A gas-liquid separation device and a photo mask substrate glue coating waste gas treatment system

Abstract

The utility model discloses a kind of gas-liquid separation device and photo mask substrate gluing waste gas treatment system, belong to photo mask substrate gluing field, photo mask substrate gluing waste gas treatment system includes gas-liquid separation device, activated carbon filter and air extraction device, gas-liquid separation device is metal material, including barrel, lid, air inlet pipe and air outlet pipe, barrel is provided with the accommodating cavity of upper end being open setting, lid is openable and covers the open end of accommodating cavity, air inlet pipe is worn in lid, the lower end of air inlet pipe is inserted into accommodating cavity, air outlet pipe is connected on the lateral wall of barrel, air outlet pipe communicates accommodating cavity, the lower end of air inlet pipe is located below the connecting place of air outlet pipe and barrel, activated carbon filter one end connects air outlet pipe, air extraction device connects the other end of activated carbon filter.In the application embodiment, waste liquid is deposited in the inner wall of air inlet pipe, then deposited to the bottom of accommodating cavity, remaining waste gas passes through the adsorption of activated carbon, and organic waste gas can be efficiently purified.

Description

Technical Field

[0001] This utility model relates to the field of photomask substrate coating technology, and in particular to a gas-liquid separation device and a photomask substrate coating waste gas treatment system. Background Technology

[0002] The photoresist coating process is widely used in current mask production, but it also brings the problem of fumes emitted during the coating process. These fumes contain large amounts of organic solvents, volatile organic compounds, and other harmful substances, which can seriously impact the environment and human health. Furthermore, in ultra-clean environments, the control of these fumes is even more stringent. Current technologies for treating photoresist coating fumes generally use activated carbon adsorption. However, activated carbon adsorption has problems: the organic solvents and volatile substances in the photoresist fumes are easily liquefied on the activated carbon filter, leading to wetting, clogging, and mold growth, thus reducing filtration efficiency. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a gas-liquid separation device and a waste gas treatment system for photomask substrate coating.

[0004] A gas-liquid separation device according to an embodiment of the present invention includes: The barrel body is made of metal, and the barrel body is provided with a receiving cavity with an open top. The cover is made of metal and can be opened to cover the open end of the receiving cavity; The air intake pipe is made of metal and passes through the cover, with its lower end extending into the accommodating cavity. The air outlet pipe, made of metal, is connected to the side wall of the barrel and connects to the accommodating cavity. The lower end of the air inlet pipe is located below the connection between the air outlet pipe and the barrel.

[0005] A gas-liquid separation device according to an embodiment of the present invention has at least the following beneficial effects: The bottom of the container is filled with water. A gas-liquid separator is placed under the COT (spin coating chamber) of the photoresist coating equipment. When the substrate is coated with photoresist, the exhaust device starts to extract the gas, drawing the waste gas generated by the photoresist into the gas-liquid separator. The gas-liquid separator is made of metal, which has high thermal conductivity and low material temperature. The overall length of the air inlet pipe is relatively long (passing through the cover and extending into the container), which facilitates the deposition of waste liquid on the inner wall of the air inlet pipe (photoresist waste gas and waste liquid mix at 23±1°C; below a certain temperature, the waste liquid will condense), and then deposits at the bottom of the container, making it less likely to cause blockage of the air outlet pipe. The photoresist waste liquid condenses inside the container, and some of the gas mixes with the aqueous solution at the bottom of the container to form waste liquid, while some of the gas liquefies within the device. After passing through the gas-liquid separator, the photoresist content in the waste gas is significantly reduced, achieving the goal of highly efficient purification of organic waste gas. By adding a gas-liquid separator, problems such as photoresist waste liquid accumulation in pipelines and high frequency of activated carbon filter replacement are solved. This reduces crystallization and condensation of photoresist exhaust gas within the pipeline, thus reducing replacement and management costs.

[0006] According to some embodiments of this utility model, the end of the air outlet pipe away from the barrel is inclined toward the bottom wall away from the accommodating cavity, the axis of the air inlet pipe is collinear with the axis of the barrel, and the axis of the air outlet pipe and the axis of the air inlet pipe are located in the same vertical plane and inclined relative to the axis of the air inlet pipe.

[0007] According to some embodiments of the present invention, a connecting ring is provided at the upper end of the barrel body, the inner ring of the connecting ring is connected to the barrel body, and the connecting ring is detachably connected to the cover body.

[0008] According to some embodiments of the present invention, the gas-liquid separation device further includes a sealing ring, which is disposed between the connecting ring and the cover.

[0009] According to some embodiments of this utility model, the upper end of the connecting ring is provided with an external thread, the cover is provided with a rim, the inner wall of the rim is provided with an internal thread, and the internal thread is adapted to and connected with the external thread.

