A photoresist storage tank

Abstract

The utility model discloses a photoresist storage tank relates to photoresist storage technical field, aims at solving the problem that current storage tank cannot carry out multi -point independent storage operation to photoresist, and the storage stability needs to be improved, and its technical scheme main points include the storage outer jar, the inside of storage outer jar is provided with a plurality of storage inner jar, a plurality of storage inner jar vertical one -dimensional arrangement, and through multiple connecting rods connection between adjacent two storage inner jar, the inside of storage inner jar is provided with piston block, the both sides of piston block inside storage inner jar are arranged as air cavity and material cavity, the inner wall of storage outer jar is provided with cooling interlayer, the lower surface of storage outer jar is provided with water inlet pipe, the upper surface of storage outer jar is provided with drain pipe, and water inlet pipe and drain pipe all with the inside of cooling interlayer are communicated. Reached the effect that can carry out multi -point independent storage operation to photoresist, and the storage stability is high, and the practicality is strong.

Description

Technical Field

[0001] This utility model relates to the field of photoresist storage technology, and in particular to a photoresist storage container. Background Technology

[0002] Photoresist storage tanks are key supporting equipment in semiconductor photoresist production systems. They are specifically designed for large-scale photoresist storage and are of great significance for the efficient operation of the production process.

[0003] From a necessity perspective, photoresist production requires multiple processes such as precision synthesis and filtration. The finished product is not used immediately but needs to be integrated with downstream wafer manufacturing processes. Large-scale storage can prevent production line shutdowns caused by a disconnect between production and application, while also meeting the raw material reserve needs of the semiconductor industry for mass production, coping with order fluctuations, and ensuring supply chain stability.

[0004] Existing storage tanks cannot perform multi-point independent storage operations for photoresist, and storage stability needs to be improved. Utility Model Content

[0005] The purpose of this invention is to provide a photoresist storage tank that can perform multi-point independent storage of photoresist, with high storage stability and strong practicality.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A photoresist storage container includes an outer storage container and multiple inner storage containers arranged longitudinally in a row. Adjacent inner storage containers are connected by multiple connecting rods. A piston block is provided inside each inner storage container, and air chambers and material chambers are provided on both sides of the piston block inside the inner storage container.

[0008] By adopting the above technical solution, photoresist can be stored independently at multiple points, and at the same time, the photoresist can be kept away from the external environment during material retrieval, resulting in high storage stability and strong practicality.

[0009] Furthermore, a cooling jacket is provided on the inner wall of the storage outer tank, a water inlet pipe is provided on the lower surface of the storage outer tank, and a drain pipe is provided on the upper surface of the storage outer tank. Both the water inlet pipe and the drain pipe are connected to the interior of the cooling jacket.

[0010] By adopting the above technical solution, low-temperature water can be effectively introduced to reduce the internal temperature of the storage tank.

[0011] Furthermore, a gas guide pipe is fixedly connected to the upper surface of the storage tank, a second solenoid valve is installed in the pipeline of the gas guide pipe, one end of the gas guide pipe is connected to the inside of the gas chamber, and one end of multiple gas guide pipes is connected to the same gas guide pipe.

[0012] By adopting the above technical solution, the second solenoid valve can be used to control and operate multiple gas distribution pipes.

[0013] Furthermore, a feed branch pipe is fixedly connected to the lower surface of the storage tank, a third solenoid valve is installed in the feed branch pipe, one end of the feed branch pipe is connected to the inside of the material chamber, and one end of multiple feed branch pipes is connected to the same feed pipe.

[0014] By adopting the above technical solution, multiple feed pipes can be independently controlled using a third solenoid valve.

[0015] Furthermore, a discharge branch pipe is fixedly connected to the lower surface of the storage tank, a first solenoid valve is installed in the pipeline of the discharge branch pipe, one end of the discharge branch pipe is connected to the inside of the material cavity, and one end of multiple discharge branch pipes is connected to the same discharge pipe.

[0016] By adopting the above technical solution, multiple first solenoid valves can be used to independently control multiple discharge pipes.

[0017] Furthermore, a temperature sensor is provided on the inner side of the storage outer tank, and a wire hole is provided on the lower surface of the storage outer tank.

[0018] By adopting the above technical solution, the internal temperature of the storage tank can be monitored in real time.

