Condensing structure of a low-temperature cold trap

Abstract

The utility model discloses a condensing structure of low temperature cold trap is set up in the cold trap body, including setting on the cold head's refrigeration sheet, refrigeration sheet spiral coiling forms a plurality of spiral turns along the radial direction of cold trap body, forms the passageway between two adjacent spiral turns, the refrigeration sheet of the utility model presents spiral distribution, makes the condensing area to get very big promotion, improves the condensing effect and prolongs the time of condensing surface to reach saturation simultaneously, and then prolongs the regeneration period of low temperature cold trap, improves the work efficiency of equipment.

Description

Technical Field

[0001] This utility model relates to the field of cold trap technology, and specifically discloses a condensation structure for a low-temperature cold trap. Background Technology

[0002] The condensation end of the cryogenic cold trap consists of one or two stainless steel discs (cold plates), as shown in the patent technology with application number CN202510333362.0. The cryogenic cold trap condenses water vapor in a vacuum environment by using ultra-low temperature. Since the condensation area of ​​the stainless steel discs is small, after a period of use, the water vapor accumulated on the condensation surface quickly reaches saturation, which leads to a decrease in the pumping efficiency and vacuum degree of the cold trap. At this time, it is necessary to stop the machine for regeneration to discharge the condensed gas and water. Frequent regeneration greatly affects the working efficiency of the equipment. Utility Model Content

[0003] The purpose of this invention is to solve the above problems and provide a condensation structure for a low-temperature cold trap. The condensation plates are spiral-shaped, which increases the condensation area, improves the condensation effect and pumping efficiency, thereby increasing the equipment operating time and greatly improving the regeneration cycle.

[0004] The purpose of this utility model is achieved through the following technical solution: a condensation structure for a low-temperature cold trap, which is disposed within the cold trap body and includes a cooling plate disposed on the cold head; the cooling plate is spirally wound along the radial direction of the cold trap body to form multiple spiral coils, and a channel is formed between two adjacent spiral coils.

[0005] The cooling elements of this invention are arranged in a spiral pattern, which greatly increases the condensation area, improves the condensation effect, and extends the time for the condensation surface to reach saturation. This, in turn, extends the regeneration cycle of the low-temperature cold trap and improves the working efficiency of the equipment.

[0006] A heating element is provided on the cooling chip, extending spirally along the cooling chip and located on the outer side of the spiral coil. The spiral extension of the heating element along the cooling chip improves the heating effect on the cooling chip, thereby increasing the regeneration efficiency of the cryogenic cold trap.

[0007] The surface of the cooling plate is at least partially bent to one side to form a reinforcing rib; the reinforcing rib extends spirally along the cooling plate. The reinforcing rib increases the strength of the cooling plate and prevents water vapor from condensing on it and deforming due to its weight.

[0008] The cooling element includes a vertical section and a support section that are perpendicularly connected to each other, so that the cross-section of the cooling element is "T"-shaped or "L"-shaped; the cooling element is connected to the cold head through its support section. The support section can improve the connection strength between the cooling element and the cold head, and also increase the contact area between the cooling element and the cold head, so that the cold head can cool the cooling element better.

[0009] The vertical part and the support part are connected by a rounded transition, which improves the connection strength between the vertical part and the support part.

[0010] The cooling element is made of oxygen-free copper.

[0011] The surface of the cooling chip is plated with a nickel layer.

[0012] Compared with the prior art, this application has the following beneficial effects: This utility model can improve the condensation effect and extend the time for the condensation surface to reach saturation, thereby extending the regeneration cycle of the low temperature cold trap and improving the working efficiency of the equipment.

[0013] Some of the additional features of this application will be described in the following description. These additional features will become apparent to those skilled in the art upon examination of the following description and the accompanying drawings, or upon understanding the production or operation of the embodiments. The features disclosed in this application can be implemented and achieved through the practice or use of various methods, means, and combinations thereof with respect to the specific embodiments described below. Attached Figure Description

[0014] The accompanying drawings, which are provided to further illustrate this application and constitute a part of this application, illustrate exemplary embodiments of this application and are used to explain this application, but do not constitute a limitation thereof. In the drawings, the same reference numerals denote the same components.

