A gas uniform distribution device for optical fiber preform deposition furnace

Abstract

The utility model relates to optical fiber preform manufacturing technical field discloses a kind of optical fiber preform deposition furnace gas uniform distribution device, including deposition furnace body, the outlet end of second gas pump is equipped with the output pipe connected with premixing box, carrier gas storage tank, first reaction gas storage tank and second reaction gas storage tank are respectively equipped with the first conduit, second conduit and third conduit connected with input pipe, multiple wave plates are fixed in premixing box, the bottom of premixing box is equipped with two ultrasonic vibration rods inserted into its interior.The utility model mixes carrier gas and reaction gas by premixing box in stirring mechanism, wave plate and ultrasonic vibration rod synergistic effect, can break airflow stratification efficiently, substantially improve gas mixing uniformity;Mixed gas is transported to the spiral pipe in deposition furnace body by first gas pump, and uniformly dispersed to furnace by spiral type distribution gas outlet, guarantee deposition process stability.

Description

Technical Field

[0001] This utility model relates to the field of optical fiber preform manufacturing technology, and in particular to a gas uniform distribution device for an optical fiber preform deposition furnace. Background Technology

[0002] In the manufacturing of optical fiber preforms, the deposition furnace is the core equipment. Through chemical vapor deposition, carrier gas (oxygen) and reactive gases such as silicon tetrachloride and germanium tetrachloride are introduced into the furnace. The glass deposition layer is generated through high-temperature reaction, and the preform blank is gradually built. The uniformity of gas mixing and the stability of gas distribution directly determine the consistency of the refractive index of the preform and the deposition quality.

[0003] However, existing deposition furnaces have shortcomings in use: gas mixing often relies on a single structure (such as simple pipe guidance), making it difficult to break up gas flow stratification and easily leading to local concentration differences; at the same time, when the mixed gas is distributed into the deposition furnace, it is mostly single-point or non-uniform gas distribution, resulting in gas concentration imbalance in the reaction area of ​​the furnace, ultimately causing uneven thickness and insufficient purity of the preform deposition layer, affecting the subsequent optical fiber performance. Therefore, in response to the above situation, there is an urgent need to develop a gas uniform distribution device for optical fiber preform deposition furnace that uses the synergistic action of a stirring mechanism, a corrugated plate and an ultrasonic vibrator in a premixing box to mix the carrier gas and the reaction gas, which can efficiently break up gas flow stratification and significantly improve gas mixing uniformity; the mixed gas is delivered to a spiral tube in the deposition furnace body by a first gas pump, and then evenly distributed into the furnace through spirally distributed gas outlets, ensuring a stable deposition process. This device aims to overcome the shortcomings in current practical applications and meet current needs. Utility Model Content

[0004] The purpose of this invention is to provide a gas uniform distribution device for an optical fiber preform deposition furnace to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A gas uniform distribution device for an optical fiber preform deposition furnace includes a deposition furnace body, a premixing tank, a first gas pump, a second gas pump, a carrier gas storage tank, a first reactive gas storage tank, a second reactive gas storage tank, a stirring mechanism, a spiral tube, and an ultrasonic vibrating rod. The outlet end of the second gas pump is connected to an output pipe connected to the premixing tank, and the inlet end of the second gas pump is connected to an input pipe. The carrier gas storage tank, the first reactive gas storage tank, and the second reactive gas storage tank are respectively equipped with a first conduit, a second conduit, and a third conduit connected to the input pipe. The premixing tank is equipped with a stirring mechanism inserted inside it. Multiple corrugated plates are fixed inside the premixing tank. Two ultrasonic vibrating rods are installed at the bottom of the premixing tank and inserted inside it. The inlet end of the first gas pump is connected to an inlet pipe connected to the premixing tank. The spiral tube is fixed inside the deposition furnace body, and its inner side is spirally arranged with multiple gas outlet holes. The outlet end of the first gas pump is connected to an outlet pipe connected to the spiral tube.

[0006] Preferably, the carrier gas storage tank stores oxygen, the first reaction gas storage tank stores silicon tetrachloride gas, and the second reaction gas storage tank stores germanium tetrachloride gas.

[0007] Preferably, a second solenoid valve and a first flow valve are installed on the first conduit, a third solenoid valve and a second flow valve are installed on the second conduit, and a fourth solenoid valve and a third flow valve are installed on the third conduit.

[0008] Preferably, a first solenoid valve is installed on the air intake pipe, and a check valve is installed on the air outlet pipe.

[0009] Preferably, the stirring mechanism includes a drive motor and a stirring shaft, wherein the drive motor is fixed on the premixing tank, and the output shaft of the drive motor is connected to the stirring shaft.

