A vacuum lamination apparatus

Abstract

The utility model belongs to diaphragm technology field, disclose a kind of vacuum laminating equipment.The vacuum laminating equipment provided by the utility model includes vacuum cavity, fixture mechanism, sealing mechanism and drive mechanism, vacuum cavity includes the upper cavity and lower cavity that mutually buckles, and the upper cavity is equipped with the hole of passing through on it, fixture mechanism passes through the hole of passing through and is inserted into vacuum cavity, sealing mechanism is used to seal the hole of passing through, drive mechanism includes first floating joint, traction assembly and drive assembly, one end of first floating joint is connected with the upper cavity, the other end of first floating joint is connected with traction assembly, the output end of drive assembly is drivingly connected with traction assembly, and drive assembly is used to drive the upper cavity and move in the direction of far from lower cavity.This vacuum laminating equipment reduces the influence of vacuum cavity when vacuumizing on fixture mechanism, improves the laminating accuracy, increases the activity of the upper cavity when vacuumizing of vacuum cavity, avoids the deformation of the upper cavity and produces pressure.

Description

Technical Field

[0001] This utility model relates to the field of diaphragm bonding technology, and in particular to a vacuum bonding device. Background Technology

[0002] In related technologies, vacuum bonding equipment includes a vacuum chamber, a drive mechanism, and a fixture mechanism. The vacuum chamber comprises an upper chamber and a lower chamber that interlock. The fixture mechanism is located within the vacuum chamber and is directly connected to the upper chamber. The fixture mechanism enables vacuum bonding of the lens and diaphragm within the vacuum chamber. The drive mechanism is directly connected to the upper chamber and drives the upper chamber to rise, thereby enabling the opening operation of the upper and lower chambers. When the upper and lower chambers interlock, achieving the cavity closing operation, and a vacuum operation is performed on the closed vacuum chamber, the upper chamber adapts to the plane of the lower chamber, causing the upper chamber to shift and vibrate relative to the lower chamber. This, in turn, causes the fixture mechanism to vibrate, reducing bonding accuracy. Furthermore, because the drive mechanism is directly connected to the upper chamber, the upper chamber will deform and experience stress when adapting to the plane of the lower chamber.

[0003] Therefore, there is an urgent need for a vacuum bonding device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum bonding device to reduce the impact of vacuum chamber evacuation on the fixture mechanism, improve bonding accuracy, increase the amount of movement of the upper cavity during vacuum chamber evacuation, and avoid deformation and stress in the upper cavity.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A vacuum bonding device, comprising:

[0007] A vacuum cavity, comprising an upper cavity and a lower cavity that are interlocked, wherein the upper cavity has a through hole;

[0008] A fixture mechanism that extends through the through-hole into the vacuum cavity;

[0009] A sealing mechanism configured to seal the through hole;

[0010] The driving mechanism includes a first floating joint, a traction component, and a driving component. One end of the first floating joint is connected to the upper cavity, and the other end of the first floating joint is connected to the traction component. The output end of the driving component is connected to the traction component in a transmission manner. The driving component is configured to drive the upper cavity to move away from the lower cavity.

[0011] As an optional solution, the traction component includes:

[0012] A connecting plate is connected to the output end of the drive assembly;

[0013] A traction rod, the bottom end of which is connected to the first floating joint, and the traction rod is movably inserted through the connecting plate;

[0014] A fixing block, which is fixedly sleeved on the top end of the traction rod;

[0015] An elastic element is located between the fixing block and the connecting plate, and the bottom end of the elastic element abuts against the top end of the connecting plate.

[0016] As an optional solution, the elastic element includes:

[0017] The first connecting block, in which the traction rod is movably inserted, and the top end of the first connecting block abuts against the bottom end of the fixing block;

[0018] The second connecting block, in which the traction rod is movably inserted, has its bottom end abutting against the top end of the connecting plate.

[0019] Multiple compression springs are arranged around the outer periphery of the traction rod, and each compression spring is connected between the first connecting block and the second connecting block.

[0020] As an optional solution, the connecting plate includes:

[0021] A connecting plate body, wherein the connecting plate body is connected to the output end of the drive component;

[0022] A first linear bearing is mounted on the connecting plate body. The traction rod is movably inserted through the first linear bearing, and the top end of the first linear bearing abuts against the bottom end of the elastic member.

