Solution removal device and crystal growing furnace

Abstract

The utility model is suitable for the technical field of silicon material processing and provides a solution removal device and a crystal growing furnace, which comprise a material extraction assembly and a material storage device, the material extraction assembly comprises a lifting rope, a quartz connecting rod, a gravity piece and a turbine piece, one end of the lifting rope is connected with a lifting piece, the other end of the lifting rope is connected with one end of the quartz connecting rod, the gravity piece is arranged in the middle of the quartz connecting rod, and the turbine piece is arranged at the end of the quartz connecting rod away from the lifting rope and the gravity piece. The material storage assembly comprises a boss piece, a supporting rod and a material storage disc, the material extraction assembly is arranged between the boss piece and the material storage disc, the lifting rope and the quartz connecting rod can move relative to the perforation, so that the turbine piece passes through the central hole of the material storage disc and immerses in the liquid in the crucible, and in the case that the turbine piece works, the liquid in the crucible immersed by the turbine piece is extracted into the material storage disc. The centrifugal force generated by the rotation of the turbine piece is used to suck the impurity silicon liquid at the bottom of the crucible to the material storage disc, so that the impurity melt at the bottom of the crucible is accurately and efficiently removed.

Description

Technical Field

[0001] This utility model belongs to the field of silicon material processing technology, and in particular relates to a solution removal device and a crystal growth furnace. Background Technology

[0002] In the field of monocrystalline silicon fabrication, continuously improving production efficiency and reducing costs have always been the core objectives of industry development. In recent years, with breakthroughs in a series of key technologies, this goal has been significantly advanced: the large-scale charging technology, which extends the hot zone size to 36 inches, combined with the application of long-life crucibles, has significantly improved the load-bearing capacity of a single charge; the introduction of water-cooled hot shield technology has enabled high-speed production, greatly shortening the pulling cycle of a single crystal rod; and the exhaust scheme of multi-filter tank collaborative operation has optimized the gas environment inside the furnace, providing more stable conditions for crystal growth. These technological advancements have jointly enabled crystal growth furnaces to achieve continuous operation of more than 450 hours per furnace, with a total charge of more than 3.5 tons, and the number of monocrystalline silicon rods pulled per furnace has exceeded 8, achieving substantial progress in improving efficiency and reducing costs.

[0003] However, the repeated feeding and crystal pulling process under large-charge, long-term operation modes faces unavoidable technical bottlenecks. This is because the segregation coefficient of metallic impurities in silicon is typically below 10. -4 After each crystal pulling process, some molten silicon always remains in the crucible. This residual melt becomes a "rich pool" for metallic impurities—the concentration of metallic impurities in the residual melt continuously increases with the number of crystal pulling cycles. When a new round of crystal pulling begins, the enriched metallic impurities enter the newly grown crystal, directly causing the crystal quality to gradually decline with the increase in the number of crystal roots pulled, specifically manifested in a continuous decrease in the minority carrier lifetime index. This problem severely limits the further realization of the advantages of large-charge technology and has become a key obstacle restricting the development of the monocrystalline silicon industry towards higher efficiency and higher quality.

[0004] Currently, the industry primarily employs differential pressure suction technology for removing crucible bottom solution. This technology uses high-purity quartz tubes or ceramic pipettes and nozzles to draw residual molten silicon into the storage container by utilizing the pressure difference between the storage container and the main chamber of the crystal growth furnace. However, in practical applications, this method has several drawbacks: the molten silicon solidifies rapidly after being drawn into the storage container, easily causing the pipette or nozzle to break, rendering it usable only as a disposable consumable and increasing production costs; establishing and maintaining the pressure difference requires complex operating procedures, which not only prolongs the operation time but also increases the skill requirements of the operators; at the same time, this method has extremely high requirements for the sealing of the storage device, and any slight leakage will affect the suction effect, resulting in high costs for removing crucible bottom solution and making it difficult to meet the needs of large-scale production. Utility Model Content

[0005] The solution removal device and crystal growth furnace provided in this embodiment of the invention aim to solve the technical problems of poor removal effect and high cost of existing crucible bottom solution.

