A single crystal furnace sub-chamber

Abstract

The utility model is suitable for single crystal production technical field, provide a kind of single crystal furnace auxiliary room, it includes furnace body, at least two gas packs and at least one air source component, and accommodation cavity is formed in furnace body, and accommodation cavity is used to accommodate crystal bar, and at least two gas packs are respectively spaced apart to set in the lateral wall of accommodation cavity. Air source component is communicated with gas pack, and air source component is used to inflate gas pack to make gas pack expand, to limit the circumferential movement of crystal bar, or used to exhaust gas pack to make gas pack compress, to remove the restriction to the circumferential movement of crystal bar. Because the inflatable and compressed gas pack and the air source component for inflating or exhausting gas pack are provided, contact fixation and separation control are automatically realized during the transfer process of crystal bar, and the precise restriction of crystal bar circumferential displacement is realized by using the pneumatic expansion away, so that the safety hazard and positioning deviation caused by manual operation are effectively eliminated, and the utility model has the advantages of high degree of automation, stable and safe and reliable fixing effect.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal rod production technology, and in particular relates to a single crystal furnace auxiliary chamber. Background Technology

[0002] In the production process of single-crystal ingots, the ingot removal step is a critical step to ensure ingot quality and operational safety. In existing technologies, after ingot growth is completed in the sub-chamber of the single-crystal furnace, the ingot needs to be transferred to the removal position via a rotating sub-chamber. Because the ingot is suspended in the rotating sub-chamber, and the sub-chamber generates a large inertial torque during rotation start-up and shutdown, the ingot is prone to irregular shaking. This shaking not only causes the ingot to collide with the furnace inner wall, causing surface damage, but in severe cases, it can also lead to ingot breakage or detachment from the seed crystal, resulting in significant economic losses.

[0003] In existing technology, operators use an extension rod with a high-temperature resistant glove or other high-temperature resistant soft material attached to the front end. The extension rod is manually operated to fix the crystal rod and prevent it from shaking during the rotation of the sub-chamber.

[0004] However, existing technologies have obvious drawbacks:

[0005] Poor operational stability: When manually fixing the crystal rod, it is difficult to precisely control the force. If the force is too weak, it cannot effectively prevent the crystal rod from shaking, and there is still a risk of collision; if the force is too strong, it will force the crystal rod to deviate from its normal position, which may cause the crystal rod to scrape against other components.

[0006] High labor costs: This operation requires two operators to work together, one to control the rotation of the auxiliary chamber and the other to operate the extension rod to fix the crystal rod, which increases the labor input.

[0007] Significant safety hazards exist: Operators need to operate at close range below the auxiliary chamber. If the crystal rod explodes or falls, the operators below are very likely to be injured, posing a serious risk to personal safety. Utility Model Content

[0008] The single crystal furnace sub-chamber provided in this embodiment of the invention aims to solve the technical problems of high operating costs and low safety performance in the rotation of crystal rods in the single crystal furnace sub-chamber.

[0009] This utility model embodiment is implemented as follows: a single crystal furnace auxiliary chamber includes:

[0010] A furnace body, wherein a receiving cavity is formed within the furnace body for receiving crystal rods;

[0011] At least two air chambers are disposed at intervals on the side wall of the accommodating cavity;

[0012] At least one gas source component is connected to the gas bag. The gas source component is used to inflate the gas bag to expand it so that the gas bag comes into contact with the crystal rod to restrict the circumferential movement of the crystal rod, or to vent the gas bag to compress it so that the gas bag separates from the crystal rod to release the restriction on the circumferential movement of the crystal rod.

[0013] Furthermore, there are two air bags, which are symmetrically arranged on the sidewall of the accommodating cavity.

[0014] Furthermore, the two air bags are positioned near the bottom of the accommodating cavity.

