A die bonding head

Abstract

The utility model discloses a kind of fixed crystal head, fixed crystal head includes power component, transmission mechanism, air bearing and suction nozzle mechanism;Air bearing includes air bearing sleeve and air bearing, air bearing includes shaft and the positioning disc of setting in the end of shaft, shaft rotation is arranged in air bearing sleeve, air film gap has between shaft and air bearing sleeve, shaft is connected with transmission mechanism;Suction nozzle mechanism includes mounting disc and suction nozzle, suction nozzle is set on mounting disc, mounting disc is magnetically attached on positioning disc.Gas bearing is set as shaft and positioning disc, and positioning disc is positioned to install suction nozzle mechanism, suction nozzle mechanism is set as including mounting disc and suction nozzle, to install the suction nozzle of mounting disc.Assemble suction nozzle by positioning disc and mounting disc being set as magnetically attached connection, when installing suction nozzle, only need to make mounting disc close to positioning disc, mounting disc can be mounted by mounting disc magnetically attached, when needing to disassemble, can directly grip suction nozzle mechanism, and it can be disassembled suction nozzle mechanism by overcoming magnetic attraction force, with good disassembly convenience.

Description

Technical Field

[0001] This utility model relates to the field of die bonding component technology, and more particularly to a die bonding head. Background Technology

[0002] Die bonders are key pieces of equipment in the packaging process of LEDs and semiconductor chips. In some LED packaging die bonders, they are typically used for high-precision wafer mounting, such as precisely placing LED wafers at the blue film dispensing position using a wafer pick-up device. Die bonders feature high-speed, precise positioning and control capabilities, with numerous internal mechanisms, motors, and complex control logic. The die bonder head is the crucial structure for wafer gripping and mounting, and its main components include a motor, coupling, connecting rod, and nozzle. The motor drives the nozzle to rotate via the coupling and connecting rod. The wafer pick-up platform moves and raises the die bonder head, which picks up the wafer and adjusts its angle.

[0003] Different products require different chips and therefore different nozzles. Furthermore, the nozzles needed for packaging different products also vary, necessitating the use of different nozzles. However, the nozzle itself is a very small component, shaped like a short needle about 1 cm long, making it difficult to grasp and causing challenges in nozzle replacement. Utility Model Content

[0004] In order to solve the technical problem of difficulty in replacing the nozzle in the existing die bonding head, one of the objectives of this utility model is to provide a die bonding head.

[0005] One of the objectives of this utility model is achieved through the following technical solution: A die bonder includes a power element, a transmission mechanism, an air bearing, and a suction nozzle mechanism. The air bearing includes an air bearing sleeve and an air bearing shaft. The air bearing shaft includes a shaft rod and a positioning disk disposed at the end of the shaft rod. The shaft rod is rotatably disposed within the air bearing sleeve. There is an air film gap between the shaft rod and the air bearing sleeve. The shaft rod is connected to the transmission mechanism. The suction nozzle mechanism includes a mounting plate and a suction nozzle, the suction nozzle being disposed on the mounting plate, and the mounting plate being magnetically attached to the positioning plate.

[0006] Optionally, the positioning disk is provided with positioning holes; The mounting plate is provided with a positioning protrusion extending toward the positioning plate, and the positioning protrusion is embedded in the positioning hole.

[0007] Optionally, the edge of the positioning disk is provided with a suction positioning ring for guiding the mounting disk to mate with the positioning disk.

[0008] Optionally, the positioning disk is provided with a plurality of magnetic blocks evenly distributed along the circumference, and the magnetic blocks are magnetically attached to the mounting disk.

[0009] Optionally, the positioning disk has an annular groove on the side facing the mounting disk, and a carbide ring is provided in the annular groove.

[0010] Optionally, the shaft has a hollow channel inside, and the hollow channel communicates with the positioning hole; The air bearing also includes a valve core and a suction cup for adsorbing the mounting plate. The valve core is disposed in the hollow channel, and the first end of the valve core is the end close to the positioning plate. The valve core is provided with a negative pressure air passage extending to the first end. The suction cup is disposed at the first end of the valve core, and the first adsorption air passage in the suction cup is connected to the negative pressure air passage.

[0011] Optionally, the valve core is further provided with a positive pressure air passage extending toward the first end; The positioning plate is provided with a flow guide channel. One end of the flow guide channel is connected to the positive pressure air passage, and the other end extends to the surface of the positioning plate facing the mounting plate, which is used to guide airflow to assist in disassembling the nozzle mechanism.

[0012] Optionally, the outer circumferential surface of the air-bearing bushing is provided with three annular pressure equalizing grooves, the inner circumferential surface of the air-bearing bushing is provided with three annular pressure grooves, the three annular pressure grooves are respectively located inside the three annular pressure equalizing grooves, and a plurality of throttling holes are provided between the annular pressure grooves and the corresponding annular pressure equalizing grooves. The negative pressure air passage is connected to the annular pressure groove located in the middle, and the positive pressure air passage is connected to the annular pressure groove near the positioning plate.

