Uniform coverage PVD coating apparatus

Abstract

The utility model discloses a kind of even covering PVD coating devices, it is related to PVD coating device technical field.The utility model includes coating mechanism.The utility model passes through self-rotating assembly, specifically is after starting motor, its output shaft drives pivot to rotate, and then make the two trays of fixed penetration revolve around the axis of pivot, let the workpiece of different positions on tray alternately approach coating particle source, it is helpful to reduce the coating thickness uneven problem possibly caused by workpiece and particle source distance difference, simultaneously, tray revolves around the axis and drives self-rotating shaft to move around pivot, the gear of self-rotating shaft outer wall is engaged with the ring gear of coating box inner wall, make self-rotating shaft drive the workpiece on placing seat self-rotate, let workpiece each outer wall surface periodically towards particle source, can reduce the probability of "shadow area" plating leakage, significantly improve workpiece full-surface coating uniformity, make the coating performance of different workpieces, same workpiece different area more easily keep consistent, reduce performance fluctuation.

Description

Technical Field

[0001] This utility model belongs to the technical field of PVD coating devices, and in particular relates to a device for uniformly covering PVD coating. Background Technology

[0002] Physical vapor deposition (PVD) coating technology is a technique that uses physical methods to vaporize a material source into atoms, molecules, or partially ionize them into ions under vacuum conditions and deposits a thin film with special functions on the substrate surface. It has a wide range of applications in many fields, and specialized coating equipment is indispensable when implementing PVD coating processes.

[0003] Some existing PVD coating devices have certain limitations in their structural design. For example, when some devices are running, the workpiece being coated can only move in a circle around a certain center and lacks a rotation function. This results in differences in the degree of contact between different parts of the workpiece and the coating material during the coating process. Some parts may be in a specific angle for a long time, making it difficult to uniformly adsorb the coating material. Ultimately, this leads to inconsistent coating thickness and poor uniformity, affecting the quality and performance of the product. Utility Model Content

[0004] The purpose of this invention is to provide a device for uniformly covering PVD coatings. By setting a rotating component, specifically, after the motor is started, its output shaft drives the rotating shaft to rotate, thereby causing two through-fixed trays to revolve around the axis of the rotating shaft. This allows workpieces at different positions on the trays to alternately approach the coating particle source, which helps to reduce the problem of uneven coating thickness caused by differences in the distance between the workpiece and the particle source. At the same time, the rotation of the trays drives the rotating shaft to move around the rotating shaft. The gear on the outer wall of the rotating shaft meshes with the ring gear on the inner wall of the coating box, causing the rotating shaft to drive the workpiece on the placement seat to rotate. This allows each outer wall surface of the workpiece to periodically face the particle source, which can reduce the probability of incomplete coating in the "shadow area" and significantly improve the coating uniformity of the entire surface of the workpiece. It makes it easier to maintain consistent coating performance for different workpieces and different areas of the same workpiece, reducing performance fluctuations. This solves the problem that the coated workpiece can only move in a circle around a certain center and lacks a rotation function.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model is a device for uniformly covering PVD coating, comprising:

[0007] A coating mechanism for depositing a thin film with specific properties on the surface of a workpiece to improve its service life, decorative effect, or functionality. The coating mechanism includes a coating box with two trays inside.

[0008] Furthermore, the coating mechanism also includes a revolution component, which is disposed on the coating box and is used to drive the workpieces placed on the two trays to revolve around the axes of the two trays during the coating operation; a rotation component, which is disposed on the two trays and is used to drive the workpieces to revolve around the trays while also rotating on their own axes; a limiting component, which is disposed inside the coating box and is used to limit and support the two trays; and a clamping component, which is disposed on the two trays and is used to clamp the workpieces. Several groups of rotation components are evenly distributed on the two trays, and several groups of clamping components are also evenly distributed on the two trays.

[0009] Furthermore, the revolution assembly includes a motor mounted on the top of the coating box. The output shaft of the motor is fixedly connected to a rotating shaft via a coupling. The bottom end of the rotating shaft extends into the interior of the coating box and is rotatably connected to the coating box. The bottom end of the rotating shaft passes through two trays and is fixedly connected to the two trays. The motor provides power for the two trays to drive the workpiece to revolution and for the workpiece to rotate on its own axis while revolutionizing.

