Water-cooled solvent trap

Abstract

The utility model discloses a water -cooled solvent trapping box, including the trapping box main body with air inlet and air outlet, the air inlet of trapping box main body is used for with the waste heat exhaust pipe output end of oven intercommunication, and the first baffle and the second baffle of interval arrangement form the wind channel of bending in trapping box main body, water -cooling pipe is connected on the first baffle and the second baffle, and the inner chamber bottom of trapping box main body is equipped with the detachable oil pan. The water -cooled solvent trapping box provided by the utility model can recycle solvent type volatile to the oil pan through cooling, and the detachable oil pan is convenient for cleaning and replacement.

Description

Technical Field

[0001] This utility model relates to the field of oven exhaust gas treatment, and in particular to a water-cooled solvent collection box. Background Technology

[0002] In the semiconductor synthesis process, after cleaning and spin coating, a soft baking and cooling process is required. Spin coating is performed using a coating machine, while soft baking is performed using an oven. When semiconductor products are baked in the oven, the resulting solvent-based volatiles are discharged outside the oven through the oven's waste heat exhaust pipes and also from the factory's main pipeline. These solvent-based volatiles contain harmful substances; if directly discharged into the environment, they would cause air pollution and hinder environmentally friendly production. Utility Model Content

[0003] The purpose of this invention is to provide a water-cooled solvent collection box that can recover solvent-based volatiles to an oil collection tray through cooling. The oil collection tray is detachable for easy cleaning and replacement.

[0004] To achieve the above objectives, this utility model provides a water-cooled solvent collection box, including a collection box body with an air inlet and an air outlet. The air inlet of the collection box body is used to connect with the output end of the waste heat exhaust pipe of the oven. A bent air duct is formed inside the collection box body by a first baffle plate and a second baffle plate arranged at intervals. Water-cooling pipes are connected to both the first baffle plate and the second baffle plate. A detachable oil collection tray is provided at the bottom of the inner cavity of the collection box body.

[0005] As a further improvement of this utility model, the two ends of the main body of the collection box are respectively provided with a first air collecting hood and a second air collecting hood in the shape of cones. The air inlet is provided on the first air collecting hood and the air outlet is provided on the second air collecting hood. The cross-sectional dimensions of both the air inlet and the air outlet are smaller than the cross-sectional dimensions of the main body of the collection box.

[0006] As a further improvement of this utility model, the water-cooled solvent collection box also includes a drawer baffle. Both the first and second baffles are connected to the drawer baffle on one side. An opening is provided on the side wall of the collection box body. The first and second baffles extend into the inner cavity of the collection box body through the opening in the side wall of the collection box body. The drawer baffle is fastened to the outside of the opening in the side wall of the collection box body. A toggle clamp is also provided on the outside of the collection box body. Each drawer baffle is pressed against the outside of the opening in the collection box body by two toggle clamps.

[0007] As a further improvement of this utility model, each of the first and second wind deflectors is provided with a water-cooled pipe arranged at intervals therebetween. The first wind deflector and the water-cooled pipe, as well as the second wind deflector and the water-cooled pipe, are connected by connectors. The inlet and outlet of the water-cooled pipe both pass through the drawer baffle and are located outside the main body of the collection box.

[0008] As a further improvement of this utility model, the water-cooling pipe is provided with multiple bends.

[0009] As a further improvement of this utility model, a first track and a second track are respectively provided on two oppositely arranged walls inside the main body of the collection box; the first track is slidably engaged with one edge of the first wind deflector, and a gap is left between the other edge of the first wind deflector away from the first track and the inner wall of the main body of the collection box; the second track is slidably engaged with one edge of the second wind deflector, and a gap is left between the other edge of the second wind deflector away from the second track and the inner wall of the main body of the collection box.

[0010] As a further improvement of this utility model, both the first track and the second track are hollow tubes, and both are provided with strip grooves; the edge of the first wind deflector is slidably engaged with the strip groove on the first track, and the edge of the first wind deflector is provided with a flange structure, which slides into the first track along with the edge of the first wind deflector; the edge of the second wind deflector is slidably engaged with the strip groove on the second track, and the edge of the second wind deflector is provided with a flange structure, which slides into the second track along with the edge of the second wind deflector.

[0011] Beneficial effects Compared with the prior art, the advantages of the water-cooled solvent collection box of this utility model are: 1. Solvent-based volatiles enter the collection box body through the air inlet, then bypass the first and second baffles before exiting through the outlet. The flow path is extended by a bend in the air duct, and the solvent-based volatiles in the air are cooled by water-cooling pipes, causing them to condense and fall onto the oil collection tray. Finally, the oil collection tray is removed for recycling. This method significantly reduces the emission of harmful gases from plant pipelines and facilitates the cleaning and replacement of the oil collection tray.

[0012] 2. The water-cooling pipes can be pulled out of the main body of the collection box along with the first and second baffles through the drawer baffles, which makes it convenient for personnel to clean the condensate of residual solvent volatiles on the surface of the water-cooling pipes and baffles in a timely manner, thereby improving the recovery rate. At the same time, keeping the surface of the water-cooling pipes clean helps to ensure the cooling effect.

