A multi-functional off-line x-ray inspection system

Abstract

The utility model relates to offline type X -ray detection system of multi -functional, including base, arc plate and the detection frame of connecting arc plate, the detection object is set up on the base, the arc plate is set up in the top of base vertically, the outer edge of arc plate away from base is convex arc guide surface, the detection frame is connected with the arc plate slidingly, the detection frame is provided with the driving roll and the first power source of connecting driving roll, the rolling surface of driving roll is connected with convex arc guide surface rolling, the detector is set up on the detection frame towards base, the utility model discloses through driving detection frame and sliding along the arc track of prearranging swing, ensure that the detection surface of detector always corresponds the detection object setting, the projection image of detector under the different position of arc track is always consistent, reduces the distortion of image. And only need to control "the position of detector along arc plate - detector exposure time" synchronization, simple logic.

Description

Technical Field

[0001] This utility model relates to the field of X-ray detection technology, and in particular to a multifunctional offline X-ray detection system. Background Technology

[0002] X-ray inspection can penetrate non-transparent objects and achieve non-destructive visualization of the internal structure of objects, making it a core means of non-destructive quality control in the semiconductor and 3C industries.

[0003] Conventional 2D image acquisition detection equipment uses a detector that moves laterally to obtain a 2D panoramic image of the object. However, when acquiring 2.5D and 3D images of an object, the detector needs to rotate around the object to obtain multi-view stitched data. Therefore, in addition to the conventional lateral movement of the detector, a Z-axis movement and self-rotation structure are also required to meet the requirement of the detector rotating around the object for detection. Multiple movement and rotation mechanisms significantly increase the structural complexity of the detection equipment, increase its cost, and increase the risk of failure. The complexity of the movement mechanism also increases the sources of error, affecting the accuracy of the detector during movement.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a multifunctional offline X-ray detection system to simplify the structure of the X-ray detection system.

[0006] The technical solution of this utility model is as follows: The multifunctional offline X-ray inspection system includes a base, an arc-shaped plate, and a detector frame connected to the arc-shaped plate. The object to be inspected is placed on the base. The arc-shaped plate is vertically positioned above the base. The outer edge of the arc-shaped plate, away from the base, has a convex arc guide surface. The detector frame is slidably connected to the arc-shaped plate. The detector frame is equipped with a drive roller and a first power source connected to the drive roller. The rolling surface of the drive roller is tactilely connected to the convex arc guide surface. A detector facing the base is mounted on the detector frame.

[0007] A further technical solution involves mounting a stage on the base. The object to be inspected is placed on the stage. A linear X-axis module is horizontally positioned between the stage and the base. The linear X-axis module slidably connects the stage and the base.

[0008] A further technical solution involves a support plate positioned between the stage and the base. An X-axis linear module is positioned between the support plate and the base. A Y-axis linear module is also laterally positioned between the support plate and the base. The Y-axis linear module is slidably connected to the support plate and the base. Both the X-axis and Y-axis linear modules can be screw-driven mechanisms.

[0009] A further technical solution involves setting an arc-shaped guide rail on the arc-shaped plate around its center to slide and connect the detection frame.

[0010] A further technical solution involves a transmission belt positioned on a convex circular arc guide surface around the center of the arc-shaped plate. A driven roller, co-directional with the driving roller, is mounted on the detector. The driving roller is positioned between the convex circular arc guide surface and the transmission belt. The driven roller is positioned on the side of the transmission belt furthest from the convex circular arc guide surface. The transmission belt simultaneously contacts both the driving roller and the driven roller.

[0011] A further technical solution involves a vertically mounted Z-axis linear module on the detection frame. The Z-axis linear module slidably connects the detection frame and the detector. The Z-axis linear module can be a lead screw drive mechanism.

[0012] A further technical solution involves using a high-frame-rate flat panel detector as the detector. Correspondingly, a microfocus X-ray source is mounted on the base.