[0015] Furthermore, the air bag includes an expansion surface and a fixing surface, a fixing structure is formed on the side wall of the accommodating cavity, and a fixing part adapted to the fixing structure is formed on the fixing surface. The air bag is fixed to the side wall of the accommodating cavity by the fixing part and the fixing structure.

[0016] Furthermore, the air bag is made of a high-temperature resistant material, and the expansion surface of the air bag is provided with a high-temperature resistant buffer layer.

[0017] Furthermore, the sidewall of the accommodating cavity is formed with an air passage, through which the air source assembly inflates or deflates the corresponding air bag.

[0018] Furthermore, the air source assembly includes a compressed air source and an air pipe. One end of the air pipe is connected to the compressed air source, and the other end of the air pipe passes through the air passage and is connected to the air bag. The connection between the air pipe and the air passage is sealed. The compressed air source is used to supply air to the air bag through the air pipe or to discharge the air inside the air bag to the outside of the air bag.

[0019] Furthermore, the air pipe is equipped with a solenoid valve and a directional regulating valve, which are connected in series on the air pipe. The solenoid valve is used to control the on / off state of the compressed air source, and the directional regulating valve is used to control the airflow direction of the compressed air source.

[0020] Furthermore, a push-button switch is provided on the furnace body. The push-button switch is electrically connected to the compressed air source, the solenoid valve, and the directional adjustment valve. The push-button switch is used to control the operation of the solenoid valve and the directional adjustment valve.

[0021] Furthermore, a sensing sensor is installed inside the accommodating cavity. The sensing sensor is electrically connected to the compressed air source, the solenoid valve, and the directional adjustment valve. The sensing sensor is used to detect the opening and closing state of the bottom of the accommodating cavity. When the bottom of the accommodating cavity is open, the compressed air source, the solenoid valve, and the directional adjustment valve inflate the air bag. When the bottom of the accommodating cavity is closed, the compressed air source, the solenoid valve, and the directional adjustment valve inflate the air bag.

[0022] The beneficial effects achieved by this utility model are that, due to the inclusion of an expandable and compressible air bag and an air source component for filling or venting the air bag, contact fixation and separation control are automatically realized during the crystal rod transfer process. The pneumatic expansion is used to precisely limit the circumferential displacement of the crystal rod, thus effectively eliminating the safety hazards and positioning deviations caused by manual operation. It has the advantages of high automation, stable fixation effect and safety and reliability. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the single crystal furnace auxiliary chamber provided in this embodiment of the utility model;

[0024] Figure 2 This is another structural schematic diagram of the single crystal furnace auxiliary chamber provided in this embodiment of the utility model;

[0025] Figure 3 This is another structural schematic diagram of the single crystal furnace auxiliary chamber provided in this embodiment of the utility model;

[0026] Figure 4 This is another structural schematic diagram of the single crystal furnace auxiliary chamber provided in this embodiment of the utility model. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0028] In existing technologies, operators use an extension rod with a high-temperature resistant glove or other high-temperature resistant soft material attached to its tip. This extension rod is manually operated to secure the crystal rod and prevent it from swaying during rotation in the sub-chamber. However, existing technologies have significant drawbacks: poor operational stability: The force applied when manually securing the crystal rod is difficult to control precisely. Insufficient force fails to effectively prevent swaying, still posing a risk of collision; excessive force forces the crystal rod off its normal position, potentially causing it to scrape against other components. High labor costs: This operation requires two operators working together—one to control the rotation of the sub-chamber and the other to operate the extension rod to secure the crystal rod, increasing manpower. Significant safety hazards: Operators must operate at close range below the sub-chamber; if the crystal rod explodes or falls, the operator below is highly susceptible to injury, posing a serious personal safety risk. This application incorporates an expandable and compressible air tank and an air source component for filling or venting the air tank. During the crystal rod transfer process, it automatically achieves contact fixation and separation control. By utilizing the pneumatic expansion to precisely limit the circumferential displacement of the crystal rod, it effectively eliminates the safety hazards and positioning deviations caused by manual operation. It has the advantages of high automation, stable fixation effect, and safety and reliability.