[0006] This utility model embodiment is implemented as follows: a solution removal device for removing impurity silicon liquid from a crucible in a crystal growth furnace, comprising: The material extraction assembly comprises a lifting rope, a quartz connecting rod, a gravity component, and a turbine component. One end of the lifting rope is connected to a lifting component, and the other end of the lifting rope is connected to one end of the quartz connecting rod. The gravity component is located in the middle of the quartz connecting rod, and the turbine component is located at the end of the quartz connecting rod away from the lifting rope and the gravity component. A material storage assembly includes a boss, a support rod, and a storage tray. The boss and the storage tray are respectively disposed at both ends of the support rod. The boss is used to abut against the flange of the crystal growth furnace to position the material storage assembly with the crystal growth furnace. The boss has a through hole. A material extraction assembly is disposed between the boss and the storage tray. The lifting rope and the quartz connecting rod are movable relative to the through hole so that the turbine component passes through the central hole of the storage tray and is immersed in the liquid in the crucible. When the turbine component is working, the liquid in the crucible immersed by the turbine component is drawn into the storage tray.

[0007] Furthermore, the quartz linkage includes a first linkage and a second linkage. One end of the first linkage is connected to the suspension rope, and the other end of the first linkage is connected to one end of the gravity member. One end of the second linkage is connected to the other end of the gravity member, and the other end of the second linkage is connected to the turbine member. The centerline of the gravity member coincides with the centerlines of the first linkage and the second linkage.

[0008] Furthermore, the turbine component includes a turbine cover plate and turbine blades. The turbine cover plate is located between the turbine blades and the second connecting rod. When the turbine blades are immersed in the liquid in the crucible, there is a gap between the turbine cover plate and the central hole of the storage tray.

[0009] Furthermore, the turbine blades are evenly distributed along the circumference of the turbine cover plate, and the number of turbine blades is 3-8.

[0010] Furthermore, the turbine blades have an arc-shaped structure, and the end of the blade away from the turbine cover plate is inclined in the direction of rotation.

[0011] Furthermore, the outer diameter of the boss is larger than the inner diameter of the flange, so that the boss and the flange are positioned together.

[0012] Furthermore, there are two support rods, which are distributed opposite each other circumferentially along the bottom of the boss.

[0013] Furthermore, the gravity component includes a weight, the outer diameter of which is larger than the inner diameter of the through hole in the boss component.

[0014] Furthermore, the outer diameter of the weight is smaller than the distance between the two support rods.

[0015] A crystal growth furnace, comprising: The main furnace chamber is equipped with a crucible. A secondary furnace chamber is connected to the main furnace chamber. A lifting component is provided on the side of the secondary furnace chamber away from the main furnace chamber. A flange is provided at the connection between the main furnace chamber and the secondary furnace chamber. In any of the preceding claims, the lifting member is connected to the suspension rope of the solution removal device to release the solution removal device from the auxiliary furnace chamber to the main furnace chamber.

[0016] The beneficial effects achieved by this utility model are due to the inclusion of a material extraction component and a material storage component. Through the synergistic effect of the material extraction component and the material storage component, the centrifugal force generated by the rotation of the turbine component is used to draw the impurity silicon liquid at the bottom of the crucible to the storage tray. At the same time, stable positioning is achieved through the cooperation of the gravity component and the support rod. This has the advantages of improving equipment reliability, simplifying the operation process, reducing maintenance costs, and achieving precise and efficient removal of impurity melt at the bottom of the crucible. Attached Figure Description

[0017] Figure 1 This is a plan view of the crystal growth furnace provided in an embodiment of the present invention; Figure 2 This is a plan view of the solution removal device provided in an embodiment of the present invention. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0019] In existing technologies, the industry primarily employs differential pressure suction technology for removing crucible bottom solution. This technology uses high-purity quartz tubes or ceramic pipettes and nozzles to draw residual molten silicon into the storage container based on the pressure difference between the storage container and the main chamber of the crystal growth furnace. However, in practical applications, this method has several drawbacks: the molten silicon solidifies rapidly after being drawn into the storage container, easily causing the pipette or nozzle to break, rendering it usable only as a disposable consumable and increasing production costs; establishing and maintaining the pressure difference requires complex operating procedures, which not only prolongs the operation time but also increases the skill requirements of the operators; at the same time, this method has extremely high requirements for the sealing of the storage device, and any slight leakage will affect the suction effect, resulting in high costs for removing crucible bottom solution and making it difficult to meet the needs of large-scale production. This application includes a material extraction component and a material storage component. Through the synergistic effect of the material extraction component and the material storage component, the centrifugal force generated by the rotation of the turbine component is used to draw the impurity silicon liquid at the bottom of the crucible to the storage tray. At the same time, the cooperation of the gravity component and the support rod achieves stable positioning. This has the advantages of improving equipment reliability, simplifying the operation process, reducing maintenance costs, and achieving precise and efficient removal of impurity melt at the bottom of the crucible.

