Electrostatic elimination connector and semiconductor delivery device

Abstract

The utility model belongs to the technical field of engineering element, concretely relates to a connecting device technology field for being used with the pipe made of plastic, especially relates to a static electricity elimination joint and semiconductor infusion equipment. The static electricity elimination joint realizes the export of static electricity in liquid by setting up static electricity export pole in the joint body, and the tail end of static electricity export pole is inserted in the internal flow channel of joint body, thereby realizing the partial flow disturbance of laminar flow liquid and improving the static electricity export effect.

Description

Technical Field

[0001] This utility model belongs to the field of engineering component technology, specifically relating to a connection device used with a plastic tube, and more particularly to an electrostatic elimination connector and a semiconductor infusion device. Background Technology

[0002] Semiconductor equipment requires liquids to be transported through infusion lines during operation. If these liquids contain static electricity, it can easily damage the pipes and valves, affecting normal production activities. Related technologies employ a static-dissipating structure inside the infusion line to transfer static electricity generated during transport through the inner wall of the pipe to the grounding terminal, thereby achieving static discharge.

[0003] However, the above method still has some problems in practical application. Since the static discharge structure usually uses a non-insulating static discharge tube for static discharge, this method relies on the contact between the inner wall of the static discharge tube and the liquid. For liquids in a stable advection state, the mixing ability of each layer of the fluid is poor due to the stratification and sliding of the fluid. If the conductivity of the liquid being transported is insufficient, the time for the charge in the center layer of the fluid to diffuse to the edge and the static discharge tube is long, resulting in insufficient static elimination effect.

[0004] There is an urgent need to provide an electrostatic elimination connector and a semiconductor infusion device to solve the technical problem of insufficient electrostatic elimination effect in related technologies.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one static elimination connector, comprising: a connector body, wherein a static discharge rod is disposed on the connector body; both sides of the connector body are respectively connected to a semiconductor infusion line through pipeline ports; and the tail end of the static discharge rod is inserted into a flow channel inside the connector body.

[0007] In one alternative embodiment, the head end of the static discharge rod is provided with a cold-pressed terminal; the cold-pressed terminal is bolted to the static discharge rod; and the cold-pressed terminal is configured to discharge static electricity from the static discharge rod outward.

[0008] In one optional embodiment, an installation tube is provided on the top wall of the connector body; the inner diameter of the installation tube is adapted to the outer diameter of the static discharge rod.

[0009] In one alternative embodiment, the outer wall of the mounting tube is threaded; and a nut is fitted on the outer side of the mounting tube; a sleeve is fitted on the electrostatic discharge rod, the sleeve being located between the top inner wall of the nut and the top outer wall of the mounting tube; wherein the sleeve is configured to clamp and limit the electrostatic discharge rod.

[0010] In one optional embodiment, the electrostatic discharge rod is further provided with a snap-fit ​​groove; a clamping washer is provided in the snap-fit ​​groove; and the clamping washer is located above the clamp, with the bottom surface of the clamping washer in contact with the top surface of the clamp.

[0011] In one optional embodiment, a shielding shell is also fitted on the outside of the nut; and a lead wire hole is provided on the top of the shielding shell, the diameter of the lead wire hole being adapted to the diameter of the cold-pressed terminal.

[0012] In one alternative embodiment, the tail end of the cold-pressed terminal is provided with a pin-type terminal; the pin-type terminal is configured to ground to discharge static electricity from the cold-pressed terminal.

[0013] In one alternative embodiment, the electrostatic discharge rod is a glass carbon rod.

[0014] This disclosure also provides at least a semiconductor infusion device, including: the aforementioned electrostatic elimination connector; and infusion tubing; wherein the infusion tubing is connected to tubing ports respectively.

[0015] The beneficial effects of this utility model are that the static electricity eliminator achieves the discharge of static electricity from the liquid by setting a static electricity discharge rod in the connector body. At the same time, since the tail end of the static electricity discharge rod is inserted into the internal flow channel of the connector body, it achieves local turbulence of laminar liquid and improves the static electricity discharge effect.

[0016] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 A three-dimensional structural schematic diagram of the electrostatic eliminator provided in an embodiment of this disclosure is shown; Figure 2 A schematic diagram of the internal structure of the electrostatic eliminator provided in an embodiment of this disclosure is shown; Figure 3 A partial structural schematic diagram of the electrostatic eliminator provided in an embodiment of this disclosure is shown; Figure 4 An exploded view of the electrostatic discharge rod provided in an embodiment of this disclosure is shown. Figure 5 A schematic diagram of the electrostatic discharge rod provided in an embodiment of this disclosure is shown.