[0029] Example 1

[0030] Please see Figures 1 to 4 The present invention is implemented as follows: a single crystal furnace auxiliary chamber 100, comprising:

[0031] The furnace body 10 has a receiving cavity 101 formed inside it, which is used to receive crystal rods;

[0032] At least two air bags 20 are respectively disposed at intervals on the side wall 101 of the receiving cavity 101;

[0033] At least one gas source component 30 is connected to the gas reservoir 20. The gas source component 30 is used to inflate the gas reservoir 20 to make it expand so that the gas reservoir 20 comes into contact with the crystal rod to restrict the circumferential movement of the crystal rod, or to vent the gas reservoir 20 to compress the gas reservoir 20 so that the gas reservoir 20 separates from the crystal rod to release the restriction on the circumferential movement of the crystal rod.

[0034] In this embodiment, the air reservoir 20 refers to a flexible container with expandable properties. Due to the high temperature of the crystal rod, the air reservoir 20 is made of high-temperature resistant rubber material. Volume change is achieved by filling or venting air into the air reservoir 20. The gas source assembly 30 refers to the assembly that fills the air reservoir 20 with gas or vents the gas from the air reservoir 20. The air reservoirs 20 are spaced apart on the sidewall 101 of the accommodating cavity, meaning that the air reservoirs 20 are discontinuously distributed circumferentially. Specifically, they can be arranged symmetrically or asymmetrically to ensure that the crystal rod can be effectively constrained in any direction.

[0035] It should be noted that the height of air tank 20 is the same.

[0036] Specifically, when it is necessary to fix the crystal rod, the gas source component 30 supplies air to the gas chamber 20. After the gas chamber 20 expands, it contacts the surface of the crystal rod, creating frictional resistance. The contact pressure is automatically adjusted by the deformation of the gas chamber 20, avoiding the problem of uneven manual force application. In this situation, the crystal rod is constrained at multiple points, and its circumferential displacement is effectively suppressed. After the rod removal operation is completed, the gas source component 30 discharges the gas from the gas chamber 20, and the gas chamber 20 returns to its original shape, releasing the constraint and ensuring that the crystal rod can move freely.

[0037] This configuration allows for rapid response to crystal rod displacement, providing continuous and stable constraint force during the 100° rotation of the single crystal furnace auxiliary chamber, effectively preventing collision accidents. The system operates without manual intervention; a single person can complete the entire operation process in one session.

[0038] It should be noted that in this embodiment, there are two gas source components 30, and each gas source component 30 is connected to one of the gas bags 20. In other embodiments, there may be only one gas source component 30, and one gas source component 30 is connected to two gas bags 20 through a gas pipe 302. By reducing the number of gas source components 30, the manufacturing cost of the single crystal furnace sub-chamber 100 is greatly reduced, which is conducive to the mass production of the single crystal furnace sub-chamber 100.

[0039] As can be seen from the above, one gas source component 30 can be connected to multiple air bags simultaneously through the air pipe 302, or one gas source component 30 can be connected to only one air bag. The specific choice can be made according to the actual situation and is not limited here.

[0040] Example 2

[0041] Please see Figures 1 to 4 Furthermore, there are two air bags 20, which are symmetrically arranged on the side wall 101 of the accommodating cavity 101.

[0042] In this application, there are two air bags 20, which are symmetrically designed. This allows the clamping force to be evenly distributed on both sides of the crystal rod, and the inertial force generated during rotation is canceled out in both directions, avoiding crystal rod displacement caused by unilateral pressure. For example, the air bags 20 can be installed on the horizontal symmetry line of the side wall 101. When inflated, the contact surfaces of the two air bags 20 form a symmetrical clamping structure with an included angle of 180 degrees.

