Optical detection device

Abstract

The utility model belongs to the technical field of semiconductor processing discloses an optical detection device, including detection subassembly and clamping component, detection subassembly includes detection platform and detection element, detection platform sets up in the below of detection element, detection platform has detection position, detection position is equipped with vacuum adsorption hole, vacuum adsorption hole links to each other and draws vacuum equipment, clamping component is used for clamping the piece to be detected, clamping component sets up in detection position, and clamping component is configured as vacuum adsorption in detection platform, wherein, one of detection platform and clamping component two has magnetic piece, and the other has magnetic attraction piece, and magnetic piece and magnetic attraction piece magnetically attract and connect. The utility model discloses the optical detection device improves the efficiency of dismantling replacement clamping component, guarantees the reliability and flatness of clamping component installation, and it is favorable to improve detection efficiency and detection accuracy.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to an optical detection device. Background Technology

[0002] In the manufacturing process of silicon-based OLEDs, one of the key steps is AOI (Automated Optical Inspection). AOI uses high-resolution cameras and image processing to detect defects in the product. During inspection, a fixture is used to hold the silicon-based OLED under inspection. This fixture is mounted on the inspection platform using multiple screws to ensure accurate positioning. Since different models of silicon-based OLED products are typically switched on the same production line, and different models require different fixtures, multiple screws need to be removed and installed to change the fixture when switching production models. Removing and installing multiple screws results in low fixture changeover time, thus affecting production efficiency. Furthermore, frequent screw removal and installation can cause stripped threads and damage, affecting the reliability and flatness of the fixture installation, and consequently impacting inspection accuracy.

[0003] Therefore, there is an urgent need for an optical detection device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide an optical inspection device that can solve the problems of existing automated optical inspection platforms requiring the removal and installation of multiple screws when changing fixtures, resulting in low replacement efficiency, and the inadequacy of fixture fixation and flatness due to stripped threads, which in turn affect the inspection accuracy.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] An optical detection device is provided, comprising:

[0007] The detection assembly includes a detection platform and a detection element. The detection platform is disposed below the detection element and has a detection position. The detection position has a vacuum adsorption hole, which is connected to a vacuum pumping device.

[0008] A clamping assembly for clamping a workpiece to be tested, the clamping assembly being disposed at the testing position, and the clamping assembly being configured to be vacuum-adsorbed onto the testing platform;

[0009] The detection platform and the clamping assembly are provided with a magnetic component and a magnetic suction component, and the magnetic component and the magnetic suction component are magnetically connected.

[0010] In one embodiment, the magnetic element is disposed on the detection platform, and the clamping assembly has a magnetic suction element.

[0011] In one embodiment, the optical detection device further includes a power supply unit, and the detection platform is provided with an electromagnetic coil, which is electrically connected to the power supply unit to form the magnetic element.

[0012] In one embodiment, an on / off switch is provided between the power supply component and the electromagnetic coil, the on / off switch being used to control the energization or de-energization of the electromagnetic coil.

[0013] In one embodiment, the upper surface of the detection platform has a first mounting hole, and the magnetic component is embedded in the first mounting hole. The bottom surface of the clamping assembly has a second mounting hole, and the magnetic component is embedded in the second mounting hole. The upper surface is attached to the bottom surface, and the first mounting hole is correspondingly connected to the second mounting hole; and / or,

[0014] The detection platform is provided with four magnetic components, and the clamping assembly is provided with four magnetic suction components. The four magnetic suction components are respectively located at the four corners of the clamping assembly, and the four magnetic suction components correspond one-to-one with the four magnetic components; and / or,

[0015] The magnetic attractor is made of magnetic metal and is detachably connected to the clamping assembly.

[0016] In one embodiment, a plurality of vacuum adsorption holes are provided, and the plurality of vacuum adsorption holes are spaced apart on the upper surface of the detection platform, the length of the vacuum adsorption holes extending along the thickness of the detection platform.

[0017] In one embodiment, the detection platform is further provided with a vacuum channel, which is parallel to the upper surface of the detection platform. Multiple vacuum adsorption holes are connected to the vacuum channel, which is connected to the vacuum pumping device.

[0018] In one embodiment, the optical detection device further includes a blowing assembly, wherein the vacuum adsorption orifice is optionally connected to either the vacuum pumping device or the blowing assembly, and the blowing assembly is configured to blow gas toward the vacuum adsorption orifice.

[0019] In one embodiment, the bottom of the clamping assembly is provided with a positioning pin, which is inserted into the vacuum adsorption hole.

[0020] In one embodiment, the upper surface of the detection platform has a guide slope that surrounds the detection position so that the detection position is recessed within the upper surface. Along the height direction of the detection platform, the guide slope extends obliquely downward toward the center of the detection position.

