clamp

Abstract

The utility model discloses a clamp, including the clamping plate installation department, set up the first clamping plate on the clamping plate installation department, with the first clamping plate cooperation clamping workpiece's second clamping plate and the fastening mechanism that will first clamping plate and second clamping plate are fixed, set up first passageway on the first clamping plate, set up second passageway on the second clamping plate, workpiece is silicon carbide wafer or silicon carbide epitaxial sheet. The utility model discloses a clamp, can realize the stable clamping of silicon carbide wafer or silicon carbide epitaxial sheet, and can cooperate with the brush tool and complete the brushing of silicon carbide wafer or silicon carbide epitaxial sheet surface.

Description

Technical Field

[0001] This utility model belongs to the field of silicon carbide wafer and silicon carbide epitaxial wafer processing technology. Specifically, this utility model relates to a fixture suitable for silicon carbide wafers and silicon carbide epitaxial wafers. Background Technology

[0002] Silicon carbide wafers have advantages such as high thermal conductivity, high breakdown field strength, and high saturated electron drift velocity. Devices made of silicon carbide materials can be used well under harsh conditions such as high temperature, high power, high voltage, high frequency, and high radiation, effectively overcoming the limitations of first-generation silicon material devices.

[0003] Characterization of silicon carbide wafers and epitaxial wafers requires etching to confirm some defects, necessitating the use of an etching furnace. The etching process involves placing silicon carbide wafers or epitaxial wafers into an etching furnace to remove substances and impurities from their surface, clearly revealing the morphology, size, depth, orientation, and number of defects on the silicon carbide wafer or epitaxial wafer surface.

[0004] After the etching process of silicon carbide wafers or epitaxial wafers is completed, they are then subjected to boiling water treatment to remove adhering substances from their surfaces through immersion and brushing. However, in actual operation, existing processing equipment and methods have many shortcomings. Existing brushing equipment struggles to stably hold the silicon carbide wafers or epitaxial wafers, leading to displacement and damage during the brushing process, which fails to fully meet the high standards of wafer surface cleanliness required in semiconductor manufacturing.

[0005] Chinese Patent Application No. 201621095591.6 discloses a silicon carbide processing fixture, including a connecting rod and a connector connected to the lower end of the connecting rod, a T-slot connected to the lower side of the connector, two horizontally arranged T-slides slidably connected to the T-slots, and a clamping device provided at the lower end of each T-slide; the T-slides are provided with a lead screw slidably connected to them in the middle, and a motor for controlling their rotation is connected to one end of the lead screw; a pressure sensor is provided in the clamping device.

[0006] A clamping device is provided, particularly concerning how to achieve stable clamping of silicon carbide wafers or silicon carbide epitaxial wafers. Utility Model Content

[0007] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention provides a clamping device suitable for silicon carbide wafers and silicon carbide epitaxial wafers, with the purpose of achieving stable clamping of silicon carbide wafers or silicon carbide epitaxial wafers.

[0008] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a clamp, including a clamping plate mounting part, a first clamping plate disposed on the clamping plate mounting part, a second clamping plate that cooperates with the first clamping plate to clamp the workpiece, and a fastening mechanism for fixing the first clamping plate and the second clamping plate. A first channel is provided on the first clamping plate, and a second channel is provided on the second clamping plate. The workpiece is a silicon carbide wafer or a silicon carbide epitaxial wafer.

[0009] A third channel is provided on the clamp mounting part, and the third channel is connected to the first channel.

[0010] The fastening mechanism includes fastening bolts and nuts, and the clamping plate mounting part, the first clamping plate and the second clamping plate are provided with through holes for the fastening bolts to pass through.

[0011] The fastening bolt is provided with a positioning block for positioning the second clamping plate, and the second clamping plate is provided with a positioning groove for the positioning block to be embedded.

[0012] The positioning block is fixedly mounted on the outer circular surface of the fastening bolt, and the length direction of the positioning block is parallel to the axis of the fastening bolt.

[0013] The fastening mechanism is provided in multiple ways. There are two first clamping plates, and a first channel is formed between the two first clamping plates to allow the brush to pass through. There are two second clamping plates, and a second channel is formed between the two second clamping plates to allow the brush to pass through.

[0014] The fixture of this invention can stably hold silicon carbide wafers or silicon carbide epitaxial wafers, and can be used with a brush to clean the surface of silicon carbide wafers or silicon carbide epitaxial wafers. Attached Figure Description

[0015] This manual includes the following figures, which illustrate the following:

[0016] Figure 1 This is the front view of the fixture;

[0017] Figure 2 This is a side view of the fixture;

[0018] Figure 3 This is a diagram illustrating the working state of the brush.

[0019] Figure 4 This is a structural diagram of the brush tool;

[0020] Figure 5 This is a partial structural diagram of the fixture;

[0021] The diagram is marked as follows:

[0022] 1. First clamping plate; 2. Second clamping plate; 3. Clamping plate mounting part; 4. First channel; 5. Second channel; 6. Third channel; 7. Fastening bolt; 8. Nut; 9. Brush; 10. Workpiece; 11. Positioning block. Detailed Implementation

[0023] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the concept and technical solution of this utility model, and to facilitate its implementation.

