Cap opening mechanism and photolithography machine

Abstract

The application discloses an uncovering mechanism and a photoetching machine. The uncovering mechanism is used for opening a cover of a mask box. The cover of the mask box is provided with a lock catch and a handle. The uncovering mechanism comprises an uncovering module and a moving module. The uncovering module comprises a clamping piece and a first driving assembly connected with the clamping piece. The moving module is movable in a vertical direction and comprises a bearing surface used for bearing the mask box. The clamping piece comprises a first clamping part and a second clamping part. The first clamping part clamps the lock catch of the cover, and the second clamping part clamps the handle of the cover. The first driving assembly is used for controlling the opening and closing of the first clamping part and the opening and closing of the second clamping part. Under the moving action of the moving module and in combination with the clamping action of the first clamping part and the second clamping part, the lock catch is unlocked, and the cover is separated from the body of the mask box. With the movement of the moving module, the first clamping part automatically clamps to realize automatic unlocking of the cover, and the second clamping part clamps the handle to realize automatic separation of the cover from the body, thereby improving the uncovering efficiency.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductors, and particularly relates to a cover opening mechanism and a photoetching machine. BACKGROUND

[0002] In a semiconductor photoetching process, a mask plate needs to be stored in a mask box to isolate environmental pollutants. In the related art, a mask box needs to be opened manually, and then the mask plate is placed on a mask table of a photoetching machine. An operator needs to manually release a lock catch of a cover body of the mask box, and then pull a handle of the cover body to separate the cover body. The work efficiency of manual cover opening is low. CONTENT OF THE UTILITY MODEL

[0003] Embodiments of the application provide a cover opening mechanism and a photoetching machine. A moving module, a first clamping part and a second clamping part cooperatively realize automatic separation of a cover body and a main body, and the cover opening efficiency is improved.

[0004] The cover opening mechanism provided in the application is characterized in that the cover opening mechanism is used for opening a cover body of a mask box, the cover body of the mask box is provided with a lock catch and a handle, and the cover opening mechanism comprises:

[0005] a cover opening module, the cover opening module comprising a clamping part and a first driving assembly connected with the clamping part; and

[0006] a moving module, the moving module being movable in a vertical direction, the moving module comprising a bearing surface, and the bearing surface being used for bearing the mask box;

[0007] the clamping part comprising a first clamping part and a second clamping part, the first clamping part clamping the lock catch of the cover body, the second clamping part clamping the handle of the cover body, the first driving assembly being used for controlling opening and closing of the first clamping part and opening and closing of the second clamping part, under the moving action of the moving module in combination with the clamping action of the first clamping part and the second clamping part, the lock catch is unlocked, and the cover body and a main body of the mask box are separated.

[0008] Optionally, along a first horizontal direction, the two sides of the cover body are both provided with the lock catch and the handle, and the lock catch and the handle are arranged at intervals;

[0009] along the first horizontal direction, the two sides of the first driving assembly are provided with the clamping part, the clamping part further comprising a support connected with the first driving assembly, and the first clamping part and the second clamping part are arranged at intervals on the support.

[0010] Optionally, the cover opening module further comprises a limiting part and a mounting plate, the mounting plate being provided with the first driving assembly and the clamping part;

[0011] In the first horizontal direction, the two sides of the mounting plate are spaced apart by the two clamping members of the bracket on the two sides of the mounting plate;

[0012] In the second horizontal direction, the two sides of the mounting plate are provided with the limiting members, the limiting members are used to limit the displacement of the mask box in the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction.

[0013] Optionally, the limiting member extends from the mounting plate towards the direction close to the moving module, and the side of the limiting member away from the mounting plate is provided with a rotatable movable wheel, and the movable wheel is used to abut against the mask box.

[0014] Optionally, the moving module comprises a second driving assembly and a hydraulic buffer;

[0015] The bearing surface is arranged on the second driving assembly, and the second driving assembly can move in the vertical direction to drive the mask box to move;

[0016] The hydraulic buffer is installed on the mounting plate, and the hydraulic buffer comprises an elastic member, when the second driving assembly drives the mask box to move in the vertical direction to the cover opening position, the mask box abuts against the hydraulic buffer, and the elastic member is in a compressed state.