[0013] A further technical solution involves vertically mounting a Z-axis linear module for the X-ray source on the base. The microfocus X-ray source is mounted on the Z-axis linear module. The Z-axis linear module can be a lead screw drive mechanism.

[0014] A further technical solution is that the lead screw transmission mechanism includes a transmission lead screw, a second power source connected to the transmission lead screw, and a sliding nut.

[0015] A further technical solution involves providing an outer casing. The base and the curved plate are housed within the outer casing. The curved plate connects to the outer casing.

[0016] The beneficial technical effects of this utility model are as follows: (1) The multifunctional offline X-ray detection system of this utility model has the object to be detected set on the base and detected by a detector on the detector frame. The detector frame is slidably connected to an arc plate, and the active roller on the detector frame is slidably connected to a convex arc guide surface to drive the detector frame to swing along the sliding plate along a preset arc trajectory. The swing of the detector frame along the preset arc trajectory ensures that the detection surface of the detector is always set to correspond to the object to be detected, and the projected image of the detector at different positions on the arc trajectory is always consistent, reducing image distortion. Moreover, the object to be detected can remain fixed during the movement of the detector, reducing the error caused by the movement of the object to be detected and ensuring detection accuracy. Furthermore, the detector moves along a preset single arc track, and during the detection process, it is only necessary to control the synchronization of "the position of the detector along the arc plate - the exposure time of the detector", which is simple in logic and improves the system response speed and detection efficiency.

[0017] (2) Furthermore, a linear X-axis module and a linear Y-axis module are provided between the stage and the base to adjust the position of the object to be detected laterally, thereby improving the flexibility of the multifunctional offline X-ray detection system. Moreover, the lateral movement of the object to be detected and the swing of the detector frame are driven by two independent mechanisms that do not interfere with each other. The movement of the object to be detected will not affect the positional accuracy of the detector, thus ensuring the detection accuracy of the multifunctional offline X-ray detection system.

[0018] (3) Furthermore, a drive belt is installed on the arc-shaped plate to connect the active roller. The drive belt flexibly contacts and adheres to the active roller, avoiding the problem of jamming and displacement caused by the rigid contact of the active roller with the arc-shaped plate, thereby ensuring the smooth and stable movement of the detector frame and ensuring the clarity of the detector imaging. At the same time, the load is evenly transmitted by the drive belt, extending the service life of the multifunctional offline X-ray detection system. Attached Figure Description

[0019] Figure 1 A front view of a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown.

[0020] Figure 2 A schematic diagram of the internal structure of a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown, with the outer casing hidden.

[0021] Figure 3 A schematic diagram of the assembly structure of the arc plate and the detector frame in a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown.

[0022] Figure 4 A schematic diagram of the screw drive mechanism in a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown.

[0023] Figure 5 A schematic diagram of the internal structure of a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown, with the outer casing hidden.

[0024] Figure 6 A schematic diagram of the assembly structure of cone-beam CT fixture and shelf in a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown.

[0025] Marked in the attached diagram: 1. Outer shell; 2. Base; 21. X-axis linear module of the table; 22. Support plate; 221. Y-axis linear module of the table; 23. Stage; 3. Arc plate; 31. Arc guide rail; 32. Convex arc guide surface; 33. Transmission belt; 4. Detector frame; 41. Drive roller; 411. First power source; 42. Driven roller; 43. Z-axis linear module of the detector; 5. Transmission screw; 51. Second power source; 52. Sliding nut; 53. Slide rail; 6. Detector; 7. Microfocus X-ray source; 71. Z-axis linear module of the X-ray source; 8. Cone-beam CT fixture; 81. Shelf. Detailed Implementation

