A semiconductor appearance inspection apparatus
Patent Information
- Application Number
- CN202521705728.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-12
- Publication Date
- 2026-10-13
- Estimated Expiration
- 2035-08-12
AI Technical Summary
[0002]半导体外观检测装置是一种用于检测芯片表面缺陷的核心设备，其自动化检测流程可提升半导体制造良品率，满足5G、AI芯片等先进制程的严苛品控需求，推动行业智能化升级，现有的半导体外观检测装置一般利用光学成像将外观或尺寸不符合要求的物料检测出来，现有的装置在检测时一般由镜头直接检测，但这种方式由于外界光源可能会被遮蔽或快速变换，导致检测时检测镜头会受到外界光源的影响无法准确检测瑕疵，从而影响检测的精准性，因此，需对上述提出的问题加以改进处理
[0011]与现有技术相比，本实用新型的有益效果是：在本实用新型中，通过遮光箱与补光灯的配合，便于防止外界光源的干扰，便于提高装置的外观检测精准性，通过真空泵与第一电机和第三电机的配合，便于调整吸嘴的位置，便于将瑕疵物料自动分离，通过限位刷与传送带的配合，便于阻止重叠的物料进入，便于保证物料外观检测的准确，通过玻璃转盘与猫眼镜头的配合，便于对物料的外观全面检测，便于防止瑕疵物料的通过，该装置提高了物料检测的效率，节省了人工的体力。
Smart Images
Figure CN224846363U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of appearance inspection tools, and in particular to a semiconductor appearance inspection device. Background Technology
[0002] Semiconductor appearance inspection equipment is a core device used to detect defects on the surface of chips. Its automated inspection process can improve the yield rate of semiconductor manufacturing, meet the stringent quality control requirements of advanced processes such as 5G and AI chips, and promote the intelligent upgrading of the industry. Existing semiconductor appearance inspection equipment generally uses optical imaging to detect materials that do not meet the requirements in appearance or size. Existing equipment generally uses a lens to directly detect defects during inspection. However, this method is affected by the possibility that the external light source may be blocked or change rapidly, which will cause the detection lens to be affected by the external light source and fail to accurately detect defects, thus affecting the accuracy of the inspection. Therefore, the above-mentioned problems need to be improved. Utility Model Content
[0003] The purpose of this invention is to address the shortcomings of existing technologies by proposing a semiconductor appearance inspection device.
[0004] To achieve the above objectives, the present invention adopts the following technical solution: a semiconductor appearance inspection device, comprising a base, an inclined conveyor belt and a support rod respectively installed at both ends of the base, and a housing installed on the top surface of the base, the housing having a separation port and a feed port at both ends, and a discharge port on one side, the support rod having an L-shaped cross-section and its bottom fixed to one end of the base, baffles fixed to the base being installed on both sides of the conveyor belt, and the two ends of the conveyor belt being sleeved on a rotating shaft, the rotating shaft being rotatably connected to the baffles, a second motor being fixed to one end of one of the rotating shafts, and a support frame fixed to the baffles being installed at the lower end of the second motor.
[0005] Preferably, a limiting brush is installed above the conveyor belt, with both ends of the limiting brush fixed to the baffle, and an inclined arc-shaped guide plate is installed at one end of the conveyor belt. The guide plate has a conveyor belt and a glass turntable at both ends, and both sides of the guide plate are fixed to the baffle.
[0006] Preferably, the glass turntable has a T-shaped cross-section, with its lower end rotatably connected to the base, and an arc-shaped limiting plate sleeved on its outer side. The outer side of the arc-shaped limiting plate is provided with a feeding groove, a discharging groove, and a separation groove. An annular baffle is fixedly connected to the middle of the glass turntable, and a fourth motor is installed below the glass turntable. A light-shielding box is installed on one side of the glass turntable, and both ends of the light-shielding box are fixedly connected to the arc-shaped baffle.
[0007] Preferably, the fourth motor drive shaft is fixedly connected to a drive gear, the drive gear is externally meshed with a driven gear, the driven gear is fixedly connected to the lower end of the glass turntable, and the lower end of the glass turntable is fitted with an annular protective shell on the outside of the fourth motor.
