A high-efficiency heating furnace body for a diffusion furnace

Abstract

The utility model relates to a kind of high-efficiency heating furnace body for diffusion furnace, including furnace shell, the inside of furnace shell is provided with uniform heating component, uniform heating component includes motor, runner, long rod and gear ring, motor is fixedly arranged at one end of furnace shell, runner is located in the inside of furnace shell, and runner is fixed on the output shaft of motor, the one end of long rod is rotatably connected on runner by bearing, and fan blade is fixedly arranged on the outer wall of long rod, gear ring is arranged on the outer wall of long rod close to runner, gear ring is fixedly arranged on the inner wall of furnace shell, and gear ring and gear ring are engaged with each other. The utility model can drive long rod to drive fan blade revolution and rotate, and then the heat of resistance heating wire on the inner side wall in furnace shell can be fanned to furnace shell center, shorten the time of heat uniform distribution in furnace shell, can accelerate the efficiency of heat diffusion, to improve the efficiency of uniform heating.

Description

Technical Field

[0001] This utility model relates to the field of diffusion furnace technology, and in particular to a high-efficiency heating furnace body for diffusion furnaces. Background Technology

[0002] A diffusion furnace is an industrial or experimental device used for high-temperature heat treatment. Its core function is to change the physical or chemical properties of materials (such as semiconductor wafers) by causing atomic diffusion in a specific atmosphere through heating. The high-efficiency heating furnace body is the core component of the diffusion furnace, responsible for achieving uniform and stable heating in a high-temperature environment to meet the process requirements of semiconductor doping, oxidation, or annealing. The existing high-efficiency heating furnace bodies for diffusion furnaces have the following drawbacks in practical use: In existing high-efficiency heating furnaces used for diffusion furnaces, heat is dissipated from the resistance heating wires on the inner side wall of the furnace body and then gradually diffuses. The heat at the inner side wall of the furnace body is significantly higher than that at the center of the furnace body. Therefore, a certain heat diffusion time is required to achieve uniform heat inside the furnace body, which reduces the rate of uniform heating. Furthermore, the high-temperature gas inside the furnace shell will pollute the air when it is discharged, and the high temperature of the gas also poses a certain danger when it is discharged. Utility Model Content

[0003] In existing high-efficiency heating furnace bodies for diffusion furnaces, heat is dissipated from the resistance heating wires on the inner side wall of the furnace body and then gradually diffuses. The heat at the inner side wall of the furnace body is significantly higher than that at the center of the furnace body. Therefore, a certain heat diffusion time is required to achieve uniform heat inside the furnace body, which reduces the rate of uniform heating. Furthermore, the high-temperature gas inside the furnace shell pollutes the air when it is discharged, and the high temperature of the gas also poses a certain degree of danger when discharged. This utility model provides a high-efficiency heating furnace body for diffusion furnaces.

[0004] The technical solution adopted by this utility model is: a high-efficiency heating furnace body for a diffusion furnace, including a furnace shell, a heat equalization component is arranged inside the furnace shell, the heat equalization component includes a motor, a rotating wheel, a long rod and a toothed ring, the motor is fixedly arranged at one end of the furnace shell, the rotating wheel is located inside the furnace shell and is fixed on the output shaft of the motor, one end of the long rod is rotatably connected to the rotating wheel through a bearing, and a fan blade is fixedly arranged on the outer wall of the long rod, a toothed ring is arranged on the outer wall of the long rod near the rotating wheel, and the toothed ring is fixedly arranged on the inner wall of the furnace shell, and the toothed ring and the toothed ring mesh with each other.

[0005] Furthermore, an exhaust assembly is provided on the top of the furnace shell, the exhaust assembly including an exhaust pipe, a pump body and a processing box.

[0006] Furthermore, the exhaust pipe, pump body, and processing box are all fixedly installed on the outer wall of the top of the furnace shell. The two ends of the exhaust pipe are respectively connected to the input ends of the furnace shell and the pump body, and the output end of the pump body is connected to the processing box through a pipe.