[0013] Optionally, the air bearing further includes a bearing housing, the bearing housing having an assembly cavity extending through both ends of the bearing housing; The air-bearing bushing is disposed inside the bearing housing; The bearing housing is provided with a first air hole, a second air hole and a third air hole, the first air hole, the second air hole and the third air hole are sequentially away from the positioning plate, and the first air hole and the third air hole communicate with the air film gap; The first vent, the second vent, and the third vent are respectively connected to the three annular pressure equalization grooves; Optionally, the positioning disk is provided with an exhaust port for discharging gas flowing out of the positive pressure air passage.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: In this invention, the air-bearing shaft is configured as a shaft and a positioning plate, and the suction nozzle mechanism is positioned and installed via the positioning plate. The suction nozzle mechanism includes a mounting plate and a suction nozzle, with the mounting plate assembling the suction nozzle. Furthermore, the positioning plate and the mounting plate are magnetically connected. Thus, when installing the suction nozzle, simply bring the mounting plate close to the positioning plate, and the mounting plate will magnetically attach. When disassembly is required, the suction nozzle mechanism can be directly grasped, overcoming the magnetic attraction force to detach the suction nozzle mechanism, providing excellent ease of assembly and disassembly. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the die bonding head of this utility model; Figure 2 This is an exploded view of the die bonding head of this utility model; Figure 3 This is a partial cross-sectional view of the die bonding head of this utility model; Figure 4 This is a cross-sectional view of the air bearing and suction nozzle mechanism in the die bonding head of this utility model; Figure 5 This is a cross-sectional view of the air-bearing shaft and suction nozzle mechanism in the die-bonding head of this utility model; Figure 6 This is a half-sectional view of the transmission airbag in the die bonding head of this utility model; Figure 7 This is a schematic diagram showing the position of the torque sensor in the die bonding head of this utility model.

[0016] Explanation of reference numerals in the attached diagram: 1. Power components; 2. Transmission airbag; 21. First connector; 22. Second connector; 23. Mid-air airbag; 231. Annular pleat; 232. Connecting ring; 233. Connecting panel; 3. Air bearing; 31. Air bushing; 311. Annular pressure equalizing groove; 312. Annular pressure groove; 313. Throttling orifice; 314. Friction surface; 315. Balancing air hole; 32. Air-bearing shaft; 321. Shaft; 3211. Hollow channel; 3212. First through hole; 322. Positioning plate; 3221. Positioning protrusion; 3222. Magnetic assembly groove; 3223. Annular groove; 3224. Flow guide channel; 3225. Exhaust port; 323. Torque sensor; 33. Suction nozzle positioning ring; 34. Magnetic block; 35. Pyrometallurgical ring; 36. Valve core; 361. Negative pressure air passage; 362. Positive pressure air passage; 363. Positive pressure annular groove; 364. Negative pressure annular groove; 37. Suction cup; 371. First suction airway; 38. Bearing housing; 381. Assembly cavity; 382. First vent; 383. Second vent; 384. Third vent; 385. Fourth vent; 4. Suction nozzle mechanism; 41. Mounting plate; 411. Assembly positioning ring; 412. Mounting platform; 4121. Suction nozzle groove; 4122. Deformation claw; 42. Suction nozzle; 421. Second suction air passage; 43. Locking screw; 5. Flywheel mechanism; 51. Disc; 52. Ring; 6. Suction nozzle flange. Detailed Implementation

[0017] The following will refer to the appendices in the embodiments of this application. Figure 1 To be continued Figure 7 The technical solutions in the embodiments of this application are clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0018] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this application embodiment are only used to explain the relative positional relationship and movement of the components in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indicator will also change accordingly. In this application embodiment, the top, bottom, upper end, and lower end are all taken as examples of a vertical assembly state, in which the suction nozzle mechanism 4 faces downward.

[0019] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed in this application.

[0020] In some die bonder embodiments, such as Figures 1 to 3As shown, the die bonding head includes a power element 1, a transmission mechanism, an air bearing 3, and a suction nozzle mechanism 4. The power element 1 is connected to the transmission mechanism for outputting rotational motion. The transmission mechanism is connected to the air bearing 3 for power transmission. The air bearing 3 is connected to the suction nozzle mechanism 4 for assembling the suction nozzle mechanism 4 and driving its movement. The air bearing 3 includes an air bearing sleeve 31 and an air bearing shaft 32. The air bearing shaft 32 is rotatably disposed within the air bearing sleeve 31, and an air film gap exists between the air bearing shaft 32 and the air bearing sleeve 31. Specifically, the air bearing shaft 32 includes a shaft 321 and a positioning disk 322 disposed at the end of the shaft 321. The shaft 321 is rotatably disposed within the air bearing sleeve 31, and an air film gap exists between the shaft 321 and the air bearing sleeve 31. The shaft 321 is connected to the transmission mechanism. The suction mechanism 4 includes a mounting plate 41 and a suction nozzle 42. The suction nozzle 42 is mounted on the mounting plate 41, and the mounting plate 41 is magnetically attached to the positioning plate 322.