[0008] Preferably, the light-shielding box is arc-shaped, and a mounting groove is horizontally opened on one side of the middle part of the light-shielding box. A glass turntable is installed in the mounting groove. A cat's eye lens, a supplementary light and a line laser rangefinder are respectively installed on the inner top surface of both ends of the light-shielding box. The supplementary light is ring-shaped, and the cat's eye lens is respectively installed on one end of the inner bottom surface and one end of the inner top surface of the light-shielding box.
[0009] Preferably, a first motor is installed at one end of the support rod, a support frame is installed below the first motor and fixed to the support rod, and a first mounting groove is opened at the upper end of the support rod. A first screw is rotatably connected in the first mounting groove, a connecting block is threaded to the middle of the first screw, the connecting block has an L-shaped cross section, a second mounting groove is opened at one end, a third motor is fixed to the top surface of the connecting block, and a vacuum pump is installed on one side of the connecting block.
[0010] Preferably, the bottom of the vacuum pump is equipped with a support frame fixed to the connecting block, a second screw is rotatably connected in the second mounting groove, one end of the second screw is fixed to the third motor, a slider is threaded onto the second screw, a connecting pipe is installed in the middle of the slider, a hose and a telescopic pipe are respectively connected to both ends of the connecting pipe, the two ends of the hose are respectively fixed to the vacuum pump intake port and the connecting pipe, the telescopic pipe is composed of two slidingly snapped air pipes, a spring is sleeved on the outside of the telescopic pipe, and a suction nozzle is fixed to the lower end of the telescopic pipe.
[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: In this utility model, the combination of the light-shielding box and the supplementary light helps to prevent interference from external light sources and improve the accuracy of the appearance inspection of the device. The combination of the vacuum pump and the first and third motors facilitates the adjustment of the nozzle position and the automatic separation of defective materials. The combination of the limiting brush and the conveyor belt helps to prevent overlapping materials from entering and ensures the accuracy of the appearance inspection of materials. The combination of the glass turntable and the cat's eye lens facilitates the comprehensive inspection of the appearance of materials and prevents defective materials from passing through. This device improves the efficiency of material inspection and saves manual labor. Attached Figure Description
[0012] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings: Figure 1 This is a three-dimensional schematic diagram of the overall structure proposed in this utility model; Figure 2 This is a three-dimensional schematic diagram of a portion of the structure proposed in this utility model; Figure 3 This is a schematic diagram of a portion of the structure proposed in this utility model from another perspective; Figure 4 This is a three-dimensional schematic diagram of the separation structure proposed in this utility model; Figure 5 This is a cross-sectional view of the overall structure proposed in this utility model; Figure 6 The present utility model proposes Figure 4 Enlarged schematic diagram of part A in the middle.