[0020] In the picture: 1. Connector body; 10. Pipe port; 11. Static discharge rod; 12. Jacket; 13. Compression washer; 14. Notch; 15. Opening; 16. Snap-fit ​​groove; 2. Cold-pressed terminal; 21. Bolt; 22. Pin terminal; 23. Mounting tube; 24. Nut; 3. Shielding shell. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0022] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the figures, the thickness of parts may be exaggerated or reduced for the purpose of effectively depicting the technical content.

[0023] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0024] See Figure 1 and Figure 2 , Figure 1 and Figure 2 An electrostatic elimination connector is shown, comprising: a connector body 1, wherein an electrostatic discharge rod 11 is provided on the connector body 1; both sides of the connector body 1 are respectively connected to a semiconductor infusion line through a pipeline port 10; and the tail end of the electrostatic discharge rod 11 is inserted into a flow channel inside the connector body 1.

[0025] Specifically, by setting an electrostatic discharge rod 11 inside the connector body 1, the electrostatic discharge in the liquid is realized. At the same time, since the tail end of the electrostatic discharge rod 11 is inserted into the internal flow channel of the connector body 1, local turbulence is achieved for the laminar liquid, thereby improving the electrostatic discharge effect.

[0026] In some embodiments, the head end of the static discharge rod 11 is provided with a cold-pressed terminal 2; the cold-pressed terminal 2 is connected to the static discharge rod 11 by a bolt 21; and the cold-pressed terminal 2 is configured to discharge static electricity on the static discharge rod 11 outward.

[0027] Specifically, the connection with the electrostatic discharge rod 11 is achieved through the set cold-pressed terminal 2, and the cold-pressed terminal 2 with a certain redundant length is used, so that the length of the electrostatic discharge rod 11 extending into the connector body 1 is adjustable to match different types of liquid flow.

[0028] Specifically, the cold-pressed terminal 2 and the static discharge rod 11 are connected by bolt 21, which improves the convenience of disassembly and installation.

[0029] In some embodiments, a mounting tube 23 is provided on the top wall of the connector body 1; the inner diameter of the mounting tube 23 is adapted to the outer diameter of the static discharge rod 11. Specifically, the outer wall of the mounting tube 23 is threaded; and a nut 24 is fitted on the outer side of the mounting tube 23; a clamping sleeve 12 and a compression washer 13 are fitted on the static discharge rod 11, the clamping sleeve 12 being located between the compression washer 13 and the top outer wall of the mounting tube 23; wherein the clamping sleeve 12 is configured to clamp and limit the static discharge rod 11. This achieves stable limiting of the static discharge rod 11.

[0030] See Figure 4 and Figure 5 In some embodiments, the electrostatic discharge rod 11 is further provided with a snap-fit ​​groove 16; a clamping washer 13 is provided in the snap-fit ​​groove 16; and the clamping washer 13 is located above the sleeve 12, and the bottom surface of the clamping washer 13 is in contact with the top surface of the sleeve 12.

[0031] See Figure 4Specifically, the electrostatic discharge rod 11 has a snap-fit ​​groove 16, on which a clamping washer 13 is snapped. The clamping washer 13 has a notch 14 and an opening 15 that are positioned opposite each other. When force is applied to both sides of the clamping washer 13, the notch 14 rotates and the opening 15 opens, thus facilitating the clamping washer 13 to snap into the snap-fit ​​groove 16. Then, when no force is applied to the clamping washer 13, the notch 14 and the opening 15 return to their initial positions. The clamp 12 is located below the clamping washer 13. The inner diameter and thickness of the clamp 12 gradually decrease from top to bottom. The upper end of the mounting tube 23 is provided with a flared connecting part. The outer surface of the clamp 12 abuts against the connecting part. The upper end of the clamp 12... The nut 24 extends above the upper end of the mounting tube 23 and contacts the clamping washer 13. When the nut 24 is turned downwards to tighten, the inner wall of the top of the nut 24 abuts against the clamping washer 13, pressing the clamping washer 13 against the upper end of the clamp 12. The upper end of the clamp 12 is pressed against the upper end face of the mounting tube 23, thereby fixing the static discharge rod 11 to the mounting tube 23. The lower half of the clamp 12 is clamped between the static discharge rod 11 and the mounting tube 23, and the upper half is pressed between the mounting tube 23 and the clamping washer 13, ensuring the sealing between the static discharge rod 11 and the mounting tube 23. This effectively reduces the risk of liquid leakage between the static discharge rod 11 and the mounting tube. The clamping washer 13 and the clamp 12 are made of insulating material.

