Optical film surface image acquisition device and defect detection system

Abstract

The application provides an optical film surface image acquisition device and a defect detection system. The device comprises a rack, a conveying mechanism, a deflection light source and a first linear array camera. The conveying mechanism is arranged on the rack and is used for conveying the optical film. Part of the optical film can be driven along a first plane. The deflection light source is installed on the rack and is arranged on one side of the first plane. The deflection light source is used for projecting N-step phase-shifted fringe gratings to the surface of the optical film. The first linear array camera and the deflection light source are arranged on the same side of the first plane. The first linear array camera and the deflection light source are arranged on two sides of the normal line of the first plane. The positions of the first linear array camera and the deflection light source do not interfere with each other. The fringe gratings have obvious light and dark contrast. Therefore, the first linear array camera can accurately acquire the images of the fringe gratings, so that subsequent defect analysis can be performed.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of thin film detection, in particular to an optical thin film surface image acquisition device and a defect detection system. BACKGROUND

[0002] Imaging and defect detection of optical thin film is a key technology in optical manufacturing and quality control. With the wide application of optical thin film in the fields of semiconductor, display, photovoltaic, etc., the importance of visual detection technology in these industries is increasingly prominent. At present, the common technology is to use high-resolution line array camera and microscope lens to image the surface of optical thin film with high precision to detect micro defects. In this field, the image recognition algorithm is quite mature, but when acquiring the surface image of the optical thin film to be recognized, due to the insensitivity of bright-dark field imaging to surface defects, it is difficult to accurately capture the tiny defects on the surface of the optical thin film in the low-contrast imaging scene, and the imaging effect is not good, thereby greatly affecting the defect detection precision. Therefore, how to accurately acquire the surface image is a technical problem to be solved in this field. CONTENT OF THE INVENTION

[0003] The present application provides an optical thin film surface image acquisition device and a defect detection system, which can accurately capture tiny defects on the surface of the optical thin film.

[0004] The present application provides an optical thin film surface image acquisition device, which comprises:

[0005] a rack;

[0006] a conveying mechanism arranged on the rack and used for conveying an optical thin film, and a part of the optical thin film can be driven along a first plane;

[0007] a deflection light source mounted on the rack and arranged on one side of the first plane, the deflection light source being used for projecting N-step phase-shifted fringe gratings to the surface of the thin film;

[0008] a first line array camera arranged on the same side of the first plane as the deflection light source, and the two are arranged on two sides of the normal line of the first plane, and the first line array camera is used for acquiring images of the fringe gratings.

[0009] In some embodiments, the optical thin film surface image acquisition device further comprises:

[0010] a line scanning light source mounted on the rack and arranged on the side of the first plane away from the first line array camera, the line scanning light source being used for projecting a line light spot to the optical thin film;

[0011] The first line array camera is further used for acquiring images of the line light spot on the optical thin film.

[0012] In some embodiments, the optical thin film surface image acquisition device further includes:

[0013] A line scan light source is mounted on the frame and disposed on the side of the first plane away from the first line scan camera. The line scan light source is used to project a line spot onto the optical thin film.

[0014] A second line scan camera is disposed on the side of the first plane opposite to the first line scan camera. The second line scan camera is used to acquire images of the line light spots on the optical thin film.

[0015] In some embodiments, the optical thin film surface image acquisition device further includes:

[0016] The first mounting rod is arranged along the Z-axis and its upper end is located on the frame. The first mounting rod is located on the upper side of the first plane.

[0017] The first adjustment component has one end mounted on the first mounting rod and the other end used to mount the first line scan camera. The first adjustment component is used to adjust the angle between the optical axis of the first line scan camera and the first mounting rod.

[0018] In some embodiments, the optical thin film surface image acquisition device further includes:

[0019] The second mounting rod is arranged along the Z-axis and its lower end is located on the frame. The second mounting rod is located on the lower side of the first plane.

[0020] The second adjustment component has one end mounted on the second mounting rod and the other end used to mount the second line scan camera. The second adjustment component is used to adjust the angle between the optical axis of the second line scan camera and the second mounting rod.