[0021] The beneficial effects of this utility model are:

[0022] The optical inspection device provided by this utility model includes a detection component and a clamping component. The detection component includes a detection platform and a detection element. The detection element captures images of the workpiece to be inspected on the detection platform and performs image processing to detect product defects. The detection platform is located below the detection element and has a detection position with a vacuum adsorption hole connected to a vacuum pump. The clamping component is used to clamp the workpiece to be inspected. The clamping component is located at the detection position and configured to be vacuum-adsorbed onto the detection platform. A negative pressure is generated within the vacuum adsorption hole by the vacuum pump, causing the clamping component to be adsorbed onto the detection position. The detection platform provides stable support and precise positioning for the clamping component. One of the detection platform and the clamping component has a magnetic component, and the other has a magnetic suction component. The magnetic component and the magnetic suction component are magnetically connected, thus firmly securing the clamping component to the detection platform. Vacuum adsorption and magnetic connection ensure the reliability and flatness of the clamping component installation. During the loading and unloading of the workpiece, failure of one connection prevents movement of the clamping component, which would affect the inspection accuracy. When it is necessary to replace the clamping assembly, the clamping assembly can be removed from the testing platform by turning off the vacuum equipment. The replacement efficiency of the clamping assembly is greatly improved, and there is no need to disassemble or install screws, which helps to improve the testing efficiency. It also avoids stripping of the threaded holes caused by disassembling and installing screws, ensuring that the testing accuracy is not affected. Attached Figure Description

[0023] Figure 1 This is a top view of the detection platform described in this embodiment of the utility model;

[0024] Figure 2 This is a cross-sectional structural diagram of the detection platform described in this embodiment of the utility model;

[0025] Figure 3 This is a top view of the clamping assembly described in this embodiment of the utility model;

[0026] Figure 4 This is a cross-sectional structural diagram of the clamping assembly described in an embodiment of the present utility model;

[0027] Figure 5 This is a cross-sectional structural diagram of the clamping component connected to the detection platform according to an embodiment of the present invention;

[0028] Figure 6 This is a cross-sectional structural diagram of the clamping component disengaging from the detection platform according to an embodiment of the present invention.

[0029] In the picture:

[0030] 1. Detection component; 11. Detection platform; 111. Vacuum adsorption hole; 112. Vacuum channel; 113. Guide slope; 114. Upper surface; 2. Clamping component; 21. Positioning pin; 22. Sealing ring; 23. Top cover buckle; 31. Magnetic component; 32. Magnetic suction component;

[0031] 100. Component to be tested; 101. PCB board; 102. Display substrate; 103. Cover plate. Detailed Implementation

[0032] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0033] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0034] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0035] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0036] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​that do not use relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0037] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0038] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0039] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0040] like Figures 1 to 6As shown, this utility model provides an optical inspection device, which includes an inspection component 1 and a clamping component 2. The inspection component 1 includes an inspection platform 11 and an inspection element. The inspection element uses a high-resolution camera to capture images of the workpiece 100 to be inspected on the inspection platform 11, and performs image processing on the images to detect product defects. The inspection platform 11 is located below the inspection element and has an inspection position with a vacuum adsorption hole 111 connected to a vacuum pumping device. The clamping component 2 is used to clamp the workpiece 100 to be inspected. The clamping component 2 is located at the inspection position and configured to be vacuum-adsorbed onto the inspection platform 11. A negative pressure is generated within the vacuum adsorption hole 111 by the vacuum pumping device, causing the clamping component 2 to be adsorbed onto the inspection position. The inspection platform 11 provides stable support and precise positioning for the clamping component 2. In this design, one of the detection platform 11 and the clamping assembly 2 is equipped with a magnetic component 31, while the other has a magnetic suction component 32. The magnetic component 31 and the magnetic suction component 32 are magnetically connected, thus firmly securing the clamping assembly 2 to the detection platform 11. Vacuum adsorption and magnetic connection ensure the reliability and flatness of the clamping assembly 2 installation. During the loading and unloading of the workpiece 100, failure of either connection type prevents the clamping assembly 2 from moving and affecting detection accuracy. When the clamping assembly 2 needs to be replaced, the vacuum equipment can be turned off to remove it from the detection platform 11. This significantly improves the replacement efficiency of the clamping assembly 2, eliminating the need to disassemble screws and thus improving detection efficiency. It also avoids stripping of threads caused by screw disassembly, ensuring that detection accuracy remains unaffected.

[0041] In one embodiment, the clamping assembly 2 has a positioning groove. The component to be tested 100 includes a PCB board 101, a display substrate 102, and a cover plate 103 arranged sequentially from bottom to top. The component to be tested 100 is embedded in the positioning groove and is secured to the top of the cover plate 103 by the upper cover buckle 23. In other embodiments, depending on the testing process and the structure of the component to be tested 100, the clamping assembly 2 may adopt other positioning and clamping structures. This embodiment does not impose specific limitations.