[0017] Optionally, the moving module further comprises a third driving assembly, the third driving assembly is arranged on the side of the mounting plate away from the clamping member, and the third driving assembly is used to drive the mounting plate to move in the vertical direction to drive the clamping member to move.

[0018] Optionally, the cover opening module further comprises an in-place sensor installed on the mounting plate, and the in-place sensor is used to detect whether there is a cover on the body of the mask box.

[0019] Optionally, the in-place sensor is located on the side of the mounting plate away from the clamping member, and a notch is formed in the mounting plate.

[0020] Optionally, the cover opening module further comprises a suction accessory installed on the mounting plate, and the suction accessory is used to adsorb the cover.

[0021] The photolithography machine provided in the present application comprises a mask table, the cover opening mechanism of any one of the above embodiments, and a transfer device. The cover opening mechanism is connected with the mask table; the transfer device is connected with the mask table, and the transfer device is used to transfer the mask plate in the mask box between the mask table and the mask box.

[0022] The cover opening mechanism and the photolithography machine provided by the embodiments of the present application have the following advantages. The moving module drives the mask box to move up and down so that the mask box enters the operation area of the cover opening module. When the cover of the mask box is opened, the cover opening module can also shield the mask box, thereby reducing the pollution of the external environment to the mask plate in the mask box. During the cover opening process, the first clamping part automatically clamps the lock catch to realize the automatic unlocking of the cover body of the mask box. The second clamping part clamps the handle and lifts the cover body, thereby realizing the automatic separation of the cover body and the body. The first clamping part and the second clamping part work together to complete the cover opening process at one time, thereby improving the cover opening efficiency and avoiding the contact pollution of manual unlocking and cover lifting to the mask plate. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained according to the structures shown in the drawings without creative labor.

[0024] Figure 1 The structure schematic diagram of the cover opening mechanism and the mask box provided by the embodiments of the present application.

[0025] Figure 2 The structure schematic diagram of the cover opening mechanism and the mask box provided by the embodiments of the present application.

[0026] Figure 3 The structure schematic diagram of the cover opening mechanism provided by the embodiments of the present application.

[0027] Explanation of the reference signs:

[0028] Cover opening mechanism 10, cover opening module 11, clamping part 111, first clamping part 1111, second clamping part 1112, bracket 1113, first driving assembly 112;

[0029] Moving module 12, bearing surface 121, second driving assembly 122, hydraulic buffer 123, third driving assembly 124;

[0030] Limiting part 13, movable wheel 131, mounting plate 14, notch 141, in-place sensor 15, suction member 16;

[0031] Mask box 200, cover body 21, lock catch 211, handle 212, body 22;

[0032] First horizontal direction X, second horizontal direction Y, vertical direction Z.

[0033] The objectives, functional features and advantages of the present application will be further described with reference to the embodiments in combination with the accompanying drawings. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described in combination with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work belong to the scope of protection of the present application.

[0035] It should be noted that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or indirectly connected to the other element.

[0036] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0037] It should be understood that the term "and / or" used in the present application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0038] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0039] Please refer to Figure 1 and Figure 2 , Figure 1 The structural schematic diagram of the uncovering mechanism 10 and the mask box 200 provided in the embodiments of the present application. Figure 2This is a partial structural diagram of the opening mechanism 10 and the mask box 200 provided in this embodiment of the application. The opening mechanism 10 provided in this embodiment of the application is used to open the cover 21 of the mask box 200. The cover 21 of the mask box 200 is provided with a latch 211 and a lifting lug 212. The opening mechanism 10 includes an opening module 11 and a moving module 12. The opening module 11 includes a clamping member 111 and a first driving assembly 112 connected to the clamping member 111.

