A multi-mode cleaning apparatus for metal mask plates

Abstract

The utility model discloses a kind of multi-mode cleaning equipment for metal mask plate, including cabinet, the front of cabinet is fixedly installed with panel, the top of cabinet is opened with first cleaning tank and second cleaning tank in one end, heating plate with electric heating tube is fixedly installed in the both sides of first cleaning tank, temperature sensor and liquid level sensor are fixedly installed in one end of first cleaning tank, motor is fixedly installed in the center of the bottom of first cleaning tank and located in cabinet, the output end of motor is connected with turbine in transmission, the outside of the bottom of first cleaning tank is fixedly installed with multiple evenly distributed transducers, two annular water pipes are fixedly installed on the inner wall of second cleaning tank, a kind of multi-mode cleaning equipment for metal mask plate of the utility model, the equipment is set by first cleaning tank and second cleaning tank, in combination with ultrasonic cleaning, spray cleaning and turbine stirring cleaning, can carry out efficient cleaning to different types of stain on the surface of metal mask plate.

Description

Technical Field

[0001] This utility model relates to the field of cleaning equipment technology, specifically a multi-mode cleaning device for metal mask plates. Background Technology

[0002] Metal photomasks are critical components in the manufacture of high-precision electronic components, and their surface cleanliness directly affects product quality. Traditional cleaning methods, often relying on ultrasonic cleaning or manual wiping, are ill-suited for dealing with the various complex contaminants that accumulate on metal photomasks during processing and storage, such as photoresist residue, metal debris, and organic grease. Ultrasonic cleaning alone lacks sufficient penetration to remove stubborn contaminants, easily leading to blind spots; manual wiping, on the other hand, poses risks of scratching the photomask surface, contamination, and low efficiency. Furthermore, existing cleaning equipment generally lacks precise control over key parameters such as temperature and liquid level during the cleaning process, resulting in inconsistent cleaning effects and failing to meet the cleaning requirements of high-precision photomasks. Utility Model Content

[0003] The purpose of this invention is to provide a multi-mode cleaning device for metal masks to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a multi-mode cleaning device for metal masks, comprising a chassis, a panel fixedly installed on the front of the chassis, a first cleaning tank and a second cleaning tank opened at one end of the top of the chassis, heating plates with electric heating tubes fixedly installed on both sides of the first cleaning tank, a temperature sensor and a liquid level sensor fixedly installed at one end of the first cleaning tank, a motor located inside the chassis fixedly installed at the center of the bottom of the first cleaning tank, a turbine being driven to the output end of the motor, a plurality of evenly distributed transducers fixedly installed on the outer side of the bottom of the first cleaning tank, and two annular water pipes fixedly installed on the inner wall of the second cleaning tank, each annular water pipe being equipped with... The device has multiple evenly distributed cleaning nozzles. Water injection pipes are fixedly connected to the top of the other end of the first cleaning tank and the top of one end of the second cleaning tank. Drainage pipes are fixedly connected to the bottom of the other end of the first cleaning tank and the bottom of one end of the second cleaning tank. Solenoid valves are fixedly installed on both the water injection pipes and the drainage pipes. The water injection pipe connected to the second cleaning tank is fixedly connected to two annular water pipes. A fixing plate is fixedly installed on the top of one end of the casing. An ultrasonic generator is fixedly installed on the top of the fixing plate. The ultrasonic generator is electrically connected to multiple transducers. An inlet pipe and an outlet pipe are fixedly installed on the bottom of one end of the casing. The inlet pipe is connected to two water injection pipes, and the outlet pipe is connected to two drainage pipes.

[0005] Preferably, a placement platform is fixedly installed at the other end of the top of the chassis, and protective side bars are fixedly installed at both ends of the top of the placement platform.

[0006] Preferably, a support rod is fixedly installed at the bottom of one end of the chassis, and two pipe seats are fixedly installed at the top of the support rod. The two pipe seats are respectively engaged and connected to the bottom of the water inlet pipe and the bottom of the water outlet pipe.

[0007] Preferably, the panel is fixedly equipped with a controller, three mode start buttons and a start switch. The three mode start buttons are electrically connected to the controller, and the controller is electrically connected to an external power supply through the start switch. The three mode start buttons send start commands for three cleaning modes to the controller, respectively starting ultrasonic cleaning, spray cleaning and turbine agitation cleaning.