[0020] Example 1 Please see Figure 1 and Figure 2 This utility model embodiment is implemented as follows: a solution removal device 100 is used to remove impurity silicon liquid from crucible 301 within a crystal growth furnace 1000, comprising: The material extraction assembly 10 comprises a lifting rope 101, a quartz connecting rod 102, a gravity component 105, and a turbine component 106. One end of the lifting rope 101 is connected to the lifting component 401, and the other end of the lifting rope 101 is connected to one end of the quartz connecting rod 102. The gravity component 105 is located in the middle of the quartz connecting rod 102, and the turbine component 106 is located at the end of the quartz connecting rod 102 away from the lifting rope 101 and the gravity component 105. The storage assembly 20 includes a boss 201, a support rod 202, and a storage tray 203. The boss 201 and the storage tray 203 are respectively disposed at both ends of the support rod 202. The boss 201 is used to abut against the flange 402 of the crystal growth furnace 1000 to position the storage assembly 20 with the crystal growth furnace 1000. The boss 201 is provided with a through hole. The extraction assembly 10 is disposed between the boss 201 and the storage tray 203. The lifting rope 101 and the quartz connecting rod 102 can move relative to the through hole so that the turbine 106 passes through the central hole of the storage tray 203 and is immersed in the liquid in the crucible 301. When the turbine 106 is working, the liquid in the crucible 301 immersed by the turbine 106 is drawn into the storage tray 203.

[0021] In this embodiment, the quartz connecting rod 102 refers to the high-temperature resistant rod-shaped structure that connects the suspension rope 101 and the turbine component 106. Specifically, it can be made of fused silica material to maintain structural stability in high-temperature environments and ensure the reliability of power transmission. The gravity component 105 refers to the mass block set in the middle of the connecting rod, which can be made of tungsten alloy. In this embodiment, the gravity component 105 is a hammer and is roughly square. Of course, in other embodiments, the gravity component 105 can also be other shapes, which are not limited here. The gravity component 105 mainly maintains the vertical state of the material extraction component 10 by its own weight to prevent swinging and deviation. Turbine component 106 refers to an end component with a fluid drive structure, which can be made of a corrosion-resistant alloy and generates negative pressure through rotational motion to achieve liquid suction. The storage tray 203 refers to a container structure with a central hole, which can be made of graphite composite material and has an inclined guide surface on the inner wall to guide the liquid to be evenly distributed. The boss part 201 refers to a positioning component with a perforation. It can be made of alumina ceramic and can be quickly positioned by matching the outer diameter of the flange 402.

[0022] Specifically, the lifting component 401 controls the lifting and lowering of the material extraction assembly 10 via the suspension rope 101 (tungsten wire rope). When the turbine component 106 is immersed in the liquid in the crucible 301, the lifting component 401 rotates under the drive of the external rotating mechanism, thereby driving the suspension rope 101 to rotate, which in turn drives the quartz connecting rod 102, the gravity component 105, and the turbine component 106 to rotate. During the rotation, the turbine blades 108 of the turbine component 106 generate centrifugal force, forming a negative pressure area in the central region, which draws the liquid into the storage pan 203 through the central hole. The storage assembly 20 is held and fixed by the boss component 201 against the flange 402, and the support rod 202 provides structural stability. The gravity component 105 balances the center of gravity of the material extraction assembly 10, ensuring that the turbine component 106 is vertically immersed in the liquid and avoiding lateral displacement that affects the extraction efficiency. The quartz connecting rod 102 maintains rigidity in the high-temperature environment, realizing reliable power transmission between the lifting component 401 and the turbine component 106.

[0023] This design prevents the accumulation of metallic impurities within the crucible 301 during multiple crystal pulling processes. Furthermore, the mechanical suction structure reduces equipment maintenance costs, and the high-temperature resistant materials extend the component's lifespan. The simplified operating procedure shortens production preparation time, and the coordinated design of the support rod 202 and the boss 201 enhances the device's positioning stability, providing a reliable guarantee for continuous production. The structure is simple and easy to implement.