[0043] It should be noted that in other embodiments, the number of air bags 20 can be one, three, four, etc., and can be designed according to the actual situation, and is not limited here.

[0044] Example 3

[0045] Please refer to it again. Figures 1 to 4 Furthermore, the two air bags 20 are positioned near the bottom of the receiving cavity 101.

[0046] This design allows the clamping force to act directly on the area below the crystal rod's center of gravity, thus improving stability.

[0047] It is understood that in other embodiments, the two air bags 20 may also be located in other positions of the receiving cavity 101, depending on the actual situation, and are not limited here.

[0048] Example 4

[0049] Please see Figures 1 to 4 Furthermore, the air bag 20 includes an expansion surface 201 and a fixing surface 202. A fixing structure 104 is formed on the side wall 101 of the accommodating cavity 101, and a fixing part 203 adapted to the fixing structure 104 is formed on the fixing surface 202. The air bag 20 is fixed to the side wall 101 of the accommodating cavity 101 by the fixing part 203 and the fixing structure 104.

[0050] The expansion surface 201 refers to the surface of the gas reservoir 20 facing the crystal rod. During inflation, it expands outward and contacts the crystal rod. This can be achieved using a composite structure where a flexible material layer covers a rigid substrate, and the flexible material layer is deformable to adapt to the shape of the crystal rod surface. The fixing surface 202 refers to the surface of the gas reservoir 20 that connects to the side wall 101 of the accommodating cavity 101. The fixing structure 104 refers to a mechanical connecting component, such as a groove, snap-fit, or bolt hole, provided on the side wall 101 of the accommodating cavity 101. This component can be formed using metal processing techniques. The fixing part 203 refers to a component that matches the fixing structure 104, such as a protrusion, latch, or bolt. A rigid connection between the gas reservoir 20 and the side wall 101 is achieved through embedding or locking. The gas reservoir 20 is fixed using the fixing part 203 and the fixing structure 104. The structure is simple and easy to implement.

[0051] Specifically, when the air bag 20 needs to be installed, the fixing part 203 is embedded in the fixing structure 104 of the side wall 101 of the receiving cavity 101. For example, a latch is inserted into the groove, or a bolt is passed through the hole to complete the fastening, which is not limited here. During the inflation process, the expansion surface 201 expands outward under the action of air pressure. At this time, the fixing structure 104 between the fixing surface 202 and the side wall 101 can withstand the reaction force generated by the expansion of the air bag 20, and prevent the air bag 20 from failing to contact the crystal rod due to displacement caused by force. During the degassing, the expansion surface 201 contracts and detaches from the crystal rod, and the fixing structure 104 still maintains the stable connection between the air bag 20 and the side wall 101, preventing the air bag 20 from being displaced due to the impact of airflow.

[0052] Example 5

[0053] Furthermore, the air bag 20 is made of high-temperature resistant material, and the expansion surface 201 of the air bag 20 is provided with a high-temperature resistant buffer layer.

[0054] As described above, the temperature of the crystal rod is relatively high, the gas chamber 20 is made of a high-temperature resistant material, and the expansion surface 201 of the gas chamber 20 is provided with a high-temperature resistant buffer layer. This can improve the stability of the gas chamber 20 under high-temperature conditions, which is beneficial to the normal operation of the gas chamber 20. Specifically, the high-temperature resistant buffer layer can be implemented by a silicone coating or a ceramic fiber woven layer. Of course, in other embodiments, the high-temperature resistant buffer layer can also be made of other materials. The specific design can be based on the actual situation and is not limited here.

[0055] Example 6

[0056] Please see Figures 1 to 4 Furthermore, the sidewall 101 of the accommodating cavity 101 is formed with an air passage 103, through which the air source assembly 30 inflates or deflates the corresponding air bag 20.