[0021] In some embodiments, the first regulating component includes:

[0022] The first clamp is used to connect with the first mounting rod;

[0023] The first mounting component is located on the side of the first clamp;

[0024] A first connector is disposed on the first mounting member. The first connector is provided with a first arc-shaped hole for angle, and the center of the arc of the first arc-shaped hole is parallel to the Y-axis.

[0025] The first connecting rod is located on the side of the first connecting member;

[0026] A first mounting base is located at the end of the first connecting rod away from the first connecting member, and is used to mount the first line scan camera. The first connecting rod is rotatably mounted with the first mounting base, and the center of rotation is parallel to the X-axis.

[0027] In some embodiments, the second regulating component includes:

[0028] The second clamp is used to connect with the second mounting rod;

[0029] The second mounting component is located on the side of the second clamp;

[0030] The second connector is disposed on the second mounting member. The second connector is provided with a second arc-shaped hole for angle, and the center of the arc of the second arc-shaped hole is parallel to the Y-axis.

[0031] The second connecting rod is located on the side of the second connecting member;

[0032] The second mounting base is located at the end of the second connecting rod away from the second connecting member, and is used to mount the second line scan camera. The second connecting rod and the second mounting base are rotatably configured, and the rotation center is parallel to the X-axis.

[0033] In some embodiments, the conveying mechanism includes a plurality of rollers rotatably mounted on the frame and a drive member for driving the rollers to rotate, the optical film being wound around the rollers, and the first plane being tangent to two adjacent rollers.

[0034] In some embodiments, the conveying mechanism further includes an encoder and a controller;

[0035] The encoder is used to acquire the rotational speed information of the roller;

[0036] The controller is used to control the projection frequency of the deflection light source and the projection frequency of the line scan light source according to the rotation speed information.

[0037] This application also proposes an optical thin film defect detection system, including the aforementioned optical thin film surface image acquisition device and analysis device; the analysis device is used to analyze defects based on the image acquired by the image acquisition device.

[0038] This application discloses an optical thin film surface image acquisition device and a defect detection system. The device includes a frame, a conveying mechanism, a deflecting light source, and a first linear array camera. The conveying mechanism is mounted on the frame and is used to convey the optical thin film. A portion of the optical thin film can be moved along a first plane. The deflecting light source is mounted on the frame and located on one side of the first plane. The deflecting light source is used to project an N-step phase-shifted striped grating onto the thin film surface. The first linear array camera and the deflecting light source are located on the same side of the first plane, respectively on opposite sides of the normal of the first plane. Their positions do not interfere with each other. The striped grating exhibits obvious brightness and darkness contrast, thereby enabling the first linear array camera to accurately acquire images of the striped grating for subsequent defect analysis. Attached Figure Description

[0039] Figure 1 This is a schematic diagram of the structure of a thin film collection device in one embodiment of this application;

[0040] Figure 2 This is a schematic diagram of the structure of the second adjustment component in one embodiment of this application;

[0041] Figure 3 This is a schematic diagram of the structure of the first adjustment component in one embodiment of this application;

[0042] The purpose, features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0043] The solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments in this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0044] It should be noted that all directional indications in the embodiments of this application, such as up, down, left, right, front, back, etc., are only used to explain the relative positional relationship and movement of the components in a specific posture as shown in the attached figure. If the specific posture changes, the directional indication will also change accordingly.

[0045] It should also be noted that when a component is described as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component present. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component present.

[0046] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed in this application.

[0047] This application provides an optical thin-film acquisition device, referring to... Figure 1 and Figure 2The system includes: a frame 1; a conveying mechanism mounted on the frame 1 for conveying an optical thin film, wherein a portion of the optical thin film can be moved along a first plane; a deflecting light source 2 mounted on the frame 1 and positioned on one side of the first plane, the deflecting light source 2 for projecting an N-step phase-shifted fringe grating onto the thin film surface; and a first linear array camera 3, positioned on the same side of the first plane as the deflecting light source 2, with the two positioned on opposite sides of the normal to the first plane, the first linear array camera 3 for acquiring images of the fringe grating. In this embodiment, the positions of the first linear array camera 3 and the deflecting light source 2 do not interfere with each other, and the projected image of the fringe grating onto the optical thin film exhibits a clear contrast between light and dark. The first linear array camera can accurately acquire images of the fringe grating for subsequent defect analysis.