[0007] Furthermore, a valve body is provided on the exhaust pipe, and a cooling sleeve is provided on the outside of the exhaust pipe.

[0008] Furthermore, the cooling jacket has a cooling pipe inside that is wound around the outside of the exhaust pipe, and both ends of the cooling pipe extend to the outside of the cooling jacket.

[0009] Furthermore, a filter screen is fixedly installed inside the treatment box, and a rotating rod is rotatably connected inside the filter screen. A vortex vane and a cleaning brush are respectively installed on the outer wall of the rotating rod. An activated carbon filter element is inserted into the top of the treatment box, and a cleaning door is provided on the outer wall of the treatment box.

[0010] Furthermore, the interior of the furnace shell is provided with a ceramic inner layer, and the inner wall of the ceramic inner layer is provided with a number of grooves, and resistance heating wires are provided inside the grooves.

[0011] The beneficial effects of this utility model are: This invention uses a heat equalization component to drive a long rod to rotate the fan blades around the sun and rotate on its own axis. This allows the heat emitted by the resistance heating wires on the inner sidewall of the furnace shell to be fanned toward the center of the furnace shell, shortening the time for uniform heat distribution within the furnace shell and accelerating the efficiency of heat diffusion, thereby improving the efficiency of uniform heating.

[0012] Secondly, this utility model uses an exhaust assembly to cool the gas inside the furnace shell, which avoids the problem of excessive heat and danger when the gas is discharged. The gas is cooled before being filtered, which is more environmentally friendly. Furthermore, when the pump draws the gas into the treatment box, it impacts the swirl vanes, causing the vanes to drive the rotating rod and cleaning brush to rotate and self-clean the filter screen, preventing the filter screen from clogging and achieving an anti-clogging function. Attached Figure Description

[0013] Figure 1 This is a three-dimensional view of the entire utility model; Figure 2 This is an internal sectional perspective view of the present invention; Figure 3 This is a three-dimensional view of the heat equalization component of this utility model; Figure 4 This is a three-dimensional view of the internal structure of the processing box of this utility model.

[0014] The components in the diagram are labeled as follows: 1. Furnace shell; 2. Heating uniform assembly; 201. Motor; 202. Rotary wheel; 203. Long rod; 204. Fan blade; 205. Gear ring; 206. Gear ring; 3. Exhaust assembly; 301. Exhaust pipe; 302. Valve body; 303. Cooling jacket; 304. Cooling pipe; 305. Pump body; 306. Processing box; 307. Filter screen; 308. Cleaning door; 309. Activated carbon filter element; 310. Rotary rod; 311. Swirl vane; 312. Cleaning brush; 4. Ceramic inner layer; 5. Groove; 6. Resistance heating wire. Detailed Implementation

[0015] In the description of this utility model, it should be noted that the terms "front", "up", "down", "left", "right", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0016] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0017] The following is in conjunction with the appendix Figures 1-4 The present invention will be further described below.

[0018] In order to solve the problems existing in the background art, this application proposes the following technical solution: a high-efficiency heating furnace body for diffusion furnace.

[0019] The specific technical solution includes a furnace shell 1, inside which a heat equalization component 2 is installed. The heat equalization component 2 includes a motor 201, a rotating wheel 202, a long rod 203, and a gear ring 206. The motor 201 is fixedly installed at one end of the furnace shell 1. The rotating wheel 202 is located inside the furnace shell 1 and is fixed to the output shaft of the motor 201. One end of the long rod 203 is rotatably connected to the rotating wheel 202 through a bearing, and a fan blade 204 is fixedly installed on the outer wall of the long rod 203. The long rod 203 is close to the rotating wheel 206. A toothed ring 205 is provided on the outer wall of the furnace shell 1, and a toothed ring 206 is fixedly installed on the inner wall of the furnace shell 1. The toothed ring 205 and the toothed ring 206 mesh with each other, which can drive the long rod 203 to revolve and rotate, thereby driving the fan blade 204 to rotate. This fans the heat emitted by the resistance heating wire 6 on the side wall of the furnace shell 1 towards the center of the furnace shell 1, which can accelerate the heat flow rate and the heat diffusion rate, thereby improving the efficiency of achieving uniform heat inside the furnace shell 1, and further improving the efficiency of uniform heating, thus realizing the high-efficiency heating function.

