A flushing device for etching machine water-cooled disc

Abstract

The utility model discloses a kind of flushing devices for etching machine water cooling disc, middle interval is provided in the inside of rack, flushing cavity is provided in the inside of rack above middle interval, water-collecting cavity is provided in the inside of rack below middle interval, water tank is opened in middle interval, water tank upper end is provided with orifice plate, orifice plate upper surface is provided with several flushing pipes, flushing pipe upper surface is all provided with several nozzles, water tank bottom is provided with sewer pipe, water-collecting cavity inside is provided with water receiving pool, sewer pipe is located in the just above water receiving pool, rack upper surface is provided with hydraulic cylinder, the piston rod of hydraulic cylinder passes through rack top and is connected with lifting plate, cavity is opened in the inside of lifting plate, recess is opened in the inside wall of both sides and rear side of cavity of lifting plate, lifting plate is movably arranged in the just above flushing pipe and nozzle, the utility model structure is reasonable, cleaning fluid can be sprayed to the water channel of etching machine water cooling disc by nozzle, ensure cleaning effect, and because of gravity debris more easily separate from etching machine water cooling disc.

Description

Technical Field

[0001] This utility model relates to the technical field of etching machine water cooling plate cleaning equipment, specifically a rinsing device for etching machine water cooling plates. Background Technology

[0002] Etching machine water-cooled trays, also commonly known as electrostatic chucks or temperature-controlled chucks, are devices used to hold silicon wafers or PCB substrates within the reaction chamber of an etching machine. After processing, the etching machine water-cooled trays must be cleaned to remove processing residues, such as metal shavings, and to prevent these shavings from remaining in the water channels.

[0003] Currently, after the etching machine's water-cooled plate is processed, it is moved to the cleaning area with the water channels facing upwards, and then manually cleaned using a cleaning gun. However, this method may still leave debris in the water channels, and it also increases labor costs. Therefore, there is an urgent need for an improved technology to solve this problem in the existing technology. Summary of the Invention

[0004] The purpose of this invention is to provide a rinsing device for the water-cooled plate of an etching machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a rinsing device for a water-cooled plate of an etching machine, comprising a frame, a middle partition, rinsing pipes, connecting pipes, nozzles, a hydraulic cylinder, a lifting plate, an upper small door, and a lower small door. A middle partition is located in the middle of the frame. A rinsing chamber is located above the middle partition inside the frame. A water collection chamber is located below the middle partition inside the frame. A water tank is formed in the middle partition. A perforated plate is located at the upper end of the water tank. Several rinsing pipes are arranged on the upper surface of the perforated plate. Several nozzles are arranged on the upper surface of each rinsing pipe. All rinsing pipes are connected to the connecting pipe. The end of the connecting pipe away from the rinsing pipe passes through the side wall of the frame and connects to a water pipe connector. A drain pipe is located at the bottom of the water tank. A water receiving pool is located inside the water collection chamber. The drain pipe... Located directly above the water receiving pool, the pool contains a frame supported by a boss. A filter screen is installed inside the frame. A water outlet is located on one side of the bottom of the water receiving pool, and a sleeve connector is installed at the outlet. The sleeve connector passes through the side wall of the frame. A hydraulic cylinder is installed on the upper surface of the frame. The piston rod of the hydraulic cylinder passes through the top of the frame and is connected to a lifting plate. The lifting plate has a cavity inside, and grooves are provided on the inner walls of both sides and the rear side of the cavity. The bottom of the cavity is open, and the front side of the lifting plate is open. The lifting plate is movably positioned directly above the flushing pipe and nozzle. An upper small door is hinged to one side of the frame at the flushing chamber, and a lower small door is hinged to one side of the frame at the water collection chamber. Both the upper and lower small doors are equipped with viewing glass.

[0006] Preferably, the present invention provides a rinsing device for a water-cooled plate of an etching machine, wherein a plurality of guide rods are connected to the upper surface of the lifting plate, and a guide sleeve is provided at the top of the frame, wherein the guide rods and the guide sleeves correspond one-to-one and guide each other.

[0007] Preferably, the present invention provides a rinsing device for a water-cooled plate of an etching machine, wherein a slot is provided on the front side of the frame and on the periphery of the rinsing chamber, a first magnetic strip is provided in the slot, a plurality of second magnetic strips are provided on the inner surface of the upper small door, the second magnetic strips correspond to and cooperate with the first magnetic strips, and a handle is provided on the outer surface of the upper small door.

[0008] Preferably, the present invention provides a rinsing device for a water-cooled plate of an etching machine, wherein the lower small door is equipped with a rotary door lock.