[0023] As an optional solution, the vacuum bonding device further includes an adjustment mechanism, which comprises:

[0024] An adjustment drive assembly is disposed on the traction assembly;

[0025] An adjustment platform, wherein the adjustment drive component is configured to drive the adjustment platform to move along the X and / or Y directions, and the adjustment platform is connected to the fixture mechanism.

[0026] As an optional solution, the fixture mechanism includes:

[0027] A connecting rod, the top end of which is connected to the adjustment platform;

[0028] The fixture body is located inside the vacuum cavity, and the bottom end of the connecting rod passes through the through hole and connects to the fixture body.

[0029] As an optional solution, the sealing mechanism includes:

[0030] A vacuum bellows is sleeved around the outer periphery of the connecting rod, and the top end of the vacuum bellows is sealed to the adjustment platform.

[0031] A sealing drive component, wherein the sealing drive component is disposed on the adjustment platform;

[0032] A sealing plate is provided with a clearance hole, through which the connecting rod is inserted. The bottom end of the vacuum bellows is sealed and connected to the clearance hole. The output end of the sealing drive is connected to the sealing plate in a transmission manner. The sealing drive can drive the sealing plate to move towards the upper cavity so that the clearance hole and the through hole are sealed and connected.

[0033] As an optional solution, the sealing mechanism further includes:

[0034] A guide rod, which is movably inserted into the adjustment platform;

[0035] The second floating joint has one end connected to the sealing plate and the other end connected to the guide rod.

[0036] As an optional solution, the adjustment platform includes:

[0037] The platform body is sealed to the top end of the vacuum bellows;

[0038] The second linear bearing is mounted on the platform body, and the guide rod is movably inserted inside the second linear bearing.

[0039] As an optional solution, the adjustment drive component includes:

[0040] An X-direction drive is disposed on the traction assembly, and the output end of the X-direction drive is connected to the adjustment platform via a transmission connection. The X-direction drive is configured to drive the adjustment platform to move along the X-direction.

[0041] A Y-direction drive is disposed on the traction assembly, and the output end of the Y-direction drive is connected to the adjustment platform via a transmission connection. The Y-direction drive is configured to drive the adjustment platform to move along the Y-direction.

[0042] The beneficial effects of this utility model are:

[0043] This invention provides a vacuum bonding device. The device allows a fixture mechanism to extend into the vacuum chamber through a through-hole in the upper cavity, and the through-hole is sealed by a sealing mechanism. This ensures the airtightness of the vacuum chamber while separating the fixture mechanism from the chamber, preventing the vacuum chamber from shifting and vibrating during vacuuming, thus reducing the impact of vacuuming on the fixture mechanism and improving bonding accuracy. Furthermore, by connecting the output end of the drive assembly to the traction assembly, which is connected to the upper cavity via a first floating joint, the range of motion of the upper cavity relative to the traction and drive assemblies is increased. When the vacuum chamber is evacuated, the upper cavity can flexibly adapt to the plane of the lower cavity, preventing deformation and stress in the upper cavity. Attached Figure Description

[0044] Figure 1 This is an isometric view of the vacuum bonding device provided in this embodiment of the utility model;

[0045] Figure 2 This is a first structural cross-sectional view of the vacuum bonding device provided in this embodiment of the present invention;

[0046] Figure 3 This is a second structural cross-sectional view of the vacuum bonding device provided in this embodiment of the present invention;

[0047] Figure 4 yes Figure 3 Enlarged view of the structure at point A in the middle.

[0048] In the picture:

[0049] 1. Vacuum cavity; 11. Upper cavity; 111. Through hole; 12. Lower cavity;

[0050] 2. Fixture mechanism; 21. Connecting rod; 22. Fixture body;

[0051] 3. Sealing mechanism; 31. Vacuum bellows; 32. Sealing drive component; 33. Sealing plate; 331. Clearance hole; 34. Guide rod; 35. Second floating joint;

[0052] 4. Drive mechanism; 41. First floating joint; 42. Traction assembly; 421. Connecting plate; 4211. Connecting plate body; 4212. First linear bearing; 422. Traction rod; 423. Fixing block; 424. Elastic element; 4241. First connecting block; 4242. Second connecting block; 4243. Compression spring;

[0053] 5. Adjustment mechanism; 51. Adjustment drive assembly; 511. X-direction drive component; 512. Y-direction drive component; 52. Adjustment platform; 521. Platform body; 522. Second linear bearing. Detailed Implementation

