Ceramic substrate ultrasonic testing device

Abstract

The utility model provides a kind of ceramic substrate ultrasonic detection device, it includes ultrasonic detection mechanism, including pool, scanning detection subassembly, drive the scanning detection subassembly and move the scanning movement subassembly above pool, scanning movement subassembly includes the Y axis movement module of parallel being located pool both sides and the X axis movement module of erecting on Y axis movement module;Tray, for carrying substrate;Tray feed line, along X direction setting is located in one side of ultrasonic detection mechanism;Tray discharge line, along X direction setting is located in another side of ultrasonic detection mechanism;Move and place mechanism, for taking and placing tray on tray feed line to pool, and taking and placing tray in pool to discharge line, move and place mechanism includes the horizontal movement subassembly, vertical movement subassembly, horizontal rotating subassembly and gripper subassembly arranged in sequence;NG marking mechanism, is located above discharge line, for marking NG substrate on discharge line.

Description

Technical Field

[0001] This utility model relates to the field of ultrasonic testing, and in particular to an ultrasonic testing device for ceramic substrates. Background Technology

[0002] As a critical substrate for electronic devices, ceramic substrates are highly susceptible to defects such as bubbles and cracks, which directly impact product reliability and lifespan. Currently, the industry commonly employs manual methods for defect detection: operators immerse the substrate in a pool of corrosive etching solution, scan it with ultrasonic equipment, and then visually inspect the image and manually mark defects. This method suffers from several significant problems: operators are frequently exposed to corrosive liquids and wastewater, which can lead to health issues such as skin burns and respiratory damage with prolonged exposure; the manual handling, piece-by-piece inspection, and marking process is time-consuming and inefficient, making it difficult to meet the demands of large-scale production; manual visual inspection is susceptible to fatigue and experience-related factors, resulting in high rates of missed detections and misjudgments, and poor consistency in inspection results; and manual operation makes it difficult to achieve precise coordination between the material tray and the inspection equipment, leading to extended inspection cycles and increased energy consumption.

[0003] Therefore, it is necessary to design an ultrasonic testing device for ceramic substrates to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide an ultrasonic testing device for ceramic substrates that integrates automatic loading and unloading, detection, and defect marking. It has a high degree of automation, avoids the damage caused by manual operation, and improves the testing efficiency.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: an ultrasonic testing device for ceramic substrates, comprising... An ultrasonic testing mechanism includes a water tank, a scanning testing component, and a scanning moving component that moves the scanning testing component above the water tank. The scanning moving component includes a Y-axis moving module arranged parallel to both sides of the water tank and an X-axis moving module mounted on the Y-axis moving module. A tray used to hold substrates; The material tray feeding line is set along the X direction on one side of the ultrasonic testing mechanism; The material tray unloading line is set along the X direction on the other side of the ultrasonic testing mechanism; A transfer mechanism is used to pick up and place a tray from the tray feeding line into the water tank, and to pick up and place a tray from the water tank into the tray unloading line. The transfer mechanism includes a horizontal moving component, a vertical moving component, a horizontal rotating component, and a gripper component arranged in sequence. An NG marking mechanism is located above the feed line of the tray and is used to mark NG substrates on the feed line of the tray.

[0006] As a further improvement of the present invention, the gripper assembly includes a clamping cylinder and two grippers located below the horizontal rotating assembly, the grippers clamping the material tray from both sides of the tray.

[0007] As a further improvement of this utility model, the inner sides of the ends of the two grippers are respectively provided with horizontal support plates, and the two horizontal support plates are arranged opposite to each other.

[0008] As a further improvement of the present invention, the transfer mechanism further includes a limiting component, which is located below the horizontal rotating component. The limiting component rotates synchronously with the gripper component under the drive of the horizontal rotating component. The limiting component includes a plurality of vertically arranged mounting rods and a buffer pad located at the end of the mounting rods. When the gripper component clamps the material tray, the buffer pad abuts against the upper surface of the material tray.

[0009] As a further improvement of this utility model, the number of water pools is multiple, and they are arranged in a matrix.

[0010] As a further improvement of this utility model, the material trays are placed sequentially in the water tank along the Y-axis, and the length direction of each material tray is set along the X-axis.

[0011] As a further improvement of this utility model, the feed line of the material tray includes two parallel belts, and the length direction of the material tray is perpendicular to the moving direction of the material tray.

