Large-stroke high-precision five-dimensional adjusting frame

Abstract

The utility model belongs to the technical field of adjusting frame, concretely relates to a big stroke high accuracy five -dimensional adjusting frame, including base body, the upside fixedly connected with fixed bolster of base body, one side fixedly connected with the side plate body of fixed bolster, install Z axle sliding seat of the Z axle direction can slide along on the side plate body, install Z axle drive mechanism of drive connection with Z axle sliding seat on the side plate body, first rotary seat is rotatively connected on Z axle sliding seat, install first rotary drive mechanism of drive connection with first rotary seat on Z axle sliding seat, the lower part fixedly connected with bottom plate body on first rotary seat side, the upside rotatively connected with second rotary seat of bottom plate body, install second rotary drive mechanism of drive connection with second rotary seat on bottom plate body. The utility model can effectively promote the stroke of adjusting frame, and the structure is relatively stable.

Description

Technical Field

[0001] This utility model belongs to the field of adjustment frame technology, specifically relating to a large-stroke, high-precision, five-dimensional adjustment frame. Background Technology

[0002] In fields such as precision manufacturing, optical inspection, and semiconductor processing, it is often necessary to perform multi-dimensional high-precision position adjustments on equipment or workpieces to meet the stringent requirements for positioning accuracy during assembly, inspection, or processing. As the core component for achieving this function, the performance of the adjustment frame directly affects the operating accuracy and stability of the entire system.

[0003] Currently, existing adjustment frames on the market have many limitations. Most adjustment frames have a small adjustment range. For example, the translational travel of the X, Y, and Z axes is generally less than ±20mm, and the adjustment range of the pitch, horizontal rotation, and other rotational axes is mostly limited to within ±5°. They cannot meet the long-distance adjustment needs of large workpieces or complex equipment (such as dynamic interferometers). When facing working conditions that require large-range position compensation, additional auxiliary adjustment mechanisms are often required, which increases the system complexity and cost. Utility Model Content

[0004] The purpose of this invention is to provide a large-stroke, high-precision five-dimensional adjustment frame that can effectively increase the stroke of the adjustment frame and has a relatively stable structure.

[0005] The specific technical solution adopted by this utility model is as follows:

[0006] A large-stroke, high-precision, five-dimensional adjustment frame includes a base body, a fixed bracket fixedly connected to the upper side of the base body, a side plate fixedly connected to one side of the fixed bracket, a Z-axis sliding seat that can slide along the Z-axis is installed on the side plate, and a Z-axis drive mechanism that is hygienically connected to the Z-axis sliding seat is installed on the side plate.

[0007] A first rotating seat is rotatably connected to the Z-axis sliding seat, and a first rotary drive mechanism that is drively connected to the first rotating seat is mounted on the Z-axis sliding seat.

[0008] A base plate is fixedly connected to the lower part of one side of the first rotating seat, and a second rotating seat is rotatably connected to the upper side of the base plate. A second rotating drive mechanism that is drivenly connected to the second rotating seat is installed on the base plate.

[0009] The upper side of the second rotary seat is fixedly connected to a first connecting support. A Y-axis sliding seat that can slide along the Y-axis is installed on the first connecting support. A Y-axis drive mechanism that is hygienically connected to the Y-axis sliding seat is installed on the first connecting support.

[0010] An X-axis sliding seat that can slide along the X-axis is mounted on the upper side of the Y-axis sliding seat, and an X-axis drive mechanism that is pulsatorically connected to the X-axis sliding seat is mounted on the Y-axis sliding seat.

[0011] A mounting base is fixedly connected to the upper side of the X-axis sliding seat.

[0012] Furthermore, a first heavy-duty rotating collar is fixedly connected to one side of the Z-axis sliding seat, and the first rotating seat is rotatably connected to the Z-axis sliding seat through the first heavy-duty rotating collar. A second heavy-duty rotating collar is fixedly connected to the upper side of the base plate, and the second rotating seat is rotatably connected to the base plate through the second heavy-duty rotating collar.

[0013] Furthermore, a Z-axis crossed roller guide is fixedly connected to one side of the side plate, and the Z-axis sliding seat is slidably connected to the side plate via the Z-axis crossed roller guide. A Y-axis crossed roller guide is fixedly connected to the upper side of the first connecting support, and the Y-axis sliding seat is slidably connected to the first connecting support via the Y-axis crossed roller guide. An X-axis crossed roller guide is fixedly connected to the upper side of the Y-axis sliding seat, and the X-axis sliding seat is slidably connected to the Y-axis sliding seat via the X-axis crossed roller guide.