[0024] Example 2 Please see Figure 1 and Figure 2Furthermore, the quartz connecting rod 102 includes a first connecting rod 103 and a second connecting rod 104. One end of the first connecting rod 103 is connected to the suspension rope 101, and the other end of the first connecting rod 103 is connected to one end of the gravity member 105. One end of the second connecting rod 104 is connected to the other end of the gravity member 105, and the other end of the second connecting rod 104 is connected to the turbine member 106. The centerline of the gravity member 105 coincides with the centerlines of the first connecting rod 103 and the second connecting rod 104.

[0025] In this embodiment, the first connecting rod 103 is a rigid connecting component that connects the lifting rope 101 and the gravity component 105. Specifically, it can be made of high-purity quartz material, which has high temperature resistance and deformation resistance properties, and is used to transmit lifting force and maintain structural stability. The second connecting rod 104 is a rigid connecting component that connects the gravity component 105 and the turbine component 106. It is also made of high-purity quartz material, which can maintain mechanical strength in high-temperature environments and ensure the positioning accuracy of the turbine component 106 in the liquid.

[0026] Specifically, the first link 103 receives the lifting action of the lifting member 401 via the suspension rope 101 and transmits the force to the gravity member 105. When subjected to external force, the gravity member 105 balances the lateral force generated by the liquid flow through its mass inertia, ensuring that the second link 104 always moves along a preset path. The second link 104 transmits the stable state of the gravity member 105 to the turbine member 106, ensuring that the turbine member 106 maintains a vertical attitude when immersed in the liquid. The centerlines of the first link 103 and the second link 104 coincide with the centerline of the gravity member 105, forming a continuous force transmission axis, effectively eliminating vibration or displacement caused by structural eccentricity.

[0027] It is understood that in other embodiments, the quartz connecting rod 102 may also be integrally formed, and the gravity component 105 may be attached to the quartz connecting rod 102 by an external structure. The specific design can be made according to the actual situation and is not limited here.

[0028] Example 3 Please see Figure 2 Furthermore, the turbine component 106 includes a turbine cover plate 107 and a turbine blade 108. The turbine cover plate 107 is located between the turbine blade 108 and the second connecting rod 104. When the turbine blade 108 is immersed in the liquid in the crucible 301, there is a gap between the turbine cover plate 107 and the center hole of the storage tray 203.

[0029] Among them, the turbine cover plate 107 refers to the flat plate structure covering the turbine blade 108. It can be made of quartz or ceramic material and is used to isolate the space between the turbine blade 108 and the storage tray 203 to prevent liquid backflow from interfering with the turbine operation. Turbine blades 108 refer to the sheet-like structures distributed circumferentially around the turbine cover plate 107. They can be made of high-temperature resistant alloy materials. They generate negative pressure through rotation to extract liquid. The gap between the turbine cover plate 107 and the center hole of the storage tray 203 refers to the gap between the turbine cover plate 107 and the center hole of the storage tray 203. Specifically, it can be controlled within the range of 0.5-2 mm to maintain the liquid flow channel and prevent structural collision.

[0030] In some embodiments, the inner wall of the storage tray 203 may be provided with a backflow surface, which refers to the inclined structure of the inner wall of the storage tray 203. Specifically, it can be formed by mechanical processing at an inclination angle of 30-45 degrees to guide the liquid to flow towards the edge of the storage tray 203 and avoid the generation of eddies.

[0031] Specifically, after the turbine blades 108 are immersed in the liquid in the crucible 301, the turbine component 106 generates centrifugal force through rotation, drawing the liquid from the central hole into the storage tray 203. The gap between the turbine cover plate 107 and the central hole allows for continuous liquid inflow while preventing rigid contact between the turbine cover plate 107 and the storage tray 203. The inclination angle of the backflow surface causes the liquid to diffuse outward along the inner wall, reducing liquid retention in the central region. For example, when the turbine blades 108 rotate at a set speed, the liquid is drawn into the storage tray 203 and evenly distributed under the guidance of the backflow surface, preventing local accumulation that could lead to solidification.

[0032] Example 4 Furthermore, the turbine blades 108 are evenly distributed along the circumference of the turbine cover plate 107, and the number of turbine blades 108 is 3-8.