[0021] In this embodiment, as Figure 2 , Figure 4 As shown, the air-bearing shaft 32 is configured as a shaft 321 and a positioning plate 322, and the suction nozzle mechanism 4 is positioned and installed via the positioning plate 322. The suction nozzle mechanism 4 is configured to include a mounting plate 41 and a suction nozzle 42, with the mounting plate 41 assembling the suction nozzle 42. Furthermore, the positioning plate 322 and the mounting plate 41 are magnetically connected. Thus, when installing the suction nozzle 42, simply bring the mounting plate 41 close to the positioning plate 322, and the mounting plate 41 will magnetically attach. When disassembly is required, the suction nozzle mechanism 4 can be directly grasped, and the suction nozzle mechanism 4 can be disassembled by overcoming the magnetic attraction force, providing excellent ease of assembly and disassembly.

[0022] In some embodiments, power element 1 is a stepper motor or a servo motor.

[0023] In some embodiments of the positioning disk 322, the positioning disk 322 is provided with positioning holes. The mounting disk 41 is provided with positioning protrusions 3221 extending toward the positioning disk 322, and the positioning protrusions 3221 are embedded in the positioning holes. In this way, during assembly, the positioning protrusions 3221 on the mounting disk 41 can be used to accurately position the assembly position, thereby improving assembly accuracy.

[0024] In addition, in order to improve assembly speed, such as Figure 5 As shown, the edge of the positioning disk 322 is provided with a suction positioning ring 33 for guiding the mounting disk 41 to mate with the positioning disk 322. When installing the suction mechanism 4, first align the suction mechanism 4 with the suction positioning ring 33 and insert it into the suction positioning ring 33. Under the guidance and initial positioning of the suction positioning ring 33, the assembly is carried out so that the mounting disk 41 is close to the positioning disk 322 until the positioning protrusion 3221 is embedded in the positioning hole.

[0025] The magnetic connection between the installation disk 41 and the positioning disk 322, specifically, as follows: Figure 2 , Figure 4 As shown, the positioning disk 322 has a plurality of magnetic blocks 34 evenly distributed along its circumference, and the magnetic blocks 34 are magnetically attracted to the mounting disk 41. More specifically, the positioning disk 322 has a plurality of magnetic mounting grooves 3222 on the side surface near the mounting disk 41, that is, the bottom of the positioning disk 322 has a plurality of magnetic mounting grooves 3222, and the magnetic blocks 34 are disposed in the magnetic mounting grooves 3222. Preferably, the magnetic mounting grooves 3222 are evenly distributed along the circumference.

[0026] Furthermore, to accurately determine the angle between the positioning plate 322 and the mounting plate 41, the surface of the mounting plate 41 near the positioning plate 322 is provided with several magnetic positioning grooves corresponding one-to-one with the magnetic blocks 34. That is, the top of the mounting plate 41 is provided with several magnetic positioning grooves corresponding one-to-one with the magnetic blocks 34. The magnetic blocks 34 are fixedly mounted in the magnetic assembly groove 3222, and a portion of the magnetic blocks 34 protrudes from the magnetic assembly groove 3222. When the mounting plate 41 is mounted on the positioning plate 322, a portion of the magnetic blocks 34 in the magnetic assembly groove 3222 is embedded in the magnetic positioning groove, thus forming precise magnetic positioning.

[0027] In some embodiments of the positioning disk 322 and the mounting disk 41, such as Figure 2 , Figure 5 As shown, the positioning plate 322 has an annular groove 3223 on the side facing the mounting plate 41, and a acetal ring 35 is placed inside the annular groove 3223. The mounting plate 41 has an assembly positioning ring 411 on the surface near the positioning plate 322, that is, an assembly positioning ring 411 is located on the top of the mounting plate 41. The assembly positioning ring 411 is embedded in the annular groove 3223 and abuts against the acetal ring 35. The top edge of the assembly positioning ring 411 has a guide bevel to guide the assembly positioning ring 411 into the annular groove 3223, reducing assembly difficulty and improving assembly convenience.

[0028] In some embodiments of shaft 321, such as Figure 5 As shown, the shaft 321 has a hollow channel 3211 inside, which connects to the positioning hole. Specifically, the hollow channel 3211 is directly opposite the positioning hole. The air bearing 3 also includes a valve core 36 and a suction cup 37 for adsorbing the mounting plate 41. The valve core 36 is disposed in the hollow channel 3211, and the first end of the valve core 36 is the end close to the positioning plate 322, that is, the lower end of the valve core 36. The valve core 36 has a negative pressure air passage 361 extending to the first end. The suction cup 37 is disposed at the first end of the valve core 36, and the first adsorption air passage 371 in the suction cup 37 is connected to the negative pressure air passage 361.

[0029] In this embodiment, the valve core 36 is inverted and movably disposed within the hollow channel 3211, meaning the valve core 36 can move and rotate within the hollow channel 3211. The magnetic adsorption connection between the mounting plate 41 and the positioning plate 322 secures the suction nozzle mechanism 4, valve core 36, and suction nozzle 42 to the positioning plate 322, preventing them from falling off.