[0013] The components in the diagram are numbered as follows: 1. Base; 2. Outer shell; 3. Support rod; 4. First motor; 5. Second motor; 6. Conveyor belt; 7. Limiting brush; 8. Limiting plate; 9. Light shield; 10. Glass turntable; 11. Third motor; 12. Vacuum pump; 13. Telescopic tube; 14. First screw; 15. Second screw; 16. Fill light; 17. Cat's eye lens; 18. Line laser rangefinder; 19. Fourth motor. Detailed Implementation
[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0015] Example: See Figure 1-5This utility model discloses a semiconductor appearance inspection device, comprising a base 1 for easy connection of various components; an inclined conveyor belt 6 and a support rod 3 are respectively installed at both ends of the base 1, and a housing 2 is installed on the top surface of the base 1. The housing 2 has a separation port and a feed port at both ends, and a discharge port on one side. The support rod 3 has an L-shaped cross-section and is fixedly connected to one end of the base 1 at its bottom. Baffles fixedly connected to the base 1 are installed on both sides of the conveyor belt 6, and both ends of the conveyor belt 6 are sleeved on a rotating shaft, which is rotatably connected to the baffles. A second motor 5 is fixedly connected to one end of one rotating shaft, and a support frame fixedly connected to the baffle is installed at the lower end of the second motor 5. A limiting brush 7 is installed above the conveyor belt 6 to facilitate brushing off overlapping materials. The limiting brush 7 is fixedly connected to the baffles at both ends, and an inclined arc-shaped guide plate is installed at one end of the conveyor belt 6. The guide plate has the conveyor belt 6 and a glass plate respectively at both ends. The glass turntable 10 has guide plates fixed to baffles on both sides. The glass turntable 10 has a T-shaped cross-section, which facilitates the rotation of the glass turntable 10 by the fourth motor 19. The lower end is rotatably connected to the base 1, and an arc-shaped limiting plate 8 is sleeved on the outside. The outer side of the arc-shaped limiting plate 8 is provided with a feeding groove, a discharging groove and a separation groove, which facilitates the separation of materials. An annular baffle is fixed to the middle of the glass turntable 10, and the fourth motor 19 is installed below the glass turntable 10. A light shield 9 is installed on one side of the glass turntable 10 to prevent material detection from being disturbed by the outside. The two ends of the light shield 9 are fixed to the arc-shaped baffle. A drive gear is fixed to the drive shaft of the fourth motor 19. A driven gear meshes with the drive gear. The driven gear is fixed to the lower end of the glass turntable 10. An annular protective shell is sleeved on the lower end of the glass turntable 10 and the outer side of the fourth motor 19 to protect the fourth motor 19.
[0016] In this utility model, the light-shielding box 9 is generally arc-shaped. A horizontal mounting groove is provided on one side of the middle of the light-shielding box 9, and a glass turntable 10 is installed in the mounting groove. A cat's eye lens 17, a supplementary light 16, and a line laser rangefinder 18 are respectively installed on the inner top surfaces of both ends of the light-shielding box 9. The supplementary light 16 is ring-shaped to facilitate more accurate detection. The model of the cat's eye lens 17 is GY-51962A14, and the cat's eye lens 17 is installed on one end of the inner bottom surface and one end of the inner top surface of the light-shielding box 9. The cat's eye lens 17 is electrically connected to an external display device. A first motor 4 is installed at one end of the support rod 3, and a support frame fixed to the support rod 3 is installed below the first motor 4. A first mounting groove is provided at the upper end of the support rod 3, and a first screw 14 is laterally rotatably connected in the first mounting groove. The first screw 14 has a thread in the middle. A connecting block with an L-shaped cross-section is connected to the nozzle. A second mounting groove is provided at one end of the connecting block, and a third motor 11 is fixedly connected to the top surface of the connecting block to facilitate adjustment of the nozzle's horizontal position. A vacuum pump 12 is installed on one side of the connecting block. A support frame fixedly connected to the connecting block is installed at the bottom of the vacuum pump 12. A second screw 15 is rotatably connected in the second mounting groove. One end of the second screw 15 is fixedly connected to the third motor 11. A slider is threaded onto the second screw 15. A connecting pipe is installed in the middle of the slider. A hose and a telescopic pipe 13 are connected to both ends of the connecting pipe, respectively. The two ends of the hose are fixedly connected to the suction port of the vacuum pump 12 and the connecting pipe, respectively, to facilitate the nozzle's suction of materials. The telescopic pipe 13 consists of two slidingly snapped air pipes. A spring is sleeved on the outside of the telescopic pipe 13, and a nozzle is fixedly connected to the lower end of the telescopic pipe 13 to prevent rigid collisions.
[0017] Working Principle: When using this utility model, firstly, all electrical equipment is powered on, the cat's eye lens 17 is electrically connected to the external display device, the material is placed on the conveyor belt 6, the second motor 5 is started, and the overlapping material is brushed off by the limiting brush 7. When a single material enters the glass turntable 10, the fourth motor 19 is started, driving the glass turntable 10 to rotate, thereby allowing the material to enter the light shield 9. The cat's eye lens 17 is started to detect scratches on the appearance of the material, and the supplementary light 16 is turned on for supplementary lighting. After the material passes through the cat's eye lens 17, the linear laser rangefinder 18 is started to detect the size of the material. At this time, if there is material that does not meet the appearance or size requirements, the first motor 4 and the third motor 11 are started to adjust the position of the suction nozzle so that the suction nozzle can align with the non-compliant material. At this time, the vacuum pump 12 is started to make the suction nozzle suck up the material, and then the material is thrown out from the waste port. When the qualified material rotates to the discharge port, the worker can take out the material. At this time, the appearance inspection of the material is completed. After all the materials have been inspected, the device can be reset.