[0019] In summary, the beneficial technical effects of this utility model are as follows:

[0020] 1. This utility model allows for the storage of photoresist by introducing it through a feed pipe, then opening the third and second solenoid valves, and subsequently using an external air pump to extract air from the air chamber. During this process, a piston block moves inside the storage tank, guiding the photoresist into the material chamber through the feed pipe. Once all storage tanks are filled with photoresist, the second and third solenoid valves are closed. This allows for independent storage of photoresist at multiple points using multiple storage tanks. When photoresist needs to be retrieved... This device can retrieve photoresist from multiple storage tanks one by one, avoiding frequent contact between large amounts of photoresist and the external environment. The protection of the photoresist during retrieval is effectively improved. During retrieval, the second and first solenoid valves at the corresponding positions are opened, and then air is introduced into the air chamber inside the corresponding storage tank through the air guide pipe and air guide branch pipe, causing the piston block to move down. This effectively squeezes out the photoresist inside the storage tank, thereby achieving a stable discharge operation. The device has high photoresist storage efficiency and strong overall practicality.

[0021] 2. This utility model can introduce external low-temperature water into the cooling jacket through a water inlet pipe when storing photoresist. This can use low-temperature water to reduce the temperature inside the storage outer tank, so that the photoresist inside the multiple storage inner tanks can be effectively placed in a low-temperature environment. Since a temperature sensor is installed inside the storage outer tank, the temperature sensor can effectively detect the temperature inside the storage outer tank, ensuring that the photoresist can be stored for a long time. It is highly practical. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0023] Figure 2 This is a diagram of the internal structure of the present invention;

[0024] Figure 3 This utility model Figure 2 Enlarged view of point A.

[0025] In the diagram: 1. Outer storage tank; 2. Feed pipe; 3. Air guide pipe; 4. Drain pipe; 5. Discharge pipe; 6. Water inlet pipe; 7. Cooling jacket; 8. Inner storage tank; 9. Piston block; 10. Discharge branch pipe; 11. First solenoid valve; 12. Air guide branch pipe; 13. Second solenoid valve; 14. Air chamber; 15. Material chamber; 16. Feed branch pipe; 17. Third solenoid valve. Detailed Implementation

[0026] The method of this utility model will be further described in detail below with reference to the accompanying drawings.

[0027] Reference Figure 1 , Figure 2 , Figure 3A photoresist storage container includes an outer storage container 1, inside which are arranged multiple inner storage containers 8. The inner storage containers 8 are arranged longitudinally in a straight line, and adjacent inner storage containers 8 are connected by multiple connecting rods. A piston block 9 is disposed inside each inner storage container 8. Air chambers 14 and material chambers 15 are configured on both sides of the piston block 9 inside each inner storage container 8. A gas guide pipe 12 is fixedly connected to the upper surface of each inner storage container 8. A second solenoid valve 13 is installed in the gas guide pipe 12. One end of the gas guide pipe 12 communicates with the interior of the air chamber 14. The multiple gas guide pipes 1... One end of the feed pipe 2 is connected to the same air guide pipe 3. A feed branch pipe 16 is fixedly connected to the lower surface of the inner storage tank 8. A third solenoid valve 17 is installed in the feed branch pipe 16. One end of the feed branch pipe 16 communicates with the inside of the material chamber 15. One end of multiple feed branch pipes 16 is connected to the same feed pipe 2. A discharge branch pipe 10 is fixedly connected to the lower surface of the inner storage tank 8. A first solenoid valve 11 is installed in the discharge branch pipe 10. One end of the discharge branch pipe 10 communicates with the inside of the material chamber 15. One end of multiple discharge branch pipes 10 is connected to the same discharge pipe 5. When storing photoresist, the photoresist can be introduced through the feed pipe 2, then the third solenoid valve 17 and the second solenoid valve 13 are opened. An external air pump is then used to extract air from the air chamber 14. At this time, the piston block 9 moves inside the inner storage tank 8. This action guides the photoresist into the material chamber 15 through the feed branch pipe 16. Once all the inner storage tanks 8 are filled with photoresist, the second solenoid valve 13 and the third solenoid valve 17 are closed. This allows for multi-point independent storage of photoresist using multiple inner storage tanks 8. When photoresist needs to be retrieved, it can be... This device allows for the sequential retrieval of photoresist from multiple storage tanks 8, avoiding frequent contact between large amounts of photoresist and the external environment. This effectively improves the protection of the photoresist during retrieval. During retrieval, the second solenoid valve 13 and the first solenoid valve 11 at the corresponding positions are opened. Then, air is introduced into the air chamber 14 inside the corresponding storage tank 8 through the air guide pipe 3 and the air guide branch pipe 12, causing the piston block 9 to move downward. This effectively squeezes out the photoresist from the storage tank 8, thereby achieving a stable discharge operation. This device has high photoresist storage efficiency and strong overall practicality.