[0048] In this embodiment, the deflection light source 2 can be a high-speed LED deflection light source 2, which can quickly switch N-step phase patterns (0°, 120°, 240°). The light source power is 50-100W, and the projection angle is adjustable. The LED array is used to generate sinusoidal fringes, and the phase shift is achieved through current modulation, which can provide a stable light source to support high-precision three-dimensional imaging. The first linear array camera 3 is located on the upper side of the thin film and acquires surface images. The key to this invention is how to overcome the limitations of bright and dark field imaging, such as insensitivity to surface defects and difficulty in accurately capturing minute defects on the surface of optical thin films in low-contrast imaging scenarios, resulting in poor imaging effects and significantly affecting the accuracy of subsequent defect detection. Therefore, this invention proposes an image acquisition device with a reasonable configuration of the light source and camera.

[0049] Subsequently, the phase-shifted fringe image sequence can be analyzed using an N-step phase-shifting method to calculate the encapsulation phase, obtaining a phase map and modulation map characterizing the three-dimensional morphology of the thin film surface. The N-step phase-shifting algorithm takes N image sequences as input and outputs the phase map and modulation map (float32 format). Real-time calculation is supported (latency <20ms). The algorithm utilizes numerical calculation and parallel processing principles, and is based on trigonometric function optimization. It efficiently outputs morphology data, providing input for defect analysis. Surface defects on the thin film are detected by analyzing the phase map and modulation map. Detection accuracy reaches the micrometer level and is suitable for high-speed production lines. Specifically, the analysis device can employ any existing image recognition method to analyze the acquired images and identify defects.

[0050] In some embodiments, an optical thin film surface image acquisition device includes: a line scan light source 4, mounted on a frame 1 and disposed on a side of a first plane opposite to the first line scan camera 3; the line scan light source 4 is used to project a line spot onto the optical thin film; the first line scan camera 3 is also used to acquire an image of the line spot on the optical thin film. The line scan light source 4 may be a high-brightness line scan light source 4 (laser diode), which projects a narrow line spot (0.1-0.5 mm wide) onto the thin film surface. The direction of the light spot is perpendicular to the direction of film movement. The power of the high-brightness line scan light source 4 is adjustable, and its frequency is controlled based on a speed signal. The high-brightness line scan light source 4 uses uniform line light to penetrate the thin film, specifically designed for interlayer detection.

[0051] The line scan light source 4 can be positioned directly below the first line scan camera 3, acquiring the aforementioned light spot image through the first line scan camera 3. Specifically, after acquiring N images of the striped grating, a projected image is acquired. The first line scan camera 3 is a 2D line scan camera, which simultaneously acquires the transmission image. The light source strobe triggers the line scan camera to expose, acquiring a single image (transmission map). Synchronization is based on the velocity signal to ensure no motion blur. The intensity I(x,y) of the transmission image is equal to the light transmittance; the I value is abnormally low in defect areas. High-quality transmission maps can be obtained, the acquisition process adapts to high-speed motion, and the detection reliability is high. The analysis device analyzes the transmission image to detect thin film interlayer defects. Specifically, preprocessing can be performed first, cropping the image and labeling the defect type (such as bubbles, foreign objects). The defect location and category are output. The model is trained on the labeled dataset and automatically learns defect features (such as intensity changes). The lightweight design (MSSA-YOLOv8) ensures real-time performance. It can efficiently detect interlayer defects. Traditional manual methods are slow and prone to missing detections. In this step, the accuracy of the deep learning model is >95%, reducing false alarms.