[0054] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0055] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0056] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0057] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0058] like Figure 1 and Figure 2As shown, this embodiment provides a vacuum bonding device, which includes a vacuum chamber 1, a fixture mechanism 2, a sealing mechanism 3, and a driving mechanism 4. The vacuum chamber 1 includes an upper chamber 11 and a lower chamber 12 that are interlocked. The upper chamber 11 has a through hole 111. The fixture mechanism 2 extends into the vacuum chamber 1 through the through hole 111 and adsorbs a film in the vacuum chamber 1 to ensure that the adsorbed film is aligned and bonded with the lens in the vacuum chamber 1. The sealing mechanism 3 is used to seal the through hole 111. The driving mechanism 4 includes a first floating joint 41, a traction component 42, and a driving component (not shown in the figure). One end of the first floating joint 41 is connected to the upper chamber 11, and the other end of the first floating joint 41 is connected to the traction component 42. The output end of the driving component is connected to the traction component 42 for transmission. The driving component is used to drive the upper chamber 11 to move away from the lower chamber 12. The vacuum bonding device provided in this embodiment allows the fixture mechanism 2 to extend into the vacuum chamber 1 through the through hole 111 on the upper cavity 11, and the through hole 111 is sealed by the sealing mechanism 3. This ensures the airtightness of the vacuum chamber 1 while separating the fixture mechanism 2 from the vacuum chamber 1, preventing the vacuum chamber 1 from shifting and vibrating during vacuuming, thus reducing the impact of vacuuming on the fixture mechanism 2 and improving bonding accuracy. Furthermore, the traction component 42 is connected to the upper cavity 11 via the first floating joint 41, increasing the range of motion of the upper cavity 11 relative to the traction component 42 and the drive component. When vacuuming the vacuum chamber 1, the upper cavity 11 can flexibly adapt to the plane of the lower cavity 12, preventing deformation and stress in the upper cavity 11. Optionally, in this embodiment, the drive component can be a drive cylinder or a linear motor module; the specific form of the drive component is not limited in this embodiment.

[0059] It should be noted that in this embodiment, the driving component drives the upper cavity 11 to rise along the Z direction in the figure through the traction component 42 and the first floating joint 41, thereby realizing the opening operation of the upper cavity 11 and the lower cavity 12.

[0060] In this embodiment, as Figure 3 and Figure 4As shown, the traction assembly 42 includes a connecting plate 421, a traction rod 422, a fixing block 423, and an elastic element 424. The connecting plate 421 is connected to the output end of the drive assembly. The bottom end of the traction rod 422 is connected to the first floating joint 41, and the traction rod 422 is movably inserted into the connecting plate 421. The fixing block 423 is fixedly sleeved on the top end of the traction rod 422. The elastic element 424 is located between the fixing block 423 and the connecting plate 421, with its bottom end abutting against the top end of the connecting plate 421. When the drive assembly drives the connecting plate 421 to rise along the Z direction, the connecting plate 421 pushes the elastic element 424 upward, which in turn pushes the fixing block 423 upward, thereby lifting the upper cavity 11 upward via the traction rod 422, thus achieving the cavity opening operation. When the upper cavity 11 and lower cavity 12 need to be engaged to achieve cavity closing, the drive assembly only needs to drive the connecting plate 421 to descend along the Z direction. At this time, the connecting plate 421 removes the upward pushing force on the elastic element 424 and the fixing block 423. Under its own gravity, the upper cavity 11 can pull the fixing block 423 and the traction rod 422 down along the Z direction, ensuring that the fixing block 423 abuts against the elastic element 424 and that the upper cavity 11 flexibly adapts to the plane of the lower cavity 12. By setting the elastic element 424, a buffer is provided for the rise and fall of the upper cavity 11, preventing large impacts from occurring between the upper cavity 11 and the lower cavity 12 during cavity opening and closing, further reducing the impact of the vacuum cavity 1 on the fixture mechanism 2.

[0061] Optionally, in this embodiment, as Figure 4 As shown, the elastic element 424 includes a first connecting block 4241, a second connecting block 4242, and multiple compression springs 4243. The traction rod 422 is movably inserted through the first connecting block 4241 and the second connecting block 4242. The top end of the first connecting block 4241 abuts against the bottom end of the fixed block 423, and the bottom end of the second connecting block 4242 abuts against the top end of the connecting plate 421. Multiple compression springs 4243 surround the outer periphery of the traction rod 422, and each compression spring 4243 is connected between the first connecting block 4241 and the second connecting block 4242. This structural design of the elastic element 424 ensures the uniformity of the elastic force exerted by the elastic element 424 around the fixed block 423, thereby ensuring that the traction rod 422 can rise and fall smoothly. In other embodiments, the elastic element 424 can be designed directly as a spring sheet.