[0014] Furthermore, the Z-axis drive mechanism includes a Z-axis adjusting screw, which is threadedly connected to the side plate body, and one end of the Z-axis adjusting screw is rotatably connected to the Z-axis sliding seat;

[0015] The Y-axis drive mechanism includes a Y-axis adjusting screw, which is threadedly connected to a first connecting support, and one end of the Y-axis adjusting screw is rotatably connected to a Y-axis sliding seat.

[0016] The X-axis drive mechanism includes an X-axis adjusting screw, which is threadedly connected to a Y-axis sliding seat, and one end of the X-axis adjusting screw is rotatably connected to the X-axis sliding seat.

[0017] Furthermore, the first rotary drive mechanism includes a first additional bracket fixedly connected to one side of the Z-axis sliding seat, a first spherical sleeve rotatably connected to the first additional bracket, a first rotary adjustment screw threadedly connected to the inside of the first spherical sleeve, and one end of the first rotary adjustment screw rotatably connected to the first rotary seat.

[0018] The second rotary drive mechanism includes a second additional bracket fixedly connected to one side of the base plate, a second spherical sleeve rotatably connected to the second additional bracket, a second rotary adjustment screw threadedly connected to the inside of the second spherical sleeve, and one end of the second rotary adjustment screw rotatably connected to the second rotary seat.

[0019] Furthermore, a hydraulic telescopic rod is fixedly connected to the base body at a position away from the side plate body, and a spherical bearing ball is fixedly connected to the piston rod of the hydraulic telescopic rod. A rotating seat is rotatably connected to the outer side of the spherical bearing ball, and a bearing plate located on the lower side of the base body is fixedly connected to the upper side of the rotating seat.

[0020] Furthermore, each of the four corners of the base is threaded with a threaded support leg, and the lower end of the threaded support leg is fitted with a rubber foot support.

[0021] The technical effects achieved by this utility model are as follows:

[0022] This utility model discloses a large-stroke, high-precision, five-dimensional adjustment frame. Through improvements to the adjustment frame structure, the stroke of the adjustment frame can be effectively increased, and the structure is relatively stable. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of this utility model;

[0024] Figure 2 This is an exploded view of the structure of this utility model;

[0025] Figure 3 This is a utility model Figure 1 A magnified view of a section at point A in the middle;

[0026] Figure 4 This is a schematic diagram of the structure of the hydraulic telescopic rod of this utility model;

[0027] Figure 5 This is a side view of the structure of the spherical load-bearing ball and spring body of this utility model.

[0028] The attached diagram lists the components represented by each number as follows:

[0029] 1. Base body; 2. Fixed bracket; 3. Side plate body; 4. Z-axis sliding seat; 5. First rotating seat; 6. Base plate body; 7. Second rotating seat; 8. First connecting support; 9. Y-axis sliding seat; 10. X-axis sliding seat; 11. Mounting base; 12. Z-axis adjusting screw; 13. First rotary adjusting screw; 14. Second rotary adjusting screw; 15. Y-axis adjusting screw; 16. X-axis adjusting screw; 17. Threaded support leg; 18. Nut; 19. Rubber foot support; 20. Z-axis cross roller guide; 21. First heavy-duty rotating collar; 22. Second heavy-duty rotating collar; 23. Y-axis cross roller guide; 24. X-axis cross roller guide; 25. Hydraulic telescopic rod; 26. Spherical bearing ball; 27. Rotating seat; 28. Bearing plate; 29. ​​Connecting frame; 30. Spring body. Detailed Implementation

[0030] To make the objectives and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0031] like Figures 1-5 As shown, a large-stroke, high-precision five-dimensional adjustment frame includes a base body 1. A fixed bracket 2 is fixedly connected to the upper side of the base body 1. A side plate 3 is fixedly connected to one side of the fixed bracket 2. A Z-axis sliding seat 4, which can slide along the Z-axis, is installed on the side plate 3. A first rotating seat 5 is rotatably connected to the Z-axis sliding seat 4. A base plate 6 is fixedly connected to the lower part of one side of the first rotating seat 5. A second rotating seat 7 is rotatably connected to the upper side of the base plate 6. A first connecting support 8 is fixedly connected to the upper side of the second rotating seat 7. A Y-axis sliding seat 9, which can slide along the Y-axis, is installed on the first connecting support 8. An X-axis sliding seat 10, which can slide along the X-axis, is installed on the upper side of the Y-axis sliding seat 9. A mounting base 11 is fixedly connected to the upper side of the X-axis sliding seat 10. A device with a dovetail groove base can be mounted on the upper side of the mounting base 11, preferably a dynamic interferometer.