[0042] In one embodiment, the magnetic component 31 is disposed on the detection platform 11, and the clamping assembly 2 has a magnetic suction component 32. The magnetic suction component 32 is made of a magnetic metal that can be attracted by the magnetic component 31, such as stainless steel with a high iron content, and the magnetic suction component 32 is detachably connected to the clamping assembly 2. By disposing of the magnetic component 31 on the detection platform 11, the magnetic force influence that might occur on the test piece 100 if the magnetic component 31 were disposed on the clamping assembly 2 is avoided.

[0043] The optical inspection device also includes a power supply unit (not shown in the figure). An electromagnetic coil is provided on the inspection platform 11, and the electromagnetic coil is electrically connected to the power supply unit to form a magnetic element 31. The magnetism generated by energizing the electromagnetic coil causes the magnetic element 31 to exert a magnetic force on the magnetic suction element 32. In one embodiment, an on / off switch is provided between the power supply unit and the electromagnetic coil to control the energization or de-energization of the electromagnetic coil. When it is necessary to disassemble the clamping assembly 2 on the inspection platform 11, the on / off switch de-energizes the electromagnetic coil, causing the magnetic element 31 to lose its magnetism and no longer exert a magnetic force on the magnetic suction element 32, making it easier to remove the clamping assembly 2.

[0044] The upper surface 114 of the detection platform 11 has a first mounting hole, in which the electromagnetic coil is embedded. The bottom surface of the clamping component 2 has a second mounting hole, in which the magnetic attractor 32 is embedded. The upper surface 114 of the detection platform 11 fits against the bottom surface of the clamping component 2, and the first mounting hole is connected to the second mounting hole. The magnetic component 31 directly attracts the magnetic attractor 32, resulting in a stronger magnetic attraction.

[0045] The testing platform 11 is equipped with four magnetic components 31, and the clamping component 2 is equipped with four magnetic suction components 32. The four magnetic suction components 32 are located at the four corners of the clamping component 2, and the four magnetic suction components 32 and the four magnetic components 31 correspond one-to-one, forming a stable adsorption on the four corners of the clamping component 2, resulting in better connection reliability.

[0046] Multiple vacuum adsorption holes 111 are provided, and the multiple vacuum adsorption holes 111 are spaced apart on the upper surface 114 of the detection platform 11. The length of the vacuum adsorption holes 111 extends along the thickness of the detection platform 11. For example, in one embodiment, four vacuum adsorption holes 111 are provided on the upper surface 114 of the detection platform 11, corresponding to the four corners of the clamping assembly 2.

[0047] To facilitate communication between the multiple vacuum adsorption holes 111 and the vacuum pumping equipment, the detection platform 11 is also provided with a vacuum channel 112. The vacuum channel 112 is parallel to the upper surface 114 of the detection platform 11, and the multiple vacuum adsorption holes 111 are all connected to the vacuum channel 112, which in turn connects to the vacuum pumping equipment. For example, in one embodiment, the detection platform 11 is further provided with two vacuum channels 112, each vacuum channel 112 corresponding to two vacuum adsorption holes 111.

[0048] In one embodiment, the optical detection device further includes a blowing assembly (not shown in the figure). The vacuum adsorption hole 111 is selectively connected to either a vacuum pumping device or the blowing assembly, and the blowing assembly is configured to blow gas toward the vacuum adsorption hole 111. Specifically, a Y-type connector is connected to one end of the vacuum channel 112 away from the vacuum adsorption hole 111. One of the connectors is connected to the blowing assembly, and the other is connected to the vacuum pumping device. Each connector is equipped with an electrically controlled valve, which controls the on / off state. When the vacuum adsorption clamping assembly 2 needs to be passed through, the vacuum pumping device is connected to the vacuum channel 112. When the clamping assembly 2 needs to be removed from the detection platform 11, the electrically controlled valve corresponding to the vacuum pumping device is closed, and the electrically controlled valve corresponding to the blowing assembly is opened, so that the blowing assembly blows gas into the vacuum adsorption hole 111 through the vacuum channel 112. This allows the vacuum to be broken more quickly, and the blowing gas has a lifting force on the clamping assembly 2, making it easier to remove the clamping assembly 2 from the detection platform 11.

[0049] The bottom of the clamping assembly 2 is provided with positioning pins 21, which are inserted into the vacuum adsorption holes 111. The vacuum adsorption holes 111 are cleverly used to form a positioning constraint on the positioning pins 21, thereby improving the positioning accuracy of the clamping assembly 2 relative to the detection position. To further improve the positioning accuracy, the bottom of the clamping assembly 2 is provided with four positioning pins 21, and the four positioning pins 21 correspond one-to-one with the four vacuum adsorption holes 111.