[0010] According to some embodiments of the present invention, the thickness of the connecting ring gradually decreases along the direction away from the axis of the barrel body.

[0011] According to some embodiments of the present invention, a guide tube is provided inside the barrel, the guide tube is connected to the bottom wall of the accommodating cavity, the air inlet pipe extends into the guide tube, the upper end of the guide tube is located above the connection between the air outlet pipe and the barrel, and the upper end of the guide tube is spaced apart from the cover.

[0012] According to some embodiments of the present invention, the inner wall of the guide tube is spaced apart from the outer wall of the air inlet pipe, and the outer wall of the guide tube is spaced apart from the side wall of the accommodating cavity.

[0013] According to some embodiments of this utility model, the gas-liquid separation device is made of stainless steel.

[0014] A photomask substrate coating waste gas treatment system according to an embodiment of this application includes: The gas-liquid separation device; An activated carbon filter, one end of which is connected to the air outlet pipe via a pipeline; An air extraction device is connected to the other end of the activated carbon filter via a pipeline.

[0015] A photomask substrate coating waste gas treatment system according to an embodiment of the present invention has at least the following beneficial effects: Water is placed at the bottom of the container. A gas-liquid separator is installed under the COT (spin coating chamber) of the coating equipment. When the substrate is coated with photoresist, the exhaust device starts to extract the gas. The waste gas generated by the photoresist is drawn into the gas-liquid separator as the exhaust device is activated. The gas-liquid separator is made of metal, which has high thermal conductivity and low material temperature. The overall length of the air inlet pipe is relatively long (it passes through the cover and extends into the container), which facilitates the deposition of waste liquid on the inner wall of the air inlet pipe (the photoresist waste gas and waste liquid mix at 23±1°C. Below a certain temperature, the waste liquid will condense) and then deposit to the bottom of the container, which does not easily cause blockage of the air outlet pipe. The photoresist waste liquid condenses inside the container, and some of the gas will merge with the aqueous solution at the bottom of the container to form waste liquid. Some of the gas will liquefy inside the device. After passing through the gas-liquid separator, the photoresist content in the waste gas is greatly reduced. An activated carbon filter is installed at the tail end of the exhaust to adsorb the remaining waste gas, thereby achieving the purpose of efficient purification of organic waste gas. By adding a gas-liquid separation device, problems such as the accumulation of photoresist waste liquid in pipelines and the high frequency of activated carbon filter replacement were solved. This reduced the proportion of organic solvents in the photoresist waste gas, decreased the pressure on the activated carbon treatment system, and improved treatment efficiency. It also reduced crystallization and condensation of the photoresist waste gas within the pipelines, thus lowering replacement and management costs.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is a schematic diagram of the structure of a gas-liquid separation device according to an embodiment of the present invention; Figure 2 This is a cross-sectional view of a gas-liquid separation device according to an embodiment of the present invention; Figure 3 for Figure 2 Enlarged view of point A in the middle; Figure 4 This is a schematic diagram of the structure of the barrel and the gas outlet pipe of another gas-liquid separation device according to an embodiment of the present invention; Figure 5 This is a cross-sectional view of another gas-liquid separation device according to an embodiment of the present invention; Icon labels: 100. Barrel body; 110. Receiving cavity; 120. Connecting ring; 121. Sealing ring; 130. Flow guide tube; 200. Cover; 210. Edge; 300. Intake pipe; 400. Exhaust pipe. Detailed Implementation

[0018] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0019] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] Please see Figure 1 , Figure 2 and Figure 3 A gas-liquid separation device according to an embodiment of this utility model includes a barrel 100, a cover 200, an inlet pipe 300, and an outlet pipe 400. The barrel 100 is made of metal and has a receiving cavity 110 with an open upper end. The cover 200 is also made of metal and can be opened to cover the open end of the receiving cavity 110. The inlet pipe 300 is made of metal and passes through the cover 200, with its lower end extending into the receiving cavity 110. The outlet pipe 400 is made of metal and is connected to the side wall of the barrel 100, communicating with the receiving cavity 110. The lower end of the inlet pipe 300 is located below the connection between the outlet pipe 400 and the barrel 100.

