Wafer viewer

Abstract

The utility model discloses a wafer viewer, including fixed frame, the opening groove of fixed frame is provided with two interval setting's locating plate, the top of each locating plate is provided with the step, and the step includes more than one step continuous arrangement group, and each step includes a kick surface and a tread, and a downward extending V type clamping groove is arranged on each tread, and the V type clamping groove between two locating plates is symmetrically arranged, and two locating plates can be inserted in the chip card and be used for lifting the wafer chip in the chip card, and the spacing for inserting the chip card exists between the fixed frame around the locating plate. The structure setting can check whether the number of multiple wafers exists one time, compared with artificial piece by piece checking, further improves work efficiency, and is convenient for user operation.

Description

Technical Field

[0001] This utility model relates to the technical field of equipment for wafer chip manufacturing, specifically a wafer viewer. Background Technology

[0002] After decades of effort, we have finally secured a place in the chip market, but chip manufacturing has always been a challenge. Chip manufacturing consists of only two steps: front-end manufacturing and back-end manufacturing. The front-end requires purifying sand by adding chemical reagents and then refining it with high-temperature rainwater to extract silicon dioxide. Once the purity reaches 99.99%, it is cut from single-crystal silicon rods into wafers between 0.5 and 1.5 millimeters in diameter. These are the basic raw materials for chips: silicon wafers, commonly known as chips. The wafers are then coated with metal and polished, and a photolithography machine is used to project the circuitry onto the wafer through a photomask.

[0003] After processing, semiconductor wafers are engraved with a 12-digit number on the back as an identification mark. This 12-digit number is a unique identifier for the wafer, used to distinguish different wafers. The wafer is then inserted into a wafer cassette. Therefore, the wafer cassette has one or more sets of wafer recesses. Each set of wafer recesses includes two symmetrical wafer recesses. Currently, it is necessary to check whether the wafer has a serial number before it leaves the factory. The current operation is to check each wafer manually, which results in low work efficiency. Therefore, it needs to be improved. Utility Model Content

[0004] The purpose of this invention is to provide a wafer inspector to solve the problem mentioned in the background art, which is that existing wafer inspection is carried out manually one by one, resulting in low work efficiency.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a wafer inspector, comprising a fixed frame, wherein two spaced positioning plates are disposed in an opening slot of the fixed frame, each positioning plate having a step on its top, the step comprising one or more steps arranged continuously, each step comprising a kick surface and a tread surface, and a downwardly extending V-shaped locking groove is disposed on each tread surface, the V-shaped locking grooves between the two positioning plates being symmetrically arranged, the two positioning plates being able to be inserted into chip holders and used to lift the wafer chip inside the chip holders, and the positioning plates having a gap between themselves and the fixed frame in all directions for inserting the chip holders.

[0006] Preferably, to facilitate assembly of the overall structure, the fixed frame includes a base plate, a front baffle, a rear baffle, a left side plate, and a right side plate. The front baffle is located at the front end of the base plate, the rear baffle is located at the rear end of the base plate, and the left side plate and right side plate are respectively located on the left and right sides of the base plate. The distance between the outer sides of the two positioning plates and the corresponding left side plate and right side plate is D3, the distance between the front ends of the two positioning plates and the front baffle is D1, and the distance between the rear ends of the two positioning plates and the rear baffle is D2, where D3>D1>D2.

[0007] Preferably, for ease of viewing, the positioning plate is higher than the height of the left and right side plates.

[0008] Preferably, for ease of viewing, the height of the front baffle is lower than the height of the rear baffle.

[0009] Preferably, to ensure the concentricity of the two positioning plates, the two positioning plates are connected by a guide rod, and one or more mounting through holes are provided on the base plate. Each positioning plate has a screw hole at the bottom that is aligned with the corresponding mounting through hole. The screw passes through the mounting through hole and is threaded into the corresponding screw hole.

[0010] Preferably, to avoid damaging the bottom of the wafer, the bottom of the V-shaped slot has a U-shaped structure.