[0013] 3. The water-cooling pipe has multiple bends to increase the contact area between the water-cooling pipe and the air containing solvent-based volatiles, thereby improving the cooling effect.

[0014] 4. The first track slides with one edge of the first wind deflector, and the second track slides with one edge of the second wind deflector. This helps to reduce the shaking of the first and second wind deflectors, thereby reducing noise.

[0015] The present invention will become clearer from the following description and in conjunction with the accompanying drawings, which are used to explain the embodiments of the present invention. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional view of a water-cooled solvent collection box; Figure 2 A three-dimensional view of the second baffle, water-cooling pipes, and drawer baffle; Figure 3 A three-dimensional view of the internal structure of a water-cooled solvent collection box; Figure 4 This is a schematic diagram of the internal gas flow direction of a water-cooled solvent trap. Figure 5 for Figure 4 Enlarged view of point C; Figure 6 for Figure 4 Enlarged view of point D; Figure 7 This is a left sectional view of a water-cooled solvent trap. Detailed Implementation

[0018] Embodiments of the present invention will now be described with reference to the accompanying drawings.

[0019] Example The specific embodiments of this utility model are as follows: Figures 1 to 7 As shown, a water-cooled solvent collection box includes a collection box body 1 with an air inlet 21 and an air outlet 81. The air inlet 21 of the collection box body 1 is used to connect to the output end of the waste heat exhaust pipe of an oven. A bent air duct 9 is formed inside the collection box body 1 by a first baffle plate 51 and a second baffle plate 52 arranged at intervals. Water-cooling pipes 3 are connected to both the first baffle plate 51 and the second baffle plate 52. A removable oil collection tray 6 is provided at the bottom of the inner cavity of the collection box body 1.

[0020] The main body 1 of the collection box is arranged horizontally, and the front and rear ends are respectively provided with a first air collecting hood 2 and a second air collecting hood 8 in the shape of cones. The air inlet 21 is set on the first air collecting hood 2, and the air outlet 81 is set on the second air collecting hood 8. The cross-sectional dimensions of both the air inlet 21 and the air outlet 81 are smaller than the cross-sectional dimensions of the main body 1 of the collection box.

[0021] The water-cooled solvent collection box also includes a drawer baffle 4. Both the first baffle plate 51 and the second baffle plate 52 are connected to the drawer baffle 4 on one side. An opening is provided on the side wall of the collection box body 1. The first baffle plate 51 and the second baffle plate 52 extend into the inner cavity of the collection box body 1 through the opening in the side wall of the collection box body 1. The drawer baffle 4 is fastened to the outside of the opening in the side wall of the collection box body 1. A toggle clamp 7 is also provided on the outside of the collection box body 1. Each drawer baffle 4 is pressed against the outside of the opening in the collection box body 1 by two upper and lower toggle clamps 7. The structure of the toggle clamp 7 is prior art; for example, a toggle clamp of model MC04-S1 can be used.

[0022] Each of the first baffle plate 51 and the second baffle plate 52 is provided with a water-cooled pipe 3 arranged at intervals therebetween. The first baffle plate 51 and the water-cooled pipe 3, and the second baffle plate 52 and the water-cooled pipe 3 are connected by connectors 54. The water inlet (cold water inlet) and the water outlet (warm water outlet) of the water-cooled pipe 3 pass through the drawer baffle 4 and are located outside the main body 1 of the collection box.

[0023] In this embodiment, there are four of each of the first and second baffle plates 51, arranged alternately along the length of the main body 1 of the collection box. Each baffle plate is mounted on a drawer baffle 4, and each baffle plate is connected to the water cooling pipe 3 by multiple connectors 54. Both the first and second baffle plates 51 and 52 are arranged vertically. The lower edge of the first baffle plate 51 is suspended and there is a gap between it and the bottom of the inner cavity of the collection box 1 for air circulation. The upper edge of the second baffle plate 52 is also left with a gap between it and the top of the inner cavity of the collection box 1 for air circulation.

[0024] The water-cooled pipe 3 has multiple bends 31, as well as straight sections. Each bend 31 connects two adjacent straight sections, such as... Figure 2 , Figure 7 As shown. The bend section 31 allows for a longer water-cooling pipe 3 to be installed per unit area, increasing the contact area between the water-cooling pipe 3 and the air containing solvent-based volatiles, thereby improving the cooling effect.

[0025] The upper and lower walls of the main body of the trapping box 1 are respectively provided with a first track 11 and a second track 12. The first track 11 is fixedly connected to the upper top surface of the trapping box 1, and the second track 12 is fixedly connected to the lower top surface of the trapping box 1. Both the first track 11 and the second track 12 are perpendicular to the openings on the side walls of the trapping box 1. The first track 11 is slidably engaged with one edge of the first baffle plate 51, and the other edge of the first baffle plate 51 away from the first track 11 is spaced apart from the inner wall of the trapping box 1. The second track 12 is slidably engaged with one edge of the second baffle plate 52, and the other edge of the second baffle plate 52 away from the second track 12 is spaced apart from the inner wall of the trapping box 1.