[0057] In this embodiment, the air passage 103 refers to a through-hole opened in the side wall 101 of the accommodating cavity 101. It can be achieved using mechanical drilling or laser cutting. The hole diameter can be designed to match the outer diameter of the air pipe 302, and is used to establish a gas transmission path between the gas source assembly 30 and the air bag 20. The connection of the gas source assembly 30 through the air passage 103 means that the air pipe 302 passes through the air passage 103 and communicates with the interior of the air bag 20.

[0058] Specifically, one end of the gas pipe 302 of the gas source assembly 30 is connected to the compressed air source 301, and the other end extends into the gas tank 20 through the air passage 103. When it is necessary to fix the crystal rod, the compressed air source 301 fills the gas tank 20 with gas through the gas pipe 302. After the gas tank 20 expands, it contacts the crystal rod to form a limit. When it is necessary to release the limit, the gas source assembly 30 discharges the gas from the gas tank 20 through the gas pipe 302. The gas tank 20 contracts and separates from the crystal rod. The setting of the air passage 103 allows the gas source assembly 30 to complete the gas path connection without penetrating other structures of the furnace body 10, and the gas path connection can be completed only through the channel of the side wall 101. At the same time, the sealing structure can prevent gas leakage or external impurities from entering the gas tank 20 under high temperature environment.

[0059] Example 7

[0060] Please see Figures 1 to 4Furthermore, the air source assembly 30 includes a compressed air source 301 and an air pipe 302. One end of the air pipe 302 is connected to the compressed air source 301, and the other end of the air pipe 302 passes through the air passage 103 and is connected to the air bag 20. The connection between the air pipe 302 and the air passage 103 is sealed. The compressed air source 301 is used to supply air to the air bag 20 through the air pipe 302 or to discharge the air inside the air bag 20 to the outside of the air bag 20.

[0061] Specifically, the compressed air source 301 refers to an air supply device capable of generating stable air pressure, which can be implemented using an industrial air compressor. The air pressure parameters are adjusted to meet the pressure threshold required for the expansion of the air reservoir 20. The air pipe 302 refers to the pipeline used to transport gas, which can be implemented using a high-temperature resistant metal flexible hose, whose flexibility can adapt to the deformation requirements of the high-temperature environment inside the furnace body 10. The sealing setting refers to the airtight connection between the air pipe 302 and the air passage 103, which can be achieved using a high-temperature sealing ring and flange compression structure to ensure no gas leakage during the filling and exhaust process.

[0062] Specifically, when the crystal rod needs to be fixed, the compressed air source 301 injects air into the air chamber 20 through the air pipe 302. After the air chamber 20 expands, it forms surface contact with the crystal rod surface, thereby restricting its circumferential displacement. When it is necessary to release the fixation, the compressed air source 301 switches to suction mode, and the air inside the air chamber 20 is discharged through the air pipe 302, causing the air chamber 20 to contract and detach from the crystal rod surface. Throughout the process, the sealed connection prevents gas leakage under high temperature conditions, thus preventing pressure loss and ensuring the reliability of the air chamber 20's operation.

[0063] Example 8

[0064] Furthermore, the air pipe 302 is equipped with a solenoid valve and a directional regulating valve, which are connected in series on the air pipe 302. The solenoid valve is used to control the on / off state of the compressed air source 301, and the directional regulating valve is used to control the airflow direction of the compressed air source 301.

[0065] In this embodiment, the solenoid valve refers to a device that controls the opening and closing of the gas passage via an electrical signal. Specifically, it can be a direct-acting solenoid valve or a pilot-operated solenoid valve. Its function is to achieve rapid cutting off or connecting of the gas path through remote electrical control, avoiding delays caused by manual operation. The directional control valve refers to a valve capable of switching the direction of gas flow. Specifically, it can be a three-position four-way directional valve. Its function is to switch the inflation and deflation modes of the gas reservoir 20 by changing the airflow path.

