A steady sample advancement system for vacuum dual station manual sample transfer

Abstract

The utility model discloses a kind of steady sample feeding systems for vacuum double-station manual sample transmission, it includes vacuum transmission cavity, low magnetic force pole and high magnetic force pole, vacuum transmission cavity inside is equipped with sample transmission stage, the bottom of sample transmission stage is equipped with lifting mechanism;The feeding end of low magnetic force pole, high magnetic force pole is vertically distributed along vacuum transmission cavity, and is connected with it by flange, the sample feeding path of low magnetic force pole, high magnetic force pole is equipped with support respectively, support is used to support and limit when low magnetic force pole, high magnetic force pole sample feeding.It is respectively provided with support on the sample feeding path of low magnetic force pole and high magnetic force pole, then the head of low magnetic force pole and high magnetic force pole can be supported and limited during sample feeding process, effectively avoid the technical problem that its head droops or left and right tilts and causes collision with other components when transmitting large-size wafer, reduce the damage risk of two magnetic force poles, to ensure that the transmission system of the utility model keeps normal work for a long time.

Description

Technical Field

[0001] This utility model relates to a steady sample feeding system for manual sample transfer in a vacuum dual-station environment, belonging to the field of vacuum technology. Background Technology

[0002] In modern materials science, semiconductor manufacturing, vacuum coating, and precision analytical testing, sample transfer in a vacuum environment is a crucial step in ensuring experimental and production quality. Traditional vacuum sample transfer systems are mostly integrated on the outside of equipment in a single-station form, used for sample entry and exit without disrupting the vacuum level of the equipment itself. With the gradual development of technology, scientific research experiments and industrial production often require multi-process integration, which single-station vacuum sample transfer systems cannot meet. Therefore, multi-station automated vacuum sample transfer systems, such as four-corner / hexagonal wafer transfer robots, have gradually been developed. While multi-station automated vacuum sample transfer systems can meet the needs, their complex automated drive mechanisms lead to high production costs. Furthermore, automated components are prone to failure under vacuum conditions, resulting in high maintenance costs, which severely limits their use by research institutions and small-batch production units.

[0003] Based on this, researchers have developed a vacuum dual-station manual sample transfer system, which enables vacuum transfer of samples between two devices. For example, utility model patent application number 202221309831.3 discloses a multifunctional transfer chamber for ALD deposition systems, which can smoothly transfer 4-inch samples between two devices under vacuum conditions. However, with the development of productivity, wafer sizes have gradually increased from 4 inches to 8 inches or even 12 inches. When wafer sizes increase, sample tray sizes also increase, along with weight. At this point, using a vacuum dual-station manual sample transfer system for sample transfer mainly faces the following two problems: (1) Due to the excessive weight of the sample tray, the head of the transfer rod droops, and it is easy to collide with the sample stage inside the equipment during the transfer process, resulting in damage to the transfer rod. (2) After repeated sampling, the sampling rod is prone to left and right deviation. If the sampling rod deviates, it is easy to collide with the lifting mechanism, which will also cause damage to the sampling rod and thus affect the normal use of the transmission system. Utility Model Content

[0004] To address the aforementioned problems, this utility model provides a steady sample feeding system for manual sample transfer in a vacuum dual-station environment, the technical solution of which is as follows.

[0005] This utility model discloses a steady sample feeding system for manual sample transfer in a vacuum dual-station configuration, comprising a vacuum transfer chamber, a low magnetic force rod, and a high magnetic force rod. The vacuum transfer chamber is equipped with a sample transfer stage, and the bottom of the sample transfer stage is equipped with a lifting mechanism. The feed ends of the low magnetic rod and the high magnetic rod are vertically distributed along the vacuum transmission cavity and connected to it through flanges. Support members are provided on the sample feeding paths of the low magnetic rod and the high magnetic rod, and the support members are used to support and limit the low magnetic rod and the high magnetic rod during sample feeding.

[0006] Furthermore, the support includes a base, rollers, a shaft, and calipers. The shaft is rotatably mounted on the base, the rollers are rotatably fitted onto the outside of the shaft, and the calipers are located at both ends of the shaft for limiting movement.

[0007] Furthermore, the roller is cylindrical with thicker ends and thinner middle or in the shape of a reel, and the lower end of the base is provided with positioning holes distributed in the vertical direction.

[0008] Furthermore, the feeding ends of the low magnetic force rod and the high magnetic force rod are provided with a feeding fork, which is made of aluminum alloy.

[0009] Furthermore, the low magnetic force rod and the high magnetic force rod are respectively fitted with a front limit and a rear limit, and the front limit and the rear limit are connected by a connecting rod.