[0040] The movable module 12 can move vertically in the Z direction. The movable module 12 includes a bearing surface 121 for supporting the mask cassette 200. The movable module 12 can achieve stable vertical Z-direction movement using methods such as screw drive, linear guide rail, and motor drive. A positioning groove or adsorption device can be provided between the bearing surface 121 and the mask cassette 200 to ensure the mask cassette 200 is fixed on the bearing surface 121, preventing displacement of the mask cassette 200 during opening.

[0041] The clamping member 111 includes a first clamping part 1111 and a second clamping part 1112. The first clamping part 1111 clamps the latch 211 of the cover 21, and the second clamping part 1112 clamps the lifting lug 212 of the cover 21. The first driving assembly 112 is used to control the opening and closing of the first clamping part 1111 and the second clamping part 1112. Under the movement of the moving module 12, combined with the clamping action of the first clamping part 1111 and the second clamping part 1112, the latch 211 is unlocked, and the cover 21 separates from the body 22 of the mask box 200.

[0042] Specifically, the first drive assembly 112 may be a cylinder, an electric push rod, or other drive element, and there are no restrictions on this. Taking the first drive assembly 112 as a cylinder as an example, the intake and exhaust of the cylinder are controlled by a solenoid valve to drive the piston to move, thereby driving the opening and closing of the first clamping part 1111 and the second clamping part 1112 of the clamping member 111.

[0043] When the cover 21 of the mask box 200 needs to be opened, the first drive assembly 112 first controls the first clamping part 1111 and the second clamping part 1112 to open. The moving module 12 moves the mask box 200 upward to a preset range, so that the latch 211 enters the clamping range of the first clamping part 1111, and the first clamping part 1111 closes to clamp the latch 211. Then the moving module 12 drives the mask box 200 downward, and the first clamping part 1111 pulls the latch 211 to unlock it. The moving module 12 continues to move downward, so that the lifting ear 212 enters the grasping range of the second clamping part 1112, and the first drive assembly 112 controls the second clamping part 1112 to clamp and hook the lifting ear 212. Since the cover 21 is clamped by the second clamping part 1112, as the moving module 12 continues to move downward, the cover 21 can be separated from the body 22. The cover 21 of the mask box 200 remains in the opening module 11, while the body 22 of the mask box 200 descends with the moving module 12 to allow the user to remove the mask from the body 22.

[0044] The latch 211 can be a lever-type snap-lock. Specifically, the latch 211 includes a rotatable plate. One end of the plate is mounted on the cover 21 via a pivot, and the plate can rotate around the pivot. The other end of the plate is a locking end, which can engage with a groove or boss on the body 22 of the mask box 200 to achieve locking. In the closed state, the locking end of the latch 211 is engaged with the body 22 of the mask box 200 to form a locked state. When it is necessary to open the cover 21 of the mask box 200, the first clamping part 1111 clamps the plate to abut against the end of the plate near the pivot. The mask box 200 moves downward as it moves, causing the latch 211 plate to move downward. The first clamping part 1111 generates an upward lifting reaction force on the plate. The plate is pulled upward by the gripper and rotates upward around the axis, causing the engaging end to disengage from the mating end, thereby unlocking the latch 211 by the first clamping part 1111.

[0045] The lug 212 may include a mounting portion and an extension connected to the mounting portion. The mounting portion is fixedly mounted on the cover 21 of the mask box 200. The extension extends from the mounting portion in a direction away from the cover 21 in a horizontal direction. The structure of the second clamping portion 1112 may be adapted to the shape of the lug 212. For example, the second clamping portion 1112 may be a hook-shaped structure to facilitate hooking the extension and provide stable tension.

[0046] The number of latches 211 can be two, and the two latches 211 can be symmetrically arranged on both sides of the cover 21 in the horizontal direction. The number of handles 212 can be four, with one handle 212 provided on each of the left and right sides of each latch 211. The number and installation position of the first clamping parts 1111 correspond to the latches 211, and similarly, the number and installation position of the second clamping parts 1112 correspond to the handles 212.