[0062] In this embodiment, as Figure 3 and Figure 4As shown, the connecting plate 421 includes a connecting plate body 4211 and a first linear bearing 4212. The connecting plate body 4211 is connected to the output end of the drive assembly. The first linear bearing 4212 is mounted on the connecting plate body 4211. A traction rod 422 is movably inserted into the first linear bearing 4212, and the top end of the first linear bearing 4212 abuts against the bottom end of the elastic member 424. When the drive assembly drives the connecting plate body 4211 to rise along the Z direction, the connecting plate body 4211 drives the first linear bearing 4212 to push the elastic member 424 upward relative to the traction rod 422. The elastic member 424 then pushes the fixing block 423 upward, ultimately causing the traction rod 422 and the first linear bearing 4212 to rise together. By setting the first linear bearing 4212, the friction between the connecting plate 421 and the traction rod 422 is effectively reduced.

[0063] Optionally, in this embodiment, as Figure 1 As shown, four traction rods 422 are spaced apart. The bottom end of each traction rod 422 is connected to the upper cavity 11 via a first floating joint 41. Each traction rod 422 is equipped with a first linear bearing 4212, an elastic element 424, and a fixing block 423. Optionally, a limiting adjustment bolt is provided at the top of each fixing block 423. The limiting adjustment bolt is used to adjust the height position of the fixing block 423 to ensure that the four traction rods 422 are at the same height, thereby ensuring the levelness of the upper cavity 11. Since the structure and principle of the limiting adjustment bolt are existing technology, they will not be described in detail here. In other embodiments, the specific number of traction rods 422 can be set according to requirements.

[0064] In this embodiment, as Figure 1 and Figure 2 As shown, the vacuum bonding equipment also includes an adjustment mechanism 5, which includes an adjustment drive assembly 51 and an adjustment platform 52. The adjustment drive assembly 51 is disposed on the traction assembly 42 and is used to drive the adjustment platform 52 to move along the X and / or Y directions. The adjustment platform 52 is connected to the fixture mechanism 2. By setting the adjustment mechanism 5, the position of the fixture mechanism 2 can be adjusted, thereby ensuring bonding accuracy. It should be noted that since the upper cavity 11 is connected to the traction rod 422 through the first floating joint 41, the upper cavity 11 can offset and vibrate relative to the traction rod 422, avoiding the upper cavity 11 transmitting vibration to the fixture mechanism 2 through the traction assembly 42 and the adjustment mechanism 5. Specifically, the adjustment drive assembly 51 is disposed on the connecting plate body 4211.

[0065] Optionally, in this embodiment, the adjustment drive assembly 51 drives the adjustment platform 52 to move along the X and Y directions. Specifically, the adjustment drive assembly 51 includes an X-direction drive member 511 and a Y-direction drive member 512. The X-direction drive member 511 is disposed on the traction assembly 42, and its output end is connected to the adjustment platform 52. The X-direction drive member 511 is used to drive the adjustment platform 52 to move along the X direction. The Y-direction drive member 512 is disposed on the traction assembly 42, and its output end is connected to the adjustment platform 52. The Y-direction drive member 512 is used to drive the adjustment platform 52 to move along the Y direction. By setting the X-direction drive member 511 and the Y-direction drive member 512, it is ensured that the adjustment platform 52 drives the fixture mechanism 2 to move along both the X and Y directions. Since the fixture mechanism 2 can move not only along the X direction but also along the Y direction, it can deflect around the Z direction relative to its initial position. Specifically, both the X-direction drive component 511 and the Y-direction drive component 512 are disposed on the connecting plate body 4211. It should be noted that the output end of the X-direction drive component 511 is connected to the adjustment platform 52 via a rolling bearing, and the output end of the Y-direction drive component 512 is also connected to the adjustment platform 52 via a rolling bearing. This ensures that both the X-direction drive component 511 and the Y-direction drive component 512 can act on the adjustment platform 52, avoiding interference during the driving process. Optionally, in this embodiment, the X-direction drive component 511 can be a drive cylinder or a linear motor module; the specific form of the X-direction drive component 511 is not limited in this embodiment. Optionally, in this embodiment, the Y-direction drive component 512 can be a drive cylinder or a linear motor module; the specific form of the Y-direction drive component 512 is not limited in this embodiment.