[0010] Advantages of this utility model: This utility model provides a vacuum dual-station manual sample transfer system. By setting support members on the sample entry paths of the low-magnetic rod and the high-magnetic rod respectively, the heads of the low-magnetic rod and the high-magnetic rod can be supported and limited during the sample entry process. This effectively avoids the technical problem of the heads drooping or tilting to the left or right when transferring large-size wafers, which could lead to collisions with other components. It also reduces the risk of damage to the two magnetic rods, thereby ensuring that the transfer system of this utility model can maintain normal operation for a long time. Attached Figure Description

[0011] Figure 1 A schematic diagram of the overall structure of a steady sample delivery system for manual sample transfer in a vacuum dual-station environment; Figure 2 A front view of a steady sample delivery system for manual sample transfer in a vacuum dual-station configuration; Figure 3 for Figure 2 Schematic diagram of the middle support component; Figure 4 This is a schematic diagram of the structure when a low-magnetic rod is fitted with a support component. Figure 5 A schematic diagram of sample transfer at the sample transfer stage for low magnetic force rods; The components are as follows: 1. Vacuum transfer chamber; 2. Low magnetic force rod; 3. High magnetic force rod; 4. Vacuum system; 5. Electrical control system; 6. Chamber cover; 7. Observation window; 8. Sample transfer stage; 9. Lifting mechanism; 10. Front limit; 11. Rear limit; 12. Sample inlet fork; 13. Side observation window; 14. Support component; 15. Top observation window; 16. Base; 17. Roller; 18. Roller shaft; 19. Clamp; 20. Another front limit; 21. Another rear limit; 22. Another sample inlet fork; 23. Another side observation window; 24. Another top observation window; 25. Sample stage. Detailed Implementation

[0012] The following is a detailed description of this utility model.

[0013] Example 1 like Figures 1-3 As shown, a dual-station manual vacuum sample transfer system includes: a vacuum transfer chamber 1, a low-magnetic rod 2, a high-magnetic rod 3, and a vacuum system 4. The vacuum transfer chamber 1 has a chamber cover 6 at its top, with an observation window 7 on the cover 6. Inside the vacuum transfer chamber 1 is a sample transfer stage 8, with a lifting mechanism 9 connected to its bottom. An aluminum alloy sample tray 25 is correspondingly located at the upper end of the lifting mechanism 9. The vacuum system 4, located below the vacuum transfer chamber 1, is used for evacuation. An electrical control system 5 is also provided for operating this transfer system.

[0014] The feed ends of the low-magnetic rod 2 and the high-magnetic rod 3 are vertically distributed along the vacuum transmission cavity 1. The vertical height difference between the low-magnetic rod 2 and the high-magnetic rod 3 is 20 cm, effectively preventing them from colliding with each other during sample injection. Specifically, the low-magnetic rod 2 and the high-magnetic rod 3 are respectively provided with sample injection path shells at their distribution positions in the vacuum transmission cavity 2. The low-magnetic rod 2 and the high-magnetic rod 3 are respectively connected to the sample injection path shells by flanges. The feed ends of the low-magnetic rod 2 and the high-magnetic rod 3 extend into the sample injection path shells through the flanges, forming a pull-out movable connection. The low-magnetic rod 2 is externally fitted with a front limit 10 and a rear limit 11, which are connected by a connecting rod. The sample injection end of the low-magnetic rod 2 is provided with a sample injection fork 12, which is made of aluminum alloy. The side of its sample injection path shell is provided with a side observation window 13, and the upper and lower ends near the sample injection path shell are respectively provided with a top observation window 15 and a support member 14. The support member 14 comprises a base 16, a roller 17, a shaft 18, and clamps 19. The roller 17 can be a hollow cylindrical structure, thicker at both ends and thinner in the middle. However, in actual use, while this type of roller 17 provides good support, it can still experience lateral shifting. To improve this, the roller 17 can also be shaped like a yarn reel, effectively preventing lateral shifting. The shaft 18 passes through an opening on one side of the base 16, through the hollow center of the roller 17, and exits through an opening on the other side of the base 16. Clamps 19 are located on both sides of the shaft 18 to prevent it from falling off.

[0015] like Figure 4 As shown, when the two magnetic rods are pushed forward, their rods enter the narrower part of the roller 17 of the support member 14, which helps to maintain the stability of the magnetic rods and prevents their heads from drooping or deflecting to the left or right. The high magnetic rod 3 has the same structure as the low magnetic rod 2, and is also equipped with another front limit 20 and another rear limit 21. Its head is also provided with another sample inlet fork 22, and the sample inlet path shell is also provided with another side observation window 23. The end is provided with another support member 14 and another top observation window 24.

[0016] The working principle of this utility model: The specific process of sample introduction and sampling using the low magnetic force rod 2 is as follows: In the initial state, the low magnetic rods 2 are all located at the rear limit 11, and the sample transfer stage 8 is located at the upper limit position under the action of the lifting mechanism 9.

[0017] During sample introduction, the sample is placed on the aluminum alloy sample tray 25. After the vacuum transfer chamber 1 is filled with atmospheric air, the chamber cover 6 can be opened, the sample tray 25 can be placed on the transfer stage 8, and then the chamber cover 6 is closed. The vacuum transfer chamber 1 is then evacuated to a vacuum state through the vacuum system 4. Figure 5 As shown, under vacuum, the low magnetic rod 2 is pushed forward to be coaxial with the sample transfer stage 8, and the lifting mechanism 9 is lowered to the bottom. At this time, the sample tray 24 can fall on the sample fork 12. The side valve of the low device (not shown in the figure) connected to the sample injection system of this utility model is opened, and the low magnetic rod 2 is pushed forward to the front limit 10. At this time, the support member 14 can support the head of the low magnetic rod 2 to prevent the sample fork 12 from drooping or tilting to the left or right and colliding with the sample stage inside the low device. After the sample tray 24 is transferred to the low device, the low magnetic rod 2 needs to be retracted to the rear limit 11. Thus, the sample injection is completed.

