A furnace heating wire replacement device

Abstract

The utility model relates to a kind of furnace body heating wire replacement device, include inner tube, heating wire group fixed mechanism being located in the outer side of inner tube, the outer side of the inner tube has multiple heat insulation limit strips in circumferential array, the heating wire group fixed mechanism includes two transmission strips in the heat insulation limit strip of opposite sliding fit, is located in the oblique connecting strip of transmission strip side, is located in the limit post of oblique connecting strip side, sliding fit in the heat insulation ring of the outer side of inner tube, spring sliding fit on the heat insulation ring and corresponding pull rod of the heat insulation limit strip;By placing one heating wire in heating wire group between two heat insulation limit strips, between two limit posts, then loosening handle, spring pushes transmission strip reset, two limit posts are inserted into heating wire both ends by sliding towards each other, limit heating wire between two heat insulation limit strips, it is convenient to avoid the trouble of bolt positioning, it is convenient to improve the efficiency and convenience of positioning heating wire.

Description

Technical Field

[0001] This utility model relates to the field of heating wire replacement technology, and in particular to a furnace heating wire replacement device. Background Technology

[0002] The boron-phosphorus diffusion furnace is a key high-temperature process equipment in semiconductor chip manufacturing. It is mainly used to dope silicon wafers, that is, to introduce specific impurities (boron, phosphorus, etc.) into silicon crystals through high-temperature thermal diffusion, thereby changing its electrical properties and forming basic device structures such as PN junctions, resistors, and ohmic contacts. The boron-phosphorus diffusion furnace is a meritorious piece of equipment in the semiconductor industry. It laid the foundation for the modern electronic age. With its excellent uniformity, high output and mature process, it remains an indispensable mainstream production equipment. It represents a classic engineering technology that changes the properties of materials through high-temperature chemical reactions.

[0003] In existing boron-phosphorus diffusion furnaces, multiple heating mechanisms are linearly arrayed inside the outer shell. When positioning the heating wire group, which is connected to multiple heating wires in sequence, multiple heating wires need to be fixed in sequence by clamps and screws. Similarly, when disassembling, multiple clamps need to be removed in sequence to release the positioning of the heating wire group, which affects the efficiency of heating wire replacement. Utility Model Content

[0004] In response to the technical problem in existing patents that, during the use of a boron-phosphorus diffusion furnace, multiple heating mechanisms are linearly arrayed inside the outer shell, and when positioning the heating wire group that is connected to multiple heating wires in sequence, multiple heating wires need to be fixed in sequence with clamps and screws, and the same applies to disassembly, multiple clamps need to be disassembled in sequence to release the positioning of the heating wire group, which affects the efficiency of heating wire replacement, this utility model provides a furnace heating wire replacement device.

[0005] The technical solution adopted by this utility model is: a furnace heating wire replacement device, including: an inner cylinder, a heating wire group fixing mechanism disposed on the outer side of the inner cylinder, a plurality of heat insulation limiting strips are arranged in a circumferential array on the outer side of the inner cylinder, the heating wire group fixing mechanism includes two transmission strips that slide against each other in the heat insulation limiting strips, an inclined connecting strip disposed on one side of the transmission strips, a limiting post disposed on one side of the inclined connecting strips, a heat insulation ring that slides against the outer side of the inner cylinder, a spring that slides against the heat insulation ring and is corresponding to the heat insulation limiting strips, and a positioning mechanism disposed on the outer side of the inner cylinder for positioning the heat insulation ring, the pull rod passing through one end of the heat insulation ring and being fixedly connected to one of the transmission strips on the heat insulation limiting strips.

[0006] Furthermore, the positioning mechanism includes a U-shaped guide seat fixed to the outside of the inner cylinder, a guide strip at one end of the heat insulation ring, a screw bolt threaded onto the upper side of the U-shaped guide seat, and multiple positioning grooves on the upper side of the guide strip. One end of the guide strip is slidably fitted inside the U-shaped guide seat, and the screw bolt corresponds to two of the positioning grooves.

[0007] Furthermore, a spring is fitted onto the pull rod, with both ends of the spring fixedly connected to the heat insulation ring and the transmission bar, respectively, and a handle is provided at the end of the pull rod away from the transmission bar.

[0008] Furthermore, the heat insulation limiting strip has a through hole on one side, one end of the transmission strip is slidably fitted in the through hole, one end of the transmission strip is provided with a rack, a gear is rotatably fitted in the through hole, the gear meshes with two racks in the through hole, and the gear is located between the two racks.

[0009] Furthermore, the inner cylinder has a circumferential array of multiple elongated holes, and the multiple heat insulation limiting strips are staggered with the multiple elongated holes. Both ends of the inner cylinder are provided with outward flanges, and two sealing heat insulation plates are provided on the outer side of the inner cylinder. The two ends of the sealing heat insulation plates are respectively fixed to the two outward flanges.