[0026] To make the objectives, features, and advantages of this utility model more apparent and understandable, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the content disclosed herein. They are not intended to limit the implementation conditions of this utility model and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0027] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] Figure 1 A front view of a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown. Figure 2 A schematic diagram of the internal structure of a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown, with the outer casing hidden. Figure 3 A schematic diagram of the assembly structure of the arc plate and the detector frame in a multifunctional offline X-ray inspection system according to an embodiment of this disclosure is shown. Please refer to... Figure 1 , Figure 2 and Figure 3 The multifunctional offline X-ray inspection system includes a base 2, an arc-shaped plate 3, and a detector frame 4 connected to the arc-shaped plate 3. An object to be inspected is placed on the base 2, and the object is inspected by a detector 6 on the detector frame 4. The arc-shaped plate 3 is vertically positioned above the base 2. The outer edge of the arc-shaped plate 3 away from the base 2 is a convex arc guide surface 32. The detector frame 4 is slidably connected to the arc-shaped plate 3. An active roller 41 and a first power source 411 connected to the active roller 41 are mounted on the detector frame 4. The rolling surface of the active roller 41 is slidably connected to the convex arc guide surface 32. The active roller 41 moves along the convex arc guide surface 32 to drive the detector frame 4 to swing along a sliding plate along a preset arc trajectory. A detector 6 is mounted on the detector frame 4 facing the base 2. The swinging of the detector frame 4 along the preset arc trajectory ensures that the detection surface of the detector 6 always corresponds to the object to be inspected, and the projected image of the detector 6 at different positions on the arc trajectory remains consistent, reducing image distortion. Furthermore, the object being detected can remain fixed during the movement of detector 6, reducing errors caused by object movement and ensuring detection accuracy. Since detector 6 moves along a preset arc-shaped single track, the detection process only requires controlling the synchronization of "detector 6's position along the arc plate 3 - detector 6's exposure time," simplifying the logic and improving system response speed and detection efficiency.

[0029] Preferably, an outer casing 1 is also provided. The base 2 and the arc-shaped plate 3 are disposed inside the outer casing 1. The arc-shaped plate 3 is connected to the outer casing 1. The outer casing 1 can be made of lead plates to form a shielded lead room to shield ionizing radiation, prevent radiation leakage, and protect operators and the external environment.

[0030] Figure 5 A schematic diagram of the internal structure of a multifunctional offline X-ray inspection system according to an embodiment of the present disclosure is shown, with the outer casing hidden. Figure 6 A schematic diagram of the assembly structure of a cone-beam CT fixture and shelf in a multifunctional offline X-ray inspection system according to an embodiment of this disclosure is shown. Please refer to... Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6 A stage 23 is mounted on the base 2. The object to be inspected is placed on the stage 23. A platform X-axis linear module 21 is horizontally positioned between the stage 23 and the base 2. The platform X-axis linear module 21 slidably connects the stage 23 and the base 2. By adjusting the position of the object to be inspected along the X-axis using the platform X-axis linear module 21, the position of the object to be inspected can be adjusted for easier inspection.

[0031] Preferably, a support plate 22 is also provided between the stage 23 and the base 2. A stage X-axis linear module 21 is disposed between the support plate 22 and the base 2. A stage Y-axis linear module 221 is also laterally disposed between the support plate 22 and the base 2. The stage Y-axis linear module 221 is slidably connected to the support plate 22 and the base 2. The stage X-axis linear module 21 and the stage Y-axis linear module 221 can be screw drive mechanisms to laterally adjust the position of the object being inspected, improving the flexibility of the multifunctional offline X-ray inspection system. Furthermore, the lateral movement of the object being inspected and the swinging of the detector 4 are driven by two independent mechanisms that do not interfere with each other. The movement of the object being inspected will not affect the positional accuracy of the detector 6, ensuring the inspection accuracy of the multifunctional offline X-ray inspection system.

[0032] In some embodiments, a window is provided on the stage 23 and a shelf 81 is provided, on which a cone-beam CT fixture 8 is provided. The stage 23, the shelf 81, and the cone-beam CT fixture 8 can be bolted together. The cone-beam CT fixture 8 clamps the object to be inspected, and the axis of rotation of the cone-beam CT fixture 8 is arranged laterally. Specifically, the cone-beam CT fixture 8 can be a commercially available Zeiss OmniFix CT series rotary fixture. During inspection, the cone-beam CT fixture 8 can drive the object to be inspected to rotate around the axis of rotation along the horizontal line, so that the detector can acquire multi-angle images of the object to be stitched into a 3D view.