[0011] Preferably, the opening of the V-shaped slot is a horizontal "∧" shaped structure, with one end of the "∧" shaped structure close to the step riser, and the other end of the "∧" shaped structure has a beveled notch.

[0012] Compared with the prior art, the beneficial effects of this utility model are: this structure can check the existence of the serial numbers of multiple wafers at one time, which further improves work efficiency compared with manual checking one wafer at a time, and is also convenient for users to operate. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the wafer viewer in Embodiment 1. Figure 2 This is a top view of the wafer viewer in Embodiment 1. Figure 3 for Figure 2 A cross-sectional view of AA; Figure 4 This is a schematic diagram of the bottom structure of a wafer viewer; Figure 5 Diagram showing the connection between the two positioning plates Figure 1 ; Figure 6 for Figure 5 Enlarged view of point B; Figure 7 Diagram showing the connection between the two positioning plates Figure 2 ; Figure 8 This is a reference diagram showing the placement structure of a wafer viewer.

[0014] In the diagram: 1. Fixed frame; 2. Positioning plate; 3. Kick surface; 4. Tread surface; 5. V-shaped slot; 6. Spacing; 101. Base plate; 102. Front baffle; 103. Rear baffle; 104. Left side plate; 105. Right side plate; 106. Guide rod; 107. Mounting through hole; 108. Screw hole; 109. Screw; 501. "∧" shaped structure; 502. Angled notch. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0016] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0017] Example 1 Please see Figures 1-8 As shown, this embodiment discloses a wafer inspector, including a fixed frame 1. Two spaced positioning plates 2 are arranged in the opening slot of the fixed frame 1. Each positioning plate 2 has a step on its top, which consists of one or more steps arranged continuously. Each step includes a kick surface 3 and a tread surface 4. A downwardly extending V-shaped locking groove 5 is provided on each tread surface 4. To avoid damaging the bottom of the wafer, the bottom of the V-shaped locking groove 5 is U-shaped. Because the bottom of the V-shaped locking groove 5 is U-shaped, it avoids the bottom of the wafer being too sharp when it is inserted into the V-shaped locking groove 5, thus preventing damage to the bottom of the wafer. The V-shaped locking grooves 5 between the two positioning plates 2 are symmetrically arranged. The two positioning plates 2 can be inserted into the chip holder and used to lift the wafer chip in the chip holder. There are gaps 6 between the positioning plates 2 and the fixed frame 1 for inserting the chip holder.

[0018] Preferably, to facilitate assembly of the overall structure, the fixed frame 1 includes a base plate 101, a front baffle 102, a rear baffle 103, a left side plate 104, and a right side plate 105. The front baffle 102 is located at the front end of the base plate 101, the rear baffle 103 is located at the rear end of the base plate 101, and the left side plate 104 and right side plate 105 are respectively located on the left and right sides of the base plate 101. The distance between the outer side of the two positioning plates 2 and the corresponding left side plate 104 and right side plate 105 is D3, the distance between the front end of the two positioning plates 2 and the front baffle 102 is D1, and the distance between the rear end of the two positioning plates 2 and the rear baffle 103 is D2, where D3>D1>D2. This structural arrangement facilitates both assembly and disassembly.

[0019] Preferably, for ease of viewing, the height of the positioning plate 2 is higher than the height of the left side plate 104 and the right side plate 105, and the height of the front baffle 102 is lower than the height of the rear baffle 103.

[0020] Preferably, to ensure the concentricity of the two positioning plates 2, the two positioning plates 2 are connected by a guide rod 106, and one or more mounting through holes 107 are provided on the base plate 101. Each positioning plate 2 has a screw hole 108 at its bottom that is aligned with the corresponding mounting through hole 107. The screw 109 passes through the mounting through hole 107 and is threaded into the corresponding screw hole 108. The above structure allows for easy disassembly of the positioning plates 2. Furthermore, by providing the guide rod 106 between the two positioning plates 2, the two guide rods 106 can be further fixed, and the concentricity of the two guide rods 106 can also be ensured, ultimately ensuring that the V-shaped locking grooves 5 on both sides can be aligned.