[0009] Preferably, the present invention provides a rinsing device for a water-cooled plate of an etching machine, wherein the perforated plate is densely covered with through holes, and the horizontal height of the perforated plate is lower than the horizontal height of the upper surface of the intermediate partition table.

[0010] Preferably, the present invention provides a rinsing device for a water-cooled plate of an etching machine, wherein the rinsing pipe is mounted on the upper surface of the perforated plate by means of a fixing member.

[0011] Preferably, the present invention provides a rinsing device for a water-cooled plate of an etching machine, wherein the bottom of the frame is provided with several supporting feet.

[0012] Preferably, the present invention provides a rinsing device for a water cooling plate of an etching machine, wherein the water pipe joint is connected to a water pump via a pipe.

[0013] Compared with the prior art, the beneficial effects of this utility model are: (1) The machine frame is divided into a rinsing chamber and a water collection chamber. The upper end of the rinsing chamber is equipped with a lifting plate through a hydraulic cylinder. The lifting plate has grooves on both sides and the rear inner wall of the cavity, which can support the sides and rear of the etching machine water cooling plate in the grooves. The middle partition is equipped with a perforated plate above the water tank. The upper surface of the perforated plate is equipped with a support rod rinsing pipe. The upper surface of the rinsing pipe is equipped with several nozzles. The cleaning liquid can be sprayed to the water channel of the etching machine water cooling plate through the nozzles to ensure the cleaning effect. Furthermore, due to gravity, the debris is more likely to detach from the etching machine water cooling plate, ensuring that the subsequent welding process will not be affected by the debris in the water channel or on the surface.

[0014] (2) No manual rinsing is required, which saves labor costs compared to manual rinsing.

[0015] (3) The lifting plate can be raised and lowered by the hydraulic cylinder, so the distance between the water cooling plate of the etching machine and the nozzle can be adjusted during rinsing, greatly improving flexibility.

[0016] (4) Both the upper and lower small doors are equipped with viewing glass to facilitate observation of the working status. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 For the appendix Figure 1 Enlarged structural diagram of point A in the middle; Figure 3 This is a schematic diagram of the appearance and structure of this utility model; Figure 4 This is a schematic diagram of the structure of the present invention located at the perforated plate; Figure 5 This is a schematic diagram of the lifting platform structure viewed from below.

[0018] In the diagram: 1. Frame; 2. Middle partition; 3. Flushing pipe; 4. Connecting pipe; 5. Nozzle; 6. Hydraulic cylinder; 7. Lifting plate; 8. Upper small door; 9. Lower small door; 10. Flushing chamber; 11. Water collection chamber; 12. Water tank; 13. Orifice plate; 14. Water pipe connector; 15. Drain pipe; 16. Water receiving pool; 17. Boss; 18. Frame; 19. Filter screen; 20. Water outlet; 21. Sleeve connector; 22. Cavity; 23. Groove; 24. Viewing glass; 25. Guide rod; 26. First magnetic strip; 27. Second magnetic strip; 28. Handle; 29. ​​Rotary door lock; 30. Fixing component; 31. Support leg; 32. Water pump. Detailed Implementation