[0010] The beneficial effects of this utility model are as follows: When using this optical fiber preform deposition furnace gas uniform distribution device, first open the second solenoid valve and start the second gas pump to deliver oxygen from the carrier gas storage tank to the premixing tank. Then, close the second solenoid valve and open the third solenoid valve to deliver silicon tetrachloride gas from the first reaction gas storage tank to the premixing tank. Next, close the third solenoid valve and open the fourth solenoid valve to deliver germanium tetrachloride gas from the second reaction gas storage tank to the premixing tank. Finally, close the fourth solenoid valve and the second gas pump, start the drive motor and ultrasonic vibrator, and drive the... The stirring shaft rotates, mixing the gas in the premixing tank. Simultaneously, a corrugated plate, with its wave-like structure, divides the airflow, guiding the gas to flow around, twist, and re-converge, increasing the gas contact area and residence time, breaking down stratification for uniform mixing. An ultrasonic vibrator, through ultrasonic vibration, causes gas molecules to move violently, quickly breaking down airflow stratification and improving mixing uniformity. After uniform mixing, the first solenoid valve is opened and the first gas pump is started, delivering the gas to the spiral tube. The gas is then evenly dispersed into the deposition furnace through multiple outlets within the spiral tube. In summary, this invention, through the synergistic action of the stirring mechanism, corrugated plate, and ultrasonic vibrator in the premixing tank, mixes the carrier gas and reactant gas, efficiently breaking down airflow stratification and significantly improving gas mixing uniformity. The mixed gas is then delivered by the first gas pump to the spiral tube within the deposition furnace, where it is evenly dispersed into the furnace through spirally distributed outlets, ensuring a stable deposition process. Attached Figure Description

[0011] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0012] Figure 2 This is an internal view of the deposition furnace body in this utility model.

[0013] Figure 3 This is an internal view of the premixing box in this utility model.

[0014] Figure 4 This is a partial structural diagram of the present invention. Figure 1 .

[0015] Figure 5 This is a partial structural diagram of the present invention. Figure 2 .

[0016] Figure 6 This is a partial structural diagram of the present invention. Figure 3 .

[0017] Legend: 1. Deposition furnace body; 2. Premixing box; 201. Corrugated plate; 3. First gas pump; 301. Inlet pipe; 302. First solenoid valve; 303. Outlet pipe; 304. Check valve; 4. Second gas pump; 401. Output pipe; 402. Input pipe; 5. Carrier gas storage tank; 501. First conduit; 502. Second solenoid valve; 503. First flow valve; 6. First reaction gas storage tank; 601. Second conduit; 602. Third solenoid valve; 603. Second flow valve; 7. Second reaction gas storage tank; 701. Third conduit; 702. Fourth solenoid valve; 703. Third flow valve; 8. Stirring mechanism; 801. Drive motor; 802. Stirring shaft; 9. Spiral tube; 901. Outlet; 10. Ultrasonic vibrator. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0019] Specific implementation examples are given below.

[0020] See Figures 1-6In this embodiment of the present invention, a gas uniform distribution device for an optical fiber preform deposition furnace includes a deposition furnace body 1, a premixing tank 2, a first gas pump 3, a second gas pump 4, a carrier gas storage tank 5, a first reaction gas storage tank 6, a second reaction gas storage tank 7, a stirring mechanism 8, a spiral tube 9, and an ultrasonic vibrating rod 10. The deposition furnace body 1 is used to perform the deposition reaction on the optical fiber preform. The carrier gas storage tank 5 stores oxygen, the first reaction gas storage tank 6 stores silicon tetrachloride gas, and the second reaction gas storage tank 7 stores germanium tetrachloride gas. The outlet end of the second gas pump 4 is equipped with an output pipe 401 connected to the premixing tank 2, and the inlet end of the second gas pump 4 is connected to an input pipe 402. The carrier gas storage tank 5, the first reaction gas storage tank 6, and the second reaction gas storage tank 7 are respectively equipped with a first conduit 501, a second conduit 601, and a third conduit 701 connected to the input pipe 402. The premixing tank 2 is equipped with... The premixing tank 2 is equipped with a stirring mechanism 8 inserted inside. Multiple corrugated plates 201 are fixed inside the premixing tank 2. When the stirring mechanism 8 stirs and mixes the gas in the premixing tank 2, the corrugated plates 201 divide the airflow through the corrugated structure, guide the gas to flow around, twist and re-merge, increase the gas contact area and residence time, break the stratification to achieve uniform mixing. Two ultrasonic vibrating rods 10 are installed at the bottom of the premixing tank 2 and inserted inside. The ultrasonic vibration can cause the gas molecules to move violently, quickly break the airflow stratification and improve the mixing uniformity. The inlet end of the first gas pump 3 is connected to the inlet pipe 301 connected to the premixing tank 2. The first solenoid valve 302 is installed on the inlet pipe 301. The spiral tube 9 is fixed inside the deposition furnace body 1. Multiple air outlets 901 are arranged in a spiral shape on the inner side of the spiral tube 9. The outlet end of the first gas pump 3 is connected to the outlet pipe 303 connected to the spiral tube 9. The check valve 304 is installed on the outlet pipe 303.