[0015] Figure 1 This is a top view of the condensation structure of this utility model installed inside the cold trap body.

[0016] Figure 2 This is a cross-sectional view of the condensation structure of this utility model.

[0017] Figure 3 for Figure 2 Enlarged diagram of point A in the middle.

[0018] Figure 4 This is a schematic diagram showing that the cooling element of this utility model is equipped with reinforcing ribs and heating elements.

[0019] The reference numerals in the above figures are: 1-cold trap body, 2-cold head, 3-cooling chip, 31-channel, 32-support, 33-heating element, 34-arc, 35-reinforcing rib. Detailed Implementation

[0020] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0021] It should be noted that if the terms "first," "second," etc., are used in the specification, claims, and accompanying drawings of this application, they are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0022] In this application, when terms such as "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" are used, they indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are mainly for better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0023] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0024] Furthermore, in this application, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0025] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0026] Example

[0027] like Figure 1 As shown, this embodiment discloses a condensation structure for a cryogenic cold trap, which includes a cooling chip 3 disposed on a cold head 2 within the cold trap body 1. Specifically, similar to a conventional cryogenic cold trap, the cold trap body 1 includes components such as a shell and a refrigerator. The cold head 2 of the refrigerator extends into the shell of the cold trap body 1, while the cooling chip 3 is mounted on the cold head 2 and faces the gas inlet of the cold trap body 1. During operation, the cold head 2 of the refrigerator provides a cold source to the cooling chip 3, causing the cooling chip 3 to cool down and thus capture water vapor. The cold trap body 1 adopts existing technology, that is, it includes components such as a shell, a refrigerator, a gas inlet, a drain outlet, and valves. Since this is existing technology, it is also described in the prior patent technology with application number CN202510333362.0, and its structure and working principle will not be elaborated here. The improvement of this embodiment lies in the cooling chip 3, which will be described in detail below.

[0028] like Figure 1 As shown, the cooling element 3 is spirally coiled along the radial direction of the cold trap body 1 to form multiple spiral coils, with a channel 31 formed between two adjacent spiral coils. After the gas enters the cryogenic cold trap, it comes into contact with both sides of the spiral cooling element 3, and water vapor is condensed into ice on the cooling element 3. By setting the cooling element 3 to be spirally distributed, the condensation area of ​​the condensation structure is greatly increased, improving the condensation effect while extending the time for the condensation surface of the condensation structure to reach saturation, thereby extending the regeneration cycle of the cryogenic cold trap and improving the working efficiency of the equipment.

[0029] In addition, such as Figure 2 , 3 As shown, a heating element 33 is provided on the cooling plate 3. The heating element 33 extends spirally along the cooling plate 3 and is located on the outer side of the spiral coil. The heating element 33 can be fastened to the cooling plate 3 by clips. Specifically, the heating element 33 is tightly attached to the cooling plate 3 and then fixed to the cooling plate 3 by clips. The clips and the cooling plate 3 can be fixed with screws. Alternatively, the cooling plate 3 has a mounting groove, and the heating element 33 can be installed in the mounting groove by embedding, which also allows the heating element 33 to be installed on the cooling plate 3.

[0030] The heating element 33 can be implemented using a heating wire. The heating wire extends from the housing and connects to the signal interface on the cold trap body 1. When prolonged use causes the cooling element 3 to reach saturation, the air inlet of the low-temperature cold trap is closed. The controller on the cold trap body 1 energizes the heating wire, which heats the cooling element 3, melting the ice condensed on it. The resulting water is discharged from the drain port. After the ice has completely melted, the drain port is closed, the air inlet is reopened, and the equipment is regenerated.

[0031] In this embodiment, extending the heating element 33 spirally along the cooling plate 3 can improve the heating effect of the heating element 33 on the cooling plate 3, thereby improving the regeneration efficiency of the low-temperature cold trap.

[0032] like Figure 4 As shown, at least a portion of the surface of the cooling plate 3 is bent to one side to form a reinforcing rib 35; the reinforcing rib 35 extends spirally along the cooling plate 3. Compared with the traditional circular cold plate, although the spiral cooling plate of this embodiment has a larger condensation area, its own strength is somewhat weakened. Therefore, by setting the surface of the cooling plate 3 to be curved, this embodiment can increase the strength of the cooling plate 3, make up for its weakened strength, and prevent water vapor from condensing on the cooling plate 3 and deforming it due to its heavy weight.