[0032] As an optional implementation, the materials of the compression washer 13 and the jacket 12 may include, but are not limited to, PTFE.

[0033] See Figure 3 In some embodiments, a shielding shell 3 is also fitted around the outside of the nut 24; and a lead wire hole is provided on the top of the shielding shell 3, the diameter of which is adapted to the diameter of the cold-pressed terminal 2. The shielding shell 3 achieves a sealed enclosure of the cold-pressed terminal 2 and the electrostatic discharge rod 11, preventing external impurities from entering the connector body 1 and causing liquid contamination.

[0034] In some embodiments, the tail end of the cold-pressed terminal 2 is provided with a pin-type terminal 22; the pin-type terminal 22 is configured to be grounded to discharge static electricity from the cold-pressed terminal 2.

[0035] In some embodiments, the electrostatic discharge rod 11 is a glass carbon rod.

[0036] On the other hand, some embodiments also provide a semiconductor infusion device, including: the above-mentioned static elimination connector; and infusion tubing; wherein the infusion tubing is respectively connected to tubing port 10.

[0037] In summary, this static electricity eliminator achieves the discharge of static electricity from the liquid by setting a static electricity discharge rod 11 inside the connector body 1. At the same time, since the tail end of the static electricity discharge rod 11 is inserted into the internal flow channel of the connector body 1, it achieves local turbulence on the laminar liquid, thereby improving the static electricity discharge effect.

[0038] In this document, when it is said that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first component and the second component.

[0039] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0040] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. An electrostatic eliminator connector, characterized in that, include: The connector body (1) is provided with an electrostatic discharge rod (11). The two sides of the connector body (1) are respectively connected to the semiconductor infusion tubing via pipeline ports (10); and The tail end of the electrostatic discharge rod (11) is inserted into the flow channel inside the connector body (1).

2. The static eliminator connector as described in claim 1, characterized in that, The head end of the electrostatic discharge rod (11) is provided with a cold-pressed terminal (2). The cold-pressed terminal (2) is connected to the electrostatic discharge rod (11) by bolts (21); and The cold-pressed terminal (2) is configured to discharge static electricity from the static discharge rod (11) outward.

3. The static eliminator connector as described in claim 2, characterized in that, An installation tube (23) is provided on the top wall of the connector body (1). The inner diameter of the mounting tube (23) is adapted to the outer diameter of the electrostatic discharge rod (11).

4. The static eliminator connector as described in claim 3, characterized in that, The outer wall of the mounting tube (23) is threaded; and The outer side of the mounting tube (23) is also fitted with a nut (24); A sleeve (12) is fitted onto the electrostatic discharge rod (11), and the sleeve (12) is located between the top inner wall of the nut (24) and the top outer wall of the mounting tube (23); wherein The clip (12) is configured to clamp and limit the electrostatic discharge rod (11).

5. The static eliminator connector as described in claim 4, characterized in that, The electrostatic discharge rod (11) is also provided with a snap-fit ​​groove (16). A clamping washer (13) is provided in the snap-fit ​​groove (16); and The compression washer (13) is located above the sleeve (12), and the bottom surface of the compression washer (13) is in contact with the top surface of the sleeve (12).

6. The static eliminator connector as described in claim 5, characterized in that, The nut (24) is also fitted with a shielding shell (3) on its outer side; and The top of the shielding shell (3) is provided with a lead wire hole, the diameter of which is adapted to the diameter of the cold-pressed terminal (2).

7. The static eliminator connector as described in claim 6, characterized in that, The tail end of the cold-pressed terminal (2) is provided with a pin-type terminal (22). The pin-type terminal (22) is configured to ground to discharge static electricity from the cold-pressed terminal (2).

8. The static eliminator connector as described in claim 1, characterized in that, The electrostatic discharge rod (11) is a glass carbon rod.

9. A semiconductor infusion device, characterized in that, include: The static eliminator connector as described in any one of claims 1-8; and Infusion tubing; in The infusion pipelines are connected to pipeline ports (10) respectively.

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