[0012] As a further improvement of this utility model, a linear module is provided below the material tray feeding line. The linear module is arranged along the Y-axis direction to drive the material tray feeding line to move along one side of the water tank.

[0013] As a further improvement of this utility model, the material tray feeding line includes two parallel belts, and the length direction of the material tray is perpendicular to the moving direction of the material tray.

[0014] As a further improvement of the present invention, the NG marking mechanism includes a bracket, a Y-axis linear module disposed on the bracket, a CCD positioning camera and a laser component disposed on the Y-axis linear module, wherein the CCD positioning camera and the laser component move synchronously on the Y-axis linear module.

[0015] As can be seen from the above technical solutions, this utility model significantly improves the efficiency, safety, and reliability of ceramic substrate testing through the following technical improvements: Fully automated process: The material tray feeding line and unloading line work together with the transfer mechanism to realize automatic loading and unloading of substrates without human intervention, avoiding personnel contact with corrosive liquids; the transfer mechanism integrates horizontal movement, vertical lifting, horizontal rotation and gripper components to accurately grab the material tray and transfer it to the inspection station, with smooth and efficient operation.

[0016] High detection accuracy: The ultrasonic testing mechanism uses a Y-axis moving module (set in parallel on both sides) and an X-axis moving module to drive the scanning and testing components to cover and scan along multiple paths in the XY plane above the water tank, ensuring no blind spots in the detection; the water tank can accommodate multiple sets of material trays for parallel detection, increasing the number of tests per unit time.

[0017] Precise defect marking: The NG marking mechanism is located on the side of the unloading line. It quickly identifies the location of defects through visual positioning and automatic marking module. The spray marking accuracy is high, avoiding the deviation of manual marking.

[0018] High product compatibility: The tray and transfer mechanism are highly adaptable and can be compatible with substrates of different sizes, reducing equipment modification costs. Attached Figure Description

[0019] Figure 1 This is a perspective view of an ultrasonic testing device for ceramic substrates according to an embodiment of the present invention.

[0020] Figure 2 for Figure 1 A 3D view of a medium-sized ultrasonic testing institution.

[0021] Figure 3 for Figure 1 A three-dimensional view of the transfer mechanism.

[0022] Figure 4 for Figure 3 Enlarged view of the rectangular section.

[0023] Figure 5 for Figure 3 Side view of the gripper component.

[0024] Figure 6 for Figure 1 A three-dimensional diagram of the NG marking mechanism in the image. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] Please refer to Figure 1 As shown, this utility model provides an ultrasonic testing device for ceramic substrates, which includes a material tray 100, a material tray feeding line 10, an ultrasonic testing mechanism 20, a transfer mechanism 30, a material tray unloading line 40, and an NG marking mechanism 50.

[0027] The tray 100 is used to carry the substrate. During the loading, unloading, inspection and marking processes of the substrate, the substrate is placed in the tray 100. In this embodiment, the tray 100 is rectangular, and multiple substrates are placed in a single row along the length of the tray 100.

[0028] The material tray feed line 10 is arranged along the X direction on one side of the ultrasonic testing mechanism 20. The material tray feed line 10 includes two parallel belts, and the length direction of the material tray 100 is perpendicular to the moving direction of the material tray 100, that is, the material tray is placed laterally on the two belts.

[0029] Please refer to Figure 2 As shown, the ultrasonic testing mechanism 20 includes a water tank, a scanning detection component 25, and a scanning moving component that moves the scanning detection component 25 above the water tank. There are multiple water tanks arranged in a matrix. In this embodiment, there are four water tanks arranged in a grid pattern: water tank 21a, water tank 21b, water tank 21c, and water tank 21d. Water tanks 21a and 21c are located near the material tray feed line 10, while water tanks 21b and 21d are located near the material tray unloading line 40. Water tanks 21a and 21c share a set of scanning moving components, as do water tanks 21b and 21d. Specifically, the scanning moving component includes a Y-axis moving module 22 parallel to both sides of the water tank, an X-axis moving module 23 mounted on the Y-axis moving module 22, and a Z-axis moving module 24 mounted on the X-axis moving module 23. The scanning detection component 25 is mounted on the Z-axis moving module 24. Each Y-axis movement module 22 is equipped with four X-axis movement modules 23.

[0030] Below the material tray feeding line 10, there is also a linear module set along the Y-axis. The linear module drives the material tray feeding line 10 to move along one side of the water tank and connect with the water tank 21a and the water tank 21c in sequence.