[0021] Preferably, the opening of the V-shaped slot 5 is a horizontal "∧" shaped structure 501, and one end of the opening of the "∧" shaped structure 501 is close to the step kick surface 3, and the other end of the opening of the "∧" shaped structure 501 is provided with a sloping notch 502.

[0022] By setting up a specific wafer inspector, which includes a fixed frame 1 with an opening slot, two parallel positioning plates 2 are set in the opening slot of the fixed frame 1, and the positioning plates 2 are provided with one or more staggered V-shaped slots 5 (and in order to lift each wafer on the chip inserter, the spacing of the V-shaped slots 5 on the same positioning plate 2 needs to be the same as the spacing of the wafer insertion slots on the chip inserter). The V-shaped slots 5 on the two positioning plates 2 are symmetrically arranged left and right. In use, the chip inserter with multiple wafers is directly placed according to... Figure 8The wafers are inserted at an angle into the opening slot of the fixed frame 1. Then, under the action of the V-shaped slots 5 of the two positioning plates 2, the wafers are arranged at different heights. Since the wafer number is generally set on the top of one side of the wafer, this structure can expose all the numbers on each wafer, making it easier for users to view. After viewing, the entire chip cassette can be lifted to remove all the wafers together. Therefore, this structure allows for viewing the presence of numbers on multiple wafers at once, which is more efficient than manually checking one wafer at a time and is more convenient for users. It should also be noted that the size of this structure can be set to multiple types according to the size of the wafers and the corresponding chip cassettes, ultimately enabling the viewing of numbers on different types of wafers.

[0023] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A wafer inspector, comprising a fixing frame (1), characterized in that: The fixed frame (1) has two spaced positioning plates (2) in the opening slot. Each positioning plate (2) has a step on top. The step consists of one or more steps arranged continuously. Each step includes a kick surface (3) and a tread surface (4). A downwardly extending V-shaped slot (5) is provided on each tread surface (4). The V-shaped slots (5) between the two positioning plates (2) are symmetrically arranged. The two positioning plates (2) can be inserted into the chip cassette and used to lift the wafer chip in the chip cassette. There is a gap (6) between the positioning plate (2) and the fixed frame (1) for inserting the chip cassette.

2. The wafer viewer according to claim 1, characterized in that: The fixed frame (1) includes a base plate (101), a front baffle (102), a rear baffle (103), a left side plate (104), and a right side plate (105). The front baffle (102) is located at the front end of the base plate (101), the rear baffle (103) is located at the rear end of the base plate (101), the left side plate (104) and the right side plate (105) are respectively located on the left and right sides of the base plate (101), the distance between the outer side of the two positioning plates (2) and the corresponding left side plate (104) and right side plate (105) is D3, the distance between the front end of the two positioning plates (2) and the front baffle (102) is D1, the distance between the rear end of the two positioning plates (2) and the rear baffle (103) is D2, and D3>D1>D2.

3. The wafer viewer according to claim 2, characterized in that: The height of the positioning plate (2) is higher than the height of the left side plate (104) and the right side plate (105).

4. The wafer viewer according to claim 2, characterized in that: The height of the front baffle (102) is lower than the height of the rear baffle (103).

5. The wafer viewer according to claim 3, characterized in that: The two positioning plates (2) are connected by a guide rod (106), and one or more mounting through holes (107) are provided on the base plate (101). Each positioning plate (2) has a screw hole (108) at the bottom that is aligned with the corresponding mounting through hole (107). The screw (109) passes through the mounting through hole (107) and is threaded into the corresponding screw hole (108).

6. The wafer viewer according to any one of claims 1, 2, 3, 4, or 5, characterized in that: The bottom of the V-shaped slot (5) has a U-shaped structure.

7. The wafer viewer according to claim 6, characterized in that: The V-shaped slot (5) has a horizontal "∧" shaped structure (501) with one end of the "∧" shaped structure (501) close to the step kick surface (3), and the other end of the "∧" shaped structure (501) has a sloping notch (502).

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