[0033] Please refer to Figure 1 , Figure 2 and Figure 3 Around the center of the arc plate 3, an arc-shaped guide rail 31 is provided on the arc plate 3 to slide and connect the probe frame 4. Specifically, a groove (not marked in the figure) is opened on the probe frame 4 for the arc-shaped guide rail 31 to be inserted into. A ball bearing (not shown in the figure) can be provided between the arc-shaped guide rail 31 and the groove to reduce the friction between the arc-shaped guide rail 31 and the groove.

[0034] Preferably, a transmission belt 33 is provided on the convex arc guide surface 32 around the center of the arc plate 3. The transmission belt 33 can be made of polyurethane. A driven roller 42 is provided on the detector 6, which is in the same direction as the active roller 41. The active roller 41 is located between the convex arc guide surface 32 and the transmission belt 33. The driven roller 42 is located on the side of the transmission belt 33 away from the convex arc guide surface 32. The transmission belt 33 contacts both the active roller 41 and the driven roller 42. The friction between the transmission belt and the active roller 41 and the driven roller 42 guides the active roller 41 to roll along the flange arc guide surface. The transmission belt 33 flexibly contacts and adheres to the active roller 41, avoiding the problem of jamming and displacement caused by the rigid contact of the active roller 41 with the arc plate 3, thereby ensuring the smooth and stable movement of the detector frame 4 and ensuring the clarity of the image of the detector 6. At the same time, the transmission belt 33 distributes the load evenly, extending the service life of the multifunctional offline X-ray detection system.

[0035] Please refer to Figure 1 , Figure 2 and Figure 3 A vertically mounted Z-axis linear module 43 is installed on the detector frame 4. The Z-axis linear module 43 slidably connects the detector frame 4 and the detector 6, allowing adjustment of the detector 6's position along the sliding direction of the Z-axis linear module 43 to accommodate detectors of different sizes and specifications. The Z-axis linear module 43 can be a lead screw drive mechanism.

[0036] Preferably, the detector 6 can be a commercially available high-frame-rate flat panel detector 6. Correspondingly, a microfocus X-ray source 7 is provided on the base 2. Specifically, during detection, the microfocus X-ray source 7 generates X-rays, the detector 6 captures the X-rays, and imaging is performed by utilizing the different absorption / scattering degrees of X-rays at different densities and thicknesses when the X-ray beam penetrates the object being detected. The detector 6 can be a commercially available Iray NDT / Mercu series high-frame-rate flat panel detector 6, and the microfocus X-ray source 7 can be a commercially available Iray Libra series microfocus X-ray source 7.

[0037] More preferably, a linear X-ray source Z-axis module 71 is vertically mounted on the base 2. A microfocus X-ray source 7 is mounted on the linear X-ray source Z-axis module 71, and its position can be adjusted along the sliding direction of the module, enhancing the flexibility of the multifunctional offline X-ray detection system. The linear X-ray source Z-axis module 71 can be a lead screw drive mechanism.

[0038] Figure 4 A schematic diagram of the screw drive mechanism in a multifunctional offline X-ray inspection system according to an embodiment of this disclosure is shown. Please refer to... Figure 2 , Figure 3 and Figure 4 The lead screw drive mechanism includes a lead screw 5, a second power source 51 connected to the lead screw 5, and a sliding nut 52. In some embodiments, the first power source 411 and the second power source 51 can be DC servo motors. The sliding nut 52 is restricted from rotation. The second power source 51 drives the lead screw 5 to rotate, thereby driving the sliding nut 52 to slide along the axis of the lead screw 5. Taking the Z-axis linear module 43 as an example, the lead screw 5 is rotatably mounted on the detector frame 4, and the detector 6 is connected to the sliding nut 52. The second power source 51 drives the lead screw 5 to rotate, driving the sliding nut 52 to move along the lead screw 5, thereby driving the detector 6 to move along the lead screw 5. In some embodiments, the lead screw drive mechanism may also include a slide rail 53, which is arranged parallel to the lead screw 5. Taking the Z-axis linear module 43 as an example, the slide rail 53 is mounted on the detector frame 4, and the detector 6 has a slot (not shown in the figure) to slide and connect to the slide rail 53, enhancing the stability of the connection between the detector 6 and the detector frame 4.

