A gas pipeline and a battery manufacturing apparatus

Abstract

The application is suitable for the technical field of battery manufacturing equipment, and provides a gas conveying pipeline and battery manufacturing equipment. The gas conveying pipeline comprises: a gas inlet pipe joint; a spraying pipe, one end of the spraying pipe being detachably connected with the gas inlet pipe joint; and a first fastening device, the first fastening device being sleeved outside the gas inlet pipe joint and the spraying pipe and fixing the gas inlet pipe joint and the spraying pipe. The application aims to solve the problem of how to design the structure of the gas conveying pipeline to improve reliability.

Description

Technical Field

[0001] This application belongs to the field of battery manufacturing equipment technology, and particularly relates to a gas transmission pipeline and battery manufacturing equipment. Background Technology

[0002] In the process of solar cell manufacturing, silicon wafers are processed using cell manufacturing equipment (such as diffusion furnaces and deposition furnaces), and gas is delivered into the chamber through gas pipelines. However, the gas pipelines in this technology have a relatively complex structure, are cumbersome to assemble and maintain, have many sealing points, and pose a significant risk of gas leakage, resulting in poor reliability.

[0003] Therefore, how to design the structure of gas pipelines to improve their reliability has become an urgent problem to be solved. Utility Model Content

[0004] This application provides a gas transmission pipeline, aiming to solve the problem of how to design the structure of a gas transmission pipeline to improve its reliability.

[0005] This application provides a gas transmission pipeline comprising: Intake pipe connector; A spray pipe, one end of which is detachably connected to the air inlet pipe connector; A first fastening device is sleeved on the outside of the air inlet pipe joint and the spray pipe to fix the air inlet pipe joint and the spray pipe.

[0006] Furthermore, the intake manifold connector includes: The first connecting part is located inside the air inlet pipe connector and is sleeved on the spray pipe; The second connecting part is located outside the air intake pipe connector and is detachably connected to the first fastening device.

[0007] Furthermore, the first fastening device includes: A locking nut, comprising a central through-hole section and an internal thread section, wherein the major diameter of the internal thread section is larger than the diameter of the central through-hole section, and a stepped limiting surface is formed between the central through-hole section and the internal thread section; A bushing is fitted onto the spray pipe, with one end of the bushing abutting against the step limiting surface and the other end abutting against the first connecting portion; the first connecting portion is at least partially fitted onto the bushing.

[0008] Furthermore, a first sealing ring is fitted onto the spray pipe via an interference fit, and the two ends of the first sealing ring abut against the air inlet pipe joint and the first fastening device, respectively.

[0009] Furthermore, a first annular groove is provided circumferentially on the outer wall of the spray pipe, and the first sealing ring is disposed in the first annular groove.

[0010] Furthermore, a second sealing ring is fitted onto the spray pipe via an interference fit, and the two ends of the second sealing ring abut against a second fastening device and a flange, respectively.

[0011] Furthermore, a second annular groove is provided circumferentially on the outer wall of the spray pipe, and the second sealing ring is disposed in the second annular groove.

[0012] Furthermore, one end of the flange is provided with a third connecting part and a fourth connecting part, the third connecting part is sleeved on the spray pipe, and the fourth connecting part is detachably connected to the second fastening device.

[0013] Furthermore, the flange has a mounting portion at the other end away from the third connection portion, through which the flange connects the spray pipe to the equipment body of the external battery manufacturing equipment.

[0014] The battery manufacturing equipment provided in this application includes any of the gas transmission pipelines described above.

[0015] In the gas transmission pipeline of this application embodiment, since the inlet pipe joint and the spray pipe are detachably connected and fixed by the first fastening device, there is no need to set an additional connecting pipe between the inlet pipe joint and the spray pipe. This can reduce costs, simplify the assembly and maintenance process of the gas transmission pipeline, reduce sealing points to reduce potential leakage risks, and thus improve reliability. Attached Figure Description

[0016] Figure 1 This is a partial structural schematic diagram of the gas transmission pipeline according to an embodiment of this application; Figure 2 This is a cross-sectional schematic diagram of a gas transmission pipeline according to an embodiment of this application; Figure 3 yes Figure 2 Enlarged view of a portion of point M in the middle; Figure 4 This is a cross-sectional schematic diagram of an intake pipe connector according to an embodiment of this application; Figure 5 This is a schematic diagram of the flange structure according to an embodiment of this application; Figure 6 This is a schematic diagram of the first installation of the sealing ring according to an embodiment of this application; Figure 7 This is a second installation diagram of the sealing ring according to an embodiment of this application; Figure 8 This is a schematic diagram of the installation of the gas transmission pipeline according to an embodiment of this application.