[0010] Furthermore, the self-rotating assembly includes a self-rotating shaft rotatably connected to the top of the tray, a gear fixedly connected to the outer wall of the self-rotating shaft, a ring gear fixedly connected to the rear inner wall of the coating box, the ring gear meshing with the gear, a placement seat fixedly connected to the top of the self-rotating shaft, the ring gear being fixedly connected to the rear inner wall of the coating box by welding, and the teeth of the ring gear being disposed on the inner wall, with the self-rotating shaft and the gear being surrounded by the ring gear in the middle.

[0011] Furthermore, the limiting assembly includes four limiting seats that are fixedly connected to the inner walls of the left and right sides of the coating box, respectively. The outer walls of the two trays are fixedly connected to limiting plates. The outer walls of the two limiting plates extend into the interior of the corresponding limiting seats and are slidably connected to the corresponding limiting seats. Each of the four limiting seats has a limiting groove adapted to the corresponding limiting plate on the side near the corresponding tray. The two limiting plates are slidably connected to the corresponding limiting seats through the corresponding limiting grooves.

[0012] Furthermore, the clamping assembly includes placement grooves formed on the top of the placement base and the top of the rotation shaft. The placement base has two sliding grooves inside, and clamping blocks are slidably connected to the inner walls of the two sliding grooves. Anti-slip pads are fixedly connected to the sides of the two clamping blocks that are close to each other. The width of the two clamping blocks is adapted to the inner walls of the corresponding sliding grooves, and the tops of the two clamping blocks are designed as slopes, forming a V-shape between the two clamping blocks.

[0013] Furthermore, telescopic rods are fixedly connected to the inner walls of the two sliding grooves on opposite sides, and springs are sleeved on the outer walls of the two telescopic rods. One end of each spring is fixedly connected to the corresponding clamping block by welding, and the other end is fixedly connected to the inner walls of the two sliding grooves on opposite sides by welding.

[0014] This utility model has the following beneficial effects:

[0015] 1. This utility model incorporates a self-rotating component. Specifically, after the motor is started, its output shaft drives the rotating shaft to rotate, causing two fixed trays to revolve around the axis of the rotating shaft. This allows workpieces at different positions on the trays to alternately approach the coating particle source, helping to reduce uneven coating thickness caused by differences in the distance between the workpiece and the particle source. Simultaneously, the revolving of the trays drives the self-rotating shaft to move around the rotating shaft. The gear on the outer wall of the self-rotating shaft meshes with the ring gear on the inner wall of the coating box, causing the self-rotating shaft to drive the workpieces on the placement seat to rotate. This allows each outer wall surface of the workpiece to periodically face the particle source, reducing the probability of incomplete coating in the "shadow area" and significantly improving the uniformity of the coating on the entire surface of the workpiece. This makes it easier to maintain consistent coating performance for different workpieces and different areas of the same workpiece, reducing performance fluctuations.

[0016] 2. This utility model, by setting up a clamping assembly, specifically, when the workpiece is inserted into the placement slot connected to the rotation axis, the workpiece pushes two clamping blocks with inclined tops to slide into the groove. The telescopic rod retracts and the spring accumulates potential energy. After the workpiece is in place, the spring resets and drives the clamping blocks closer. The relative movement of the two clamping blocks clamps the workpiece, which can effectively reduce the loosening and displacement of the workpiece during the "revolution + rotation" process. At the same time, the top edge of the arc-shaped clamping block can reduce the squeezing damage to the outer wall of the workpiece. While providing stable clamping force, it protects the integrity of the workpiece surface, laying the foundation for the workpiece to maintain a stable posture during the coating process and helping to reduce coating deviation caused by workpiece shaking.

[0017] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2This is a cross-sectional structural diagram of the coating box of this utility model;

[0021] Figure 3 This is a schematic diagram of the structure of the rotating shaft of this utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the tray of this utility model;

[0023] Figure 5 This is a cross-sectional structural diagram of the clamping base of this utility model;

[0024] Figure 6 This is a schematic diagram of the structure of the clamping block of this utility model.