[0010] The beneficial effects of this utility model are: By pulling the lever, the lever causes the transmission bar to slide, compressing the spring. Through the meshing of the rack and gear, the two transmission bars inside the through hole slide towards each other, which in turn causes the two limiting posts to slide towards each other and separate. One of the heating wires in the heating wire assembly is placed between the two heat-insulating limiting bars and between the two limiting posts. Then, the handle is released, the spring pushes the transmission bar to return to its original position, and the two limiting posts slide towards each other and insert into both ends of the heating wire, limiting the heating wire between the two heat-insulating limiting bars. This avoids the trouble of bolt positioning and improves the efficiency and convenience of positioning the heating wire. By rotating the screw bolt to loosen the positioning groove, and then pulling the heat insulation ring, multiple transmission bars are simultaneously slid through the spring, releasing the limit on all heating wires in the heating wire group, which facilitates quick disassembly of multiple heating wires in the heating wire group and easy replacement of heating wires. Attached Figure Description

[0011] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a cross-sectional structural diagram of the present invention; Figure 3 This is an exploded view of this utility model; Figure 4 This is a cross-sectional view of the positioning mechanism in this utility model; Figure 5This is a schematic diagram of the heating wire assembly structure in this utility model.

[0012] The diagram is marked as follows: 1. Inner cylinder; 101. Insulation limiting strip; 102. Long strip hole; 103. Outward flange; 104. Sealing insulation plate; 2. Heating wire assembly fixing mechanism; 201. Transmission bar; 202. Inclined connecting bar; 203. Limiting post; 204. Insulation ring; 205. Pull rod; 206. Positioning mechanism; 2061. U-shaped guide seat; 2062. Guide bar; 2063. Claw bolt; 2064. Positioning groove; 207. Spring; 208. Handle; 209. Through hole; 210. Rack; 211. Gear; 3. Heating wire assembly. Detailed Implementation

[0013] In the description of this utility model, it should be noted that the terms "front", "up", "down", "left", "right", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0014] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0015] The following is in conjunction with the appendix Figure 1-5 The present invention will be further described below.

[0016] To address the problems existing in the background art, this application proposes the following technical solution: A furnace heating wire replacement device includes: an inner cylinder 1, a heating wire assembly fixing mechanism 2 located on the outer side of the inner cylinder 1, a plurality of heat insulation limiting strips 101 arranged in a circumferential array on the outer side of the inner cylinder 1, the heating wire assembly fixing mechanism 2 including two transmission strips 201 slidably engaged in the heat insulation limiting strips 101, an inclined connecting strip 202 located on one side of the transmission strips 201, a limiting post 203 located on one side of the inclined connecting strips 202, a heat insulation ring 204 slidably engaged on the outer side of the inner cylinder 1, a spring slidably engaged on the heat insulation ring 204 and corresponding to the heat insulation limiting strips 101, and a positioning mechanism 206 located on the outer side of the inner cylinder 1 for positioning the heat insulation ring 204, one end of the pull rod 205 passing through the heat insulation ring 204 and fixedly connected to one of the transmission strips 201 on the heat insulation limiting strips 101, the distance between the inclined connecting strip 202 and the outer side of the inner cylinder 1 gradually increases from the end connected to the transmission strip 201 to the end connected to the limiting post 203.

[0017] Furthermore, the positioning mechanism 206 includes a U-shaped guide seat 2061 fixed to the outside of the inner cylinder 1, a guide strip 2062 located at one end of the heat insulation ring 204, a screw bolt 2063 threaded onto the upper side of the U-shaped guide seat 2061, and a plurality of positioning grooves 2064 located on the upper side of the guide strip 2062. One end of the guide strip 2062 is slidably fitted inside the U-shaped guide seat 2061, and the screw bolt 2063 corresponds to two positioning grooves 2064.

[0018] Furthermore, a spring 207 is fitted on the pull rod 205, and the two ends of the spring 207 are fixedly connected to the heat insulation ring 204 and the transmission bar 201, respectively. A handle 208 is provided at the end of the pull rod 205 away from the transmission bar 201.

[0019] Furthermore, a through hole 209 is provided on one side of the heat insulation limiting strip 101, one end of the transmission strip 201 is slidably fitted in the through hole 209, one end of the transmission strip 201 is provided with a rack 210, and a gear 211 is rotatably fitted in the through hole 209. The gear 211 meshes with two racks 210 in the through hole 209, and the gear 211 is located between the two racks 210.

