A laser cylindrical mirror milling tool and a matching cutter thereof

Abstract

The utility model provides a kind of laser cylindrical mirror mills type frock and the tool matched therewith, including pedestal, the inner side surface of the pedestal is concave, more than two rows of positioning slots are set along length direction and are arranged on the inner side surface;Edge slot is arranged at the edge of the bottom of any positioning slot slot, and the edge slot of the positioning slot in same row is located same side;The bottom of any positioning slot is paved with viscose layer;At least one water inlet groove is arranged in the pedestal, and the water inlet groove is through inside and outside.The utility model solves the technical problem of poor machining accuracy, high positioning error and difficult machining in the prior art.

Description

Technical Field

[0001] This utility model relates to precision machining technology for optical components, and in particular to a laser cylindrical mirror milling fixture and its matching cutting tools. Background Technology

[0002] A laser cylindrical mirror is a curved optical element that achieves linear focusing or collimation of a laser beam by controlling the phase leading edge of the laser beam in the fast or slow axis direction. It is a key functional device for aberration compensation and energy redistribution in laser systems.

[0003] Laser cylindrical mirrors require milling to shape their curved surfaces during production. Traditional milling fixtures typically place multiple cylindrical mirrors in a row of positioning slots, and then bring the cylindrical mirrors into contact with the tool body to perform curved surface milling.

[0004] Laser cylindrical mirrors machined using traditional milling fixtures offer a certain level of precision and relatively fast processing speed, providing a cost-performance advantage in conventional high-power laser and infrared systems. However, to enter high-end applications such as EUV / deep ultraviolet, lithography, and 10,000-watt ultrafast lasers, further improvements in precision are needed, presenting the following challenges:

[0005] 1. During the milling process, the cylindrical mirror is prone to offset and slippage, resulting in insufficient machining accuracy.

[0006] 2. During batch processing, manual assembly and fixing are required, which introduces human positioning errors. Simultaneously, machining errors exist at the corners of the positioning grooves, causing edge positioning errors when the cylindrical mirror is near the edge. These dual effects amplify and compound the errors, resulting in poor consistency among cylindrical mirrors in the same batch.

[0007] 3. Fluoride materials have low mechanical strength and are difficult to process. Traditional milling can easily produce microcracks that affect the lens surface shape. It is necessary to process them with the help of pouring coolant and polishing fluid. However, traditional milling makes it difficult to continuously and evenly pour coolant and polishing fluid. Utility Model Content

[0008] The purpose of this utility model is to provide a laser cylindrical mirror milling fixture and its matching cutting tools. This laser cylindrical mirror milling fixture is intended to solve the technical problems of poor machining accuracy, high positioning error, and high machining difficulty in the prior art.

[0009] This utility model provides a laser cylindrical mirror milling fixture and its matching cutting tool, including a base, the inner side of the base being concave, and two or more rows of positioning grooves arranged along the length direction are formed on the inner side; a relief groove is formed at the edge of the bottom of any of the positioning grooves, and the relief grooves of the same row of positioning grooves are located on the same side; an adhesive layer is laid at the bottom of any of the positioning grooves; and at least one water inlet groove with the inner and outer sides connected is formed in the base.

[0010] Furthermore, the inner surface of the base is a concave arc shape, and the axial direction of the concave arc shape is parallel to the length direction of the base.

[0011] Furthermore, three rows of positioning grooves are machined on the inner side of the base, and each row of positioning grooves includes two or more positioning grooves evenly spaced along the inner side. The three rows of positioning grooves are evenly spaced along the arc direction of the inner side.

[0012] Furthermore, the side slots of any row of positioning slots arranged along the length direction are collinear and interconnected.

[0013] Furthermore, the base is provided with at least four water inlet grooves, and the inner holes of all the water inlet grooves are evenly opened on the inner side surface.

[0014] Furthermore, a countersunk hole is provided on the outer side hole of the water inlet tank.

[0015] Furthermore, the cross-section of the water inlet trough is an oblong hole shape.

[0016] Furthermore, the inner side surface is provided with three rows of positioning grooves along the circumferential direction, and each row includes several positioning grooves arranged along the length direction.

[0017] Furthermore, the thickness of the adhesive layer is 0.08 mm.

[0018] This utility model provides a cutting tool used in conjunction with the above-mentioned tooling, including a cutting tool body, the milling surface of the cutting tool body being an arc surface, and a polishing skin being provided on the milling surface of the cutting tool body; the inner side facing the cutting tool body; the milling surface of the cutting tool body being tangent to the bottom surface of the positioning groove of the above-mentioned laser cylindrical mirror milling tooling.

[0019] Compared with existing technologies, the advantages of this invention are positive and obvious:

[0020] 1. This utility model uses an adhesive layer to stress-free bond and fix the cylindrical mirror plane to the positioning groove, achieving full constraint positioning of the lens. This fundamentally eliminates the micro-displacement and sliding of the lens relative to the tooling during milling, ensuring the stability of the processing process and enabling precise control of the finished product's surface accuracy and eccentricity. It can meet the stringent requirements of high-end application scenarios such as deep ultraviolet and photolithography.