[0026] Both the first track 11 and the second track 12 are hollow square tubes, and both the bottom surface of the first track 11 and the top surface of the second track 12 are provided with strip grooves 13. The upper edge of the first wind deflector 51 is slidably engaged with the strip groove 13 on the first track 11. The first wind deflector 51 has a horizontally arranged flange structure 53 on this edge, and the flange structure 53 of the first wind deflector 51 slides into the inner cavity of the first track 11 along with the edge of the first wind deflector 51. Figure 5 As shown. The lower edge of the second wind deflector 52 is slidably engaged with the strip groove 13 on the second track 12. The second wind deflector 52 has a horizontally arranged flange structure 53 on this edge. The flange structure 53 of the second wind deflector 52 slides into the inner cavity of the second track 12 along with the edge of the second wind deflector 52, as shown. Figure 6 As shown.

[0027] Solvent-based volatiles enter the collection box body 1 through the air inlet 21, then bypass the first baffle plate 51 and the second baffle plate 52 before being discharged from the air outlet 81. The flow path of the gas is extended by the bend in the air duct 9, and then the solvent-based volatiles in the air are cooled by the water-cooling pipe 3, causing them to condense and fall onto the oil collection tray 6. Finally, the oil collection tray 6 is removed for recycling. This method can significantly reduce the emission of harmful gases from the plant's pipelines, achieving clean emissions and environmental protection, while also facilitating the cleaning and replacement of the oil collection tray 6.

[0028] The present invention has been described above in conjunction with the preferred embodiments, but the present invention is not limited to the embodiments disclosed above, but should cover various modifications and equivalent combinations made in accordance with the essence of the present invention.

Claims

1. A water-cooled solvent collection box, characterized in that, The main body (1) of the collection box includes an air inlet (21) and an air outlet (81). The air inlet (21) of the collection box is used to connect with the exhaust pipe of the oven. The collection box is formed by a bent air duct (9) through a first baffle plate (51) and a second baffle plate (52) arranged at intervals. Water cooling pipes (3) are connected to both the first baffle plate (51) and the second baffle plate (52). A removable oil tray (6) is provided at the bottom of the inner cavity of the collection box.

2. The water-cooled solvent collection box according to claim 1, characterized in that, The main body (1) of the collection box is provided with a first air collecting hood (2) and a second air collecting hood (8) in the shape of cones at both ends. The air inlet (21) is provided on the first air collecting hood (2) and the air outlet (81) is provided on the second air collecting hood (8). The cross-sectional dimensions of both the air inlet (21) and the air outlet (81) are smaller than the cross-sectional dimensions of the main body (1) of the collection box.

3. The water-cooled solvent collection box according to claim 1, characterized in that, The drawer includes a drawer baffle (4), a first baffle (51) and a second baffle (52), both of which are connected to the drawer baffle (4) on one side. The side wall of the main body of the trap (1) has an opening. The first baffle (51) and the second baffle (52) extend into the inner cavity of the main body of the trap (1) from the opening in the side wall of the main body of the trap (1). The drawer baffle (4) is fastened to the outside of the opening in the side wall of the main body of the trap (1).

4. A water-cooled solvent collection box according to claim 3, characterized in that, Each of the first baffle plate (51) and the second baffle plate (52) is provided with a water-cooled pipe (3) arranged at intervals therebetween. The first baffle plate (51) and the water-cooled pipe (3) and the second baffle plate (52) and the water-cooled pipe (3) are connected by connectors (54). The water inlet and outlet of the water-cooled pipe (3) pass through the drawer baffle (4) and are located outside the main body (1) of the collection box.

5. A water-cooled solvent collection box according to claim 3, characterized in that, The water-cooled pipe (3) is provided with multiple bends (31).

6. A water-cooled solvent collection box according to claim 3, characterized in that, The two walls inside the main body (1) of the collection box are respectively provided with a first track (11) and a second track (12); the first track (11) is slidably engaged with one edge of the first baffle plate (51), and the other edge of the first baffle plate (51) away from the first track (11) is separated from the inner wall of the main body (1); the second track (12) is slidably engaged with one edge of the second baffle plate (52), and the other edge of the second baffle plate (52) away from the second track (12) is separated from the inner wall of the main body (1).

7. A water-cooled solvent collection box according to claim 6, characterized in that, The first track (11) and the second track (12) are both hollow tubes, and both are provided with strip grooves (13); the edge of the first baffle (51) is slidably engaged with the strip groove (13) on the first track (11), and the edge of the first baffle (51) is provided with a flange structure (53), and the flange structure (53) of the first baffle (51) slides into the first track (11) along with the edge of the first baffle (51); the edge of the second baffle (52) is slidably engaged with the strip groove (13) on the second track (12), and the edge of the second baffle (52) is provided with a flange structure (53), and the flange structure (53) of the second baffle (52) slides into the second track (12) along with the edge of the second baffle (52).

Images