[0047] In the opening mechanism 10 and lithography machine provided in this application embodiment, the moving module 12 drives the mask box 200 to rise and fall, causing the mask box 200 to enter the operating area of ​​the opening module 11. When opening the mask box 200, the opening module 11 can also shield the mask box 200, reducing the contamination of the mask plate in the mask box 200 by the external environment. During the opening process, as the moving module 12 moves, the first clamping part 1111 automatically clamps the latch 211 to automatically unlock the cover 21 of the mask box 200, and the second clamping part 1112 clamps the lifting lug 212 and lifts the cover 21 to achieve automatic separation of the cover 21 from the body 22. The first clamping part 1111 and the second clamping part 1112 work together to complete the opening process in one go, improving the opening efficiency, and at the same time avoiding contact contamination of the mask plate caused by manual unlocking and lifting.

[0048] Optionally, along the first horizontal direction X, both sides of the cover 21 are provided with a latch 211 and a lifting lug 212, with the latch 211 and lifting lug 212 spaced apart. Please refer to Figure 3 , Figure 3 This is a partial structural schematic diagram of the lid-opening mechanism 10 provided in this application embodiment. Along the first horizontal direction X, clamping members 111 are provided on both sides of the first driving assembly 112. Each clamping member 111 also includes a bracket 1113 connected to the first driving assembly 112. The first clamping portion 1111 and the second clamping portion 1112 are spaced apart on the bracket 1113. The symmetrical layout design of the clamping members 111 on the lid-opening module 11 allows for a more balanced force distribution on the lid 21 during the opening process, effectively avoiding tilting or jamming of the lid 21 caused by unilateral force application.

[0049] As a component connecting the first drive assembly 112 and the clamping part, the bracket 1113 needs a certain strength and rigidity to ensure that the force can be effectively transmitted. The bracket 1113 can be made of materials such as aluminum alloy or stainless steel. The bracket 1113 can be connected to the first drive assembly 112 by means of bolts or welding.

[0050] The first clamping part 1111 and the second clamping part 1112 are mounted on the bracket 1113 by means of slots, threads, etc., which facilitates replacement or adjustment according to actual needs. For example, for mask boxes 200 of different sizes, the opening mechanism 10 can be raised to achieve compatibility with mask boxes 200 of various specifications by adjusting the length of the bracket 1113 or the distance between the first clamping part 1111 and the second clamping part 1112.

[0051] When the lid is opened, the first drive assembly 112 controls the movement of the clamping parts 111 on both sides. As the moving module 12, carrying the mask box 200, rises to the open position, the first clamping parts 1111 of the clamping parts 111 on both sides align and clamp the latches 211 on both sides of the lid 21, avoiding uneven force due to unlocking on one side. Subsequently, under the control of the first drive assembly 112, the second clamping parts 1112 grasp the lifting ears 212 on both sides of the lid 21. During the descent of the moving module 12, the first clamping parts 1111 can unlock the latches 211, and the second clamping parts 1112 on both sides lift the lid 21 through the lifting ears 212, so that the lid 21 is smoothly separated from the body 22 of the mask box 200. The simultaneous application of force from both sides improves the stability of the opening process and reduces the risk of damage to the lid 21 due to uneven force.

[0052] Please see Figure 3 Optionally, the cover opening module 11 also includes a limiting member 13 and a mounting plate 14, on which a first drive assembly 112 and a clamping member 111 are disposed. The mounting plate 14 provides a stable mounting base for the first drive assembly 112 and the clamping member 111, and may be made of high-strength aluminum alloy or stainless steel.

[0053] Along the second horizontal direction Y, limiting members 13 are provided on both sides of the mounting plate 14. The limiting members 13 are used to limit the displacement of the mask box 200 in the second horizontal direction Y, which is perpendicular to the first horizontal direction X. The limiting members 13 on both sides of the mounting plate 14 can limit the mask box 200 in a preset position. By limiting the position of the mask box 200 in the second horizontal direction Y, displacement of the mask box 200 along the second horizontal direction Y during the opening process is avoided, which would affect the clamping effect of the first clamping part 1111 and the second clamping part 1112, thereby affecting the unlocking or separation of the cover 21.

