A wafer sawing machine blanking mechanism

Abstract

The utility model relates to the technical field of wafer scriber blanking, disclose a wafer scriber blanking mechanism, including blanking frame and with the detachable connection of blanking frame mounting panel, are equipped with a plurality of mounting holes on the mounting panel, according to work piece size, a plurality of mounting holes detachably install suction nozzle mounting seat, the suction nozzle mounting seat is connected and has the suction nozzle elastically, and the suction nozzle is divided into outside suction nozzle and inside suction nozzle, and outside suction nozzle is used to adsorb the frame, and inside suction nozzle is used to adsorb work piece. The utility model, through the arrangement of outside suction nozzle and inside suction nozzle on the same mounting panel, can single independent adsorption work piece and its external frame, in turn blanking, improve the blanking efficiency, and the whole adopts suction nozzle and carries out negative pressure adsorption work piece, slows down the pressure to work piece, guarantees the yield of work piece.

Description

Technical Field

[0001] This utility model relates to the field of dicing machine feeding technology, specifically a dicing machine feeding mechanism. Background Technology

[0002] With the shrinking size and increasing integration of semiconductor devices, wafer dicing processes place higher demands on precision, efficiency, and yield. As a crucial step after dicing, the wafer cutting device needs to achieve high-precision picking, transfer, and sorting of wafers, while adapting to the processing needs of multi-size wafers (such as 6-inch, 8-inch, and 12-inch) and new materials. Furthermore, the trends of automated production and Industry 4.0 are driving the development of wafer cutting devices towards greater intelligence, gradually reducing the need for manual intervention.

[0003] Traditional wafer unloading devices separate the edge from the finished product and demold it separately, increasing the unloading operation time. Furthermore, vibrations during robotic arm gripping and guide rail movement can damage the finished product. In particular, the wafer lifting mechanism, which separates the finished product from the edge, can easily lead to wafer cracking if precision is insufficient, reducing production yield. Therefore, a device is needed that can mitigate vibrations during workpiece transfer and safely separate the edge from the finished product. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a dicing machine unloading mechanism that solves the problem of separating the edge from the finished product and demolding separately during the existing wafer dicing unloading process, which reduces the overall unloading efficiency. At the same time, the existing workpiece lifting mechanism is prone to damaging the finished product when separating it from the edge.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A dicing machine feeding mechanism includes a feeding frame and a mounting plate detachably connected to the feeding frame. The mounting plate has multiple mounting holes. According to the size of the workpiece, a suction nozzle mounting seat is detachably installed in several mounting holes. A suction nozzle is connected and elastically connected to the suction nozzle mounting seat. The suction nozzle is divided into an outer suction nozzle and an inner suction nozzle. The outer suction nozzle is used to adsorb the frame, and the inner suction nozzle is used to adsorb the workpiece.

[0007] The mounting plate has multiple mounting grooves near its two side edges on its end face, and the unloading frame has multiple threaded holes evenly spaced on its end face. The mounting plate and the unloading frame are locked together by multiple locking screws.

[0008] The inner suction nozzles are controlled by a single air pressure valve, while the outer suction nozzles share a common air pressure valve, allowing for separate control of workpiece and frame placement.

[0009] A movable seat is provided above the feeding frame. The movable seat moves linearly in a first direction under the drive of the first linear module. A second linear module is fixedly connected to the movable seat. The feeding frame moves linearly in a second direction through the second linear module. The first direction and the second direction are perpendicular to each other.

[0010] A drag chain is provided between the feeding frame and the moving seat.

[0011] A processing fixture is provided below the first linear module. The processing fixture has no less than two processing stations. The workpiece is transported to the processing station by the loading mechanism for subsequent processing. The processing fixture rotates under the drive of the drive table. A feeding guide shell is arranged on one side of the processing fixture.