[0021] 2. This utility model provides a uniform and controllable overflow space for the adhesive layer by designing a relief groove at the bottom edge of the positioning groove; the relief groove also eliminates the processing error of corner positioning, and ensures precise alignment of the cylindrical mirror during manual assembly, thereby improving the consistency of processing of products in the same batch.

[0022] 3. This invention utilizes a water inlet tank inside the tooling base to continuously and evenly deliver coolant and grinding fluid directly to the contact area between the abrasive and the lens, achieving efficient heat dissipation and lubrication. This directional and controllable casting method effectively avoids thermal stress cracks and mechanical damage to fluoride crystals caused by localized overheating or uneven abrasive distribution, thus improving surface finish while preserving the inherent properties of the material. Attached Figure Description

[0023] Figure 1 A schematic diagram of the structure of an embodiment of this utility model.

[0024] Figure 2 A cross-sectional structural diagram of an embodiment of this utility model.

[0025] Figure 3 Schematic diagram of the cross-sectional structure of an embodiment of this utility model. Figure 2 .

[0026] In the figure: 1. Base; 2. Inner side; 3. Tool body; 4. Positioning groove; 5. Adhesive layer; 6. Edge groove; 7. Water inlet groove; 71. Inner hole of water inlet groove; 72. Outer hole of water inlet groove; 73. Countersunk hole; 8. Cylindrical mirror. Detailed Implementation

[0027] The following embodiments will further illustrate the present invention, but are not intended to limit the present invention.

[0028] like Figures 1 to 3 As shown, this embodiment provides a laser cylindrical mirror milling fixture and its matching tool, including a base 1, the inner side 2 of the base 1 is an arc-shaped concave surface, and the axial direction of the arc-shaped concave surface is parallel to the length direction of the base 1.

[0029] It also includes a tool body 3, the milling surface of the tool body 3 is an arc surface, and a polishing skin is provided on the milling surface of the tool body 3; the base 1 is installed outside the tool body 3, the inner side 2 faces the milling surface of the tool body 3, and the inner side 2 is coaxially arranged with the milling surface of the tool body 3.

[0030] A certain gap is reserved between the inner side 2 and the milling surface of the cylindrical tool body 3. This gap is used to guide the coolant and grinding fluid during the machining process.

[0031] Three rows of positioning grooves 4 are precisely machined on the inner surface 2 of the base 1. Each row of positioning grooves 4 includes two or more positioning grooves 4 evenly spaced along the inner surface 2 of the base 1. The three rows of positioning grooves 4 are evenly spaced along the arc direction of the inner surface 2 of the base 1. Cylindrical mirrors 8 are placed in the positioning grooves, thereby achieving the effect of simultaneously positioning and batch processing of multiple cylindrical mirrors 8. The bottom of these positioning grooves 4 is tangent to the milling surface of the tool body 3. Because the surface and bottom of the cylindrical mirror 8 are parallel, the surface of the cylindrical mirror 8 placed in the positioning groove 4 is also tangent to the milling surface of the tool body 3, so that the surface of the cylindrical mirror 8 is processed by the arc-shaped milling surface of the tool body 3.

[0032] Each positioning groove 4 has an adhesive layer 5 at its bottom. This adhesive layer 5 is used to firmly bond and fix the flat side of the cylindrical mirror 8. As a flexible buffer medium, this adhesive layer 5 can effectively absorb and disperse the mechanical vibration and impact stress generated during the milling process, avoiding stress concentration on the brittle fluoride crystal surface caused by hard clamping or rigid contact, thereby preventing the generation of mechanical damage such as microcracks and edge chipping.

[0033] The adhesive layer 5 has a thickness of 0.08 mm. This thickness allows for a good balance between processing accuracy and buffering effect, ensuring the reliability of the cylindrical mirror 8 while maximizing surface accuracy.

[0034] At one edge of the bottom of each positioning groove 4, a relief groove 6 is also machined. The relief grooves of the same row of positioning grooves 4 are located on the same side, so that the cylindrical mirrors 8 in the same row of positioning grooves 4 are all positioned off-center to the side in the same direction, maintaining the consistency of processing. The relief groove 6 has two functions: First, it provides uniform overflow space for the adhesive, ensuring that the thickness of the adhesive layer 5 is consistent, thereby improving the positioning accuracy of the lens; Second, the relief groove 6 also eliminates the processing error of corner positioning, ensuring precise alignment of the cylindrical mirrors 8 during manual assembly, thereby improving the processing consistency of products in the same batch.

[0035] Any row of positioning grooves 4 arranged along the length of the base 1 has its respective side grooves 6 arranged in a straight line and connected to each other. This design facilitates the processing and manufacturing of the side grooves 6.