[0030] When disassembling the nozzle mechanism 4, the air source connected to the negative pressure airway 361 is suspended. Under its own gravity, the valve core 36 slides downward, thereby automatically falling down to disassemble the valve core 36 and the suction cup 37. In this way, the valve core 36 can fall down and be disassembled along with the nozzle mechanism 4, which makes the valve core 36 easy to disassemble and also facilitates the disassembly and assembly of the nozzle mechanism 4.

[0031] When disassembling the nozzle mechanism 4, the air source is kept connected to the negative pressure airway 361. The negative pressure prevents the valve core 36 from descending, and the valve core 36 remains in the hollow channel 3211. In this way, the nozzle mechanism 4 can be disassembled separately.

[0032] Furthermore, the negative pressure air passage 361 inside the valve core 36 is connected to the negative pressure air source, thereby providing negative pressure to the suction cup 37 and providing negative pressure to the suction cup 37 to adsorb the nozzle mechanism 4.

[0033] Specifically, the suction cup 37 adsorbs the aforementioned positioning protrusion 3221.

[0034] Furthermore, such as Figure 5 As shown, the second adsorption channel 421 inside the suction nozzle 42 is connected to the first adsorption channel 371. More specifically, the cross-sectional area of ​​the second adsorption channel 421 is smaller than the cross-sectional area of ​​the first adsorption channel 371. When both the second adsorption channel 421 and the first adsorption channel 371 are circular holes, the diameter of the second adsorption channel 421 is smaller than the diameter of the first adsorption channel 371. Since the second adsorption channel 421 is connected to the first adsorption channel 371, the negative pressure channel 361 provides negative pressure to the second adsorption channel 421, thereby increasing the negative pressure required for adsorption in the suction nozzle 42.

[0035] Of course, for the hollow channel 3211 and the positioning hole, the positioning hole can also be part of the hollow channel 3211, that is, the positioning hole is the lower opening of the hollow channel 3211.

[0036] In some embodiments of the valve core 36, such as Figure 5As shown, the valve core 36 also has a positive pressure air passage 362 extending towards the first end. The positioning plate 322 has a guide channel 3224, one end of which connects to the positive pressure air passage 362, and the other end extends to the surface of the positioning plate 322 facing the mounting plate 41, i.e., the lower surface of the positioning plate 322, used to guide airflow to assist in disassembling the suction nozzle mechanism 4. When the suction nozzle mechanism 4 needs to be disassembled separately, the air source connected to the negative pressure air passage 361 is maintained. The negative pressure causes the valve core 36 to descend and fall, remaining within the hollow channel 3211. However, this also increases the difficulty of disassembling the suction nozzle mechanism 4 from the suction cup 37. In this embodiment, a positive pressure air passage 362 is provided in the valve core 36, and airflow is guided through the guide channel 3224 to the space between the positioning plate 322 and the mounting plate 41. The high-speed airflow impacts the mounting plate 41, pushing it apart, thus assisting in disassembling the suction nozzle mechanism 4 and reducing the difficulty of disassembly.

[0037] One end of the flow channel 3224 is connected to the positive pressure air passage 362. The flow channel 3224 and the positive pressure air passage 362 can be directly connected or indirectly connected. In some indirectly connected embodiments, when the length of the valve core 36 is less than the length of the hollow channel 3211, the positive pressure air passage 362 is first connected to the hollow channel 3211, and the hollow channel 3211 is connected to the flow channel 3224. In this way, the working positive pressure airflow in the positive pressure air passage 362 flows through the hollow channel 3211 to the flow channel 3224, and finally flows to the gap between the positioning plate 322 and the mounting plate 41.

[0038] Of course, such as Figure 2 As shown, the positioning plate 322 has an exhaust hole 3225 that extends through the upper and lower surfaces to discharge the gas flowing out of the positive pressure air passage 362. The compressed air flows through the gap between the positioning plate 322 and the mounting plate 41, and finally exits through the exhaust hole 3225.

[0039] The valve core 36 is provided with a positive pressure air passage 362 and a negative pressure air passage 361. The negative pressure air passage 361 is located at the center of the valve core 36, specifically at the axis of the valve core 36. There is at least one positive pressure air passage 362; specifically, one, two, three, four, or other numbers of positive pressure air passages 362 can be provided. The positive pressure air passages 362 are arranged around the negative pressure air passage 361 within the valve core 36. Additionally, as... Figure 5As shown, the outer circumferential surface of the valve core 36 is provided with a positive pressure annular groove 363 and a negative pressure annular groove 364, which surround the outer circumferential surface of the valve core 36. Simultaneously, the interior of the positive pressure annular groove 363 connects to each positive pressure air passage 362, and the opening of the positive pressure annular groove 363 connects to the annular pressure groove 312 at the corresponding position on the air float sleeve 31. The interior of the negative pressure annular groove 364 connects to the negative pressure air passage 361, and the opening of the negative pressure annular groove 364 connects to the annular pressure groove 312 at the corresponding position on the air float sleeve 31.