[0012] This utility model has the following beneficial effects:

[0013] The dicing machine's unloading mechanism features multiple mounting holes on the mounting plate, allowing for easy removal of the mounting plate from the unloading frame before daily unloading. Matching suction nozzle mounts and nozzles are pre-installed according to the workpiece size, and then the mounting plate is assembled with the unloading frame. This process is more time-saving and labor-saving compared to the traditional method of replacing the robotic arm's unloading grippers all at once, and the adjustment and installation process is quick and convenient. The inner and outer suction nozzles can independently grip the workpiece and frame, allowing for step-by-step unloading of the frame and workpiece during subsequent unloading operations. The unloading frame only needs to travel one unloading stroke, improving overall unloading efficiency. The elastically connected suction nozzles provide cushioning and shock absorption when pressed against the workpiece surface by the unloading frame, reducing pressure on the workpiece. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the present invention from the main viewpoint;

[0015] Figure 2 This is a schematic diagram of the overall structure of this utility model from a downward viewing angle;

[0016] Figure 3 This is a schematic diagram of the installation state structure of the first linear module and the second linear module of this utility model;

[0017] Figure 4 This is a schematic diagram of the installation state of the drive platform and the unloading guide shell of this utility model;

[0018] Figure 5 This is a schematic diagram showing the distribution of the workpiece and the frame in Embodiments 2 and 3 of this utility model.

[0019] In the diagram: 1. Feeding frame; 2. Mounting plate; 3. Mounting slot; 4. Locking screw; 5. Mounting hole; 6. Nozzle; 7. First linear module; 8. Moving seat; 9. Second linear module; 10. Cable chain; 11. Machining fixture; 12. Workpiece; 13. Frame; 14. Drive table; 15. Feeding guide shell; 16. Nozzle mounting seat. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Example 1

[0022] A dicing machine feeding mechanism includes a feeding frame 1 and a mounting plate 2 detachably connected to the feeding frame 1. The mounting plate 2 has multiple mounting holes 5. According to the size of the workpiece 12, a suction nozzle mounting seat 16 is detachably installed in several mounting holes 5. A suction nozzle 6 is connected and elastically connected to the suction nozzle mounting seat 16. The suction nozzle 6 is divided into an outer suction nozzle 6 and an inner suction nozzle 6. The outer suction nozzle 6 is used to adsorb the frame 13, and the inner suction nozzle 6 is used to adsorb the workpiece 12.

[0023] like Figure 1 and 2 As shown, in the above technical solution, by opening multiple mounting holes 5 on the mounting plate 2, it is convenient to disassemble the mounting plate 2 on the unloading frame 1 separately before daily unloading. According to the size of the workpiece 12 to be processed, the matching suction nozzle mounting base 16 and suction nozzle 6 are pre-installed. The mounting plate 2 and the unloading frame 1 are then installed together. Compared with the traditional method of replacing the corresponding unloading gripper of the robot, this method saves time and effort, and the adjustment and installation process is convenient and quick. The inner suction nozzle 6 and the outer suction nozzle 6 can independently adsorb the workpiece 12 and the frame. In subsequent unloading, the frame and the workpiece 12 are unloaded in steps. The unloading frame 1 only needs to travel one unloading stroke, which improves the overall unloading efficiency. The elastically connected suction nozzle 6 can play a buffering and shock-absorbing role when the suction nozzle 6 is pressed against the surface of the workpiece 12 along with the unloading frame 1, reducing the pressure on the workpiece 12.

[0024] The mounting plate 2 has multiple mounting grooves 3 near its two side edges on its end face. The unloading frame 1 has multiple threaded holes evenly spaced on its surface. The mounting plate 2 and the unloading frame 1 are locked together by multiple locking screws 4. Figure 1As shown, in this technical solution, the locking screw 4 and the mounting slot 3 facilitate quick and easy disassembly of the mounting plate 2, improving the efficiency of replacing the entire cutting module. Simultaneously, the mounting position of the mounting plate 2 on the cutting frame 1 can be controlled, and the multiple mounting holes 5 on the mounting plate 2 further enhance the adaptability of the entire cutting mechanism to mainstream sizes.