[0033] In this embodiment, circumferential uniform distribution means that the turbine blades 108 are arranged at equal angular intervals around the central axis of the turbine cover plate 107. Specifically, it can be achieved by using a ring array processing technology. This layout can ensure that the centrifugal force is evenly distributed during rotation.

[0034] It should be noted that in other embodiments, the number of turbine blades can also be 9, 10, 11, etc., and the specific number can be selected according to different situations, which is not limited here.

[0035] Example 5 Furthermore, the turbine blade 108 has an arc-shaped structure, and the end of the blade away from the turbine cover plate 107 is inclined in the direction of rotation.

[0036] In this embodiment, the arc-shaped structure refers to the continuous curvature of the turbine blade 108's surface shape, which can be achieved using circular arcs or parabolic surfaces. This structure guides the fluid flow along the curved surface, reducing flow separation. The tilting towards the rotation direction refers to the blade tip forming a specific angle relative to the rotation axis, which can be achieved by tip bending or twisting. This design reduces the impact resistance between the blade tip and the fluid, improving fluid transport efficiency.

[0037] Example 6 Please see Figure 1 and Figure 2 Furthermore, the outer diameter of the boss 201 is larger than the inner diameter of the flange 402, so that the boss 201 and the flange 402 can be positioned.

[0038] Specifically, the boss 201 refers to the positioning component located on top of the storage assembly 20. It can be an annular structure with an outer diameter larger than the inner diameter of the flange 402, achieving positioning through abutment. This design allows the storage assembly 20 to automatically align with the center of the flange 402 during installation, preventing misalignment between the extraction assembly 10 and the crucible 301 due to offset. The flange 402 is the annular disc at the connection between the main furnace chamber 30 and the auxiliary furnace chamber 40. Its inner diameter matches the outer diameter of the boss 201, supporting and fixing the storage assembly 20. This dimensional fit ensures stable installation of the storage assembly 20 within the crystal growth furnace 1000.

[0039] Furthermore, with the storage assembly 20 installed, the boss 201, with its outer diameter larger than the inner diameter of the flange 402, can be forcibly pressed against the surface of the flange 402. This mechanical interference allows the storage assembly 20 to be naturally fixed to the flange 402 under gravity, achieving center positioning without additional adjustment. When the extraction assembly 10 is operating, the tight fit between the boss 201 and the flange 402 prevents the storage pan 203 from shifting due to liquid flow or vibration of the turbine component 106, thereby ensuring that the turbine component 106 is always aligned with the central area of ​​the crucible 301 for extracting impurity silicon liquid.

[0040] Example 7 Please see Figure 1 and Figure 2 Furthermore, there are two support rods 202, which are distributed opposite each other along the bottom of the boss 201.

[0041] Specifically, the support rod 202 refers to the rigid connecting member between the boss 201 and the storage tray 203. It can be made of metal and is used to maintain the overall structural stability of the storage assembly 20. The symmetrical arrangement of the two rods can effectively distribute the load. The circumferentially opposed distribution means that the two support rods 202 are arranged symmetrically at 180 degrees on the bottom circumference of the boss 201. They can be fixed by welding or threaded connection.

[0042] In other embodiments, the number of support rods 202 can also be three. The three support rods 202 can form a stable triangular support structure to prevent the storage tray 203 from deflecting during liquid collection. In yet another embodiment, the number of support rods 202 can also be four, five, six, etc., which can be designed according to the actual situation and are not limited here.

[0043] Example 8 Furthermore, the gravity component 105 includes a counterweight, the outer diameter of which is larger than the inner diameter of the through hole in the boss component 201, and the outer diameter of which is smaller than the distance between the two support rods 202.

[0044] In this embodiment, the counterweight refers to a component that provides stable counterweight through its own weight. Specifically, it can be made of high-density metal material and machined into a cylindrical or spherical structure. Its outer diameter design must meet the dual requirements of being larger than the inner diameter of the perforation and smaller than the spacing between the support rods 202. The inner diameter of the perforation refers to the diameter parameter of the central channel of the boss 201, which can be achieved by machining a circular through-hole with a smooth inner wall. The spacing between the support rods 202 refers to the spatial distance formed when two rods are symmetrically distributed at the bottom of the boss 201, which can be set by adjusting the installation angle or position of the rods.