[0054] As the moving module 12, carrying the mask box 200, rises and approaches the opening module 11, the mask box 200 gradually moves closer to the limiting member 13. The moving module 12 controls the mask box 200 to move upward so that at least part of the cover 21 is located between the two limiting members 13. The limiting member 13 can confine the mask box 200 within a preset position by means of rigid blocking or elastic buffering. The limiting member 13 can be a linear bearing, roller bearing, or elastic limiting block, etc., and is not limited here.

[0055] Optionally, the limiting member 13 extends from the mounting plate 14 toward the moving module 12, and the limiting member 13 is provided with a rotatable movable wheel 131 on the side opposite to the mounting plate 14. The movable wheel 131 is used to abut against the mask box 200.

[0056] The movable wheel 131 not only restricts the displacement of the mask box 200 in the second horizontal direction Y, but also significantly reduces the friction during the limiting process, preventing scratches or wear caused by hard contact between the surface of the mask box 200 and the limiting member 13. In some embodiments, the limiting member 13 can also achieve displacement in the second direction through a sliding mechanism mounted on the mounting plate 14, so as to adapt to mask boxes 200 of different sizes and specifications and improve compatibility.

[0057] Please see Figure 1 and Figure 3 Optionally, the moving module 12 includes a second drive assembly 122 and a hydraulic buffer 123. The bearing surface 121 is disposed on the second drive assembly 122, which is capable of moving in the vertical direction Z to drive the mask box 200 to move.

[0058] The second drive component 122 of the mobile module 12 typically uses a servo motor paired with a lead screw transmission mechanism. The bearing surface 121 is fixed on the moving part of the second drive component 122. The moving part can move linearly along the vertical direction Z, thereby driving the mask box 200 on the bearing surface 121 to move up and down.

[0059] The hydraulic buffer 123 is mounted on the mounting plate 14. The hydraulic buffer 123 includes an elastic element (not shown). When the second drive assembly 122 drives the mask box 200 to move vertically in the Z direction to the open position, the mask box 200 abuts against the hydraulic buffer 123, and the elastic element is in a compressed state.

[0060] The hydraulic buffer 123 can reduce the impact of the mask box 200 on the opening module 11 when the mask box 200 moves to the opening position. While protecting the opening module 11, the hydraulic buffer 123 can also reduce the impact on the mask plate in the mask box 200, ensuring the accuracy of subsequent photolithography processes.

[0061] The hydraulic buffer 123 is mounted on the mounting plate 14 of the cover-opening module 11 via bolts. The hydraulic buffer 123 integrates a piston and elastic elements. When the second drive assembly 122 drives the mask box 200 to the open position, the top surface of the cover 21 of the mask box 200 presses against the piston rod of the hydraulic buffer 123, compressing the elastic elements and absorbing the impact energy. The second drive assembly 122 then drives the mask box 200 to descend, and the hydraulic buffer 123 resets.

[0062] It should be noted that when the hydraulic buffer 123 resets, it also applies a downward force to the cover 21 of the mask box 200. Under the action of this force, the first clamping part 1111 can lift the latch 211 to unlock it; the second clamping part 1112 can hook the lifting ear 212 to unlock and separate the cover 21.

[0063] Optionally, the moving module 12 further includes a third driving component 124, which is located on the side of the mounting plate 14 away from the clamping member 111. The third driving component 124 is used to drive the mounting plate 14 to move in the vertical direction Z to move the clamping member 111.