[0039] The specific workflow of this utility model is as follows: The inspector places the object to be inspected on the stage 23 and drives the stage 23 to move laterally via the X-axis linear module 21 and the Y-axis linear module 221 to adjust the object to the inspection position. The distance between the detector 6 and the object is adjusted via the Z-axis linear module 43. The detector 6 and the microfocus X-ray source 7 are then activated for inspection. At this time, the first power source 411 can be activated to drive the detector frame 4 to slide along the arc-shaped track, thereby driving the detector 6 to rotate around the object to acquire multi-view data.

[0040] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0041] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A multifunctional offline X-ray inspection system, characterized in that, The multifunctional offline X-ray detection system includes a base, an arc-shaped plate, and a detector frame connected to the arc-shaped plate; the object to be detected is placed on the base; the arc-shaped plate is vertically positioned above the base; the outer edge of the arc-shaped plate away from the base is a convex arc guide surface; the detector frame is slidably connected to the arc-shaped plate; the detector frame is equipped with an active roller and a first power source connected to the active roller; The rolling surface of the active roller is rolledly connected to the convex arc guide surface; a detector is provided on the detector frame facing the base.

2. The multifunctional offline X-ray detection system as described in claim 1, characterized in that: A stage is provided on the base; the object to be detected is placed on the stage; a platform X-axis linear module is arranged horizontally between the stage and the base; the platform X-axis linear module is slidably connected to the stage and the base.

3. The multifunctional offline X-ray detection system as described in claim 2, characterized in that: A support plate is also provided between the platform and the base; the X-axis linear module of the platform is disposed between the support plate and the base; a Y-axis linear module of the platform is also arranged laterally between the support plate and the base; the Y-axis linear module of the platform is slidably connected to the support plate and the base; the X-axis linear module and the Y-axis linear module of the platform can be lead screw drive mechanisms.

4. The multifunctional offline X-ray detection system as described in claim 1, characterized in that: The detector frame is slidably connected to an arc-shaped guide rail on the arc-shaped plate around its center.

5. The multifunctional offline X-ray detection system as described in claim 1, characterized in that: A transmission belt is provided on the convex arc guide surface around the center of the arc plate; a driven roller is provided on the detector in the same direction as the driving roller; the driving roller is located between the convex arc guide surface and the transmission belt; the driven roller is located on the side of the transmission belt away from the convex arc guide surface; the transmission belt simultaneously contacts the driving roller and the driven roller.

6. The multifunctional offline X-ray detection system as described in claim 1, characterized in that: The detection frame is vertically equipped with a detection Z-axis linear module; the detection Z-axis linear module is slidably connected to the detection frame and the detector; the detection Z-axis linear module can be a lead screw drive mechanism.

7. The multifunctional offline X-ray detection system as described in claim 1, characterized in that: The detector can be a high frame rate flat panel detector; correspondingly, a microfocus X-ray source is provided on the base.

8. The multifunctional offline X-ray detection system as described in claim 7, characterized in that: The base is vertically mounted with a Z-axis linear module for the X-ray source; the microfocus X-ray source is mounted on the Z-axis linear module for the X-ray source; the Z-axis linear module for the X-ray source can be a lead screw drive mechanism.

9. The multifunctional offline X-ray detection system as described in claim 3, 6, or 8, characterized in that: The lead screw transmission mechanism includes a lead screw, a second power source connected to the lead screw, and a sliding nut.

10. The multifunctional offline X-ray detection system as described in claim 1, characterized in that: It is also provided with an outer shell; the base and the arc-shaped plate are disposed inside the outer shell; the arc-shaped plate is connected to the outer shell.

Images