[0025] The attached diagram lists the components represented by each number as follows:

[0026] 1. Coating mechanism; 11. Coating box; 111. Tray; 12. Revolutionary assembly; 121. Motor; 122. Rotating shaft; 13. Rotation assembly; 131. Rotation shaft; 132. Gear; 133. Ring gear; 134. Placement seat; 14. Limiting assembly; 141. Limiting seat; 142. Limiting plate; 15. Clamping assembly; 151. Placement groove; 152. Slide groove; 153. Clamping block; 154. Anti-slip pad; 155. Telescopic rod; 156. Spring. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0028] Please see Figure 1-6 As shown, this utility model is a device for uniformly covering a PVD coating, comprising:

[0029] The coating mechanism 1 is used to deposit a thin film with specific properties on the surface of a workpiece, thereby improving the service life, decorative effect, or functionality of the workpiece. The coating mechanism 1 includes a coating box 11, inside which are two trays 111. The coating mechanism 1 also includes a revolution component 12, which is mounted on the coating box 11 and is used to drive the workpieces placed on the two trays 111 to revolve around the axes of the two trays 111 during the coating operation; a rotation component 13, mounted on the two trays 111, which respectively drives the workpieces to revolve around the axes of the trays 111 while also rotating on their own axes; a limiting component 14, located inside the coating box 11, which provides limiting support for the two trays 111; and a clamping component 15. 5. A clamping assembly 15 is set on two trays 111 to clamp the workpiece. Several groups of rotating components 13 are evenly distributed on the two trays 111, and several groups of clamping components 15 are also evenly distributed on the two trays 111. A revolving assembly 12 includes a motor 121 mounted on the top of the coating box 11. The output shaft of the motor 121 is fixedly connected to a rotating shaft 122 via a coupling. The bottom end of the rotating shaft 122 extends into the interior of the coating box 11 and is rotatably connected to it. The bottom end of the rotating shaft 122 passes through both trays 111 and is fixedly connected to them. When the motor 121 starts, it drives the rotating shaft 122 to rotate, which in turn drives the two trays 111 to rotate. The rotating assembly 13 includes a rotating component rotatably connected to the top of the trays 111.A gear 132 is fixedly connected to the outer wall of the rotating shaft 131, and a ring gear 133 is fixedly connected to the rear inner wall of the coating box 11. The ring gear 133 meshes with the gear 132. A placement seat 134 is fixedly connected to the top of the rotating shaft 131. When the tray 111 rotates, it drives the rotating shaft 131 to rotate around the rotating shaft 122. During the rotation of the rotating shaft 131 around the rotating shaft 122, the meshing of the gear 132 and the ring gear 133 causes the shaft to rotate. The limiting assembly 14 includes four limiting seats 141 fixedly connected to the left inner wall and the right inner wall of the coating box 11, respectively. A limiting plate 142 is fixedly connected to the outer wall of both trays 111. The outer walls of the two limiting plates 142 extend into the interior of the corresponding limiting seat 141 and slide in connection with the corresponding limiting seat 141. The two limiting plates 142, the four limiting seats 141, and the openings on the four limiting seats 141 are all connected to the limiting assembly 141. The limiting groove supports and limits the two trays 111. By setting a rotation component 13, specifically, after the motor 121 is started, its output shaft drives the rotating shaft 122 to rotate, causing the two through-and-fixed trays 111 to revolve around the axis of rotation. This allows workpieces at different positions on the trays 111 to alternately approach the coating particle source, helping to reduce uneven coating thickness caused by differences in the distance between the workpiece and the particle source. Simultaneously, the rotation of the trays 111 drives the rotation shaft 131 to move around the axis. The gear 132 on the outer wall of the rotation shaft 131 meshes with the ring gear 133 on the inner wall of the coating box 11, causing the rotation shaft 131 to drive the workpieces on the placement seat 134 to rotate. This ensures that the outer surfaces of the workpieces periodically face the particle source, reducing the probability of incomplete coating in "shadow areas," significantly improving the uniformity of the coating across the entire surface of the workpiece, and making it easier to maintain consistent coating performance for different workpieces and different areas of the same workpiece, reducing performance fluctuations.