[0022] Water is placed at the bottom of the accommodating cavity 110. A gas-liquid separator is installed under the COT (spin coating chamber) of the coating equipment. When the substrate is coated with photoresist, the exhaust device starts to extract the gas, and the waste gas generated by the photoresist is drawn into the gas-liquid separator as the exhaust device is turned on. The gas-liquid separator is made of metal, which has high thermal conductivity and low material temperature. The overall length of the inlet pipe 300 is relatively long (it passes through the cover 200 and extends into the accommodating cavity 110 at the lower end), which facilitates the deposition of waste liquid on the inner wall of the inlet pipe 300 (the photoresist waste gas and waste liquid are mixed at 23±1°C. Below a certain temperature, the waste liquid will condense) and then deposit at the bottom of the accommodating cavity 110, which is less likely to cause blockage of the outlet pipe 400. The photoresist waste liquid condenses inside the accommodating cavity 110, and some of the gas will merge with the aqueous solution at the bottom of the accommodating cavity 110 to form waste liquid. Some of the gas will liquefy inside the device. After passing through the gas-liquid separator, the photoresist content of the waste gas has been greatly reduced, achieving the purpose of efficient purification of organic waste gas. By adding a gas-liquid separation device, problems such as the accumulation of photoresist waste liquid in pipelines and the high frequency of activated carbon filter replacement were solved. This reduced crystallization and condensation of photoresist waste gas within the pipelines, thus lowering replacement and management costs.

[0023] In some embodiments, see Figure 1 , Figure 2 and Figure 3 The end of the vent pipe 400 away from the barrel 100 is inclined towards the bottom wall away from the receiving cavity 110. The axis of the inlet pipe 300 is collinear with the axis of the barrel 100. The axis of the vent pipe 400 and the axis of the inlet pipe 300 are located in the same vertical plane and are inclined relative to the axis of the inlet pipe 300. The vent pipe 400 is inclined upward, so some waste liquid can condense on the inner wall of the vent pipe 400 and then flow into the receiving cavity 110 along the inclined inner wall, which is less likely to cause blockage of the vent pipe 400.

[0024] In some embodiments, see Figure 1 , Figure 2 and Figure 3A connecting ring 120 is provided at the upper end of the barrel body 100. The inner ring of the connecting ring 120 is connected to the barrel body 100, and the connecting ring 120 is detachably connected to the lid 200. The connecting ring 120 enhances the strength of the upper part of the barrel body 100 and facilitates the detachable connection between the barrel body 100 and the lid 200.

[0025] In some embodiments, see Figure 1 , Figure 2 and Figure 3 The gas-liquid separation device also includes a sealing ring 121, which is located between the connecting ring 120 and the cover 200. By providing the sealing ring 121 between the connecting ring 120 and the cover 200, the airtightness of the accommodating cavity 110 can be ensured, preventing waste liquid leakage.

[0026] In some embodiments, see Figure 1 , Figure 2 and Figure 3 The connecting ring 120 has an external thread at its upper end, and the cover 200 has a surrounding edge 210 with an internal thread on its inner wall. The internal thread and the external thread are matched and connected. The connecting ring 120 and the cover 200 are threadedly connected, making disassembly and assembly convenient.

[0027] In some embodiments, see Figure 1 , Figure 2 and Figure 3 The thickness of the connecting ring 120 gradually decreases along the direction away from the axis of the barrel 100. The inner ring of the connecting ring 120 is thicker to ensure the structural stability of the barrel 100.

[0028] In some embodiments, see Figure 1 , Figure 4 and Figure 5 A guide tube 130 is installed inside the barrel 100. The guide tube 130 is connected to the bottom wall of the accommodating cavity 110. The air inlet pipe 300 extends into the guide tube 130. The upper end of the guide tube 130 is located above the connection between the air outlet pipe 400 and the barrel 100. The upper end of the guide tube 130 is spaced apart from the cover 200. The guide tube 130 extends the path of the waste liquid in the gas-liquid separator, allowing the waste liquid to condense and settle better inside the gas-liquid separator.

[0029] In some embodiments, see Figure 1 , Figure 4 and Figure 5The inner wall of the guide tube 130 is spaced apart from the outer wall of the air inlet pipe 300, and the outer wall of the guide tube 130 is spaced apart from the side wall of the accommodating cavity 110. The waste liquid enters along the air inlet pipe 300, rushes towards the bottom wall of the accommodating cavity 110, then flows upward along the gap between the air inlet pipe 300 and the guide tube 130, and then flows towards the air outlet pipe 400 along the gap between the guide tube 130 and the inner wall of the accommodating cavity 110. This can extend the path of the waste liquid in the gas-liquid separator, so that the waste liquid can better condense and deposit inside the gas-liquid separator.

[0030] In some embodiments, see Figure 1 , Figure 2 and Figure 3 The gas-liquid separator is made of stainless steel. Stainless steel has good thermal conductivity, low temperature, is not prone to rust, has a long service life, and is easy to clean.

[0031] A photomask substrate coating waste gas treatment system according to an embodiment of this application includes a gas-liquid separation device, an activated carbon filter, and an exhaust device. One end of the activated carbon filter is connected to an exhaust pipe 400 via a pipeline, and the exhaust device is connected to the other end of the activated carbon filter via a pipeline.

[0032] An activated carbon filter is installed at the tail end of the exhaust gas to treat the remaining exhaust gas. The activated carbon is 10mm×10mm×10mm honeycomb activated carbon and is replaced every three months.