[0040] like Figure 5 As shown, the valve core 36 is housed within the shaft 321. Therefore, the shaft 321 has two sets of first through holes 3212, which are the holes through which fluids pass in the positive pressure air passage 362 and the negative pressure air passage 361, respectively. Each set of first through holes 3212 is circumferentially arranged on the shaft 321. The inner ends of the two sets of first through holes 3212 are respectively connected to the positive pressure annular groove 363 and the negative pressure annular groove 364, thereby connecting the positive pressure air passage 362 and the negative pressure air passage 361. The outer ends of the two sets of first through holes 3212 are also respectively connected to the annular pressure groove 312 located in the middle and the annular pressure groove 312 near the positioning plate 322.

[0041] In some embodiments of shaft 321, such as Figure 2 , Figure 7 As shown, a torque sensor 323 or a pressure sensor is provided on the shaft 321. The clamping force is converted into an electrical signal by the torque sensor 323 or the pressure sensor, thus enabling precise control of the suction nozzle 42 pressure based on the electrical signal. Specifically, the torque sensor 323 is located at the lower end of the shaft 321, that is, the lower end of the shaft 321 is connected to the torque sensor 323, and the torque sensor 323 is connected to the positioning plate 322. Alternatively, the shaft 321 is divided into two sections, and the torque sensor 323 is located between the two sections of the shaft 321.

[0042] In some embodiments of the air-bearing bushing 31, such as Figure 4 As shown, the outer circumferential surface of the air-bearing bushing 31 has three annular pressure equalizing grooves 311, and the inner circumferential surface of the air-bearing bushing 31 has three annular pressure grooves 312. The three annular pressure grooves 312 are located inside the three annular pressure equalizing grooves 311, and several throttling orifices 313 are provided between the annular pressure grooves 312 and their corresponding annular pressure equalizing grooves 311. The negative pressure air passage 361 is connected to the annular pressure groove 312 located in the middle, and the positive pressure air passage 362 is connected to the annular pressure groove 312 near the positioning plate 322. High-speed airflow enters the throttling orifice 313 from the annular pressure equalizing groove 311, and then enters the annular pressure groove 312, so that an air film is formed between the air-bearing bushing 31 and the shaft 321, forming a suspension support for the shaft 321.

[0043] In some embodiments of the air bearing 3, such as Figure 4 As shown, the air bearing 3 also includes a bearing housing 38, and an assembly cavity 381 is provided inside the bearing housing 38, which extends through both ends of the bearing housing 38. The air bearing sleeve 31 is disposed inside the bearing housing 38.

[0044] The bearing housing 38 is provided with a first vent 382, ​​a second vent 383, and a third vent 384, which are sequentially located away from the positioning disk 322. The first vent 382 and the third vent 384 connect to the air film gap. The first vent 382, ​​the second vent 383, and the third vent 384 can be located on the same side line or on different side lines. The first vent 382, ​​the second vent 383, and the third vent 384 are respectively connected to three annular pressure equalizing grooves 311.

[0045] The first vent 382 and the third vent 384 are positive pressure vents, connected to a compressed air source, specifically a compressor. The second vent 383 is a negative pressure vent, connected to a vacuum air source, specifically a negative pressure pump. The positive pressure air passage 362 connects to the first vent 382 via one set of first through holes 3212 and the air film gap. The negative pressure air passage 361 connects to the second vent 383 via another component's first through hole 3212 and the air film gap.

[0046] The first through hole 3212 of the shaft 321 is of a limited number, for example, the number of first through holes is 2 to 8, specifically two, three, four, five, six, seven, eight, etc., in the air film gap. For the air bearing 3, the air bearing 3 uses airflow pressure to support the air bearing shaft 32, which can reduce the friction force on the air bearing shaft 32, reduce the rotational resistance of the air bearing shaft 32, and improve the adjustment accuracy and rotational speed.

[0047] Of course, such as Figure 1 , Figure 2 As shown, a suction nozzle flange 6 is also provided between the power element 1 and the air bearing 3. One end of the suction nozzle flange 6 is connected to the power element 1, specifically to the housing of the power element 1, and the other end of the suction nozzle flange 6 is connected to the air bearing 3, specifically to the bearing housing 38. The suction nozzle flange 6 has a cavity inside, which extends through both ends of the suction nozzle flange 6, and is used to accommodate the transmission mechanism, namely the transmission airbag 2 mentioned below. The transmission airbag 2 is disposed within the cavity of the suction nozzle flange 6.

[0048] In some embodiments of the suction mechanism 4, such as Figure 5As shown, the mounting plate 41 is provided with a mounting platform 412 for assembling the suction nozzle 42. The mounting platform 412 has a suction nozzle groove 4121, and external threads are provided on the outer circumferential surface of the mounting platform 412. The mounting platform 412 has several deformation claws 4122 surrounding the suction nozzle groove 4121. The suction nozzle 42 is inserted into the suction nozzle groove 4121 and protrudes from the area between the deformation claws 4122. The suction nozzle mechanism 4 also includes a locking screw 43, which is threadedly engaged with the mounting platform 412 and presses the deformation claws 4122. When it is necessary to lock the suction nozzle 42, the locking screw 43 is tightened, and the deformation of the deformation claws 4122 locks the suction nozzle 42. Conversely, when it is necessary to disassemble and replace the suction nozzle 42, the locking screw 43 is loosened, the deformation claws 4122 spring back and release the suction nozzle 42, and the suction nozzle 42 can be pulled out.