[0017] Explanation of key component symbols: 100 - Gas transmission pipeline; 10-Intake pipe connector, 11-First connecting part, 111-First inner diameter section, 112-Limiting cone surface, 113-Second inner diameter section, 12-Second connecting part; 20-Spray pipe, 21-First sealing ring, 22-First annular groove, 23-Second annular groove, 24-Second sealing ring, 25-Flange, 251-Third connecting part, 252-Fourth connecting part, 253-Mounting part; 30-First fastening device, 31-Locking nut, 311-Central through hole section, 312-Step limiting surface, 313-Internal thread section, 32-Bushing; 40 - Second fastening device; 50 - Equipment body. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application.

[0019] In the description of this application, it should be understood that the terms "length", "width", "upper", "lower", "left", "right", "horizontal", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0020] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0021] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0022] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] The following disclosure provides numerous different embodiments or examples for implementing various structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, various specific examples of processes and materials are provided in this application, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0024] Please see Figure 1 , Figure 2 and Figure 3 The gas pipeline 100 of this application embodiment includes an air inlet pipe joint 10, a spray pipe 20 and a first fastening device 30, wherein one end of the spray pipe 20 is detachably connected to the air inlet pipe joint 10; the first fastening device 30 is sleeved on the outside of the air inlet pipe joint 10 and the spray pipe 20 to fix the air inlet pipe joint 10 and the spray pipe 20.

[0025] In this embodiment of the application, the gas pipeline 100 is detachably connected to the inlet pipe joint 10 and the spray pipe 20 and fixed by the first fastening device 30. Therefore, there is no need to set an additional connecting pipe between the inlet pipe joint 10 and the spray pipe 20. This can reduce costs, simplify the assembly and maintenance process of the gas pipeline 100, reduce sealing points to reduce potential leakage risks, and thus improve reliability.

[0026] The gas delivery pipe 100 in this embodiment can be applied to battery manufacturing equipment. Battery manufacturing equipment includes, but is not limited to, diffusion furnaces and deposition equipment. The battery manufacturing equipment has a gas chamber, into which the spray pipe 20 extends, while the inlet pipe connector 10, part of the spray pipe 20, and the first fastening device 30 are all located outside the gas chamber. In this embodiment, the outer wall of the spray pipe 20 is typically provided with several spray holes. This ensures the uniformity of gas input. Of course, spray holes may not be provided, yet the spray pipe 20 can still deliver gas to the gas chamber.

[0027] For example, the spray pipe 20 can be made of stainless steel, or it can be made of materials such as quartz or silicon carbide. When the spray pipe 20 is made of materials such as quartz or silicon carbide, the difference in the coefficient of thermal expansion between the spray pipe 20 and the silicon deposited on its surface is small, and the silicon deposited on the surface of the spray pipe 20 is less likely to fall off due to thermal expansion and contraction. In this way, the service life of the spray pipe 20 can be extended, further reducing the cost of consumables.

[0028] Please see Figure 3 Specifically, in the embodiments of this application, the air intake pipe connector 10 can be a straight cylindrical connector or an elbow cylindrical connector. The air intake pipe connector 10 has a through hole that matches the inner diameter of the air intake pipe. The shape of the air intake pipe connector 10 can be adjusted according to the equipment installation space. Specifically, the air intake pipe connector 10 includes a first connecting part 11 and a second connecting part 12. The first connecting part 11 is located inside the air intake pipe connector 10 and is sleeved on the spray pipe 20; the second connecting part 12 is located outside the air intake pipe connector 10 and is detachably connected to the first fastening device 30.