[0030] The clamping assembly 15 includes a placement groove 151 formed at the top of the placement base 134 and the top of the rotation shaft 131. Two sliding grooves 152 are formed inside the placement base 134. Clamping blocks 153 are slidably connected to the inner walls of both sliding grooves 152. Anti-slip pads 154 are fixedly connected to the sides of the two clamping blocks 153 that are close to each other. The two anti-slip pads 154 are fixedly connected to the corresponding clamping blocks 153 by welding, and each side of the two anti-slip pads 154 that is close to each other is provided with anti-slip protrusions. The top edges of the sliding pads 154 on the sides that are close to each other are designed to be arc-shaped. Telescopic rods 155 are fixedly connected to the inner walls of the two sliding grooves 152 on the sides that are far apart from each other. Springs 156 are fitted onto the outer walls of the two telescopic rods 155. When a workpiece is inserted into the placement groove 151 on the placement seat 134, the bottom of the workpiece is positioned inside the placement groove 151 at the top of the rotation shaft 131. During the feeding process, the workpiece first contacts the two clamping blocks 153. As the workpiece continues to move, it pushes the two clamping blocks 153 away from each other towards their corresponding positions. The workpiece moves within the slide groove 152, causing the corresponding telescopic rod 155 and spring 156 to retract. When the bottom of the workpiece enters the placement groove 151 at the top of the spindle 131, the telescopic rod 155 and spring 156 return to their original position and stretch, causing the two clamping blocks 153 to move closer together to clamp the workpiece. By setting the clamping assembly 15, specifically when the workpiece is inserted into the placement groove 151 that is connected to the spindle 134, the workpiece pushes the two clamping blocks 153, whose tops are inclined, to slide into the slide groove 152, and the telescopic rod 155 retracts. Furthermore, the spring 156 accumulates potential energy. After the workpiece is in place, the spring 156 resets and drives the clamping block 153 to approach. The relative movement of the two clamping blocks 153 clamps the workpiece, which can effectively reduce the loosening and displacement of the workpiece during the "revolution + rotation" process. At the same time, the top edge of the arc-shaped clamping block can reduce the squeezing damage to the outer wall of the workpiece. While providing stable clamping force, it protects the integrity of the workpiece surface, laying the foundation for the workpiece to maintain a stable posture during the coating process and helping to reduce coating deviation caused by workpiece shaking.

[0031] A specific application of this embodiment is as follows: The operator aligns the workpiece to be coated with the placement groove 151 opened at the top of the placement seat 134 and slowly inserts the workpiece. During the insertion process, the bottom of the workpiece first contacts the two clamping blocks 153 in the placement groove 151. Since the tops of the two clamping blocks 153 are designed as inclined surfaces, the workpiece will exert a pushing force on the two clamping blocks 153 to both sides as it continues to move downward, pushing the two clamping blocks 153 to slide into the corresponding sliding grooves 152 respectively. During this process, the clamping blocks 153 will drive the corresponding telescopic rod 155 to retract, and at the same time, the spring 156 sleeved on the outer wall of the telescopic rod 155 is... By compressing and accumulating elastic potential energy, when the bottom of the workpiece is completely inserted into the placement groove 151 connected to the top of the rotating shaft 131, the pushing force of the workpiece on the clamping block 153 disappears, the spring 156 releases elastic potential energy and pushes the telescopic rod 155 to reset, thereby driving the two clamping blocks 153 to move closer to each other until the anti-slip pad 154 on the inner side of the clamping block 153 is tightly attached to the outer wall of the workpiece. The protrusions on the anti-slip pad 154 can enhance the friction and prevent the workpiece from loosening in subsequent movements, thus completing the clamping of a single workpiece. In the same way, multiple workpieces are clamped into several sets of placement seats 134 evenly distributed on the two trays 111.

[0032] After the workpiece is clamped, the starting device enters the coating operation stage: First, the motor 121 installed on the top of the coating box 11 is started. The output shaft of the motor 121 drives the rotating shaft 122 to rotate around its own axis at a certain speed through the coupling. Since the bottom end of the rotating shaft 122 passes through the two trays 111 and is fixedly connected to the trays 111, the rotation of the rotating shaft 122 will synchronously drive the two trays 111 to rotate around the axis of the rotating shaft 122. This is the "revolution" motion of the workpiece. During the revolution of the trays 111, the rotating shaft 131 rotatably connected to the top of the trays 111 will move around the rotating shaft 122 together with the trays 111. The gear 132 fixed on the outer wall of the rotating shaft 131 and the ring gear 133 fixed on the inner wall of the rear side of the coating box 11 always maintain a constant distance. In the meshing state, when the spin shaft 131 revolves around the spin shaft 122 with the tray 111, the gear 132 will rotate under the action of the teeth of the ring gear 133, which will drive the spin shaft 131 fixed to the gear 132 to rotate around its own axis. The placement seat 134 at the top of the spin shaft 131 rotates synchronously with the spin shaft 131, thus realizing the composite motion of the workpiece "revolving" and "rotating" at the same time. This reduces the uneven coating thickness caused by the difference in distance between the workpiece and the particle source, and improves the uniformity of the coating particles received on the workpiece surface. At the same time, the two trays 111 are always limited and supported by the limiting seat 141 and the limiting plate 142 during the rotation process, preventing the trays 111 from shifting or shaking during high-speed rotation.