[0049] In this embodiment, the detachable connection between the suction nozzle mechanism 4 and the positioning plate 322 allows for quick and convenient assembly and disassembly of the suction nozzle mechanism 4. Furthermore, after disassembling the suction nozzle mechanism 4, the suction nozzle 42 can be loosened or locked using the locking screw 43. This allows the suction nozzle 42 to be directly inserted and removed, enabling replacement within the suction nozzle mechanism 4. Thus, in this embodiment, the suction nozzle mechanism 4 can be disassembled and replaced first, and the suction nozzle 42 can be disassembled and replaced simultaneously within the suction nozzle mechanism 4, allowing for secondary disassembly and replacement, providing greater convenience.

[0050] In a die bonder, a robotic arm or multi-axis moving platform drives the die bonder head to move, typically involving movement in three directions: X, Y, and Z. Some die bonders use a motor to output power, with the motor's output shaft and the air bearing shaft 32 connected by a coupling. Since wafers are small and fragile, high precision is required for the movement of the robotic arm or multi-axis platform. In existing die bonders, the motor and air bearing shaft 32 are connected by a coupling, and the motor outputs power in a relatively rigid manner, creating a rigid connection between the motor and the suction nozzle 42. When fixing the wafer, the die bonder head directly applies pressure to the wafer, and the rigid pressure of the suction nozzle 42 causes the wafer to break.

[0051] In some embodiments of the transmission mechanism, such as Figure 2As shown, the transmission mechanism is a transmission airbag 2. Specifically, the power element 1 is connected to the transmission airbag 2 for outputting rotational motion. The transmission airbag 2 is connected to the air bearing shaft 32 for power transmission. The air bearing shaft 32 is connected to the suction nozzle mechanism 4 for assembling the suction nozzle mechanism 4 and driving its movement. In this embodiment, the transmission airbag 2 is provided between the power element 1 and the air bearing shaft 32. Thus, the power output by the power element 1 is transmitted to the air bearing shaft 32 via the transmission airbag 2, and finally to the suction nozzle mechanism 4. During die bonding, the transmission airbag 2 buffers the pressure applied to the wafer by the die bonding head, avoiding rigid impact on the wafer, preventing or reducing wafer breakage, and improving wafer safety.

[0052] Furthermore, the rigid connection provided by the coupling, with a buffer mass encompassing at least the entire mass of the die bonder head, results in a significant inertial momentum. The wafer must withstand the pressure exerted by the die bonder head during die bonding. In this embodiment, a transmission airbag 2 is positioned between the power element 1 and the air bearing shaft 32. The transmission airbag 2 provides a buffering effect, with a buffer mass equal to the mass of the air bearing shaft 32 and the suction mechanism 4. The mass of the air bearing shaft 32 and the suction mechanism 4 is much smaller than the mass of the die bonder head, resulting in a smaller inertial momentum. In this embodiment, the pressure the wafer must withstand during die bonding is significantly less than the pressure exerted by the die bonder head with the coupling, resulting in less buffer pressure and effectively improving safety during die bonding.

[0053] In some embodiments of the transmission airbag 2, such as Figure 6 As shown, the transmission airbag 2 includes a first connector 21, a second connector 22, and a central airbag 23. The first connector 21 and the second connector 22 are respectively disposed at both ends of the central airbag 23. The first connector 21 is connected to the power element 1, and the second connector 22 is connected to the air bearing shaft 32. The transmission airbag 2 as a whole serves as a transmission and buffer structure. Specifically, the first connector 21 and the second connector 22 are the two ends of the transmission airbag 2, used for power input and output. The central airbag 23 serves as a transmission and buffer structure. During die bonding, the central airbag 23 is compressed by the pressure feedback from the lower air bearing shaft 32, thereby effectively reducing the impact force of the die bonding head on the wafer and improving the safety of die bonding.

[0054] In some embodiments of the medium-sized airbag 23, such as Figure 6 As shown, the outer circumferential surface of the air bladder 23 is provided with several annular folds 231, which are arranged along the transmission direction. The air bladder 23 has annular folds 231 surrounding its outer circumferential surface. The pressure fed back from the air bearing shaft 32 acts on the annular folds 231. The annular folds 231 have a larger deformation range and require less force for deformation. In this way, the space for elastic deformation of the air bladder 23 is increased, the elastic coefficient is reduced, and the cushioning effect is improved.

[0055] Especially when the air bladder 23 is made of metal or ceramic, the air bladder 23 itself has the defect of being difficult to deform. The air bladder 23 of this utility model can change the original structural defects of the metal air bladder 23, so that the air bladder 23 has good elasticity. At the same time, it utilizes the strength of the metal and ceramic itself to maintain the strength in the direction of rotation, thereby accurately outputting rotational motion.