[0064] As the mask cassette 200 rises with the second drive assembly 122 and approaches the open position, the third drive assembly 124 drives the mounting plate 14, along with the clamping member 111, to move downwards, shortening the distance between the mask cassette 200 and the clamping member, thus achieving rapid docking. After the clamping member 111 completes its clamping action on the latch 211 and the lifting lug 212, the third drive assembly 124 drives the mounting plate 14 upwards, which, in conjunction with the downward movement of the second drive assembly 122, separates the cover 21 of the mask cassette 200 from its main body 22. The actions of the third drive assembly 124 and the second drive assembly 122 work together, and this bidirectional movement mode, compared to relying solely on the second drive assembly 122 to move the mask cassette 200, effectively reduces the opening time and improves work efficiency.

[0065] In addition, when the photolithography machine is moving the photomask in the photomask box 200, the third drive assembly 124 can also drive the cover 21 on the clamping member 111 to move upward, so as to avoid interference between the cover 21 and the photomask moving device.

[0066] Please see Figure 3 Optionally, the cover opening module 11 also includes an in-situ sensor 15 mounted on the mounting plate 14, which is used to detect whether there is a cover 21 on the body 22 of the mask box 200.

[0067] When the in-situ sensor 15 detects that there is a cover 21 on the body 22 of the mask box 200, the first drive assembly 112 controls the opening and closing of the first clamping part 1111 and the second clamping part 1112 to unlock and lift the cover 21, so as to avoid the waste of power resources caused by the first drive assembly 112, the first clamping part 1111 and the second clamping part 1112 still working normally when there is no cover 21 on the mask box 200.

[0068] The in-situ sensor 15 can be a diffuse reflection photoelectric sensor, an infrared sensor, a fiber optic sensor, or an inductive sensor, without limitation. Specifically, if the body 22 of the mask box 200 has a cover 21, the infrared beam or sensing signal emitted by the in-situ sensor 15 will be reflected or triggered by the cover 21. The in-situ sensor 15 will convert the detected signal into an electrical signal and transmit it to the control system, indicating that the body 22 of the mask box 200 has a cover 21. The first drive assembly 112 can control the first gripping part 1111 and the second gripping part 1112 of the clamping member 111 to perform subsequent gripping actions. Conversely, if the body 22 of the mask box 200 does not have a cover 21, the in-situ sensor 15 cannot receive a feedback signal. If the body 22 of the mask box 200 has a cover 21, the action of the first drive assembly 112 will be paused or adjusted to avoid invalid gripping by the clamping part.

[0069] Please see Figure 3 Optionally, the in-situ sensor 15 is located on the side of the mounting plate 14 opposite to the clamping member 111, and a notch 141 is formed on the mounting plate 14. When the moving module 12 moves the mask box 200 vertically Z-direction and approaches the mounting plate 14, the arrangement of the in-situ sensor 15 away from the mask box 200 can avoid interference from the mask box 200 to the in-situ sensor 15, and the detection signal of the in-situ sensor 15 can be emitted to the surface of the mask box 200 through the notch 141 area. At the same time, the notch 141 can also reduce the weight of the mounting plate 14, realizing the lightweight design of the opening mechanism 10.

[0070] In some embodiments, the in-situ sensor 15 may also be located on the mounting plate 14 and on the same side as the clamping member 111, that is, the in-situ sensor 15 is set close to the mask box 200. This arrangement can make the detection efficiency of the in-situ sensor 15 faster.

[0071] Please see Figure 3 Optionally, the opening module 11 also includes an adsorption component 16 mounted on the mounting plate 14, which is used to adsorb the cover 21. With the cover 21 held by the clamping component 111, the adsorption component 16 is used to adsorb the cover 21, further improving the ability of the opening module 11 to prevent the cover 21 from falling off during the entire opening process.

[0072] The adsorption component 16 can be a vacuum suction cup or an electromagnetic adsorption sheet. Taking a vacuum suction cup as an example, the suction cup can be made of silicone material, which has good flexibility and sealing properties. When the vacuum suction cup comes into contact with the cover 21, the vacuum suction cup is connected to an external vacuum system through an air passage to evacuate air, which can quickly create a negative pressure and firmly adsorb the cover 21. If an electromagnetic adsorption sheet is used, the cover 21 is adsorbed by generating magnetism through electricity. The cover 21 is equipped with magnetic components.