[0066] Alternatively, in other embodiments, only the X-direction drive member 511 may be provided, so that the X-direction drive member 511 drives the adjustment platform 52 to move along the X direction. In other embodiments, only the Y-direction drive member 512 may be provided, so that the Y-direction drive member 512 drives the adjustment platform 52 to move along the Y direction.

[0067] In this embodiment, as Figure 2 As shown, the fixture mechanism 2 includes a connecting rod 21 and a fixture body 22. The top end of the connecting rod 21 is connected to the adjustment platform 52, the fixture body 22 is located inside the vacuum chamber 1, and the bottom end of the connecting rod 21 passes through the through hole 111 and is connected to the fixture body 22.

[0068] In this embodiment, as Figure 1 and Figure 2As shown, the sealing mechanism 3 includes a vacuum bellows 31, a sealing drive 32, and a sealing plate 33. The vacuum bellows 31 is sleeved around the outer periphery of the connecting rod 21, and its top end is sealed to the adjusting platform 52. The sealing drive 32 is mounted on the adjusting platform 52. The sealing plate 33 has a clearance hole 331 through which the connecting rod 21 passes. The bottom end of the vacuum bellows 31 is sealed to the clearance hole 331. The output end of the sealing drive 32 is connected to the sealing plate 33 via a transmission mechanism. The sealing drive 32 can drive the sealing plate 33 to move towards the upper cavity 11 (i.e., downward along the Z direction) to seal the clearance hole 331 with the through hole 111. It should be noted that when the sealing mechanism 3 does not need to seal the through hole 111, the sealing drive 32 drives the sealing plate 33 to move upward along the Z direction, thus disconnecting the clearance hole 331 from the through hole 111. By setting up the vacuum bellows 31, the sealing plate 33 is able to move up and down relative to the adjusting platform 52 while ensuring a tight seal, effectively guaranteeing the sealing effect of the sealing mechanism 3 on the through hole 111. Optionally, the sealing drive 32 is a drive cylinder. Optionally, in this embodiment, two sealing drive 32s are spaced apart, and the two sealing drive 32s drive the sealing plate 33 to move up and down synchronously, ensuring the reliability of driving the sealing plate 33. In other embodiments, the specific number of sealing drive 32s can be set according to requirements.

[0069] Optionally, such as Figure 1 and Figure 2 As shown, the sealing mechanism 3 also includes a guide rod 34 and a second floating joint 35. The guide rod 34 is movably inserted into the adjustment platform 52. One end of the second floating joint 35 is connected to the sealing plate 33, and the other end is connected to the guide rod 34. By setting the second floating joint 35, the range of motion of the sealing plate 33 relative to the guide rod 34 is increased, ensuring that the clearance hole 331 and the through hole 111 are sealed and connected. It should be noted that in this embodiment, the output end of the sealing drive 32 is connected to the sealing plate 33 via the floating joint, ensuring the normal driving operation of the sealing drive 32 and avoiding the problem of drive jamming.

[0070] Optionally, such as Figure 2As shown, the adjustment platform 52 includes a platform body 521 and a second linear bearing 522. The platform body 521 is sealed to the top end of the vacuum bellows 31. The second linear bearing 522 is installed on the platform body 521, and a guide rod 34 is movably inserted within the second linear bearing 522. By setting the second linear bearing 522, the friction between the guide rod 34 and the adjustment platform 52 is reduced, ensuring the flexibility of the guide rod 34 in lifting and lowering relative to the second linear bearing 522. Specifically, in this embodiment, the sealing drive 32 is disposed on the platform body 521, and the platform body 521 is connected to the connecting rod 21.

[0071] Optionally, in this embodiment, as Figure 1 As shown, two guide rods 34 are spaced apart. The bottom end of each guide rod 34 is connected to the sealing plate 33 via a second floating joint 35, and each guide rod 34 is equipped with a corresponding second linear bearing 522 to ensure the smooth lifting and lowering movement of the sealing plate 33. In other embodiments, the specific number of guide rods 34 can be set according to requirements.

[0072] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A vacuum bonding device, characterized in that, include: Vacuum cavity (1), the vacuum cavity (1) includes an upper cavity (11) and a lower cavity (12) that are interlocked with each other, and the upper cavity (11) is provided with a through hole (111). A fixture mechanism (2) extends into the vacuum cavity (1) through the through hole (111); A sealing mechanism (3) is configured to seal the through hole (111). The drive mechanism (4) includes a first floating joint (41), a traction component (42), and a drive component. One end of the first floating joint (41) is connected to the upper cavity (11), and the other end of the first floating joint (41) is connected to the traction component (42). The output end of the drive component is connected to the traction component (42) in a transmission manner. The drive component is configured to drive the upper cavity (11) to move away from the lower cavity (12).