[0019] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model. It should be noted that in the description of this utility model, the terms "inner", "outer", "upper", "lower", "both sides", "one end", "the other end", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0020] Please see Figure 1-5This utility model provides a technical solution: a rinsing device for a water-cooled plate of an etching machine, including a frame 1, a middle partition 2, a rinsing pipe 3, a connecting pipe 4, a nozzle 5, a hydraulic cylinder 6, a lifting plate 7, an upper small door 8, and a lower small door 9. The bottom of the frame 1 is provided with several supporting feet 31 to achieve overall lifting and support. A middle partition 2 is located in the middle position inside the frame 1. A rinsing chamber 10 is located above the middle partition 2 inside the frame 1. A water collection chamber 11 is located below the middle partition 2 inside the frame 1. A water tank 12 is formed in the middle partition 2, and a perforated plate 13 is provided at the upper end of the water tank 12. The orifice plate 13 has numerous through holes, and its horizontal height is lower than that of the upper surface of the intermediate partition 2 to prevent cleaning fluid from flowing from the orifice plate 13 onto the intermediate partition 2. Several flushing pipes 3 are installed on the upper surface of the orifice plate 13, and are fixed to the upper surface of the orifice plate 13 by fasteners 30. Several nozzles 5 are installed on the upper surface of each flushing pipe 3. All flushing pipes 3 are connected to connecting pipes 4. The end of the connecting pipe 4 away from the flushing pipes 3 passes through the side wall of the frame 1 and connects to the water pipe connector 14. A drain pipe 15 is installed at the bottom of the water tank 12, and a water receiving pool 16 is installed inside the water collection chamber 11. The drain pipe 15 is located directly above the water receiving tank 16. Inside the water receiving tank 16, a frame 18 is supported by a boss 17. A filter screen 19 is installed inside the frame 18. A water outlet 20 is provided on one side of the bottom of the water receiving tank 16. The water outlet 20 is equipped with a sleeve connector 21, which passes through the side wall of the frame 1. A hydraulic cylinder 6 is installed on the upper surface of the frame 1. The piston rod of the hydraulic cylinder 6 passes through the top of the frame 1 and is connected to a lifting plate 7. Several guide rods 25 are also connected to the upper surface of the lifting plate 7. A guide sleeve is provided at the top of the frame 1. The guide rods 25 correspond one-to-one with the guide sleeve and guide each other. The lifting is ensured by the cooperation of the guide rods 25. The stability of the lifting plate 7 during lifting is ensured by the following: the lifting plate 7 has a cavity 22 inside, and grooves 23 are provided on both sides and the rear inner wall of the lifting plate 7. The bottom of the lifting plate 7 in the cavity 22 is an open structure, and the front side of the lifting plate 7 is an open opening. The lifting plate 7 is movably positioned directly above the flushing pipe 3 and the nozzle 5. An upper small door 8 is hinged on one side of the frame 1 at the flushing chamber 10, and a lower small door 9 is hinged on one side of the frame 1 at the water collection chamber 11. The lower small door 9 is equipped with a rotating door lock 29 to facilitate closing and opening the lower small door 9. Both the upper small door 8 and the lower small door 9 are equipped with viewing glass 24. A slot is provided on the front side of the frame 1 and on the periphery of the rinsing chamber 10. A first magnetic strip 26 is provided in the slot. Several second magnetic strips 27 are provided on the inner surface of the upper small door 8. The second magnetic strips 27 correspond to and cooperate with the first magnetic strips 26. A handle 28 is provided on the outer surface of the upper small door 8. The upper small door 8 is tightly fitted with the frame 1 by magnetic strips to prevent water leakage during rinsing. The water pipe connector 14 is connected to the water pump 32 through a pipe, and the water pump 32 is used to pump the cleaning fluid into the flushing pipe 3 and spray it out from each nozzle 5.

[0021] Working method and operating principle: First, place the frame 18 with filter screen 19 into the water receiving tank 16 and support it on the boss 17. Then, place the water receiving tank 16 into the water collection chamber 11. Pass the sleeve connector 21 through the side wall of the frame 1 and connect it to the water outlet 20 of the water receiving tank 16. Connect the outer end of the sleeve connector 21 to the external drainage pipe. Install the connecting pipe 4 and the flushing pipe 3 on the upper surface of the orifice plate 13 through the connector. Then, install several nozzles 5 on the upper surface of the flushing pipe 3 through the connector. Connect one end of the connecting pipe 4 to the inner end of the water pipe connector 14. Finally, connect the water pipe connector 14 to the high-pressure water pump 32 through the pipe. Ready for use. During operation, the upper small door 8 is opened, the etching machine water cooling plate is placed into the rinsing chamber 10 and inserted into the cavity 22 of the lifting plate 7, with the water channel of the etching machine water cooling plate facing downwards. The sides and rear of the etching machine water cooling plate are supported in the groove 23. The upper small door 8 is closed by the cooperation of the first magnetic strip 26 and the second magnetic strip 27. The hydraulic cylinder 6 drives the lifting plate 7 and the etching machine water cooling plate to descend and pass through the nozzle 5. The water pump 32 is started. The water pump 32 sends the cleaning fluid from the connecting pipe 4 into each rinsing pipe 3. The cleaning fluid is rinsed through the nozzle 5 and flows from the water tank 12 and the drain pipe 15 into the water receiving pool 16, and is discharged from the outlet 20 and the external pipe. The debris remains on the filter screen 19. This utility model has a reasonable structure. The frame 1 is divided into a rinsing chamber 10 and a water collection chamber 11. The upper end of the rinsing chamber 10 is equipped with a lifting plate 7 via a hydraulic cylinder 6. The lifting plate 7 has grooves 23 on both sides and the rear inner wall of the cavity 22, which can support the sides and rear of the etching machine water cooling plate in the grooves 23. The middle partition 2 is located above the water tank 12 and is equipped with a perforated plate 13. The upper surface of the perforated plate 13 is equipped with a support rod rinsing pipe 3, and the upper surface of the rinsing pipe 3 is equipped with several nozzles 5. The cleaning liquid can be sprayed onto the water channel of the etching machine water cooling plate through the nozzles 5 to ensure the cleaning effect. Due to gravity, the debris is more easily removed from the etching machine water cooling plate, ensuring that the subsequent welding process will not be affected by debris in the water channel or on the surface. No manual rinsing is required, which saves labor costs compared to manual rinsing. The lifting plate 7 can be raised and lowered by the hydraulic cylinder 6, so the distance between the etching machine water cooling plate and the nozzles 5 can be adjusted during rinsing, which greatly improves flexibility. The upper small door 8 and the lower small door 9 are equipped with viewing glass 24 for easy observation of the working status.