[0045] Specifically, after the storage assembly 20 is positioned against the flange 402 by the boss 201, the extraction assembly 10 moves vertically by driving the quartz connecting rod 102 via the suspension rope 101. When the weight moves downward with the quartz connecting rod 102, its outer diameter being larger than the inner diameter of the perforation effectively prevents the gravity component 105 from accidentally detaching from the perforation area, ensuring the extraction assembly 10 maintains a stable trajectory during vertical movement. Simultaneously, the design of the weight's outer diameter being smaller than the spacing between the support rods 202 ensures that the gravity component 105 will not contact or interfere with the rods when passing through the support rod 202 area, guaranteeing smooth movement of the extraction assembly 10 between the storage tray 203 and the boss 201. This structure, by precisely matching the dimensional relationship between the weight's outer diameter, the perforation's inner diameter, and the spacing between the support rods 202, achieves both the limiting function of the gravity component 105 and avoids the risk of collision with the support structure during movement.

[0046] Example 10 Please see Figure 1 A crystal growth furnace 1000, comprising: The main furnace chamber 30 is equipped with a crucible 301. A secondary furnace chamber 40 is connected to the main furnace chamber 30. A lifting component 401 is provided on the side of the secondary furnace chamber 40 away from the main furnace chamber 30. A flange 402 is provided at the connection between the main furnace chamber 30 and the secondary furnace chamber 40. In any of the above-mentioned solution removal devices 100, the lifting member 401 is connected to the suspension rope 101 of the solution removal device 100 to release the solution removal device 100 from the auxiliary furnace chamber 40 to the main furnace chamber 30.

[0047] The main furnace chamber 30 is a closed cavity used to contain the crucible 301 and molten silicon. It can be made of high-temperature resistant metal and its internal space is designed to accommodate a large-sized crucible 301, maintaining a stable silicon melt environment. The auxiliary furnace chamber 40 is an auxiliary cavity connected to the main furnace chamber 30. It can be a split-type structure, sealed to the main furnace chamber 30 via a flange 402. It houses the lifting device and provides a lifting channel for the solution removal device 100. The lifting component 401 is the drive mechanism that controls the movement of the solution removal device 100. It can be implemented using a servo motor and a steel cable system, precisely controlling the raising and lowering of the lifting rope 101 to adjust the immersion depth of the turbine component 106 in the crucible 301. The flange 402 is an annular sealing structure connecting the main and auxiliary furnace chambers 40. It can be implemented using a flanged metal ring and a sealing gasket, with its inner diameter smaller than the outer diameter of the boss component 201 to ensure the positioning and fixation of the storage assembly 20.

[0048] Furthermore, the crucible 301 placed in the main furnace chamber 30 continuously contains the silicon melt during the crystal pulling process, and the auxiliary furnace chamber 40 is sealed to the main furnace chamber 30 through the flange 402.

[0049] When it is necessary to remove impurity molten silicon, the material extraction assembly 10 and the material storage assembly 20 are first hung in the auxiliary furnace chamber 40. Since the outer diameter of the counterweight is larger than the inner diameter of the through hole in the boss component 201, a stable connection exists between the material extraction assembly 10 and the material storage assembly 20. After argon gas is extracted from the auxiliary furnace chamber 40, the furnace pressure in the auxiliary furnace chamber 40 and the main furnace chamber 30 is consistent. Then, the isolation barrier is opened to connect the main furnace chamber 30 and the auxiliary furnace chamber 40. Next, the lifting component 401 is controlled to release the lifting rope 101 (this can be achieved by setting a telescopic motor or a lead screw structure, which will not be elaborated here) to lower the material extraction assembly 10 and the material storage assembly 20 into the main furnace chamber 30. During this process… Since the outer diameter of the boss 201 is larger than the inner diameter of the flange 402, the boss 201 will abut against the flange 402 for positioning. Then, the lifting rope 101 is released to create a gap between the turbine cover plate 107 of the turbine component 106 and the center hole. Then, the crucible 301 support rod of the crystal growth furnace 1000 is controlled to lift the crucible 301 to a height so that the turbine blades 108 of the turbine component 106 are immersed in the liquid in the crucible 301. Then, the turbine component 106 is controlled to operate. While the turbine component 106 is operating, the liquid in the crucible 301 immersed in the turbine component 106 is drawn into the storage tray 203. Centrifugal force is used to draw the silicon liquid into the storage tray 203. After the liquid is drawn, the lifting component 401 retracts the solution removal device 100 into the auxiliary furnace chamber 40. The operation is convenient and the structure is simple.