[0021] A second solenoid valve 502 and a first flow valve 503 are installed on the first conduit 501. A third solenoid valve 602 and a second flow valve 603 are installed on the second conduit 601. A fourth solenoid valve 702 and a third flow valve 703 are installed on the third conduit 701. The gas output from the carrier gas storage tank 5, the first reaction gas storage tank 6, and the second reaction gas storage tank 7 is measured in real time through the first flow valve 503, the second flow valve 603, and the third flow valve 703. The output value is preset. After the output value is reached, the second solenoid valve 502, the third solenoid valve 602, and the fourth solenoid valve 702 are closed.

[0022] The stirring mechanism 8 includes a drive motor 801 and a stirring shaft 802. The drive motor 801 is fixed on the premixing box 2. The output shaft of the drive motor 801 is connected to the stirring shaft 802. In use, the drive motor 801 drives the stirring shaft 802 to rotate, and the stirring shaft 802 stirs and mixes the gas in the premixing box 2.

[0023] The first air pump 3, the first solenoid valve 302, the second air pump 4, the second solenoid valve 502, the first flow valve 503, the third solenoid valve 602, the second flow valve 603, the fourth solenoid valve 702, the third flow valve 703, the drive motor 801, and the ultrasonic vibrator 10 are all controlled by a PLC system.

[0024] Working principle: This optical fiber preform deposition furnace gas uniform distribution device operates by first opening the second solenoid valve 502 and starting the second gas pump 4 to deliver oxygen from the carrier gas storage tank 5 to the premixing tank 2. Then, the second solenoid valve 502 is closed, and the third solenoid valve 602 is opened to deliver silicon tetrachloride gas from the first reaction gas storage tank 6 to the premixing tank 2. Next, the third solenoid valve 602 is closed, and the fourth solenoid valve 702 is opened to deliver germanium tetrachloride gas from the second reaction gas storage tank 7 to the premixing tank 2. Finally, the fourth solenoid valve 702 is closed, and the second gas pump 4 is started. The drive motor 801 and the ultrasonic vibrating rod 10 are then activated. The drive motor 801... The stirring shaft 802 is driven to rotate, and the gas in the premixing box 2 is stirred and mixed by the stirring shaft 802. At the same time, the wave plate 201 divides the airflow through the wave-shaped structure, guides the gas to flow around, twist and re-merge, increases the gas contact area and residence time, breaks the layering to achieve uniform mixing. The ultrasonic vibrator 10 causes the gas molecules to move violently through ultrasonic vibration energy, quickly breaks the airflow layering and improves the mixing uniformity. After uniform mixing, the first solenoid valve 302 is opened and the first gas pump 3 is started. The gas is delivered to the spiral tube 9 through the first gas pump 3. The gas is then evenly dispersed into the deposition furnace body 1 through the multiple gas outlets 901 in the spiral tube 9.

[0025] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A gas uniform distribution device for an optical fiber preform deposition furnace, characterized in that, The system includes a deposition furnace body (1), a premixing tank (2), a first gas pump (3), a second gas pump (4), a carrier gas storage tank (5), a first reactive gas storage tank (6), a second reactive gas storage tank (7), a stirring mechanism (8), a spiral tube (9), and an ultrasonic vibrator (10). The outlet end of the second gas pump (4) is connected to an output pipe (401) connected to the premixing tank (2), and the inlet end of the second gas pump (4) is connected to an input pipe (402). The carrier gas storage tank (5), the first reactive gas storage tank (6), and the second reactive gas storage tank (7) are respectively equipped with a first conduit (501) connected to the input pipe (402). The premixing box (2) is equipped with a stirring mechanism (8) inserted into it, and multiple corrugated plates (201) are fixed inside the premixing box (2). Two ultrasonic vibrating rods (10) are installed at the bottom of the premixing box (2). The inlet end of the first gas pump (3) is connected to an inlet pipe (301) connected to the premixing box (2). The spiral tube (9) is fixed inside the deposition furnace body (1). Multiple air outlets (901) are spirally arranged on the inner side of the spiral tube (9). The outlet end of the first gas pump (3) is connected to an outlet pipe (303) connected to the spiral tube (9).

2. The gas uniform distribution device for the optical fiber preform deposition furnace according to claim 1, characterized in that, The carrier gas storage tank (5) stores oxygen, the first reaction gas storage tank (6) stores silicon tetrachloride gas, and the second reaction gas storage tank (7) stores germanium tetrachloride gas.

3. The gas uniform distribution device for the optical fiber preform deposition furnace according to claim 1, characterized in that, The first conduit (501) is equipped with a second solenoid valve (502) and a first flow valve (503), the second conduit (601) is equipped with a third solenoid valve (602) and a second flow valve (603), and the third conduit (701) is equipped with a fourth solenoid valve (702) and a third flow valve (703).

4. The gas uniform distribution device for the optical fiber preform deposition furnace according to claim 1, characterized in that, A first solenoid valve (302) is installed on the air intake pipe (301), and a check valve (304) is installed on the air outlet pipe (303).

5. The gas uniform distribution device for the optical fiber preform deposition furnace according to claim 1, characterized in that, The stirring mechanism (8) includes a drive motor (801) and a stirring shaft (802). The drive motor (801) is fixed on the premixing box (2), and the output shaft of the drive motor (801) is connected to the stirring shaft (802).

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