[0028] Reference Figure 1 , Figure 2The storage outer tank 1 has a cooling jacket 7 on its inner wall, a water inlet pipe 6 on its lower surface, and a drain pipe 4 on its upper surface. Both the water inlet pipe 6 and the drain pipe 4 are connected to the interior of the cooling jacket 7. A temperature sensor (PT100) is installed inside the storage outer tank 1, and a wire hole is installed on the lower surface of the storage outer tank 1. When storing photoresist, the water inlet pipe 6 can be used to introduce low-temperature water from outside into the cooling jacket 7. This can use low-temperature water to lower the temperature inside the storage outer tank 1, so that the photoresist inside the multiple storage inner tanks 8 can be effectively placed in a low-temperature environment. Since a temperature sensor is installed inside the storage outer tank 1, the temperature sensor can effectively detect the temperature inside the storage outer tank 1, ensuring that the photoresist can be stored for a long time, which is highly practical.

[0029] Working Principle: In use, first install the device at the designated location. Then, install a three-way valve at the port of the air inlet pipe, connecting the inlet and outlet air paths. Introduce photoresist through the feed pipe 2. Next, open the third solenoid valve 17 and the second solenoid valve 13. Then, use an external air pump to extract air from the air chamber 14. At this time, the piston block 9 moves inside the storage tank 8. This action introduces photoresist into the material chamber 15 through the feed branch pipe 16. Once all storage tanks 8 are filled with photoresist, close the second solenoid valve 13 and the third solenoid valve 17. This allows for independent storage of photoresist using multiple storage tanks 8. When photoresist needs to be retrieved, it can be retrieved one by one from each storage tank 8, avoiding frequent contact of large amounts of photoresist with the external environment. The protection of photoresist during use is effectively improved. When using, the second solenoid valve 13 and the first solenoid valve 11 at the corresponding positions are opened, and then air is introduced into the air chamber 14 inside the corresponding storage inner tank 8 through the air guide pipe 3 and the air guide branch pipe 12, causing the piston block 9 to move down. This can effectively squeeze out the photoresist inside the storage inner tank 8, thereby achieving a stable discharge operation. When storing photoresist, the external low-temperature water is introduced into the cooling jacket 7 through the water inlet pipe 6. This can use low-temperature water to reduce the temperature inside the storage outer tank 1, so that the photoresist inside the multiple storage inner tanks 8 can be effectively placed in a low-temperature environment. Since a temperature sensor is installed inside the storage outer tank 1, the temperature sensor can effectively detect the temperature inside the storage outer tank 1, ensuring that the photoresist can be stored for a long time.

[0030] The embodiments described herein are preferred embodiments of this utility model and are not intended to limit the scope of protection of this utility model. Therefore, all equivalent changes made to the structure, shape, and principle of this utility model should be included within the scope of protection of this utility model.

Claims

1. A photoresist storage container, comprising an outer storage container (1), characterized in that: The storage outer tank (1) is provided with multiple storage inner tanks (8). The multiple storage inner tanks (8) are arranged in a vertical line, and adjacent storage inner tanks (8) are connected by multiple connecting rods. The storage inner tank (8) is provided with a piston block (9). The piston block (9) inside the storage inner tank (8) is provided with an air chamber (14) and a material chamber (15) on both sides.

2. The photoresist storage container according to claim 1, characterized in that: The storage outer tank (1) has a cooling jacket (7) on its inner wall, a water inlet pipe (6) on its lower surface, and a drain pipe (4) on its upper surface. Both the water inlet pipe (6) and the drain pipe (4) are connected to the interior of the cooling jacket (7).

3. A photoresist storage container according to claim 1, characterized in that: A gas guide pipe (12) is fixedly connected to the upper surface of the storage tank (8). A second solenoid valve (13) is installed in the pipeline of the gas guide pipe (12). One end of the gas guide pipe (12) is connected to the inside of the gas chamber (14). One end of multiple gas guide pipes (12) is connected to the same gas guide pipe (3).

4. A photoresist storage container according to claim 1, characterized in that: A feed pipe (16) is fixedly connected to the lower surface of the storage tank (8). A third solenoid valve (17) is installed in the feed pipe (16). One end of the feed pipe (16) is connected to the inside of the material chamber (15). One end of multiple feed pipes (16) is connected to the same feed pipe (2).

5. A photoresist storage container according to claim 1, characterized in that: A discharge branch pipe (10) is fixedly connected to the lower surface of the storage tank (8). A first solenoid valve (11) is installed in the pipeline of the discharge branch pipe (10). One end of the discharge branch pipe (10) is connected to the inside of the material chamber (15). One end of multiple discharge branch pipes (10) is connected to the same discharge pipe (5).

6. A photoresist storage container according to claim 1, characterized in that: A temperature sensor is provided on the inner side of the storage outer tank (1), and a wire hole is provided on the lower surface of the storage outer tank (1).

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