[0052] In this embodiment, the analysis device can be used to perform time-division separation and recombination on the acquired N+1 images to obtain N phase-shifted fringe images and 1 transmission image. N is a positive integer greater than or equal to 3. Within one acquisition cycle, the device acquires a total of N+1 images (N from the fringe grating and 1 from the line scan spot). Time-division separation is based on timestamps or row data indexes to segment the image sequence. For example, the first N images are phase-shifted fringe images, and the N+1th image is the transmission image. The recombination process can use software algorithms (such as OpenCV) to package the N fringe images into a sequence, and the transmission image is output separately. The device alternately triggers the deflection light source 2 and the line scan light source 4 within a short time (10ms), and the line scan camera acquires data synchronously. The separation algorithm is based on image timestamps or content features (the fringe image has a periodic pattern, and the transmission image has a uniform spot). This reduces hardware requirements, and a single line scan camera can handle multimodal data. It can save equipment costs (no need for multi-line scan cameras) and simplify the device; in addition, it can improve data utilization, with N+1 images capturing surface and interlayer information completely; the reconstructed data can be directly used for defect analysis.

[0053] In some embodiments, an optical thin film surface image acquisition device includes: a line scan light source 4, mounted on a frame 1 and disposed on the side of a first plane away from the first line scan camera 3, the line scan light source 4 being used to project line spots onto the optical thin film; and a second line scan camera 5, disposed on the side of the first plane away from the first line scan camera 3, the second line scan camera 5 being used to acquire images of the line spots on the optical thin film. In this embodiment, the second line scan camera 5 is used specifically to acquire transmission images (images of line spots), and two line scan cameras independently acquire different types of images. The two line scan cameras are placed on opposite sides of the thin film, the principle of which is multi-view imaging, and the effect covers the surface and transmission detection. The dual line scan camera design improves throughput; time-division separation simplifies the device and reduces costs. The first line scan camera 33 is used to acquire stripe images, and the second line scan camera 55 is used to acquire transmission images. The roller, line scan camera, high-speed deflection light source 21, and line scan light source 44 can be mounted on the bracket 1, and the height and angle of the line scan camera are adjustable. The angle is the angle between the central axis of the field of view of the line scan camera and the vertical direction. Ideally, the angle is 0°. The height is adjusted so that the focus falls on the thin film.

[0054] In some embodiments, the first adjustment assembly 7 includes: a first clamp 71 for engaging with the first mounting rod 6; a first mounting member 72 disposed on the side of the first clamp 71; a first connecting member 73 disposed on the first mounting member 72, the first connecting member 73 having a first arc-shaped hole for angle adjustment, the center of the arc of the first arc-shaped hole being parallel to the Y-axis; a first connecting rod 74 disposed on the side of the first connecting member 73; and a first mounting base 75 disposed at the end of the first connecting rod 74 away from the first connecting member 73, for mounting the first line scan camera 3, the first connecting rod 74 being rotatably mounted to the first mounting base 72, and the center of rotation being parallel to the X-axis. The first line scan camera 3 can be oscillated around the three axes using the first adjustment assembly 7 to adjust the angle; after adjustment, the screws can be tightened. In addition, the first mounting rod 6 can be provided with a scale for easy height adjustment, the end face of the first clamp 71 can be provided with an angle scale, the mating surface of the first mounting part 72 and the first connecting part 73 can also be provided with an angle scale, and the mating surface of the first mounting base 75 and the first connecting rod 74 is provided with an angle scale. The above-mentioned angle scales facilitate angle adjustment.

[0055] In some embodiments, the second adjustment assembly includes: a second clamp for engaging with a second mounting rod; a second mounting member disposed on the side of the second clamp; a second connecting member disposed on the second mounting member, the second connecting member having a second arc-shaped hole for angle adjustment, the center of the arc of the second arc-shaped hole being parallel to the Y-axis; a second connecting rod disposed on the side of the second connecting member; and a second mounting base disposed at the end of the second connecting rod away from the second connecting member, for mounting the second line scan camera. The second connecting rod and the second mounting base are rotatably configured, and the rotation center is parallel to the X-axis. In this embodiment, the second line scan camera 5 can be oscillated around the three axes by the second adjustment assembly 9 to adjust the angle. After adjustment, the screws can be tightened. In addition, the second mounting rod can be provided with a scale for height adjustment, the end face of the second clamp can be provided with an angle scale, the mating surface of the second mounting member and the second connecting member can also be provided with an angle scale, and the mating surface of the second mounting base and the second connecting rod is provided with an angle scale. The aforementioned angle scales facilitate angle adjustment.