[0050] The beneficial effects achieved by this utility model are due to the provision of a material extraction component 10 and a material storage component 20. Through the synergistic effect of the material extraction component 10 and the material storage component 20, the centrifugal force generated by the rotation of the turbine component 106 is used to draw the impurity silicon liquid at the bottom of the crucible 301 to the storage tray 203. At the same time, stable positioning is achieved through the cooperation of the gravity component 105 and the support rod 202. This has the advantages of improving equipment reliability, simplifying operation procedures, reducing maintenance costs, and achieving precise and efficient removal of impurity melt at the bottom of the crucible 301.

[0051] It is understood that those skilled in the art can combine various implementation methods in the above embodiments under the guidance of the above examples to obtain technical solutions with multiple implementation methods.

[0052] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A solution removal device for removing molten silicon containing impurities from a crucible within a crystal growth furnace, characterized in that, It includes: The material extraction assembly comprises a lifting rope, a quartz connecting rod, a gravity component, and a turbine component. One end of the lifting rope is connected to a lifting component, and the other end of the lifting rope is connected to one end of the quartz connecting rod. The gravity component is located in the middle of the quartz connecting rod, and the turbine component is located at the end of the quartz connecting rod away from the lifting rope and the gravity component. A material storage assembly includes a boss, a support rod, and a storage tray. The boss and the storage tray are respectively disposed at both ends of the support rod. The boss is used to abut against the flange of the crystal growth furnace to position the material storage assembly with the crystal growth furnace. The boss has a through hole. A material extraction assembly is disposed between the boss and the storage tray. The lifting rope and the quartz connecting rod are movable relative to the through hole so that the turbine component passes through the central hole of the storage tray and is immersed in the liquid in the crucible. When the turbine component is working, the liquid in the crucible immersed by the turbine component is drawn into the storage tray.

2. The solution removal device as described in claim 1, characterized in that, The quartz connecting rod includes a first connecting rod and a second connecting rod. One end of the first connecting rod is connected to the suspension rope, and the other end of the first connecting rod is connected to one end of the gravity component. One end of the second connecting rod is connected to the other end of the gravity component, and the other end of the second connecting rod is connected to the turbine component. The centerline of the gravity component coincides with the centerlines of the first connecting rod and the second connecting rod.

3. The solution removal device as described in claim 2, characterized in that, The turbine component includes a turbine cover plate and turbine blades. The turbine cover plate is located between the turbine blades and the second connecting rod. When the turbine blades are immersed in the liquid in the crucible, there is a gap between the turbine cover plate and the central hole of the storage tray.

4. The solution removal device as described in claim 3, characterized in that, The turbine blades are evenly distributed along the circumference of the turbine cover plate, and the number of turbine blades is 3-8.

5. The solution removal device as described in claim 4, characterized in that, The turbine blades have an arc-shaped structure, and the end of the blade away from the turbine cover plate is inclined in the direction of rotation.

6. The solution removal apparatus as claimed in claim 1, characterized in that, The outer diameter of the boss is larger than the inner diameter of the flange, so that the boss and the flange are positioned together.

7. The solution removal apparatus as claimed in claim 1, characterized in that, The number of support rods is two, and the two support rods are distributed opposite each other circumferentially along the bottom of the boss.

8. The solution removal apparatus as claimed in claim 7, characterized in that, The gravity component includes a weight, the outer diameter of which is larger than the inner diameter of the through hole in the boss component.

9. The solution removal apparatus as claimed in claim 8, characterized in that, The outer diameter of the weight is smaller than the distance between the two support rods.

10. A crystal growth furnace, characterized in that, It includes: The main furnace chamber is equipped with a crucible. A secondary furnace chamber is connected to the main furnace chamber. A lifting component is provided on the side of the secondary furnace chamber away from the main furnace chamber. A flange is provided at the connection between the main furnace chamber and the secondary furnace chamber. The solution removal device according to any one of claims 1-9, wherein the lifting member is connected to the suspension rope of the solution removal device to release the solution removal device from the auxiliary furnace chamber to the main furnace chamber.

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