[0029] Thus, the spray pipe 20 is positioned and fixed on the inside by the first connecting part 11, and the first fastening device 30 is connected to the second connecting part to firmly connect the air inlet pipe joint 10 and the spray pipe 20. The first fastening device 30 achieves axial and circumferential fastening of the spray pipe 20, and the first fastening device 30 is easy to install and disassemble.

[0030] Specifically, please refer to Figure 4In this embodiment, the first connecting portion 11 includes a first inner diameter section 111 and a second inner diameter section 113 connected sequentially. The diameter of the first inner diameter section 111 is smaller than the diameter of the second inner diameter section 113 but greater than or equal to the outer diameter of the spray pipe 20. Thus, the spray pipe 20 is movably inserted into the first inner diameter section 111, allowing the first inner diameter section 111 to be fitted onto the spray pipe 20. Simultaneously, a limiting conical surface 112 is formed at the transition between the first inner diameter section 111 and the second inner diameter section 113. The taper of the limiting conical surface 112 is not limited, allowing a portion of the limiting conical surface 112 to provide lateral (actually along the axial direction of the spray pipe 20) support and limiting, which is sufficient for fastening with the first fastening device 30.

[0031] It is understood that by providing the first connecting part 11 and the second connecting part 12, a first inner diameter section 111 for accommodating the spray pipe 20 is provided, a limiting conical surface 112 for axial support and limiting of the spray pipe 20 is provided, and a second inner diameter section 113 for circumferential support is provided. Since the design diameter of the first inner diameter section 111 matches the outer diameter of the spray pipe 20, the end of the spray pipe 20 can be accurately accommodated, so that the spray pipe 20 naturally has an initial positioning. Therefore, when tightening the first fastening device 30 and the second connecting part 12, there is no need to adjust the spray pipe 20 again, so that they work together with the first fastening device 30 to complete the tightening of the spray pipe 20 and complete the limitation of the axial and circumferential degrees of freedom of the spray pipe 20.

[0032] Please see Figure 3 In this embodiment, the first fastening device 30 includes a locking nut 31 and a bushing 32. The locking nut 31 includes a central through-hole section 311 and an internal thread section 313. The major diameter of the internal thread section 313 is larger than the diameter of the central through-hole section 311. The diameter of the central through-hole section 311 is larger than the outer diameter of the spray pipe 20. A stepped limiting surface 312 is formed between the central through-hole section 311 and the internal thread section 313. The bushing 32 is sleeved on the spray pipe 20, and one end of the bushing 32 abuts against the stepped limiting surface 312, and the other end abuts against the first connecting part 11. The first connecting part 11 is at least partially sleeved on the bushing 32.

[0033] Thus, since the second inner diameter section 113 is partially fitted onto the bushing 32, the bushing 32 can provide circumferential support during the locking process of the second connecting part 12 and the locking nut 31. By setting the locking nut 31 and the bushing 32, since the internal thread section 313 of the locking nut 31 is threadedly connected to the second connecting part 12, during the process of rotating and tightening the locking nut 31, the outer wall of the bushing 32 supports the circumferential locking force during the locking process of the locking nut 31. The circumferential locking force is transmitted to the limiting cone surface 112 through the bushing 32, thereby securing the locking nut 31.

[0034] It is understood that the second connecting part 12 is detachably connected to the first fastening device 30. As in this embodiment, a threaded connection can be used, where the second connecting part 12 has an external thread that connects to the internal thread section 313. This threaded connection provides a stable and tight fit, with self-locking properties to prevent loosening. In other embodiments, other snap-fit ​​or locking structures can also be used to achieve a detachable connection, thus providing ease of disassembly.

[0035] Please see Figure 6 In this embodiment of the application, the outer wall of the spray pipe 20 is provided with a first annular groove 22 in the circumferential direction, and the first sealing ring 21 is disposed in the first annular groove 22.

[0036] Thus, the sidewall of the first annular groove 22 can limit the first sealing ring 21, preventing the first sealing ring 21 from sliding axially along the spray pipe 20, thereby further constraining the axial freedom of the spray pipe 20, the air inlet pipe joint 10, and the first fastening device 30.

