, the width of the end of the retaining tooth 152 away from its supporting column 151 is smaller than the width of the end of the retaining tooth 152 close to its supporting column 151, so as to reduce the obstruction of the battery cell segment 7 by the retaining groove 14. Preferably, the outer edge of the retaining tooth 152 is a curved edge, so as to avoid scratching the battery cell segment 7 during the installation of the battery cell segment 7 by the outer edge of the retaining tooth 152.

[0077] In some embodiments, see Figure 1 and Figure 5 As shown, the main body also includes a top plate 4 and a bottom plate 5 arranged in a vertical direction, and several segmented bearing units 1 are disposed between the top plate 4 and the bottom plate 5, and are respectively connected to the top plate 4 and the bottom plate 5.

[0078] It is understandable that the top plate 4, bottom plate 5, first support member 11 and second support member 12 can be integrally formed, or they can be assembled into one piece by connecting parts such as bolts, rivets, and buckles, or they can be connected into one piece by mutually compatible connecting structures such as mortise and tenon structure and slot 14 boss structure.

[0079] In some embodiments, see Figure 5 As shown, the quartz boat also includes boat ears 6, which are located on both sides of the main body in the first horizontal direction and extend along the first horizontal direction. The boat ears 6 can be used to position and fix each other with the boat support, or to be clamped and gripped by the handling mechanism to transport the quartz boat.

[0080] On the other hand, see Figure 4 and Figure 6 As shown in the figure, this utility model embodiment also discloses a processing device, including the quartz boat mentioned above, with the fluid flow channel 2 arranged along the process gas inlet direction of the processing device.

[0081] In some embodiments, the processing equipment is a diffusion device or an LPCVD device.

[0082] In some embodiments, the processing device may further include a boat support, the length direction of which is arranged along a second horizontal direction, and a plurality of quartz boats are arranged on the boat support along the second horizontal direction.

[0083] In the description of this specification, references to terms such as "some embodiments," "exemplary," "example," or "for example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0084] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A quartz boat, comprising a main body, characterized in that, The main body includes several segmentation support units for carrying battery cell segments; The segmented support unit includes a first support member and a second support member arranged along a first horizontal direction. A receiving space for accommodating battery cell segments is provided between the first support member and the second support member, and a slot for inserting battery cell segments is provided on the side of the first support member and the second support member facing each other. Several of the segmented support units are arranged along the first horizontal direction, and a fluid flow channel is provided between adjacent segmented support units, the fluid flow channel being connected to the accommodating space.

2. The quartz boat according to claim 1, characterized in that, In the same segmented bearing unit, the relative distance between the bottom of the slot of the first support member and the bottom of the slot of the second support member is the first horizontal distance. The width of the fluid flow channel is less than the first horizontal spacing.

3. The quartz boat according to claim 2, characterized in that, The width of the fluid flow channel is: 0.05 ≤ W / L1 ≤ 0.3 In the formula, W is the width of the fluid flow channel, and L1 is the first horizontal spacing.

4. The quartz boat according to claim 1, characterized in that, The width of the fluid flow channel is 4mm to 60mm.

5. The quartz boat according to claim 1, characterized in that, In the same segmented bearing unit, the relative distance between the bottom of the slot of the first support member and the bottom of the slot of the second support member is the first horizontal distance, and the relative distance between the opening of the slot of the first support member and the opening of the slot of the second support member is the second horizontal distance. The first horizontal spacing is greater than or equal to the width of the battery cell segment along the first horizontal direction, and the second horizontal spacing is less than the width of the battery cell segment along the first horizontal direction.

6. The quartz boat according to claim 5, characterized in that, The first horizontal spacing is: 3mm≤L1-D≤15mm In the formula, L1 is the first horizontal spacing, and D is the width of the battery cell segment along the first horizontal direction; And / or, the first horizontal spacing is 80mm to 140mm.

7. The quartz boat according to claim 1, characterized in that, The segmented support unit includes a first segmented support unit and a second segmented support unit arranged adjacent to each other. The first support member and the second support member of the first segmented support unit are arranged sequentially along the direction close to the second segmented support unit, and the first support member and the second support member of the second segmented support unit are arranged sequentially along the direction away from the first segmented support unit. The gap between the second support member of the first segmented support unit and the first support member of the second segmented support unit forms the fluid flow channel. The segmented support unit has a flow passage on the side close to the fluid flow channel for connecting the fluid flow channel and the accommodating space.

8. The quartz boat according to claim 1, characterized in that, The same segmented support unit includes a plurality of first support members and a plurality of second support members. The plurality of first support members are arranged at intervals along a second horizontal direction, and the plurality of second support members are arranged at intervals along a second horizontal direction. The second horizontal direction intersects with the first horizontal direction.

9. The quartz boat according to claim 1, characterized in that, The first support member and / or the second support member includes a support column extending in a vertical direction, and the support column is provided with a plurality of teeth arranged at intervals in a vertical direction, with the slots formed between adjacent teeth.

10. The quartz boat according to claim 1, characterized in that, The main body also includes a top plate and a bottom plate arranged in a vertical direction, and a plurality of the segmented bearing units are disposed between the top plate and the bottom plate and are respectively connected to the top plate and the bottom plate.

11. A processing apparatus, characterized in that, The quartz boat according to any one of claims 1 to 10 is provided, wherein the fluid flow channel is arranged along the process gas inlet direction of the processing equipment.

12. The processing apparatus according to claim 11, characterized in that, The processing equipment is a diffusion device or an LPCVD device.

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