[0020] In specific implementations, such as Figure 1 , 2 and Figure 4 As shown, an exhaust assembly 3 is provided on the top of the furnace shell 1. The exhaust assembly 3 includes an exhaust pipe 301, a pump body 305 and a processing box 306. The exhaust assembly 3 is used to cool and filter the high-temperature gas extracted from the inside of the furnace shell 1.

[0021] Furthermore, the exhaust pipe 301, pump body 305, and processing box 306 are all fixedly installed on the outer wall of the top of the furnace shell 1. The two ends of the exhaust pipe 301 are connected to the furnace shell 1 and the input end of the pump body 305, respectively. The output end of the pump body 305 is connected to the processing box 306 through a pipe. The pump body 305 can draw the high-temperature gas inside the furnace shell 1 into the processing box 306 through the exhaust pipe 301.

[0022] Furthermore, a valve body 302 is provided on the exhaust pipe 301, and a cooling sleeve 303 is provided on the outer side of the exhaust pipe 301.

[0023] Furthermore, the cooling jacket 303 is provided with a cooling pipe 304 wrapped around the outside of the exhaust pipe 301, and both ends of the cooling pipe 304 extend to the outside of the cooling jacket 303. The cooling medium circulating inside the cooling pipe 304 can exchange heat with the high-temperature gas inside the exhaust pipe 301 to cool the high-temperature gas.

[0024] Furthermore, a filter screen 307 is fixedly installed inside the treatment box 306, and a rotating rod 310 is rotatably connected inside the filter screen 307. A swirl vane 311 and a cleaning brush 312 are respectively installed on the outer wall of the rotating rod 310. An activated carbon filter element 309 is inserted into the top of the treatment box 306, and a cleaning door 308 is provided on the outer wall of the treatment box 306. When the activated carbon filter element 309 needs to be replaced, it can be pulled out from the top of the treatment box 306 for replacement.

[0025] In specific implementations, such as Figure 1 and Figure 2 As shown, the furnace shell 1 has a ceramic inner layer 4 inside, and the inner wall of the ceramic inner layer 4 has several grooves 5. The grooves 5 are equipped with resistance heating wires 6. The ceramic inner layer 4 is a high-temperature resistant ceramic inner layer 4, and the resistance heating wires 6 can heat the inside of the furnace shell 1.

[0026] To ensure that those skilled in the art can fully understand the technical solution, this application provides the following overall overview: In use, after the object to be processed is fed into the furnace shell 1 of the diffusion furnace, the resistance heating wire 6 is turned on to heat it, and the motor 201 is turned on to drive the rotating wheel 202 to rotate. The rotating wheel 202 will drive the long rod 203 to rotate. When the long rod 203 rotates, the toothed ring 205 at its end will mesh with the toothed ring 206, which will drive the long rod 203 to rotate. The long rod 203 will rotate on its own axis and then drive the fan blade 204 to rotate. This will fan the heat emitted by the resistance heating wire 6 on the side wall of the furnace shell 1 towards the center of the furnace shell 1, which will accelerate the heat flow rate and the heat diffusion rate, thereby improving the efficiency of achieving uniform heat inside the furnace shell 1 and further improving the efficiency of uniform heating. The two ends of the cooling pipe 304 are connected to the input and output ends of the external cold medium circulation equipment, respectively. When the diffusion furnace is finished using, the high temperature inside the furnace shell 1 needs to be checked. When the warm gas is discharged, the pump body 305 is turned on to draw the high-temperature gas inside the furnace shell 1 into the treatment box 306 through the exhaust pipe 301. When the gas passes through the exhaust pipe 301, the external equipment introduces a cooling medium into the cooling pipe 304. The cooling medium can exchange heat with the high-temperature gas to cool it and prevent the gas from being too hot when discharged, which could be dangerous. When the cooled gas enters the treatment box 306, the filter screen 307 and the activated carbon filter element 309 filter the gas in sequence, which is more environmentally friendly. When the pump body 305 draws the gas into the treatment box 306, the gas will impact the swirl vane 311, which can drive the rotating rod 310 and the cleaning brush 312 to rotate and self-clean the filter screen 307, preventing the filter screen 307 from clogging and achieving an anti-clogging function. Opening the cleaning door 308 makes it easy to clean the filtered particles.