[0025] The inner suction nozzles 6 are controlled by a single air pressure valve, while the outer suction nozzles 6 share a common air pressure valve, so as to separately control the picking and placing of workpiece 12 and frame 13.

[0026] Example 2

[0027] A movable seat 8 is provided above the unloading frame 1. Driven by the first linear module 7, the movable seat 8 achieves linear movement in a first direction. A second linear module 9 is fixedly connected to the movable seat 8, and the unloading frame 1 achieves linear movement in a second direction through the second linear module 9. The first and second directions are perpendicular to each other. Figure 3 As shown, in this technical solution, the first linear module 7 and the second linear module 9 are set to enable the entire feeding frame 1 to move linearly in two mutually perpendicular directions, thereby meeting the automatic feeding needs of various scenarios.

[0028] A cable chain 10 is provided between the feeding frame 1 and the movable seat 8. For example... Figure 3 As shown, in this technical solution, the cable chain 10 ensures the stability and accuracy of the unloading frame 1 when it moves linearly along the second direction, further ensuring the accuracy of subsequent unloading, avoiding damage to the workpiece 12, and helping to improve the yield rate.

[0029] Example 3

[0030] A processing fixture 11 is provided below the first linear module 7. The processing fixture 11 has at least two processing stations. The workpiece 12 is transported to the processing station by a loading mechanism for subsequent processing. The processing fixture 11 rotates under the drive of the drive table 14. A discharge guide shell 15 is arranged on one side of the processing fixture 11. For example... Figure 3-5 As shown, in this technical solution, the rotatable processing fixture 11 allows for the dicing and processing of all workpieces 12 at its processing station. After this process, the workpiece 12 near the unloading frame 1 can be suction-loaded. Once the unloading frame 1 has finished loading and returned to its initial position, the drive table 14 rotates the processing fixture 11 to switch to the next workpiece 12 for loading. This cycle repeats, shortening the travel distance of the unloading mechanism when loading multiple workpieces 12 onto the processing fixture 11 in a single operation. Multiple repetitive strokes are replaced by the rotation of the processing fixture 11, further improving the overall unloading efficiency.

[0031] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A dicing machine feeding mechanism, comprising a feeding frame and a mounting plate detachably connected to the feeding frame, characterized in that: The mounting plate has multiple mounting holes. Depending on the size of the workpiece, several mounting holes can be detachably installed with suction nozzle mounting seats. Suction nozzles are connected and elastically connected to the suction nozzle mounting seats. The suction nozzles are divided into outer suction nozzles and inner suction nozzles. The outer suction nozzles are used to adsorb the frame, and the inner suction nozzles are used to adsorb the workpiece.

2. The dicing machine feeding mechanism according to claim 1, characterized in that: The mounting plate has multiple mounting grooves near its two side edges on its end face, and the unloading frame has multiple threaded holes evenly spaced on its end face. The mounting plate and the unloading frame are locked together by multiple locking screws.

3. The dicing machine feeding mechanism according to claim 2, characterized in that: The inner suction nozzles are controlled by a single air pressure valve, while the outer suction nozzles share a common air pressure valve, allowing for separate control of workpiece and frame placement.

4. The dicing machine feeding mechanism according to claim 2 or 3, characterized in that: A movable seat is provided above the feeding frame. The movable seat moves linearly in a first direction under the drive of the first linear module. A second linear module is fixedly connected to the movable seat. The feeding frame moves linearly in a second direction through the second linear module. The first direction and the second direction are perpendicular to each other.

5. The dicing machine feeding mechanism according to claim 4, characterized in that: A drag chain is provided between the feeding frame and the moving seat.

6. The dicing machine feeding mechanism according to claim 5, characterized in that: A processing fixture is provided below the first linear module. The processing fixture has no less than two processing stations. The workpiece is transported to the processing station by the loading mechanism for subsequent processing. The processing fixture rotates under the drive of the drive table. A feeding guide shell is arranged on one side of the processing fixture.

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