[0066] Specifically, when the crystal rod needs to be fixed, the solenoid valve receives an electrical signal to open the air path, the directional adjustment valve switches to the charging mode, and the compressed air source 301 supplies air to the air chamber 20 through the air pipe 302 to cause it to expand; when the fixing needs to be released, the directional adjustment valve switches to the exhaust mode, and the gas in the air chamber 20 is discharged through the air pipe 302. The solenoid valve, directional adjustment valve and switch arranged in series form a multi-stage control structure, in which the solenoid valve realizes the opening and closing of the main air path, and the directional adjustment valve is responsible for switching between charging and exhaust modes.

[0067] Example 9

[0068] Please see Figure 3 Furthermore, a push-button switch 40 is provided on the furnace body 10. The push-button switch 40 is electrically connected to the compressed air source 301, the solenoid valve, and the directional adjustment valve. The push-button switch 40 is used to control the operation of the solenoid valve and the directional adjustment valve.

[0069] Specifically, the push-button switch 40 refers to a physical operating unit integrated outside the furnace body 10. It can be implemented using a waterproof and dustproof industrial-grade push-button switch, whose contacts are connected to the circuit board to form a control signal transmission path. The electrical connection refers to establishing an electrical signal transmission channel through cables or wires, and controlling the operation of the solenoid valve and the directional adjustment valve through the push-button switch 40. The structure is simple and easy to implement.

[0070] Example 10

[0071] Please see Figure 4 Furthermore, a sensing sensor 50 is installed inside the accommodating cavity 101. The sensing sensor 50 is electrically connected to the compressed air source 301, the solenoid valve, and the directional adjustment valve. The sensing sensor 50 is used to detect the opening and closing state of the bottom of the accommodating cavity 101. When the bottom of the accommodating cavity 101 is open, the compressed air source 301, the solenoid valve, and the directional adjustment valve inflate the air tank 20. When the bottom of the accommodating cavity 101 is closed, the compressed air source 301, the solenoid valve, and the directional adjustment valve operate to inflate the air tank 20.

[0072] The difference between this embodiment and Embodiment Nine above is that Embodiment Nine uses a mechanical switch, requiring manual operation. In this embodiment, the sensing sensor 50 is a detection device used to detect the opening and closing state of the bottom of the cavity. Specifically, it can be implemented using a photoelectric sensor or a mechanical limit switch. Its function is to acquire the physical state change signal of the bottom of the cavity in real time. Detecting the opening and closing state refers to identifying the displacement state of the bottom cover plate of the cavity. Specifically, it can be implemented using a contact probe or a non-contact infrared sensor. Its function is to determine whether the crystal rod is in a movable state. Automatic control of filling and venting refers to triggering the gas source component 30 to work based on the sensor signal. Specifically, it can be implemented using a PLC controller or a microcontroller to realize the logic judgment. Its function is to replace manual operation and realize the automated switching between fixing and releasing.

[0073] Specifically, when the sensing sensor 50 detects that the bottom of the accommodating cavity 101 is in an open state (in this embodiment, a door 105 is provided at the bottom of the accommodating cavity 101, which is used to open or close the bottom of the accommodating cavity 101), it indicates that the crystal rod is about to enter the transfer stage. At this time, the sensor signal triggers the solenoid valve to open and drives the directional adjustment valve to switch to the inflation passage. The compressed air source 301 injects gas into the air tank 20 through the air pipe 302, causing it to expand and come into contact with the surface of the crystal rod. When the sensing sensor 50 detects that the bottom of the accommodating cavity 101 is in a closed state, it indicates that the crystal rod has been fixed or needs to be released from constraint. At this time, the sensor signal controls the directional adjustment valve to switch to the exhaust passage, and the gas in the air tank 20 is discharged through the air pipe 302 to achieve contraction and separation. The entire process achieves closed-loop control of state perception and actuator through electrical linkage, without the need for manual intervention in the inflation and deflation of the air tank 20.

[0074] In this embodiment, no manual operation is required, which enhances the intelligence of the single crystal furnace auxiliary chamber 100 and improves the user experience.