[0056] Specifically, the annular pleat 231 comprises two parallel annular surfaces with a gap between them, and the edges of the two annular surfaces are sealed together. In this embodiment, the air bladder 23 has an annular pleat 231 surrounding its outer circumference. The external feedback force is transmitted to the second connector 22 via the air bearing shaft 32. Within the allowable range of the gap, this force ultimately forces the annular surface to undergo elastic deformation, thus achieving the elastic deformation of the air bladder 23.

[0057] For the medium-sized airbag 23, its structure includes more than just the annular folds 231. In some embodiments of the medium-sized airbag 23, the medium-sized airbag 23 includes several annular folds 231, several connecting rings 232, and two connecting panels 233. The connecting rings 232 are spaced apart from the annular folds 231, and the ends of the connecting rings 232 are connected to the annular surfaces of adjacent annular folds 231. The two connecting panels 233 block both ends of the medium-sized airbag 23. When the annular folds 231 are located at the ends of the medium-sized airbag 23, the connecting panels 233 are connected to the annular folds 231, or the connecting panels 233 block the second through hole in the middle of the outer annular surface of the annular folds 231. When the connecting rings 232 are located at the ends of the medium-sized airbag 23, the connecting panels 233 are connected to the outer ends of the connecting rings 232, specifically blocking the outer ends of the connecting rings 232.

[0058] Meanwhile, the aforementioned first connector 21 and second connector 22 are respectively connected to two connector panels 233.

[0059] Regarding the specific materials of the middle airbag 23, the materials of the middle airbag 23 include, but are not limited to, metal, plastic or elastic ceramic materials.

[0060] The first connector 21 has a connecting hole and a locking hole. The connecting hole is located at the end of the first connector 21, and the axial direction of the connecting hole is the same as the length direction of the first connector 21. The locking hole is located on the side wall of the connecting hole and is used to lock the connection between the first connector 21 and the power element 1. The output end of the power element 1 extends into the connecting hole, and a locking element is provided in the locking hole to lock the output end of the power element 1.

[0061] In some embodiments of the die bonder, such as Figure 2 , Figure 3As shown, the die bonder also includes a flywheel mechanism 5. One side of the flywheel mechanism 5 is connected to the transmission airbag 2, and the other side is connected to the air bearing shaft 32. When the flywheel mechanism 5 is connected to the transmission airbag 2, it is specifically connected to the second connector 22. The flywheel mechanism 5 balances the motion state of the air bearing shaft 32, increasing the motion stability of the air bearing shaft 32.

[0062] In addition, the air bearing 3 is provided with adjusting air holes, specifically the bearing housing 38, for adjusting the axial movement of the air bearing shaft 32. Specifically, the adjusting air holes are the aforementioned first air hole 382 and third air hole 384. These two air inlets can also be used to adjust the axial movement of the air bearing shaft 32. The first air hole 382 and the third air hole 384 supply air to the corresponding two rings of throttling orifices 313, respectively. By changing the air pressure difference between the two air inlets, the air bearing shaft 32 moves. For example, increasing the air pressure in the third air hole 384 causes the air bearing shaft 32 to move away from the transmission airbag 2. After moving a certain distance, the flywheel mechanism 5 contacts the air bearing sleeve 31, and the end face of the flywheel mechanism 5 and the air bearing sleeve 31 rub against each other, thereby braking the transmission airbag 2, preventing the suction nozzle mechanism 4 from rotating, and facilitating responses to unexpected situations. The flywheel mechanism 5 can quickly brake the power element 1, accelerating the stopping speed of the power element 1.

[0063] Of course, in addition to the air-bearing bushing 31, the flywheel mechanism 5 can also brake by friction with the end face of the bearing housing 38.

[0064] For the air bearing bush 31 to participate in braking, specifically, the end of the air bearing bush 31 near the transmission air bag 2 is provided with a friction surface 314, and the friction surface 314 is provided with anti-slip texture.

[0065] Of course, after the flywheel mechanism 5 moves in the direction of the transmission airbag 2, the flywheel mechanism 5 and the suction nozzle flange 6 are braked by friction.

[0066] In some configurations, the braking state is the normal state after wafer adsorption, or in other words, the flywheel mechanism 5 is in a braking state during operation. The flywheel mechanism 5 transmits braking power to prevent the air bearing shaft 32 from rotating. When it is necessary to adjust the wafer angle, the position of the air bearing shaft 32 is adjusted by adjusting the air holes, and the flywheel mechanism 5 is disengaged from the braking state. After adjusting the wafer angle, the flywheel mechanism 5 acts as a positioning structure or locking mechanism for the air bearing shaft 32, preventing the wafer from rotating and improving the angle accuracy of die bonding.

[0067] In addition, before die bonding, the flywheel mechanism 5 is in a braking state and moves towards the bearing housing 38, while the transmission airbag 2 is in an extended state. At this time, the transmission airbag 2 has the longest switching stroke, improving the buffering effect of the die bonding head.

[0068] For flywheel mechanism 5, specifically, as follows: Figure 3 , Figure 4As shown, the flywheel mechanism 5 includes a disc 51 and a ring 52. The disc 51 is connected to the second connector 22, and the ring 52 is sleeved on the disc 51.