[0033] In the specific manufacturing process, reinforcing ribs 35 can be formed on the cooling plate 3 by stamping, and then the cooling plate 3 can be rolled up and installed on the cold head 2.

[0034] like Figure 3 As shown, the cooling element 3 includes a vertical portion 36 and a support portion 32 connected perpendicularly to each other, thus making the cross-section of the cooling element 3 "T" or "L" shaped. The cooling element 3 is connected to the cold head 2 through its support portion 32. In this embodiment, the cross-section of the cooling element 3 is set to a "T" shape. During installation, the support portion 32 is fixed to the cold head 2 with screws, which can be installed at intervals. The vertical portion 36 and the support portion 32 are integrally formed, which increases strength and facilitates temperature conduction.

[0035] In this embodiment, by providing a support part 32, the connection strength between the cooling chip 3 and the cold head 2 can be improved, and the contact area between the cooling chip 3 and the cold head 2 can also be increased, so that the temperature of the cold head 2 can be better conducted to the cooling chip 3. This allows the cooling chip 3 to increase its cooling area in a spiral distribution, while also improving the cooling speed of the cooling chip 3 to a certain extent.

[0036] Furthermore, the vertical part 36 and the support part 32 are connected by an arc 34, such as Figure 3 As shown, this can improve the connection strength between the vertical part 36 and the support part 32.

[0037] In this embodiment, the cooling element 3 is made of oxygen-free copper. The thermal conductivity of copper is about 400 W / m·K, while the thermal conductivity of stainless steel is 16-30 W / m·K. Using copper allows the temperature transmitted from the cold head to reach all points on the condensing surface more evenly, thereby ensuring that the condensing effect of the entire condensing surface reaches the optimal state.

[0038] In addition, the surface of the cooling chip 3 is plated with a nickel layer, which can effectively prevent oxygen-free copper from being corroded and oxidized by condensed gases and water vapor in the working environment.

[0039] It should be noted that all features disclosed in this specification, or all steps in all methods or processes disclosed, may be combined in any way, except for mutually exclusive features and / or steps.

[0040] Furthermore, the specific embodiments described above are exemplary. Those skilled in the art can devise various solutions inspired by the disclosure of this utility model, and these solutions all fall within the scope of this utility model and its protection. Those skilled in the art should understand that this utility model specification and its drawings are illustrative and not intended to limit the scope of the claims. The scope of protection of this utility model is defined by the claims and their equivalents.

Claims

1. A condensation structure for a low-temperature cold trap, disposed within the cold trap body (1), characterized in that, It includes a cooling chip (3) disposed on the cold head (2); the cooling chip (3) is spirally coiled along the radial direction of the cold trap body (1) to form multiple spiral coils, and a channel (31) is formed between two adjacent spiral coils.

2. The condensation structure of the low-temperature cold trap according to claim 1, characterized in that, A heating element (33) is provided on the cooling plate (3), the heating element (33) extends spirally along the cooling plate (3), and the heating element (33) is located on the outside of the spiral ring.

3. The condensation structure of the low-temperature cold trap according to claim 1, characterized in that, The plate surface of the cooling plate (3) is bent to one side at least partially to form a reinforcing rib (35); the reinforcing rib (35) extends spirally along the cooling plate (3).

4. The condensation structure of the low-temperature cold trap according to claim 1, characterized in that, The cooling element (3) includes a vertical part (36) and a support part (32) that are perpendicularly connected to each other, so that the cross-section of the cooling element (3) is "T" shaped or "L" shaped; the cooling element (3) is connected to the cold head (2) through its support part (32).

5. The condensation structure of the low-temperature cold trap according to claim 4, characterized in that, The vertical part (36) and the support part (32) are connected by an arc (34).

6. The condensation structure of the low-temperature cold trap according to claim 1, characterized in that, The cooling chip (3) is made of oxygen-free copper.

7. The condensation structure of the low-temperature cold trap according to claim 6, characterized in that, The surface of the cooling chip (3) is plated with a nickel layer.

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