[0056] In some embodiments, the conveying mechanism includes multiple rollers rotatably mounted on a frame 1, and a drive component for driving the rollers to rotate. An optical film can be wound around the rollers, with its first plane tangent to two adjacent rollers. The conveying mechanism includes an encoder for acquiring the rotational speed information of the rollers. The conveying mechanism also includes a controller for controlling the projection frequency of the deflection light source 2 and the projection frequency of the line scan light source 4 based on the rotational speed information. In this embodiment, the encoder can be mounted on the rollers to measure the film linear velocity v (mm / s) in real time and generate a digital speed signal (PWM or CAN signal). The sampling rate is ≥1kHz. The encoder converts mechanical displacement into an electrical signal, which is processed by the controller (PLC) into a speed value. It can adapt to different production line speeds and control the projection frequency of the striped grating to prevent motion blur. Specifically, the strobe frequency of the deflection light source 2 is adjusted according to the speed signal. As the speed increases, the frequency increases to maintain the spatial sampling density. Closed-loop control principle. The frequency is linearly related to the speed, ensuring that the projection interval matches the film displacement. This prevents image stretching or blurring at high speeds; consistent projection accuracy and enhanced detection robustness are achieved. The controller controls the projection frequency of the line scan spot based on the speed signal. The line scan light source module 4 controls the frequency of the line scan light source 4 and dynamically adjusts the strobe, making the interlayer detection adaptable to high-speed lines. The control process is coordinated with the stripe grating control, thereby optimizing the control efficiency of the device.

[0057] In some embodiments, the optical thin film surface image acquisition device includes: a first mounting rod 6, arranged along the Z-axis with its upper end mounted on the frame 1, the first mounting rod 6 being located on the upper side of a first plane; and a first adjustment component 7, one end of which is mounted on the first mounting rod 6, and the other end of which is used to mount a first line scan camera 3, the first adjustment component 7 being used to adjust the angle between the optical axis of the first line scan camera 3 and the first mounting rod 6. Furthermore, the optical thin film surface image acquisition device includes: a second mounting rod 8, arranged along the Z-axis with its lower end mounted on the frame 1, the second mounting rod 8 being located on the lower side of the first plane; and a second adjustment component 9, one end of which is mounted on the second mounting rod 8, and the other end of which is used to mount a second line scan camera 5, the second adjustment component 9 being used to adjust the angle between the optical axis of the second line scan camera 5 and the second mounting rod 8. The height and angle of the line scan camera can be adjusted through the above adjustment structure to ensure clear imaging.

[0058] This application also proposes an optical thin film defect detection system, including the aforementioned optical thin film surface image acquisition device and analysis device; the analysis device is used to analyze defects based on the images acquired by the image acquisition device. It can detect defects on the thin film surface and in the interlayer, and analyze information such as defect type and location, with detection accuracy down to the micrometer level, and is suitable for high-speed production lines. In this embodiment, the analysis device specifically includes an image signal processor (ISP), connected to a first linear array camera and a second linear array camera, used for image preprocessing; a neural network processing unit (NPU), connected to the image signal processor, the NPU being pre-configured with a neural network model, used for feature extraction and recognition of the preprocessed image, and outputting the recognition result; a memory, connected to the NPU, used for storing parameters and intermediate data of the neural network model; and a communication interface, connected to the NPU, used for transmitting the recognition result to an external device.

[0059] The above are only some or preferred embodiments of this application. Neither the text nor the drawings should limit the scope of protection of this application. All equivalent structural transformations made using the content of this application's specification and drawings under the overall concept of this application, or direct / indirect applications in other related technical fields, are included within the scope of protection of this application. It should be noted that the above-mentioned thin film detection method and device belong to a general utility model concept, and the content of the above embodiments can be applied to each other.

[0060] The above are only some or preferred embodiments of this application. Neither the text nor the drawings should limit the scope of protection of this application. All equivalent structural transformations made using the content of this application's specification and drawings under the overall concept of this application, or direct / indirect applications in other related technical fields, are included within the scope of protection of this application.