[0027] All standard parts used in this utility model can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0028] Although embodiments of the present invention have been shown and described, the scope of the present invention will be defined by the appended claims and their equivalents for those skilled in the art.

Claims

1. A high-efficiency heating furnace body for a diffusion furnace, characterized in that, The furnace includes a furnace shell (1), and a heat equalization component (2) is provided inside the furnace shell (1). The heat equalization component (2) includes a motor (201), a rotating wheel (202), a long rod (203), and a gear ring (206). The motor (201) is fixedly installed at one end of the furnace shell (1). The rotating wheel (202) is located inside the furnace shell (1) and is fixed on the output shaft of the motor (201). One end of the long rod (203) is rotatably connected to the rotating wheel (202) through a bearing. A fan blade (204) is fixedly installed on the outer wall of the long rod (203). A gear ring (205) is provided on the outer wall of the long rod (203) near the rotating wheel (202). The gear ring (206) is fixedly installed on the inner wall of the furnace shell (1), and the gear ring (205) and the gear ring (206) mesh with each other.

2. The high-efficiency heating furnace body for a diffusion furnace according to claim 1, characterized in that, The top of the furnace shell (1) is provided with an exhaust assembly (3), which includes an exhaust pipe (301), a pump body (305) and a processing box (306).

3. The high-efficiency heating furnace body for a diffusion furnace according to claim 2, characterized in that, The exhaust pipe (301), pump body (305) and processing box (306) are all fixedly installed on the outer wall of the top of the furnace shell (1). The two ends of the exhaust pipe (301) are connected to the input ends of the furnace shell (1) and the pump body (305) respectively. The output end of the pump body (305) is connected to the processing box (306) through a pipe.

4. The high-efficiency heating furnace body for a diffusion furnace according to claim 3, characterized in that, A valve body (302) is provided on the exhaust pipe (301), and a cooling sleeve (303) is provided on the outside of the exhaust pipe (301).

5. A high-efficiency heating furnace body for a diffusion furnace according to claim 4, characterized in that, The cooling jacket (303) is provided with a cooling pipe (304) wrapped around the outside of the exhaust pipe (301), and both ends of the cooling pipe (304) extend to the outside of the cooling jacket (303).

6. A high-efficiency heating furnace body for a diffusion furnace according to claim 5, characterized in that, The processing box (306) is fixedly provided with a filter screen (307), and a rotating rod (310) is rotatably connected inside the filter screen (307). A swirl vane (311) and a cleaning brush (312) are respectively provided on the outer wall of the rotating rod (310). An activated carbon filter element (309) is inserted into the top of the processing box (306), and a cleaning door (308) is provided on the outer wall of the processing box (306).

7. A high-efficiency heating furnace body for a diffusion furnace according to claim 1, characterized in that, The furnace shell (1) is provided with a ceramic inner layer (4), and a number of grooves (5) are provided on the inner wall of the ceramic inner layer (4), and resistance heating wires (6) are provided inside the grooves (5).

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