2. The vacuum bonding equipment according to claim 1, characterized in that, The traction assembly (42) includes: A connecting plate (421) is connected to the output end of the drive assembly; The bottom end of the traction rod (422) is connected to the first floating joint (41), and the traction rod (422) is movably inserted in the connecting plate (421); A fixing block (423) is fixedly sleeved on the top end of the traction rod (422); An elastic element (424) is located between the fixing block (423) and the connecting plate (421), and the bottom end of the elastic element (424) abuts against the top end of the connecting plate (421).

3. The vacuum bonding equipment according to claim 2, characterized in that, The elastic element (424) includes: The first connecting block (4241) is in which the traction rod (422) is movably inserted, and the top end of the first connecting block (4241) abuts against the bottom end of the fixing block (423). The second connecting block (4242) is movably inserted in the second connecting block (4242), and the bottom end of the second connecting block (4242) abuts against the top end of the connecting plate (421); Multiple compression springs (4243) are arranged around the outer periphery of the traction rod (422), and each compression spring (4243) is connected between the first connecting block (4241) and the second connecting block (4242).

4. The vacuum bonding equipment according to claim 2, characterized in that, The connecting plate (421) includes: A connecting plate body (4211) is connected to the output end of the drive assembly; The first linear bearing (4212) is mounted on the connecting plate body (4211). The traction rod (422) is movably inserted inside the first linear bearing (4212), and the top end of the first linear bearing (4212) abuts against the bottom end of the elastic member (424).

5. The vacuum bonding equipment according to any one of claims 1 to 4, characterized in that, The vacuum bonding device further includes an adjustment mechanism (5), which includes: Adjustment drive assembly (51), which is disposed on the traction assembly (42); An adjustment platform (52) is configured to drive the adjustment platform (52) to move along the X and / or Y directions, and the adjustment platform (52) is connected to the fixture mechanism (2).

6. The vacuum bonding equipment according to claim 5, characterized in that, The fixture mechanism (2) includes: Connecting rod (21), the top end of which is connected to the adjusting platform (52); The fixture body (22) is located inside the vacuum cavity (1), and the bottom end of the connecting rod (21) passes through the through hole (111) and is connected to the fixture body (22).

7. The vacuum bonding equipment according to claim 6, characterized in that, The sealing mechanism (3) includes: Vacuum bellows (31), the vacuum bellows (31) is sleeved on the outer periphery of the connecting rod (21), and the top end of the vacuum bellows (31) is sealed to the adjustment platform (52); A sealing drive (32) is disposed on the adjustment platform (52); A sealing plate (33) is provided with a clearance hole (331). The connecting rod (21) passes through the clearance hole (331). The bottom end of the vacuum bellows (31) is sealed and connected to the clearance hole (331). The output end of the sealing drive (32) is connected to the sealing plate (33) in a transmission manner. The sealing drive (32) can drive the sealing plate (33) to move towards the upper cavity (11) so that the clearance hole (331) is sealed and connected to the through hole (111).

8. The vacuum bonding equipment according to claim 7, characterized in that, The sealing mechanism (3) further includes: Guide rod (34), which is movably inserted into the adjustment platform (52); The second floating joint (35) has one end connected to the sealing plate (33) and the other end connected to the guide rod (34).

9. The vacuum bonding equipment according to claim 8, characterized in that, The adjustment platform (52) includes: Platform body (521), the platform body (521) is sealed to the top end of the vacuum bellows (31); The second linear bearing (522) is mounted on the platform body (521), and the guide rod (34) is movably inserted inside the second linear bearing (522).

10. The vacuum bonding equipment according to claim 5, characterized in that, The adjustment drive component (51) includes: An X-direction drive (511) is disposed on the traction assembly (42), and the output end of the X-direction drive (511) is connected to the adjustment platform (52) in a transmission manner. The X-direction drive (511) is configured to drive the adjustment platform (52) to move along the X direction. Y-direction drive (512), the Y-direction drive (512) is disposed on the traction assembly (42), the output end of the Y-direction drive (512) is connected to the adjustment platform (52) for transmission, and the Y-direction drive (512) is configured to drive the adjustment platform (52) to move along the Y direction.

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