[0022] Any aspects of this utility model not described in detail are well-known technologies to those skilled in the art.

[0023] Finally, it should be noted that the above specific embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although this utility model has been described in detail with reference to the embodiments, those skilled in the art should understand that modifications and equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications and substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A rinsing device for a water-cooled plate of an etching machine, characterized in that: The system includes a frame (1), a middle partition (2), a flushing pipe (3), a connecting pipe (4), a nozzle (5), a hydraulic cylinder (6), a lifting plate (7), an upper small door (8), and a lower small door (9). The middle partition (2) is located in the middle of the frame (1). A flushing chamber (10) is located above the middle partition (2) inside the frame (1). A water collection chamber (11) is located below the middle partition (2) inside the frame (1). A water tank (12) is provided on the middle partition (2), and a perforated plate is provided at the upper end of the water tank (12). 13), the upper surface of the orifice plate (13) is provided with several flushing pipes (3), and the upper surface of each flushing pipe (3) is provided with several nozzles (5). All the flushing pipes (3) are connected to the connecting pipe (4). The end of the connecting pipe (4) away from the flushing pipe (3) passes through the side wall of the frame (1) and is connected to the water pipe connector (14). The bottom of the water tank (12) is provided with a drain pipe (15). The inside of the water collection chamber (11) is provided with a water receiving pool (16). The drain pipe (15) is located directly above the water receiving pool (16). The frame (18) is supported by a boss (17) inside the water tank (16). A filter screen (19) is provided on the inner side of the frame (18). A water outlet (20) is provided on one side of the bottom of the water tank (16). A sleeve joint (21) is provided on the water outlet (20). The sleeve joint (21) passes through the side wall of the frame (1). A hydraulic cylinder (6) is provided on the upper surface of the frame (1). The piston rod of the hydraulic cylinder (6) passes through the top of the frame (1) and is connected to a lifting plate (7). A cavity (22) is opened inside the lifting plate (7). Grooves (23) are provided on both sides and the inner wall of the rear side of the cavity (22). The lifting plate (7) is an open structure at the bottom of the cavity (22). The front side of the lifting plate (7) is open. The lifting plate (7) is movably arranged directly above the flushing pipe (3) and the nozzle (5). An upper small door (8) is hinged on one side of the frame (1) and located in the flushing chamber (10). A lower small door (9) is hinged on one side of the frame (1) and located in the water collection chamber (11). Both the upper small door (8) and the lower small door (9) are provided with viewing glass (24).

2. The rinsing device for a water-cooled plate of an etching machine according to claim 1, characterized in that: The upper surface of the lifting plate (7) is also connected to several guide rods (25), and the top of the frame (1) is provided with a guide sleeve. The guide rods (25) correspond one-to-one with the guide sleeve and guide each other.

3. The rinsing device for a water-cooled plate of an etching machine according to claim 1, characterized in that: The frame (1) has a slot on its front side and around the rinsing chamber (10). A first magnetic strip (26) is provided in the slot. Several second magnetic strips (27) are provided on the inner surface of the upper small door (8). The second magnetic strips (27) correspond to and cooperate with the first magnetic strips (26). A handle (28) is provided on the outer surface of the upper small door (8).

4. The rinsing device for a water-cooled plate of an etching machine according to claim 1, characterized in that: The lower small door (9) is equipped with a rotary door lock (29).

5. A rinsing device for a water-cooled plate of an etching machine according to claim 1, characterized in that: The perforated plate (13) is densely covered with through holes, and the horizontal height of the perforated plate (13) is lower than the horizontal height of the upper surface of the intermediate partition (2).

6. The rinsing device for a water-cooled plate of an etching machine according to claim 1, characterized in that: The flushing pipe (3) is mounted on the upper surface of the orifice plate (13) by means of a fastener (30).

7. A rinsing device for a water-cooled plate of an etching machine according to claim 1, characterized in that: The bottom of the frame (1) is provided with several support feet (31).

8. A rinsing device for a water-cooled plate of an etching machine according to claim 1, characterized in that: The water pipe joint (14) is connected to the water pump (32) via a pipe.

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