[0018] During sampling, the vacuum transfer chamber 1 is evacuated to a vacuum level using the vacuum system 4. The side valve of the low-level device is opened, and the low-magnetic rod 2 is pushed forward to the front limit 10. At this time, the support member 14 can support the head of the low-magnetic rod 2, preventing the sample fork 12 from drooping or tilting to the left or right, which would cause it to collide with the sample stage inside the low-level device. After the sample tray 24 is removed from the low-level device by the sample fork 12, the low-magnetic rod 2 is pulled backward until it is coaxial with the sample transfer stage 8. The lifting mechanism 9 will then drive the sample transfer stage 8 to rise to the matching position, and the sample tray 24 can fall onto the sample transfer stage 8. Then, the low-magnetic rod 2 is pulled backward to the rear limit 11. At this time, if it is necessary to remove the sample, the vacuum transfer chamber 1 can be vented to the atmosphere, the chamber cover 6 can be opened, the sample tray 24 can be removed, and then the chamber cover 6 can be closed.

[0019] If it is necessary to transfer the sample to a high-performance device for further experiments, follow these steps: Under vacuum, push the high magnetic rod 3 forward until it is coaxial with the sample transfer stage 8, and lower the lifting mechanism 9 to the matching position. The sample tray 24 will then fall onto the sample infeed fork 22 of the high magnetic rod 3. Since there is a 20 cm height difference between the low magnetic rod 2 and the high magnetic rod 3, no collision will occur when pushing the rod. Then, open the side valve of the high equipment and push the high magnetic rod 3 forward to the front limit 20. At this time, the support member 14 can support the head of the high magnetic rod 3 to prevent the sample infeed fork 22 from drooping or tilting to the left or right and colliding with the sample stage inside the high equipment. After transferring the sample tray 24 into the high equipment, the high magnetic rod 3 needs to be retracted to the rear limit 21. Thus, the sample introduction is completed.

[0020] During sampling, the vacuum transfer chamber 1 is evacuated to a vacuum using the vacuum system 4. The high-side valve of the high-device is opened, and the high magnetic rod 3 is pushed forward to the front limit 21. At this time, the support member 14 can support the head of the high magnetic rod 3, preventing the sample fork 22 from drooping or tilting to the left or right, thus avoiding collision with the sample stage inside the high-device. After the high magnetic rod 3 removes the sample tray 24 from the high-device, it is pulled backward to be coaxial with the sample transfer stage 8. Then, the sample transfer stage 8 is raised to the matching position, and the sample tray 24 can fall onto the sample transfer stage 8. Subsequently, the high magnetic rod 3 is pulled backward to the rear limit 21. If the sample needs to be removed at this time, the vacuum transfer chamber 1 can be vented to the atmosphere, the chamber cover 6 can be opened, the sample tray 24 can be removed, and then the chamber cover 6 can be closed. If the sample needs to be transferred to the low-device for further experiments, the above sampling steps of the low magnetic rod 2 can be repeated.

[0021] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the claims.

Claims

1. A steady sample delivery system for manual sample transfer in a vacuum dual-station environment, characterized in that, It includes a vacuum transmission chamber, a low-magnetic rod, and a high-magnetic rod. The vacuum transmission chamber is equipped with a sample transfer stage, and the bottom of the sample transfer stage is equipped with a lifting mechanism. The feed ends of the low-magnetic rod and the high-magnetic rod are vertically distributed along the vacuum transmission chamber and connected to it through flanges. Support members are respectively provided on the sample feed paths of the low-magnetic rod and the high-magnetic rod. The support members are used to support and limit the low-magnetic rod and the high-magnetic rod during sample feed.

2. The steady sample feeding system for manual sample transfer in a vacuum dual-station configuration according to claim 1, characterized in that, The support includes a base, rollers, a shaft, and calipers. The shaft is rotatably mounted on the base, the rollers are rotatably fitted onto the outside of the shaft, and the calipers are located at both ends of the shaft for limiting movement.

3. A steady sample feeding system for manual sample transfer in a vacuum dual-station configuration according to claim 2, characterized in that, The roller is cylindrical with thicker ends and thinner middle or in the shape of a reel, and the lower end of the base is provided with positioning holes distributed in the vertical direction.

4. A steady sample feeding system for manual sample transfer in a vacuum dual-station configuration according to claim 1, characterized in that, The feeding ends of the low magnetic rod and the high magnetic rod are equipped with a feeding fork, which is made of aluminum alloy.

5. A steady sample feeding system for manual sample transfer in a vacuum dual-station configuration according to claim 1, characterized in that, The low magnetic force rod and the high magnetic force rod are respectively fitted with a front limit and a rear limit, which are connected by a connecting rod.

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