[0008] Preferably, the temperature sensor and the liquid level sensor are electrically connected to the controller, and the controller is electrically connected to the heating element, solenoid valve, motor and ultrasonic generator on the heating plate.

[0009] Preferably, a connector is fixedly provided at one end of the water inlet pipe and one end of the water outlet pipe, and a valve is fixedly installed in the middle of the water inlet pipe and the middle of the water outlet pipe.

[0010] Compared with the prior art, the beneficial effects of this utility model are: by setting up a first cleaning tank and a second cleaning tank, and combining ultrasonic cleaning, spray cleaning and turbine stirring cleaning, the equipment can efficiently clean different types of stains on the surface of metal mask plates. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of this utility model;

[0012] Figure 2 This is a plan view of the first cleaning tank of this utility model;

[0013] Figure 3 This is a schematic diagram of the water inlet pipe and support rod of this utility model;

[0014] Figure 4 This is a schematic diagram of the placement platform of this utility model.

[0015] In the diagram: 1. Chassis; 2. First cleaning tank; 3. Second cleaning tank; 4. Panel; 5. Ultrasonic generator; 6. Placement platform; 7. Fixing plate; 8. Support rod; 9. Circular water pipe; 10. Cleaning nozzle; 11. Water injection pipe; 12. Drainage pipe; 13. Heating plate; 14. Temperature sensor; 15. Motor; 16. Turbine; 17. Transducer; 18. Inlet pipe; 19. Valve; 20. Connector; 21. Pipe seat; 22. Protective side rod; 23. Outlet pipe; 24. Liquid level sensor. Detailed Implementation

[0016] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0017] Please see Figure 1-4 This utility model provides a multi-mode cleaning device for metal masks, including a housing 1. A panel 4 is fixedly installed on the front of the housing 1. A first cleaning tank 2 and a second cleaning tank 3 are opened at one end of the top of the housing 1. Heating plates 13 with electric heating tubes are fixedly installed on both sides of the first cleaning tank 2. A temperature sensor 14 and a liquid level sensor 24 are fixedly installed at one end of the first cleaning tank 2. A motor 15 located inside the housing 1 is fixedly installed at the center of the bottom of the first cleaning tank 2. A turbine 16 is driven to the output end of the motor 15. Multiple evenly distributed transducers 17 are fixedly installed on the outer side of the bottom of the first cleaning tank 2. Two annular water pipes 9 are fixedly installed on the inner wall of the second cleaning tank 3. Multiple evenly distributed cleaning nozzles are provided on the two annular water pipes 9. 10. A water injection pipe 11 is fixedly connected to the top of the other end of the first cleaning tank 2 and the top of one end of the second cleaning tank 3. A drain pipe 12 is fixedly connected to the bottom of the other end of the first cleaning tank 2 and the bottom of one end of the second cleaning tank 3. A solenoid valve is fixedly installed on the water injection pipe 11 and the drain pipe 12. The water injection pipe 11 connected to the second cleaning tank 3 is fixedly connected to two annular water pipes 9. A fixing plate 7 is fixedly installed on the top of one end of the housing 1. An ultrasonic generator 5 is fixedly installed on the top of the fixing plate 7. The ultrasonic generator 5 is electrically connected to multiple transducers 17. A water inlet pipe 18 and a water outlet pipe 23 are fixedly installed on the bottom of one end of the housing 1. The water inlet pipe 18 is connected to two water injection pipes 11, and the water outlet pipe 23 is connected to two drain pipes 12.