[0037] Specifically, the two ends of the first sealing ring 21 abut against the air inlet pipe connector 10 and the first fastening device 30, respectively. The two end faces of the sealing ring abut against the limiting cone surface 112 of the air inlet pipe connector 10 and the end face of the bushing of the first fastening device 30, respectively. In this way, the axial freedom of the spray pipe 20, as well as the air inlet pipe connector 10 and the first fastening device 30, can be constrained.

[0038] Please see Figure 6 In this embodiment of the application, a second annular groove 23 is provided circumferentially on the outer wall of the spray pipe 20, and a second sealing ring 24 is disposed in the second annular groove 23.

[0039] Please note that the explanations and descriptions of the second annular groove 23 and the second sealing ring 24 can be found in the explanations and descriptions of the first annular groove 22 and the first sealing ring 21. To avoid redundancy, they will not be repeated here.

[0040] Specifically, the two ends of the second sealing ring 24 abut against the second fastening device 40 and the flange 25, respectively.

[0041] Please see Figure 5 In some embodiments, one end of the flange 25 is provided with a third connecting part 251 and a fourth connecting part 252. The third connecting part 251 is sleeved on the spray pipe 20, and the fourth connecting part 252 is detachably connected to the second fastening device 40.

[0042] This can improve the versatility of ventilation duct spare parts and reduce manufacturing and maintenance costs.

[0043] Specifically, the structure of the second fastening device 40 can be the same as that of the first fastening device 30. Correspondingly, the structures of the third connecting part 251 and the fourth connecting part 252 of the flange 25 can also be the same as those of the first connecting part 11 and the second connecting part 12 of the intake pipe connector 10, respectively. The structural explanations and descriptions of the flange 25 and the second fastening device 40 can be found above, and will not be repeated here to avoid redundancy. Of course, the structures of the flange 25 and the second fastening device 40 can also adopt other detachable connection structures and are not limited to the same structure.

[0044] Specifically, the flange 25 has a mounting portion 253 at its end furthest from the third connection portion 251. The flange 25 connects the spray pipe 20 to the equipment body 50 of the external battery manufacturing equipment via the mounting portion 253. This secures the entire gas pipeline 100 to the equipment body 50. Specifically, one end of the spray pipe 20 is connected to the air inlet pipe joint 10 via the first fastening device 30. The middle part of the spray pipe 20, away from the air inlet pipe joint 10, is mounted on the external equipment body 50 via a flange 25 and a second fastening device 40. The flange 25 provides the main stable support and installation for the entire gas transmission pipeline 100. For example, the gas transmission pipeline 100 can be fixedly installed at the required location, such as the tail cover of a diffusion furnace, via the flange 25.

[0045] In some embodiments, the mounting portion 253 can be a disc-shaped structure. Similar to a common flange structure, a plurality of screw holes are formed along the circumference of the disc-shaped structure. During installation, screws are used to fasten it to the equipment body 50, so that the spray pipe 20 is concentrically aligned with the corresponding mounting hole on the equipment body 50, facilitating the insertion of the spray pipe 20 into the mounting hole. At this time, the second sealing ring 24 is also used to seal the gap between the spray pipe 20 and the flange 25, preventing gas in the gas chamber from leaking out of the equipment body 50.

[0046] In some embodiments, the mounting portion 253 may also be a smooth tube that matches the mounting hole on the equipment body 50, and the outer diameter of the tube and the inner diameter of the mounting hole have zero tolerance or positive tolerance. This allows the mounting portion 253 to be interference-fitted with the mounting hole, or to be directly welded and fixed to the equipment body 50. This allows the spray pipe 20 inside the flange 25 to pass through the mounting hole from one end of the smooth tube, and the remaining portion of the spray pipe 20 to enter the gas chamber of the equipment body 50, spraying the corresponding gas.