[0032] The connection method of each structure of the five-dimensional adjustment frame is disclosed in detail here. Specifically, a first heavy-duty rotating collar 21 is fixedly connected to one side of the Z-axis sliding seat 4. The first rotating seat 5 is rotatably connected to the Z-axis sliding seat 4 through the first heavy-duty rotating collar 21. A second heavy-duty rotating collar 22 is fixedly connected to the upper side of the base plate 6. The second rotating seat 7 is rotatably connected to the base plate 6 through the second heavy-duty rotating collar 22. The first heavy-duty rotating collar 21 and the second heavy-duty rotating collar 22 enable the stable rotation of the first rotating seat 5 and the second rotating seat 7. By using heavy-duty rotating collars on both axes, the load capacity is strong. The rotation stroke of the first heavy-duty rotating collar 21 and the second heavy-duty rotating collar 22 is preferably ±7°, so that the rotation adjustment range of the first rotating seat 5 and the second rotating seat 7 is ±7°, and the adjustment resolution accuracy is preferably 0.004°.

[0033] Meanwhile, a Z-axis cross roller guide 20 is fixedly connected to one side of the side plate 3. The Z-axis sliding seat 4 is slidably connected to the side plate 3 through the Z-axis cross roller guide 20. A Y-axis cross roller guide 23 is fixedly connected to the upper side of the first connecting support 8. The Y-axis sliding seat 9 is slidably connected to the first connecting support 8 through the Y-axis cross roller guide 23. An X-axis cross roller guide 24 is fixedly connected to the upper side of the Y-axis sliding seat 9. The X-axis sliding seat 10 is slidably connected to the Y-axis sliding seat 9 through the X-axis cross roller guide 24. By using cross roller guides for guidance, the straightness is good and the load capacity is strong. The translational stroke of the X, Y, and Z axes is ±25mm. The preferred adjustment accuracy is 0.005-0.01mm for X, Y, and Z axes.

[0034] like Figures 1-2 As shown, in order to adjust the five-dimensional adjustment frame, a Z-axis drive mechanism is installed on the side plate 3 and is connected to the Z-axis sliding seat 4. The Z-axis drive mechanism includes a Z-axis adjusting screw 12, which is threadedly connected to the side plate 3. One end of the Z-axis adjusting screw 12 is rotatably connected to the Z-axis sliding seat 4. By rotating the Z-axis adjusting screw 12, the Z-axis sliding seat 4 can be moved along the Z-axis. The setting of the Z-axis adjusting screw 12 can ensure the adjustment accuracy, and after adjustment, it can be effectively locked to maintain stability.

[0035] The first connecting support 8 is equipped with a Y-axis drive mechanism that is connected to the Y-axis sliding seat 9. The Y-axis drive mechanism includes a Y-axis adjusting screw 15, which is threadedly connected to the first connecting support 8. One end of the Y-axis adjusting screw 15 is rotatably connected to the Y-axis sliding seat 9. By rotating the Y-axis adjusting screw 15, the Y-axis sliding seat 9 can be moved along the Y-axis. The setting of the Y-axis adjusting screw 15 can ensure the adjustment accuracy, and after adjustment, it can be effectively locked to maintain stability.

[0036] An X-axis drive mechanism is installed on the Y-axis slide seat 9 and is connected to the X-axis slide seat 10. The X-axis drive mechanism includes an X-axis adjusting screw 16, which is threadedly connected to the Y-axis slide seat 9. One end of the X-axis adjusting screw 16 is rotatably connected to the X-axis slide seat 10. By rotating the X-axis adjusting screw 16, the X-axis slide seat 10 can be moved along the X-axis. The setting of the X-axis adjusting screw 16 can ensure the adjustment accuracy, and after adjustment, it can be effectively locked to maintain stability.