[0075] The beneficial effects achieved by this utility model are that, due to the inclusion of an expandable and compressible air tank 20 and an air source component 30 for inflating or deflating the air tank 20, contact fixation and separation control are automatically realized during the crystal rod transfer process. The pneumatic expansion is used to precisely limit the circumferential displacement of the crystal rod, thus effectively eliminating the safety hazards and positioning deviations caused by manual operation. It has the advantages of high automation, stable fixation effect and safety and reliability.

[0076] It is understood that those skilled in the art can combine various implementation methods in the above embodiments under the guidance of the above examples to obtain technical solutions with multiple implementation methods.

[0077] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A single crystal furnace auxiliary chamber, characterized in that, It includes: A furnace body, wherein a receiving cavity is formed within the furnace body for receiving crystal rods; At least two air chambers are disposed at intervals on the side wall of the accommodating cavity; At least one gas source component is connected to the gas bag. The gas source component is used to inflate the gas bag to expand it so that the gas bag comes into contact with the crystal rod to restrict the circumferential movement of the crystal rod, or to vent the gas bag to compress it so that the gas bag separates from the crystal rod to release the restriction on the circumferential movement of the crystal rod.

2. The single crystal furnace auxiliary chamber as described in claim 1, characterized in that, The number of air bags is two, and the two air bags are symmetrically arranged on the side wall of the accommodating cavity.

3. The single crystal furnace auxiliary chamber as described in claim 2, characterized in that, The two air bags are positioned near the bottom of the accommodating cavity.

4. The single crystal furnace auxiliary chamber as described in claim 3, characterized in that, The air bag includes an expansion surface and a fixing surface. A fixing structure is formed on the side wall of the accommodating cavity. A fixing part adapted to the fixing structure is formed on the fixing surface. The air bag is fixed to the side wall of the accommodating cavity by the fixing part and the fixing structure.

5. The single crystal furnace auxiliary chamber as described in claim 4, characterized in that, The air bag is made of high-temperature resistant material, and the expansion surface of the air bag is provided with a high-temperature resistant buffer layer.

6. The single crystal furnace auxiliary chamber as described in claim 1, characterized in that, The sidewall of the accommodating cavity is formed with an air passage, through which the air source assembly inflates or deflates the corresponding air bag.

7. The single crystal furnace auxiliary chamber as described in claim 6, characterized in that, The air source assembly includes a compressed air source and an air pipe. One end of the air pipe is connected to the compressed air source, and the other end of the air pipe passes through the air passage and is connected to the air bag. The connection between the air pipe and the air passage is sealed. The compressed air source is used to supply air to the air bag through the air pipe or to discharge the air in the air bag to the outside of the air bag.

8. The single crystal furnace auxiliary chamber as described in claim 7, characterized in that, The air pipe is equipped with a solenoid valve and a directional regulating valve, which are connected in series on the air pipe. The solenoid valve is used to control the on / off state of the compressed air source, and the directional regulating valve is used to control the airflow direction of the compressed air source.

9. The single crystal furnace auxiliary chamber as described in claim 8, characterized in that, The furnace body is equipped with a push-button switch, which is electrically connected to the compressed air source, the solenoid valve, and the directional adjustment valve. The push-button switch is used to control the operation of the solenoid valve and the directional adjustment valve.

10. The single crystal furnace auxiliary chamber as described in claim 8, characterized in that, A sensing sensor is installed inside the accommodating cavity. The sensing sensor is electrically connected to the compressed air source, the solenoid valve, and the directional adjustment valve. The sensing sensor is used to detect the opening and closing state of the bottom of the accommodating cavity. When the bottom of the accommodating cavity is open, the compressed air source, the solenoid valve, and the directional adjustment valve inflate the air bag. When the bottom of the accommodating cavity is closed, the compressed air source, the solenoid valve, and the directional adjustment valve inflate the air bag.

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