[0018] First, an appropriate amount of clean water is injected into the first cleaning tank 2. The liquid level sensor 24 senses the liquid level, and when the liquid level reaches the position of the liquid level sensor 24, the solenoid valve of the corresponding water inlet pipe 18 is closed to stop the water injection. Then, the metal mask is placed in the first cleaning tank 2 for cleaning. The first cleaning tank 2 has a cleaning mode and an ultrasonic cleaning mode. The electric heating tube on the heating plate 13 is energized to heat the liquid. The temperature sensor 14 monitors the liquid temperature in the tank in real time and automatically stops heating when the temperature reaches the set value. Soaking the metal mask in hot water softens the surface deposits, improving the efficiency of subsequent cleaning. When the cleaning mode is entered, the motor 15 starts, driving the turbine 16 to rotate at high speed, so that the cleaning fluid forms a strong turbulence in the first cleaning tank 2, impacting the dirt on the surface of the metal mask. To enhance the cleaning effect, the ultrasonic cleaning mode is then activated. The motor 15 is turned off, and the ultrasonic generator 5 is activated. The ultrasonic generator 5 transmits a high-frequency electrical signal to the transducer 17, generating high-frequency vibrations and forming a large number of microbubbles in the cleaning fluid. These microbubbles then cavitation remove residual impurities. After cleaning in the first cleaning tank 2, the mask plate is transferred to the second cleaning tank 3. At the same time, the ultrasonic generator 5 is turned off, and the cleaning nozzle 10 on the annular water pipe 9 sprays high-pressure water mist for a secondary rinse to remove residual sewage and particles. After cleaning, the solenoid valve of the inlet pipe 18 on the second cleaning tank 3 is closed to stop the water supply. The solenoid valves of the two drain pipes 12 are opened to completely drain the waste liquid from both tanks. Then, the inside of the two tanks is briefly rinsed with pure water to prevent impurities from remaining.

[0019] A placement platform 6 is fixedly installed at the other end of the top of the chassis 1. Protective side rods 22 are fixedly installed at both ends of the top of the placement platform 6. A support rod 8 is fixedly installed at the bottom of one end of the chassis 1. Two pipe seats 21 are fixedly installed at the top of the support rod 8. The two pipe seats 21 are respectively engaged and connected to the bottom of the water inlet pipe 18 and the bottom of the water outlet pipe 23. After the second cleaning tank 3 completes the spray rinsing, the metal mask plate is taken out and placed on the placement platform 6 for easy subsequent sending into the drying oven for constant temperature drying. The whole equipment is easy to operate. The support rod 8 supports the water inlet pipe 18 and the water outlet pipe 23 through the two pipe seats 21 respectively, improving the stability of the water inlet pipe 18 and the water outlet pipe 23.

[0020] The panel 4 is fixedly equipped with a controller, three mode start buttons, and a start switch. The three mode start buttons are electrically connected to the controller, which is electrically connected to an external power supply via the start switch. Temperature sensor 14 and liquid level sensor 24 are electrically connected to the controller. The controller is electrically connected to the heating element, solenoid valve, motor 15, and ultrasonic generator 5 on the heating plate 13. Connectors 20 are fixedly installed at one end of the water inlet pipe 18 and one end of the water outlet pipe 23. Valves 19 are fixedly installed in the middle of the water inlet pipe 18 and the middle of the water outlet pipe 23. The cleaning equipment is started by the start switch on the panel 4. The controller controls the heating element, four solenoid valves, motor 15, and ultrasonic generator 5 on the heating plate 13 to work in coordination. It controls the water inlet and outlet, and automatically adjusts the water temperature, water flow, and ultrasonic frequency according to the preset cleaning mode.

[0021] In this embodiment, the power is switched on by a start switch, and the two valves 19 are opened. The three cleaning modes of the first cleaning tank 2 are activated using the three mode start buttons. The controller controls the equipment. First, the solenoid valve connecting the first cleaning tank 2 to the water inlet pipe 18 is opened, while the solenoid valve connecting the first cleaning tank 2 to the drain pipe 12 is closed, injecting an appropriate amount of clean water into the first cleaning tank 2. The liquid level sensor 24 senses the liquid level, and once the liquid level reaches the sensor's position, it controls the solenoid valve of the water inlet pipe 18 to close, stopping the water injection. Then, the metal mask is placed in the first cleaning tank 2, and the metal mask is cleaned in the first cleaning tank 2 using three cleaning modes: heating mode, cleaning mode, and ultrasonic cleaning mode. When the heating mode is activated, the heating element on the heating plate 13 is energized to heat the water. The temperature sensor 14 monitors the liquid temperature in the tank in real time, ensuring that heating automatically stops once the set temperature is reached. The metal mask is then immersed in the heat... Water softens the surface deposits, improving the efficiency of subsequent cleaning. When entering the cleaning mode, motor 15 starts, driving turbine 16 to rotate at high speed, creating strong turbulence in the cleaning fluid within the first cleaning tank 2, impacting the dirt on the surface of the metal mask plate and enhancing the cleaning effect. Subsequently, the ultrasonic cleaning mode is activated, motor 15 is turned off, and ultrasonic generator 5 transmits high-frequency electrical signals to transducer 17, generating high-frequency vibrations and forming a large number of microbubbles in the cleaning fluid, which remove residual impurities through cavitation. After cleaning the first cleaning tank 2, ultrasonic generator 5 is turned off, and the mask plate is transferred to the second cleaning tank 3. The solenoid valve of the water inlet pipe 18 connected to the second cleaning tank 3 is opened, and the cleaning nozzle 10 on the annular water pipe 9 sprays high-pressure water mist for secondary rinsing, removing residual sewage and particles. After cleaning, the solenoid valves of the two drain pipes 12 are opened to completely drain the waste liquid in the two tanks. Then, the solenoid valves of the two water inlet pipes 18 are opened to rinse the inside of the tanks, preventing impurities from remaining.