[0037] A first rotary drive mechanism is installed on the Z-axis sliding seat 4 and is connected to the first rotary seat 5. The first rotary drive mechanism includes a first additional bracket fixedly connected to one side of the Z-axis sliding seat 4. A first spherical sleeve is rotatably connected to the first additional bracket. A first rotary adjustment screw 13 is threadedly connected to the inside of the first spherical sleeve. One end of the first rotary adjustment screw 13 is rotatably connected to the first rotary seat 5. At this time, the first rotary seat 5 can be pushed or driven by rotating the first rotary adjustment screw 13, thereby driving the first rotary seat 5 to rotate. The setting of the first rotary adjustment screw 13 can ensure the adjustment accuracy. After adjustment, it can be effectively locked to maintain stability.

[0038] A second rotary drive mechanism is installed on the base plate 6 and is connected to the second rotary seat 7. The second rotary drive mechanism includes a second additional bracket fixedly connected to one side of the base plate 6. A second spherical sleeve is rotatably connected to the second additional bracket. A second rotary adjustment screw 14 is threadedly connected to the inside of the second spherical sleeve. One end of the second rotary adjustment screw 14 is rotatably connected to the second rotary seat 7. At this time, the second rotary seat 7 can be pushed or driven by rotating the second rotary adjustment screw 14, thereby driving the second rotary seat 7 to rotate. The setting of the second rotary adjustment screw 14 can ensure the adjustment accuracy. After adjustment, it can be effectively locked to maintain stability.

[0039] like Figures 1-2 and Figures 4-5 As shown, a hydraulic telescopic rod 25 can be fixedly connected to the base body 1 at a position away from the side plate body 3. The piston rod of the hydraulic telescopic rod 25 is fixedly connected to a spherical bearing ball 26. A rotating seat 27 is rotatably connected to the outer side of the spherical bearing ball 26. A bearing plate 28 located on the lower side of the base plate body 6 is fixedly connected to the upper side of the rotating seat 27. After the position of the base plate body 6 is adjusted, the bearing plate 28 is moved upward by activating the hydraulic telescopic rod 25 until the bearing plate 28 and the base plate body 6 abut against each other, which can provide support for the position of the base plate body 6 away from the side plate body 3 and improve the stability of the five-dimensional adjustment frame.

[0040] Meanwhile, a connecting rod can be fixedly connected between the piston rod and the spherical bearing ball 26. Multiple connecting frames 29 are fixedly connected around the connecting rod. A spring body 30 is fixedly connected between the connecting frame 29 and the bearing plate 28. At this time, the bearing plate 28 can be initially positioned by setting multiple spring bodies 30.

[0041] Among them, such as Figures 1-3 As shown, in some embodiments, threaded legs 17 are threadedly connected to the four corners of the base body 1. Rubber foot supports 19 are installed at the lower end of the threaded legs 17. The leveling work can be performed by rotating the threaded legs 17 to adjust the distance between the rubber foot supports 19 and the base body 1.

[0042] In some embodiments, the lower end of the threaded support leg 17 is fixedly connected to a nut 18, and the upper end of the rubber foot support 19 is fixedly connected to a threaded connecting rod. The threaded connecting rod can be threaded onto the nut 18. After removing the nut 18, the threaded support leg 17 can be removed from the base body 1, so that the rubber foot support 19 can be installed as needed.

[0043] In summary, this technical solution, through improvements to the adjustment frame structure, can effectively increase the stroke of the adjustment frame, and the structure is relatively stable.

[0044] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the field.

Claims

1. A large-stroke, high-precision five-dimensional adjustment frame, characterized in that: Includes a base body (1), a fixed bracket (2) is fixedly connected to the upper side of the base body (1), a side plate body (3) is fixedly connected to one side of the fixed bracket (2), a Z-axis sliding seat (4) that can slide along the Z-axis is installed on the side plate body (3), and a Z-axis drive mechanism that is connected to the Z-axis sliding seat (4) is installed on the side plate body (3). The Z-axis sliding seat (4) is rotatably connected to a first rotating seat (5), and the Z-axis sliding seat (4) is equipped with a first rotary drive mechanism that is drively connected to the first rotating seat (5); A base plate (6) is fixedly connected to the lower part of one side of the first rotating seat (5), and a second rotating seat (7) is rotatably connected to the upper side of the base plate (6). A second rotating drive mechanism that is connected to the second rotating seat (7) is installed on the base plate (6). The upper side of the second rotating seat (7) is fixedly connected to a first connecting support (8), and a Y-axis sliding seat (9) that can slide along the Y-axis is installed on the first connecting support (8). A Y-axis drive mechanism that is connected to the Y-axis sliding seat (9) is installed on the first connecting support (8). The upper side of the Y-axis sliding seat (9) is equipped with an X-axis sliding seat (10) that can slide along the X-axis. The Y-axis sliding seat (9) is equipped with an X-axis drive mechanism that is connected to the X-axis sliding seat (10) in a transmission manner. The upper side of the X-axis sliding seat (10) is fixedly connected to the mounting base (11).