[0047] When the gas pipeline 100 in this embodiment is installed and used on the diffusion furnace, an installation hole adapted to the size of the gas pipeline 100 is opened on the furnace tail cover of the diffusion furnace, and then the end of the flange 25 with the installation part 253 is fixedly installed on the furnace tail cover. The axial opening position of the first annular groove 22 on the spray pipe 20 can be determined according to the length of the first inner diameter section 111. The axial opening position of the second annular groove 23 on the spray pipe 20 can be determined on site according to the specific model of the diffusion furnace, the external layout of the gas inlet pipe and the available space size of the furnace tail area.

[0048] Subsequently, the spray pipe 20 extends into the furnace through one side of the third connection 251 of the flange 25. When the second sealing ring 24 contacts the limiting cone surface of the third connection 251 of the flange 25, the preset axial installation position of the spray pipe 20 relative to the furnace tail cover of the diffusion furnace is determined. When the other end of the spray pipe 20 extends into the first inner diameter section 111, and the first sealing ring 21 contacts the limiting cone surface 112, the installation position of the spray pipe 20 relative to the air inlet pipe joint 10 is determined.

[0049] Embodiments of this application also provide a battery manufacturing apparatus, including the gas supply pipe 100 described in the above embodiments. The battery manufacturing apparatus may be a diffusion furnace, a deposition furnace, or other battery manufacturing apparatus with a gas chamber.

[0050] In some embodiments, the first annular groove 22 and the second annular groove 23 are not provided on the outer wall of the spray pipe 20, or one of the first annular groove 22 and the second annular groove 23 is provided. In this way, the processing cost of the spray pipe 20 can be further reduced.

[0051] Specifically, please refer to Figure 7 In some embodiments, a first sealing ring 21 is fitted onto the spray pipe 20 by an interference fit. The first sealing ring 21 is used to seal the connection between the air inlet pipe joint 10 and the spray pipe 20. Specifically, it is used to seal the gap between the spray pipe 20 and the first inner diameter section 111.

[0052] Specifically, the two ends of the first sealing ring 21 abut against the air intake pipe joint 10 and the first fastening device 30, respectively. It should be understood that the first sealing ring 21 should be a rigid sealing ring to increase its strength.

[0053] Specifically, the two end faces of the sealing ring abut against the limiting cone surface 112 of the air inlet pipe connector 10 and the end face of the bushing 32 of the first fastening device 30, respectively, thereby constraining the axial freedom of the spray pipe 20, the air inlet pipe connector 10, and the first fastening device 30.

[0054] Specifically, a second sealing ring 24 is fitted onto the spray pipe 20 via an interference fit, and the two ends of the second sealing ring 24 abut against the second fastening device 40 and the flange 25, respectively. Thus, the position of the second sealing ring 24 can be adjusted during installation according to actual needs. For example, when the size of the first inner diameter section 111 changes, the position of the second sealing ring 24 can be adjusted accordingly without any additional setup.

[0055] Please see Figure 8 In some embodiments, when the gas pipeline 100 is installed and used on the diffusion furnace, an installation hole adapted to the size of the gas pipeline 100 is opened on the furnace tail cover of the diffusion furnace, and then the end of the flange 25 with the installation part 253 is fixedly installed on the furnace tail cover.

[0056] During installation, the axial installation positions of the first sealing ring 21 and the second sealing ring 24 on the spray pipe 20 can be determined based on the length of the first inner diameter section 111, the specific model of the diffusion furnace, the external layout of the air inlet pipe, and the available space size of the furnace tail area. The spray pipe 20 extends into the furnace through the third connection part 251 of the flange 25.

[0057] When the second sealing ring contacts the limiting cone surface of the third connection portion 251 of the flange 25, the preset axial installation position of the spray pipe 20 relative to the furnace tail cover of the diffusion furnace is determined; and when the other end of the spray pipe 20 extends into the first inner diameter section 111 until the first sealing ring 21 contacts the limiting cone surface 112, the installation position of the spray pipe 20 relative to the air inlet pipe joint 10 is determined.