[0050] In order to improve vacuum performance and prevent insufficient adhesion of clamping component 2 due to insufficient sealing at the insertion point of positioning pin 21 and vacuum adsorption hole 111, a sealing ring 22 is provided on the outer periphery of positioning pin 21. The sealing ring 22 is used to seal the gap between positioning pin 21 and vacuum adsorption hole 111.

[0051] The upper surface 114 of the detection platform 11 has a guide slope 113, which surrounds the detection position so that the detection position is recessed within the upper surface 114. Along the height direction of the detection platform 11, the guide slope 113 extends inclined downwards towards the center of the detection position. The guide slope 113 creates a concave structure for the detection position, providing coarse positioning for the alignment of the clamping assembly 2 and the detection position, allowing the positioning pin 21 to quickly align with the vacuum adsorption hole 111. Furthermore, the surrounding guide slope 113 also provides protection for the detection platform 11. Figure 5 The diagram shows a cross-sectional view of the clamping assembly 2 aligned and connected to the detection platform 11. Figure 6 The diagram shows a cross-sectional view of the clamping assembly 2 disengaging upward from the detection platform 11.

[0052] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. An optical detection device, characterized in that, include: The detection component (1) includes a detection platform (11) and a detection element. The detection platform (11) is located below the detection element. The detection platform (11) has a detection position. The detection position has a vacuum adsorption hole (111) which is connected to a vacuum pumping device. A clamping assembly (2) is used to clamp the workpiece to be tested (100). The clamping assembly (2) is disposed at the detection position and is configured to be vacuum adsorbed onto the detection platform (11). The detection platform (11) and the clamping assembly (2) are provided with a magnetic component (31) and a magnetic suction component (32), and the magnetic component (31) and the magnetic suction component (32) are magnetically connected.

2. The optical detection device according to claim 1, characterized in that, The magnetic component (31) is disposed on the detection platform (11), and the clamping assembly (2) has a magnetic suction component (32).

3. The optical detection device according to claim 2, characterized in that, The optical detection device also includes a power supply unit, and the detection platform (11) is provided with an electromagnetic coil, which is electrically connected to the power supply unit to form the magnetic element (31).

4. The optical detection device according to claim 3, characterized in that, An on / off switch is provided between the power supply component and the electromagnetic coil, and the on / off switch is used to control the energization or de-energization of the electromagnetic coil.

5. The optical detection device according to claim 2, characterized in that, The upper surface (114) of the detection platform (11) has a first mounting hole, and the magnetic component (31) is embedded in the first mounting hole. The bottom surface of the clamping assembly (2) has a second mounting hole, and the magnetic suction component (32) is embedded in the second mounting hole. The upper surface (114) is in contact with the bottom surface, and the first mounting hole is correspondingly connected to the second mounting hole; and / or, The detection platform (11) is provided with four magnetic components (31), and the clamping assembly (2) is provided with four magnetic suction components (32). The four magnetic suction components (32) are respectively located at the four corners of the clamping assembly (2), and the four magnetic suction components (32) and the four magnetic components (31) correspond one-to-one; and / or, The magnetic attractor (32) is made of magnetic metal and is detachably connected to the clamping assembly (2).

6. The optical detection device according to claim 1, characterized in that, The vacuum adsorption holes (111) are provided in multiple ways, and the multiple vacuum adsorption holes (111) are spaced apart on the upper surface (114) of the detection platform (11), and the length of the vacuum adsorption holes (111) extends along the thickness of the detection platform (11).

7. The optical detection device according to claim 6, characterized in that, The detection platform (11) is also provided with a vacuum channel (112), which is parallel to the upper surface (114) of the detection platform (11). Multiple vacuum adsorption holes (111) are connected to the vacuum channel (112), which is connected to the vacuum pumping device.

8. The optical detection apparatus according to any one of claims 1-7, characterized in that, The optical detection device further includes a blowing assembly, wherein the vacuum adsorption hole (111) is selectively connected to either the vacuum pumping device or the blowing assembly, and the blowing assembly is configured to blow gas toward the vacuum adsorption hole (111).

9. The optical detection device according to any one of claims 1-7, characterized in that, The bottom of the clamping assembly (2) is provided with a positioning pin (21), which is inserted into the vacuum adsorption hole (111).

10. The optical detection apparatus according to any one of claims 1-7, characterized in that, The upper surface (114) of the detection platform (11) has a guide slope (113), which surrounds the detection position so that the detection position is recessed in the upper surface (114). Along the height direction of the detection platform (11), the guide slope (113) extends inclined from top to bottom toward the center of the detection position.

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