[0073] The lithography machine proposed in this application includes a mask stage, a transfer device, and an opening mechanism 10 according to any of the above-described embodiments. The opening mechanism 10 is connected to the mask stage. The transfer device is connected to the mask stage and is used to transfer the mask plate in the mask cassette 200 between the mask stage and the mask cassette 200. Because the lithography machine of this application employs the aforementioned opening mechanism 10, it at least possesses the beneficial effects of the aforementioned opening mechanism 10, which will not be repeated here.

[0074] The above description is merely a preferred embodiment of this application and does not limit the patent scope of this application. Any equivalent structural transformations made based on the inventive concept of this application and the contents of the specification and drawings of this application, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this application.

Claims

1. A lid-opening mechanism, characterized in that, The opening mechanism is used to open the cover of the mask box. The cover of the mask box is provided with a latch and a lifting lug. The opening mechanism includes: A lid-opening module, the lid-opening module including a clamping member and a first drive assembly connected to the clamping member; and, A movable module, which can move vertically, includes a bearing surface for supporting the mask box; The clamping component includes a first clamping part and a second clamping part. The first clamping part clamps the latch of the cover, and the second clamping part clamps the lifting lug of the cover. The first driving component is used to control the opening and closing of the first clamping part and the second clamping part. Under the movement of the moving module, combined with the clamping action of the first clamping part and the second clamping part, the latch is unlocked, and the cover separates from the body of the mask box.

2. The opening mechanism according to claim 1, characterized in that, Along the first horizontal direction, the latch and the lifting lug are provided on both sides of the cover, and the latch and the lifting lug are spaced apart; Along the first horizontal direction, the clamping members are provided on both sides of the first drive group. The clamping members also include a bracket connected to the first drive assembly. The first clamping part and the second clamping part are spaced apart on the bracket.

3. The lid-opening mechanism according to claim 2, characterized in that, The opening module also includes a limiting component and a mounting plate, wherein the first driving component and the clamping component are disposed on the mounting plate; Along the second horizontal direction, the limiting member is provided on both sides of the mounting plate. The limiting member is used to restrict the displacement of the mask box in the second horizontal direction, which is perpendicular to the first horizontal direction.

4. The lid-opening mechanism according to claim 3, characterized in that, The limiting member extends from the mounting plate toward the moving module, and a rotatable movable wheel is provided on the side of the limiting member away from the mounting plate. The movable wheel is used to abut against the mask box.

5. The lid-opening mechanism according to claim 3, characterized in that, The mobile module includes a second drive assembly and a hydraulic buffer; The bearing surface is disposed on the second driving component, and the second driving component can move along the vertical direction to drive the mask box to move; The hydraulic buffer is mounted on the mounting plate. The hydraulic buffer includes an elastic element. When the second drive assembly drives the mask box to move vertically to the open position, the mask box abuts against the hydraulic buffer, and the elastic element is in a compressed state.

6. The lid-opening mechanism according to claim 5, characterized in that, The moving module further includes a third driving component, which is located on the side of the mounting plate opposite to the clamping member. The third driving component is used to drive the mounting plate to move along the vertical direction to move the clamping member.

7. The lid-opening mechanism according to claim 3, characterized in that, The cover opening module also includes an in-situ sensor mounted on the mounting plate, which is used to detect whether there is a cover on the body of the mask box.

8. The lid-opening mechanism according to claim 7, characterized in that, The in-situ sensor is located on the side of the mounting plate opposite to the clamping member, and a notch is formed on the mounting plate.

9. The lid-opening mechanism according to claim 3, characterized in that, The opening module also includes an adsorption component mounted on the mounting plate, which is used to adsorb the cover.

10. A lithography machine, characterized in that, include: Masking stage; The opening mechanism according to any one of claims 1-9, wherein the opening mechanism is connected to the mask stage; A transfer device, connected to the mask stage, is used to transfer a mask plate in the mask box between the mask stage and the mask box.

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