[0022] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-mode cleaning device for metal photomasks, comprising a chassis (1), characterized in that: A panel (4) is fixedly installed on the front of the casing (1). A first cleaning tank (2) and a second cleaning tank (3) are opened at one end of the top of the casing (1). Heating plates (13) with electric heating tubes are fixedly installed on both sides of the first cleaning tank (2). A temperature sensor (14) and a liquid level sensor (24) are fixedly installed at one end of the first cleaning tank (2). A motor (15) located inside the casing (1) is fixedly installed at the center of the bottom of the first cleaning tank (2). A turbine (16) is driven to the output end of the motor (15). Multiple evenly distributed transducers (17) are fixedly installed on the outer side of the bottom of the first cleaning tank (2). Two annular water pipes (9) are fixedly installed on the inner wall of the second cleaning tank (3). Multiple evenly distributed cleaning nozzles (10) are provided on the two annular water pipes (9). The top of the other end of the first cleaning tank (2) is... Water injection pipes (11) are fixedly connected to the top of one end of the first cleaning tank (2) and the second cleaning tank (3). Drainage pipes (12) are fixedly connected to the bottom of the other end of the first cleaning tank (2) and the bottom of one end of the second cleaning tank (3). Solenoid valves are fixedly installed on the water injection pipes (11) and the drainage pipes (12). The water injection pipe (11) connected to the second cleaning tank (3) is fixedly connected to two annular water pipes (9). A fixing plate (7) is fixedly installed on the top of one end of the housing (1). An ultrasonic generator (5) is fixedly installed on the top of the fixing plate (7). The ultrasonic generator (5) is electrically connected to multiple transducers (17). A water inlet pipe (18) and a water outlet pipe (23) are fixedly installed on the bottom of one end of the housing (1). The water inlet pipe (18) is connected to two water injection pipes (11). The water outlet pipe (23) is connected to two drainage pipes (12).

2. The multi-mode cleaning equipment for metal masks according to claim 1, characterized in that: A placement platform (6) is fixedly installed at the other end of the top of the chassis (1), and protective side bars (22) are fixedly installed at both ends of the top of the placement platform (6).

3. The multi-mode cleaning equipment for metal masks according to claim 1, characterized in that: A support rod (8) is fixedly installed at the bottom of one end of the casing (1). Two pipe seats (21) are fixedly installed at the top of the support rod (8). The two pipe seats (21) are respectively engaged and connected to the bottom of the water inlet pipe (18) and the bottom of the water outlet pipe (23).

4. The multi-mode cleaning equipment for metal masks according to claim 1, characterized in that: The panel (4) is fixedly equipped with a controller, three mode start buttons and a start switch. The three mode start buttons are electrically connected to the controller, and the controller is electrically connected to an external power supply through the start switch.

5. The multi-mode cleaning equipment for metal masks according to claim 4, characterized in that: The temperature sensor (14) and the liquid level sensor (24) are electrically connected to the controller, which is electrically connected to the heating tube, solenoid valve, motor (15) and ultrasonic generator (5) on the heating plate (13).

6. The multi-mode cleaning equipment for metal masks according to claim 4, characterized in that: A connector (20) is fixedly installed at one end of the water inlet pipe (18) and at one end of the water outlet pipe (23). A valve (19) is fixedly installed in the middle of the water inlet pipe (18) and the middle of the water outlet pipe (23).

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