[0058] Since the first sealing ring 21 and the second sealing ring 24 are rigid sealing rings and are fixed to the spray pipe 20 with an interference fit, when the positions of the first sealing ring 21 and the second sealing ring 24 on the spray pipe 20 are determined, and when the nuts of the first fastening device 30 and the second fastening device 40 are tightened, the limiting cone surface 112 of the air inlet pipe connector 10 and the end face of the bushing 32 of the first fastening device 30 abut against both sides of the first sealing ring 21, and the limiting cone surface of the third connecting part 251 of the flange 25 and the end face of the bushing of the second fastening device 40 abut against both sides of the second sealing ring 24, the two sealing rings are subjected to uniform compression deformation within a limited installation space.

[0059] In this way, on the one hand, the position of the sealing ring can be flexibly set, increasing the flexibility of pipeline installation; on the other hand, the conical surface fit can provide good alignment and prevent the sealing ring from twisting due to off-center loading. In addition, the outer wall of the bushing 32 supports the circumferential locking force during the nut tightening process, and the axial locking force of the nut is transmitted to the limiting conical surface through the bushing 32, thereby avoiding unnecessary bending moment on the external thread pair.

[0060] At the same time, by pressing the second sealing ring 24 against the bushing end face and the limiting cone surface, the second sealing ring 24 undergoes a slight deformation, which can also form a reliable sealing structure between the air intake pipe joint 10 and the first fastening device 30, and between the flange 25 and the second fastening device 40.

[0061] Thus, the gas pipeline 100 design in this embodiment not only enhances the overall rigidity and stability of the connection point, but also effectively prevents medium leakage caused by vibration and loosening. The balanced distribution of clamping force extends the service life of the sealing ring, ensuring the safety and sealing integrity of the gas pipeline 100 during long-term operation, and ultimately improving the reliability of use.

[0062] In the description of this specification, the references to terms such as "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0063] Furthermore, the above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A gas transmission pipeline, characterized in that, include: Intake pipe connector; A spray pipe, one end of which is detachably connected to the air inlet pipe connector; A first fastening device is sleeved on the outside of the air inlet pipe joint and the spray pipe to fix the air inlet pipe joint and the spray pipe.

2. The gas pipeline according to claim 1, characterized in that, The intake pipe connector includes: The first connecting part is located inside the air inlet pipe connector and is sleeved on the spray pipe; The second connecting part is located outside the air intake pipe connector and is detachably connected to the first fastening device.

3. The gas transmission pipeline according to claim 2, characterized in that, The first fastening device includes: A locking nut, comprising a central through-hole section and an internal thread section, wherein the major diameter of the internal thread section is larger than the diameter of the central through-hole section, and a stepped limiting surface is formed between the central through-hole section and the internal thread section; A bushing is fitted onto the spray pipe, with one end of the bushing abutting against the step limiting surface and the other end abutting against the first connecting portion; the first connecting portion is at least partially fitted onto the bushing.

4. The gas transmission pipeline according to claim 1, characterized in that, The spray pipe is fitted with a first sealing ring by an interference fit, and the two ends of the first sealing ring abut against the air inlet pipe joint and the first fastening device, respectively.

5. The gas transmission pipeline according to claim 4, characterized in that, The outer wall of the spray pipe is provided with a first annular groove in the circumferential direction, and the first sealing ring is disposed in the first annular groove.

6. The gas pipeline according to claim 1, characterized in that, The spray pipe is fitted with a second sealing ring by an interference fit, and the two ends of the second sealing ring abut against a second fastening device and a flange, respectively.

7. The gas pipeline according to claim 6, characterized in that, The outer wall of the spray pipe is provided with a second annular groove in the circumferential direction, and the second sealing ring is disposed in the second annular groove.

8. The gas pipeline according to claim 6, characterized in that, One end of the flange is provided with a third connecting part and a fourth connecting part. The third connecting part is sleeved on the spray pipe, and the fourth connecting part is detachably connected to the second fastening device.

9. The gas transmission pipeline according to claim 8, characterized in that, The flange has a mounting portion at the other end away from the third connection portion, and the flange is connected to the spray pipe and the equipment body of the external battery manufacturing equipment through the mounting portion.

10. A battery manufacturing apparatus, characterized in that, Includes the gas pipeline as described in any one of claims 1-9.

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