[0069] Either the disc 51 or the ring 52 can participate in braking. The disc 51 engages in friction braking with the end face of the air bearing sleeve 31, while the ring 52 engages in friction braking with the bearing housing 38.

[0070] Specifically, disc 51 is a disc-shaped spring, and ring 52 is fitted onto the outer circumferential surface of the spring. The disc-shaped spring allows ring 52 to maintain elastic contact with bearing housing 38, avoiding rigid collision.

[0071] When the flywheel mechanism 5 and the air bearing sleeve 31 are in friction braking mode, the disc 51 is in friction braking mode with the friction surface 314.

[0072] Furthermore, such as Figure 3 , Figure 4 As shown, the air bearing sleeve 31 has multiple circumferentially distributed balancing air holes 315 on its end face near the flywheel mechanism 5. The bearing housing 38 has a fourth air hole 385, which is a positive pressure hole connected to a compressed air source. The fourth air hole 385 is also connected to one end of the balancing air hole 315, the other end of which faces the flywheel mechanism 5. In this way, the balancing air hole 315 can inject high-speed airflow into the flywheel mechanism 5, allowing the flywheel mechanism 5 to maintain balance. This is especially important when braking is not required, preventing brake lock-up.

[0073] In addition, a connecting cylinder and a third connecting head are provided on both sides of the middle part of the disc 51. The connecting cylinder has a similar structure to the first connecting head 21, and also has a connecting hole and a locking hole. The second connecting head 22 is inserted into the connecting cylinder and threadedly connected to the connecting cylinder. At the same time, the connection between the second connecting head 22 and the connecting cylinder can be locked by using the locking screw 43.

[0074] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A die bonding head, characterized in that, The die bonding head includes a power element, a transmission mechanism, an air bearing, and a suction nozzle mechanism; The air bearing includes an air bearing sleeve and an air bearing shaft. The air bearing shaft includes a shaft rod and a positioning disk disposed at the end of the shaft rod. The shaft rod is rotatably disposed within the air bearing sleeve. There is an air film gap between the shaft rod and the air bearing sleeve. The shaft rod is connected to the transmission mechanism. The suction nozzle mechanism includes a mounting plate and a suction nozzle, the suction nozzle being disposed on the mounting plate, and the mounting plate being magnetically attached to the positioning plate.

2. The die bonder as described in claim 1, characterized in that, The positioning disk is provided with positioning holes; The mounting plate is provided with a positioning protrusion extending toward the positioning plate, and the positioning protrusion is embedded in the positioning hole.

3. The die bonder as described in claim 1 or 2, characterized in that, The edge of the positioning disk is provided with a suction positioning ring for guiding the mounting disk to align with the positioning disk.

4. The die bonder as described in claim 1, characterized in that, The positioning disk is provided with a number of magnetic blocks evenly distributed along the circumference, and the magnetic blocks are magnetically attached to the mounting disk.

5. The die bonder as described in claim 1, characterized in that, The positioning plate has an annular groove on the side facing the mounting plate, and a carbide ring is provided in the annular groove.

6. The die bonder as described in claim 1, characterized in that, The shaft has a hollow channel inside; The air bearing also includes a valve core and a suction cup for adsorbing the mounting plate. The valve core is disposed in the hollow channel, and the first end of the valve core is the end close to the positioning plate. The valve core is provided with a negative pressure air passage extending to the first end. The suction cup is disposed at the first end of the valve core, and the first adsorption air passage in the suction cup is connected to the negative pressure air passage.

7. The die bonder as described in claim 6, characterized in that, The valve core is also provided with a positive pressure air passage extending towards the first end; The positioning plate is provided with a flow guide channel. One end of the flow guide channel is connected to the positive pressure air passage, and the other end extends to the surface of the positioning plate facing the mounting plate, which is used to guide airflow to assist in disassembling the nozzle mechanism.

8. The die bonder as described in claim 7, characterized in that, The outer circumferential surface of the air-bearing bushing is provided with three annular pressure equalizing grooves, and the inner circumferential surface of the air-bearing bushing is provided with three annular pressure grooves. The three annular pressure grooves are respectively located inside the three annular pressure equalizing grooves, and a number of throttling holes are provided between the annular pressure grooves and the corresponding annular pressure equalizing grooves. The negative pressure air passage is connected to the annular pressure groove located in the middle, and the positive pressure air passage is connected to the annular pressure groove near the positioning plate.

9. The die bonder as described in claim 8, characterized in that, The air bearing also includes a bearing housing, and the bearing housing has an assembly cavity that extends through both ends of the bearing housing; The air-bearing bushing is disposed inside the bearing housing; The bearing housing is provided with a first air hole, a second air hole and a third air hole, the first air hole, the second air hole and the third air hole are sequentially away from the positioning plate, and the first air hole and the third air hole communicate with the air film gap; The first vent, the second vent, and the third vent are respectively connected to the three annular pressure equalization grooves.

10. The die bonder as described in claim 7, characterized in that, The positioning plate is provided with an exhaust hole for discharging the gas flowing out of the positive pressure air passage.

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