[0036] At least four water inlet grooves 7 are formed on the base 1, penetrating both the inner and outer sides of the base 1, to meet the cooling and lubrication requirements during the processing. The inner holes 71 of all these water inlet grooves are evenly distributed along the circumference and length of the base 1 to ensure that the coolant and grinding fluid can uniformly cover the entire processing area. In this embodiment, the cross-sectional shape of the water inlet groove 7 is an elongated oval shape to optimize fluid flow and increase the cross-sectional area. Countersunk holes 73 are machined at the outer holes 71 of the water inlet grooves. Since the outlet pipes of the coolant and grinding fluid are located above the tooling, the countersunk holes 73 act as funnels, facilitating concentrated liquid inflow.

[0037] How to use this embodiment:

[0038] Step 1: First, pre-process the cylindrical mirror blank 8 made of fluoride crystal material. Through rough grinding and fine grinding processes, the bottom surface of the cylindrical mirror 8 is precision polished to achieve the required smoothness and flatness. This surface will serve as the reference surface for subsequent processing. The bottom surface is then painted to form a robust protective film, preventing scratches or contamination during subsequent processing.

[0039] Step 2: Place the cylindrical mirrors 8 bottom-side down into the positioning slots 4 of the base 1 one by one. During placement, ensure that one sidewall of the cylindrical mirror 8 is flush against the inner sidewall of the positioning slot 4 with the notch 6 to guarantee consistent positioning. The mirrors are firmly bonded and fixed by the adhesive layer 5 pre-laid at the bottom of the positioning slot 4. Repeat this operation to install multiple cylindrical mirrors 8 into all positioning slots 4, achieving multi-station batch clamping.

[0040] Step 3: Install the fixture base 1, which has been fitted with multiple cylindrical mirrors 8, onto the machine tool worktable, and move the worktable so that the surfaces of all the cylindrical mirrors 8 to be machined in the fixture gradually approach the tool body 3 for milling.

[0041] Step 4: The tool body 3 moves along a preset trajectory to mill the curved surface of the cylindrical mirror 8. Simultaneously, the fixture can also move around the axis of the milling surface of the tool body 3 for machining. During this process, the coolant and polishing fluid supply is activated. The fluid is continuously and evenly poured into the contact area between the tool and the mirror through the evenly distributed water inlet grooves 7 on the fixture and the countersunk holes 73 on their outer sides. The fluid serves to cool, lubricate, remove debris, and assist in polishing.

[0042] In the description of this utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A laser cylindrical mirror milling fixture, characterized in that: Includes a base (1), the inner side (2) of the base (1) is concave, and two or more rows of positioning grooves (4) are provided on the inner side (2) along the length direction. A relief groove (6) is provided at the edge of the bottom of any of the positioning grooves (4), and the relief grooves (6) of the same row of positioning grooves (4) are located on the same side; An adhesive layer (5) is laid on the bottom of any of the positioning grooves (4); The base (1) has at least one water inlet trough (7) that runs through the inner and outer sides.

2. The laser cylindrical mirror milling fixture according to claim 1, characterized in that: The inner surface (2) of the base (1) is a concave arc surface, and the axial direction of the concave arc surface is parallel to the length direction of the base (1).

3. The laser cylindrical mirror milling fixture according to claim 2, characterized in that: Three rows of positioning grooves (4) are machined on the inner side (2) of the base (1). Each row of positioning grooves (4) includes two or more positioning grooves (4) evenly spaced along the inner side (2). The three rows of positioning grooves (4) are evenly spaced along the arc direction of the inner side (2).

4. The laser cylindrical mirror milling fixture according to claim 1, characterized in that: The side grooves (6) of any row of positioning grooves (4) arranged along the length direction are collinear and interconnected.

5. The laser cylindrical mirror milling fixture according to claim 1, characterized in that: The base (1) is provided with at least four water inlet grooves (7), and the inner holes (71) of all the water inlet grooves are evenly opened on the inner side surface (2).

6. The laser cylindrical mirror milling fixture according to claim 1, characterized in that: A countersunk hole (73) is provided on the outer hole (72) of the water inlet tank.

7. The laser cylindrical mirror milling fixture according to claim 1, characterized in that: The cross-section of the water inlet trough (7) is an elongated hole shape.

8. The laser cylindrical mirror milling fixture according to claim 1, characterized in that: The inner side (2) is provided with three rows of positioning grooves (4) along the circumferential direction, and each row includes several positioning grooves (4) arranged along the length direction.

9. The laser cylindrical mirror milling fixture according to claim 1, characterized in that: The thickness of the adhesive layer (5) is 0.08 mm.

10. A cutting tool used in conjunction with the tooling described in claim 1, characterized in that: The tool body (3) is included, the milling surface of the tool body (3) is an arc surface, and a polishing skin is provided on the milling surface of the tool body (3); the inner side (2) faces the tool body (3); the milling surface of the tool body (3) is tangent to the bottom surface of the positioning groove (4) in the laser cylindrical mirror milling fixture according to claim 1.

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