2. The large-stroke, high-precision five-dimensional adjustment frame according to claim 1, characterized in that: A first heavy-duty rotating collar (21) is fixedly connected to one side of the Z-axis sliding seat (4). The first rotating seat (5) is rotatably connected to the Z-axis sliding seat (4) through the first heavy-duty rotating collar (21). A second heavy-duty rotating collar (22) is fixedly connected to the upper side of the base plate (6). The second rotating seat (7) is rotatably connected to the base plate (6) through the second heavy-duty rotating collar (22).

3. The large-stroke, high-precision five-dimensional adjustment frame according to claim 2, characterized in that: A Z-axis cross roller guide (20) is fixedly connected to one side of the side plate (3). The Z-axis sliding seat (4) is slidably connected to the side plate (3) through the Z-axis cross roller guide (20). A Y-axis cross roller guide (23) is fixedly connected to the upper side of the first connecting support (8). The Y-axis sliding seat (9) is slidably connected to the first connecting support (8) through the Y-axis cross roller guide (23). An X-axis cross roller guide (24) is fixedly connected to the upper side of the Y-axis sliding seat (9). The X-axis sliding seat (10) is slidably connected to the Y-axis sliding seat (9) through the X-axis cross roller guide (24).

4. The large-stroke, high-precision five-dimensional adjustment frame according to claim 3, characterized in that: The Z-axis drive mechanism includes a Z-axis adjusting screw (12), which is threadedly connected to the side plate (3), and one end of the Z-axis adjusting screw (12) is rotatably connected to the Z-axis sliding seat (4); The Y-axis drive mechanism includes a Y-axis adjusting screw (15), which is threadedly connected to a first connecting support (8), and one end of the Y-axis adjusting screw (15) is rotatably connected to a Y-axis sliding seat (9). The X-axis drive mechanism includes an X-axis adjusting screw (16), which is threadedly connected to a Y-axis sliding seat (9), and one end of the X-axis adjusting screw (16) is rotatably connected to the X-axis sliding seat (10).

5. The large-stroke, high-precision five-dimensional adjustment frame according to claim 4, characterized in that: The first rotary drive mechanism includes a first additional bracket fixedly connected to one side of the Z-axis sliding seat (4), a first spherical sleeve rotatably connected to the first additional bracket, a first rotary adjustment screw (13) threadedly connected to the inside of the first spherical sleeve, and one end of the first rotary adjustment screw (13) rotatably connected to the first rotary seat (5). The second rotary drive mechanism includes a second additional bracket fixedly connected to one side of the base plate (6), a second spherical sleeve rotatably connected to the second additional bracket, a second rotary adjustment screw (14) threadedly connected to the inside of the second spherical sleeve, and one end of the second rotary adjustment screw (14) rotatably connected to the second rotary seat (7).

6. The large-stroke, high-precision five-dimensional adjustment frame according to claim 5, characterized in that: A hydraulic telescopic rod (25) is fixedly connected to the base body (1) at a position away from the side plate body (3). A spherical bearing ball (26) is fixedly connected to the piston rod of the hydraulic telescopic rod (25). A rotating seat (27) is rotatably connected to the outer side of the spherical bearing ball (26). A bearing plate (28) located on the lower side of the base plate body (6) is fixedly connected to the upper side of the rotating seat (27).

7. A large-stroke, high-precision, five-dimensional adjustment frame according to claim 6, characterized in that: A connecting rod is fixedly connected between the piston rod and the spherical bearing ball (26), and multiple connecting frames (29) are fixedly connected around the connecting rod. A spring body (30) is fixedly connected between the connecting frame (29) and the bearing plate (28).

8. A large-stroke, high-precision five-dimensional adjustment frame according to any one of claims 1-7, characterized in that: The base body (1) has threaded legs (17) at each of its four corners, and rubber foot supports (19) are installed at the lower end of each threaded leg (17).

9. A large-stroke, high-precision five-dimensional adjustment frame according to claim 8, characterized in that: The lower end of the threaded support leg (17) is fixedly connected to a nut (18), and the upper end of the rubber foot support (19) is fixedly connected to a threaded connecting rod, which is threadedly connected to the nut (18).

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