[0033] During the coating process, the photoresist used has a viscosity of 2–5 mPa·s, a diluent content of over 90%, a coating volume of 0.5–2.5 mL, a coating disk rotation speed of 1500–3500 r / min, and an exhaust pressure of 300–500 Pa in the coating chamber.

[0034] The coating thickness of the photoresist (thin-film photoresist) is 300–600 nm.

[0035] The baking temperature of the hot plate is 90-130℃, and the baking time is 15-60 minutes.

[0036] The COT (spin coating chamber) consists of two parts: a top cover and a coating chamber. When applying adhesive, the top cover is closed, which changes the airflow. The size of the top cover is determined by the coating chamber. There is a central circle in the middle of the top cover. The diameter of the central circle is determined by the size of the substrate. The diameter of the central circle is generally 150-300mm.

[0037] A method for treating waste gas during the coating process of glass substrates includes the following steps: A gas-liquid separator is installed under the COT (spin coater) of the photoresist coating equipment. During substrate coating, the internal temperature and humidity control range of our machine is: temperature 23±1℃, humidity 45±3%. The waste gas generated by the photoresist is drawn into the gas-liquid separator as the exhaust system is activated. Exhaust flow is 300~500pa. Since the photoresist composition contains 95~97% diluent (PGMEA), the waste gas generated during coating is mostly diluent and a small amount of resin. As the exhaust system continuously extracts air, the waste gas containing liquid and gas passes through the gas-liquid separator. Inside this device, the photoresist waste liquid condenses, some gas mixes with the aqueous solution at the bottom to form waste liquid, and some gas liquefies within the device. After passing through the gas-liquid separator, the photoresist content in the waste gas is significantly reduced. An activated carbon filter is installed at the tail end of the exhaust to adsorb the remaining waste gas, thereby achieving efficient purification of the organic waste gas.

[0038] By adding a gas-liquid separation device, problems such as the accumulation of photoresist waste liquid in pipelines and the high frequency of activated carbon filter replacement were solved. This reduced the proportion of organic solvents in the photoresist waste gas, decreased the pressure on the activated carbon treatment system, and improved treatment efficiency. It also reduced crystallization and condensation of the photoresist waste gas within the pipelines, thus lowering replacement and management costs.

[0039] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0040] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A gas-liquid separation device, characterized in that, include: The barrel body is made of metal, and the barrel body is provided with a receiving cavity with an open top. The cover is made of metal and can be opened to cover the open end of the receiving cavity; The air intake pipe is made of metal and passes through the cover, with its lower end extending into the accommodating cavity. The air outlet pipe, made of metal, is connected to the side wall of the barrel and connects to the accommodating cavity. The lower end of the air inlet pipe is located below the connection between the air outlet pipe and the barrel.

2. The gas-liquid separation device according to claim 1, characterized in that, The end of the air outlet pipe away from the barrel is inclined toward the bottom wall away from the accommodating cavity. The axis of the air inlet pipe is collinear with the axis of the barrel. The axis of the air outlet pipe and the axis of the air inlet pipe are located in the same vertical plane and are inclined relative to the axis of the air inlet pipe.

3. The gas-liquid separation device according to claim 1, characterized in that, A connecting ring is provided at the upper end of the barrel body, and the inner ring of the connecting ring is connected to the barrel body. The connecting ring is detachably connected to the cover body.

4. The gas-liquid separation device according to claim 3, characterized in that, The gas-liquid separation device also includes a sealing ring, which is disposed between the connecting ring and the cover.

5. A gas-liquid separation device according to claim 3, characterized in that, The upper end of the connecting ring is provided with an external thread, the cover is provided with a rim, the inner wall of the rim is provided with an internal thread, and the internal thread is adapted to and connected with the external thread.

6. A gas-liquid separation device according to claim 3, characterized in that, The thickness of the connecting ring gradually decreases along the direction away from the axis of the barrel.

7. A gas-liquid separation device according to claim 1, characterized in that, A guide tube is provided inside the barrel, and the guide tube is connected to the bottom wall of the accommodating cavity. The air inlet pipe extends into the guide tube, and the upper end of the guide tube is located above the connection between the air outlet pipe and the barrel. The upper end of the guide tube is spaced apart from the cover.

8. A gas-liquid separation device according to claim 7, characterized in that, The inner wall of the guide tube is spaced apart from the outer wall of the air inlet pipe, and the outer wall of the guide tube is spaced apart from the side wall of the accommodating cavity.

9. A gas-liquid separation device according to claim 1, characterized in that, The gas-liquid separation device is made of stainless steel.

10. A system for treating exhaust gas from photomask substrate coating, characterized in that, include: The gas-liquid separation device as described in any one of claims 1-9; An activated carbon filter, one end of which is connected to the air outlet pipe via a pipeline; An air extraction device is connected to the other end of the activated carbon filter via a pipeline.

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