[0018] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A semiconductor appearance inspection device, comprising a base (1), characterized in that: The base (1) is equipped with an inclined conveyor belt (6) and a support rod (3) at both ends, and the base (1) is equipped with a shell (2) on the top surface. The shell (2) has a separation port and a feed port at both ends and a discharge port on one side. The support rod (3) has an L-shaped cross section and is fixed to one end of the base (1) at the bottom. The conveyor belt (6) is equipped with baffles fixed to the base (1) on both sides, and the two ends of the conveyor belt (6) are sleeved on the rotating shaft. The rotating shaft is rotatably connected to the baffle. A second motor (5) is fixed to one end of the rotating shaft. A support frame fixed to the baffle is installed at the lower end of the second motor (5). A limiting brush (7) is installed above the conveyor belt (6). The two ends of the limiting brush (7) are fixed to the baffle. An inclined arc-shaped guide plate is installed at one end of the conveyor belt (6). The two ends of the guide plate are respectively provided with the conveyor belt (6) and the glass turntable (10). The two sides of the guide plate are fixed to the baffle. The glass turntable (10) has a T-shaped cross section, and its lower end is rotatably connected to the base (1). An arc-shaped limiting plate (8) is sleeved on the outside. The arc-shaped limiting plate (8) is provided with a feeding groove, a discharging groove and a separation groove on its outer side. An annular baffle is fixedly connected to the middle of the glass turntable (10). A fourth motor (19) is installed below the glass turntable (10). A light-shielding box (9) is installed on one side of the glass turntable (10). The two ends of the light-shielding box (9) are fixedly connected to the arc-shaped baffle. The light shield (9) is arc-shaped. Cat's eye lens (17), supplementary light (16) and line laser rangefinder (18) are installed at both ends of the inner top surface of the light shield (9). The cat's eye lens (17) is installed at one end of the inner bottom surface and one end of the inner top surface of the light shield (9).
2. The semiconductor appearance inspection device according to claim 1, characterized in that: The fourth motor (19) has a drive gear fixedly connected to its drive shaft. The drive gear is externally meshed with a driven gear. The driven gear is fixedly connected to the lower end of the glass turntable (10). The lower end of the glass turntable (10) is fitted with an annular protective shell on the outside of the fourth motor (19).
3. The semiconductor appearance inspection device according to claim 1, characterized in that: A first motor (4) is installed at one end of the support rod (3). A support frame is fixed to the support rod (3) below the first motor (4). A first mounting groove is opened at the upper end of the support rod (3). A first screw (14) is rotatably connected in the first mounting groove. A connecting block is threaded in the middle of the first screw (14). The connecting block has an L-shaped cross section. A second mounting groove is opened at one end. A third motor (11) is fixed to the top surface of the connecting block. A vacuum pump (12) is installed on one side of the connecting block.
4. The semiconductor appearance inspection device according to claim 3, characterized in that: The vacuum pump (12) has a support frame fixed to the connecting block at the bottom. A second screw (15) is rotatably connected in the second mounting slot. One end of the second screw (15) is fixed to the third motor (11). A slider is threaded onto the second screw (15). A connecting pipe is installed in the middle of the slider. A hose and a telescopic pipe (13) are connected to both ends of the connecting pipe. Both ends of the hose are fixed to the air inlet of the vacuum pump (12) and the connecting pipe. The telescopic pipe (13) is composed of two slidingly clamped air pipes. A spring is sleeved on the outside of the telescopic pipe (13), and a suction nozzle is fixed to the lower end of the telescopic pipe (13).