[0024] It should be noted that in the following embodiments, the terms "first," "second," and "third" do not represent an absolute distinction in structure and / or function, nor do they represent the order of execution; they are merely for the convenience of description.

[0025] like Figures 1 to 5 As shown, this utility model provides a clamp, including a clamping plate mounting part 3, a first clamping plate 1 disposed on the clamping plate mounting part 3, a second clamping plate 2 that cooperates with the first clamping plate 1 to clamp the workpiece, and a fastening mechanism for fixing the first clamping plate 1 and the second clamping plate 2. The workpiece is a silicon carbide wafer or a silicon carbide epitaxial wafer. The upper end of the clamping plate mounting part 3 is used to connect with a lifting tool. The first clamping plate 1 is fixedly mounted on the clamping plate mounting part 3 and is used to contact the first surface of the workpiece. The second clamping plate 2 is used to contact the second surface of the workpiece. The first surface and the second surface of the workpiece are two opposing surfaces in the thickness direction of the workpiece.

[0026] like Figures 1 to 3 As shown, in this embodiment of the invention, multiple fastening mechanisms are provided, including fastening bolts 7 and nuts 8, which are threaded together. Through holes are provided on the clamping plate mounting part 3, the first clamping plate 1, and the second clamping plate 2 to allow the fastening bolts 7 to pass through. One end of the fastening bolt 7 is fixedly connected to the clamping plate mounting part 3, and the nut 8 is sleeved on the other end of the fastening bolt 7. The first clamping plate 1 and the second clamping plate 2 are located between the clamping plate mounting part 3 and the nut 8. After tightening the nut 8, the first clamping plate 1 and the second clamping plate 2 are fixed on the clamping plate mounting part 3, and the workpiece in the middle is clamped by the first clamping plate 1 and the second clamping plate 2.

[0027] like Figures 1 to 4As shown, in this embodiment of the invention, a first channel 4 is provided on the first clamping plate 1, a second channel 5 is provided on the second clamping plate 2, and a third channel 6 is provided on the clamping plate mounting part 3. Two first clamping plates 1 are provided, with a certain distance between them, forming a first channel 4 between them for the brush 9 to pass through. Two second clamping plates 2 are provided, with a certain distance between them, forming a second channel 5 between them for the brush 9 to pass through. The third channel 6 is also for the brush 9 to pass through, and it communicates with the first channel 4. The brush 9 is used to wipe the first and second surfaces of the workpiece. The brush 9 needs to be inserted into the first channel 4, the second channel 5, and the third channel 6 to ensure contact with the first and second surfaces of the workpiece.

[0028] like Figures 1 to 4 As shown, in this embodiment of the invention, each first clamping plate 1 cooperates with a second clamping plate 2 to clamp the workpiece at both ends of the workpiece. Figure 5 As shown, a positioning block 11 for positioning the second clamping plate 2 is provided on the fastening bolt 7. A positioning groove for embedding the positioning block 11 is provided on the second clamping plate 2. The positioning block 11 is fixedly set on the outer circular surface of the fastening bolt 7. The length direction of the positioning block 11 is parallel to the axis of the fastening bolt 7. The positioning groove is a groove provided on the inner circular surface of the through hole on the second clamping plate 2 through which the fastening bolt 7 passes. The positioning block 11 cooperates with the positioning groove to play a positioning role during the assembly of the second clamping block, so that the second clamping block can accurately align with the cooperating first clamping block and cooperate with the first clamping block to clamp the workpiece at a preset position. This can achieve stable clamping of silicon carbide wafers or silicon carbide epitaxial wafers, and can be used with the brush 9 to complete the brushing of the surface of silicon carbide wafers or silicon carbide epitaxial wafers.

[0029] The present invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution of the present invention; or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. A fixture, characterized in that: The device includes a clamping plate mounting part, a first clamping plate disposed on the clamping plate mounting part, a second clamping plate that cooperates with the first clamping plate to clamp the workpiece, and a fastening mechanism for fixing the first clamping plate and the second clamping plate. The first clamping plate is provided with a first channel, and the second clamping plate is provided with a second channel. The workpiece is a silicon carbide wafer or a silicon carbide epitaxial wafer.

2. The clamp according to claim 1, characterized in that: A third channel is provided on the clamp mounting part, and the third channel is connected to the first channel.

3. The clamp according to claim 1, characterized in that: The fastening mechanism includes fastening bolts and nuts, and the clamping plate mounting part, the first clamping plate and the second clamping plate are provided with through holes for the fastening bolts to pass through.

4. The clamp according to claim 3, characterized in that: The fastening bolt is provided with a positioning block for positioning the second clamping plate, and the second clamping plate is provided with a positioning groove for the positioning block to be embedded.

5. The clamp according to claim 4, characterized in that: The positioning block is fixedly mounted on the outer circular surface of the fastening bolt, and the length direction of the positioning block is parallel to the axis of the fastening bolt.

6. The clamp according to any one of claims 1 to 5, characterized in that: The fastening mechanism is provided in multiple ways. There are two first clamping plates, and a first channel is formed between the two first clamping plates to allow the brush to pass through. There are two second clamping plates, and a second channel is formed between the two second clamping plates to allow the brush to pass through.

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