[0020] Furthermore, the inner cylinder 1 has a circumferential array of multiple elongated holes 102, and multiple heat-insulating limiting strips 101 are staggered with the multiple elongated holes 102. Both ends of the inner cylinder 1 are provided with outward flanges 103, and the outer side of the inner cylinder 1 is provided with two sealing heat-insulating plates 104. The two ends of the sealing heat-insulating plates 104 are respectively fixed on the two outward flanges 103, so as to fix the two sealing heat-insulating plates 104 on the outward flanges 103 to seal the outer side of the inner cylinder 1, and at the same time limit the heating wire, so as to facilitate the heating wire to dissipate heat through the elongated holes 102 and heat the objects inside the inner cylinder 1.

[0021] Working principle: Pulling the lever 205 via the handle 208 causes the lever 205 to slide the transmission bar 201, compressing the spring 207. Through the meshing of the rack 210 and gear 211, the two transmission bars 201 within the through hole 209 slide towards each other, thereby causing the two limiting posts 203 to slide and separate towards each other. One heating wire from the heating wire assembly 3 is placed between two adjacent heat-insulating limiting bars 101 and between the two limiting posts 203. Then, releasing the handle 208 causes the spring 207 to push the transmission bar 201 back to its original position, and the two limiting posts 203 slide towards each other and insert. The heating wire is positioned between two heat-insulating limiting strips 101 at both ends. Then, multiple heating wires in the heating wire group 3 are positioned elastically in sequence, which avoids the trouble of bolt positioning and improves the efficiency and convenience of positioning the heating wires. When it is necessary to disassemble the heating wire group 3, the screw bolt 2063 is turned to unscrew the positioning groove 2064. Then, the heat insulation ring 204 is pulled to drive multiple transmission strips 201 to slide simultaneously through the spring 207, thereby releasing the limitation on all heating wires in the heating wire group 3. This facilitates the quick disassembly of multiple heating wires in the heating wire group 3 and the replacement of heating wires.

[0022] All standard parts used in this utility model can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. In addition, the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0023] Although embodiments of the present invention have been shown and described, the scope of the present invention will be defined by the appended claims and their equivalents for those skilled in the art.

Claims

1. A furnace heating wire replacement device, characterized in that, include: The inner cylinder (1) and the heating wire assembly fixing mechanism (2) are located on the outside of the inner cylinder (1). The outer side of the inner cylinder (1) is arranged with multiple heat insulation limiting strips (101). The heating wire assembly fixing mechanism (2) includes two transmission strips (201) that slide against each other in the heat insulation limiting strips (101), an inclined connecting strip (202) located on one side of the transmission strips (201), a limiting post (203) located on one side of the inclined connecting strips (202), a heat insulation ring (204) that slides on the outside of the inner cylinder (1), a spring that slides on the heat insulation ring (204) and is corresponding to the heat insulation limiting strips (101), and a positioning mechanism (206) located on the outside of the inner cylinder (1) for positioning the heat insulation ring (204). The pull rod (205) passes through one end of the heat insulation ring (204) and is fixedly connected to one of the transmission strips (201) on the heat insulation limiting strips (101).

2. The furnace heating wire replacement device according to claim 1, characterized in that, The positioning mechanism (206) includes a U-shaped guide seat (2061) fixed to the outside of the inner cylinder (1), a guide strip (2062) provided at one end of the heat insulation ring (204), a screw bolt (2063) threaded to the upper side of the U-shaped guide seat (2061), and a plurality of positioning grooves (2064) provided on the upper side of the guide strip (2062). One end of the guide strip (2062) is slidably fitted in the U-shaped guide seat (2061), and the screw bolt (2063) corresponds to two of the positioning grooves (2064).

3. The furnace heating wire replacement device according to claim 1, characterized in that, A spring (207) is fitted on the pull rod (205), and the two ends of the spring (207) are fixedly connected to the heat insulation ring (204) and the transmission bar (201) respectively.

4. The furnace heating wire replacement device according to claim 1, characterized in that, The heat insulation limiting strip (101) has a through hole (209) on one side. One end of the transmission strip (201) is slidably fitted in the through hole (209). One end of the transmission strip (201) is provided with a rack (210). A gear (211) is rotatably fitted in the through hole (209). The gear (211) meshes with the two racks (210) in the through hole (209).

5. A furnace heating wire replacement device according to claim 1, characterized in that, The inner cylinder (1) has a circumferential array of multiple elongated holes (102), and the multiple heat insulation limiting strips (101) are arranged alternately with the multiple elongated holes (102).

6. A furnace heating wire replacement device according to claim 1, characterized in that, The inner cylinder (1) has outward flanges (103) at both ends, and two sealing heat insulation plates (104) are provided on the outer side of the inner cylinder (1). The two ends of the sealing heat insulation plates (104) are respectively fixed on the two outward flanges (103).

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