Claims

1. An optical thin film surface image acquisition device, characterized in that, include: frame; A conveying mechanism, mounted on the frame, is used to convey an optical film, wherein a portion of the optical film is capable of moving along a first plane; A deflecting light source is mounted on the frame and disposed on one side of the first plane. The deflecting light source is used to project an N-step phase-shifted stripe grating onto the thin film surface. The first linear scan camera and the deflecting light source are located on the same side of the first plane, and are respectively located on opposite sides of the normal of the first plane. The first linear scan camera is used to acquire the image of the striped grating.

2. The optical thin film surface image acquisition device according to claim 1, characterized in that, Also includes: A line scan light source is mounted on the frame and disposed on the side of the first plane away from the first line scan camera. The line scan light source is used to project a line spot onto the optical thin film. The first line scan camera is also used to acquire images of the line spot on the optical thin film.

3. The optical thin film surface image acquisition device according to claim 1, characterized in that, Also includes: A line scan light source is mounted on the frame and disposed on the side of the first plane away from the first line scan camera. The line scan light source is used to project a line spot onto the optical thin film. A second line scan camera is disposed on the side of the first plane opposite to the first line scan camera. The second line scan camera is used to acquire images of the line light spots on the optical thin film.

4. The optical thin film surface image acquisition device according to claim 2, characterized in that, Also includes: The first mounting rod is arranged along the Z-axis and its upper end is located on the frame. The first mounting rod is located on the upper side of the first plane. The first adjustment component has one end mounted on the first mounting rod and the other end used to mount the first line scan camera. The first adjustment component is used to adjust the angle between the optical axis of the first line scan camera and the first mounting rod.

5. The optical thin film surface image acquisition device according to claim 3, characterized in that, Also includes: The second mounting rod is arranged along the Z-axis and its lower end is located on the frame. The second mounting rod is located on the lower side of the first plane. The second adjustment component has one end mounted on the second mounting rod and the other end used to mount the second line scan camera. The second adjustment component is used to adjust the angle between the optical axis of the second line scan camera and the second mounting rod.

6. The optical thin film surface image acquisition device according to claim 4, characterized in that, The first adjustment component includes: The first clamp is used to connect with the first mounting rod; The first mounting component is located on the side of the first clamp; A first connector is disposed on the first mounting member. The first connector is provided with a first arc-shaped hole for angle, and the center of the arc of the first arc-shaped hole is parallel to the Y-axis. The first connecting rod is located on the side of the first connecting member; A first mounting component is disposed at the end of the first connecting rod away from the first connecting component, and is used to mount a first line scan camera. The first connecting rod is rotatably configured with respect to the first mounting component, and the center of rotation is parallel to the X-axis.

7. The optical thin film surface image acquisition device according to claim 5, characterized in that, The second adjustment component includes: The second clamp is used to connect with the second mounting rod; The second mounting component is located on the side of the second clamp; The second connector is disposed on the second mounting member. The second connector is provided with a second arc-shaped hole for angle, and the center of the arc of the second arc-shaped hole is parallel to the Y-axis. The second connecting rod is located on the side of the second connecting member; The second mounting component is located at the end of the second connecting rod away from the second connecting member, and is used to mount the second line scan camera. The second connecting rod and the second mounting component are rotatably configured, and the center of rotation is parallel to the X-axis.

8. The optical thin film surface image acquisition device according to claim 7, characterized in that, The conveying mechanism includes a plurality of rollers rotatably mounted on the frame, and a drive member for driving the rollers to rotate. The optical film is capable of being wound around the rollers, and the first plane is tangent to two adjacent rollers.

9. The optical thin film surface image acquisition device according to claim 7, characterized in that, The transmission mechanism also includes an encoder and a controller; The encoder is used to acquire the rotational speed information of the roller; The controller is used to control the projection frequency of the deflection light source and the projection frequency of the line scan light source according to the rotation speed information.

10. An optical thin film defect detection system, characterized in that, The invention includes an optical thin film surface image acquisition device and an analysis device as described in any one of claims 1 to 9; the analysis device is used to analyze defects based on the image acquired by the image acquisition device.

Images