[0033] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0034] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A device for uniformly covering PVD coating, characterized in that, include: The coating mechanism (1) is used to deposit a thin film with specific properties on the surface of a workpiece, thereby improving the service life, decorative effect or functionality of the workpiece. The coating mechanism (1) includes a coating box (11) with two trays (111) inside.

2. The device for uniformly covering PVD coating according to claim 1, characterized in that, The coating mechanism (1) further includes a revolution component (12), which is disposed on the coating box (11). The revolution component (12) is used to drive the workpieces placed on the two trays (111) to revolve around the axis of the two trays (111) during the coating operation; and The self-rotating component (13) is set on two trays (111). The two self-rotating components (13) are respectively used to drive the workpiece to revolve around the tray (111) as the axis while rotating on its own axis. A limiting component (14) is disposed inside the coating box (11) and is used to limit and support the two trays (111). A clamping assembly (15) is disposed on two trays (111) and is used to clamp the workpiece. Among them, the self-rotating component (13) is provided with several groups, and the several groups of self-rotating components (13) are evenly distributed on the two trays (111). The clamping component (15) is provided with several groups, and the several groups of clamping components (15) are also evenly distributed on the two trays (111).

3. The device for uniformly covering PVD coating according to claim 2, characterized in that, The revolution assembly (12) includes a motor (121) mounted on top of the coating box (11). The output shaft of the motor (121) is fixedly connected to a rotating shaft (122) via a coupling. The bottom end of the rotating shaft (122) extends into the interior of the coating box (11) and is rotatably connected to the coating box (11). The bottom end of the rotating shaft (122) passes through two trays (111) and is fixedly connected to the two trays (111). The motor (121) is bolted to the top of the coating mechanism (1), the shaft (122) is rotatably connected to the top of the coating box (11) via a bearing, and is fixedly connected to the two trays (111) by welding.

4. The device for uniformly covering PVD coating according to claim 3, characterized in that, The rotating assembly (13) includes a rotating shaft (131) rotatably connected to the top of the tray (111), a gear (132) fixedly connected to the outer wall of the rotating shaft (131), a ring gear (133) fixedly connected to the rear inner wall of the coating box (11), the ring gear (133) meshing with the gear (132), and a placement seat (134) fixedly connected to the top of the rotating shaft (131). The rotating shaft (131) is rotatably connected to the tray (111) via a bearing, and the gear (132) and the placement seat (134) are fixedly connected to the rotating shaft (131) by welding.

5. The apparatus for uniformly covering a PVD coating according to claim 4, characterized in that, The limiting component (14) includes four limiting seats (141) that are fixedly connected to the inner wall of the left side and the inner wall of the coating box (11) respectively. The outer walls of the two trays (111) are fixedly connected to limiting plates (142). The outer walls of the two limiting plates (142) extend into the interior of the corresponding limiting seat (141) and are slidably connected to the corresponding limiting seat (141). The four limiting seats (141) are fixedly connected to the coating box (11) by welding, and the side of the four limiting seats (141) near the corresponding tray (111) is designed to be arc-shaped and adapted to the outer wall of the corresponding tray (111).

6. The apparatus for uniformly covering a PVD coating according to claim 5, characterized in that, The clamping assembly (15) includes a placement groove (151) opened on the top of the placement seat (134) and the top of the rotation shaft (131). The placement seat (134) has two sliding grooves (152) inside. The inner walls of the two sliding grooves (152) are slidably connected with clamping blocks (153). The two clamping blocks (153) are fixedly connected with anti-slip pads (154) on the side of each other that is close to each other. Among them, the placement groove (151) opened on the top of the placement seat (134) is connected to the placement groove (151) opened on the top of the rotation shaft (131), and both slides (152) are connected to the placement groove (151) opened on the placement seat (134).

7. The apparatus for uniformly covering a PVD coating according to claim 6, characterized in that, Telescopic rods (155) are fixedly connected to the inner walls of the two sliding grooves (152) on the side away from each other, and springs (156) are sleeved on the outer walls of the two telescopic rods (155). The fixed ends of the two telescopic rods (155) are fixedly connected to the inner wall of the corresponding slide groove (152) by welding, and the movable ends are fixedly connected to the corresponding clamping block (153) by welding.

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