[0031] The transfer mechanism 30 is used to pick up and place trays from the tray feeding line 10 into the water tank, and to pick up and place trays from the water tank into the tray unloading line 40. Please refer to... Figures 3 to 5As shown, the transfer mechanism 30 includes a horizontal moving component (including an X-axis linear module 31 and a Y-axis linear module 32), a vertical moving component 33, a horizontal rotating component 34, a gripper assembly 36, and a limiting component 37 arranged sequentially. The horizontal rotating component 34 includes a motor 342, a motor mounting plate 341, and a rotating shaft 343. A mounting plate 35 is provided below the rotating shaft 343. The gripper assembly 36 includes a clamping cylinder 361 mounted on the mounting plate 35 and two grippers 362 driven by the clamping cylinder 361. The grippers 362 clamp the material tray from both sides of the material tray 100. A horizontal support plate is provided on the inner side of the end of the gripper 362, and the horizontal support plates of the two grippers 362 are arranged opposite each other. In this embodiment, the material trays are placed sequentially in the water tank along the Y-axis direction, and the length direction of each material tray is arranged along the X-axis. Therefore, after the transfer mechanism 30 clamps the material tray on the material tray feed line 10, it rotates 90° and places it in the water tank.

[0032] The limiting component 37 is located below the mounting plate 35. Under the drive of the horizontal rotation component 34, the limiting component 37 rotates synchronously with the gripper component 36. The limiting component 37 includes a plurality of vertically arranged mounting rods 371 and a buffer pad 372 located at the end of the mounting rods 371. When the gripper component 36 grips the material tray, the buffer pad 372 abuts against the upper surface of the material tray 100.

[0033] The material feeding line 40 includes two parallel belts, with the length of the material tray perpendicular to its direction of movement. The material feeding line is positioned along the X-axis on the other side of the ultrasonic testing mechanism. Below the material feeding line 40, a linear module is also provided along the Y-axis. This linear module drives the entire material feeding line 40 to move along one side of the water tank, sequentially docking with water tanks 21b and 21d.

[0034] An NG marking mechanism 50 is located above the tray unloading line 40 and is used to mark NG substrates on the tray unloading line 40. Please refer to... Figure 6 As shown, the NG marking mechanism 50 includes a bracket 51, a Y-axis linear module 52 mounted on the bracket 51, a CCD positioning camera 53 mounted on the Y-axis linear module 52, and a laser component 54. The CCD positioning camera 53 and the laser component 54 move synchronously on the Y-axis linear module 52.

[0035] The working process of the ultrasonic testing device for ceramic substrates of this invention is as follows: 1. The material tray feeding line is connected to the front-end equipment. The material tray carries the product flow to the end of the material tray feeding line and is positioned. The linear module drives the material tray feeding line to move to one side of the water tank 21a or water tank 21b. 2. The transfer mechanism picks up the tray containing the product to be tested from the tray feeding line and places it in water tanks 21a and 21b (or water tanks 21c and 21d). Four trays are placed in each water tank. After two water tanks are filled each time, the scanning detection component starts ultrasonic testing. 3. When the scanning and detection component detects water tanks 21a and 21b, the tray of the tray feed line moves to the side of water tank 21c. The transfer mechanism then picks up the tray containing the product to be tested from the tray feed line and places it into water tanks 21c and 21d. Conversely, when the scanning and detection component detects water tanks 21c and 21d, the tray of the tray feed line moves to the side of water tank 21a. The transfer mechanism then picks up the tray containing the product to be tested from the tray feed line and places it into water tanks 21a and 21b. 4. After the test is completed, the transfer mechanism 2 clamps the tested tray and places it into the tray unloading line; 5. Products with OK test results are placed in a tray and flow directly to the downstream equipment via the tray unloading line; products with NG test results are placed in a tray and transported to the NG marking mechanism for marking via the tray unloading line.

[0036] The terms used herein, such as “up,” “down,” “front,” “back,” “left,” and “right,” indicating relative spatial positions, are for illustrative purposes to describe the relationship of one feature relative to another, as shown in the accompanying drawings. It is understood that, depending on the product's placement, these terms may be intended to include different orientations besides those shown in the figures, and should not be construed as limiting the claims.

[0037] Furthermore, the above embodiments are only used to illustrate the present utility model and are not intended to limit the technical solutions described in the present utility model. The understanding of this specification should be based on those skilled in the art. Although the present utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still make modifications or equivalent substitutions to the present utility model. All technical solutions and improvements that do not depart from the spirit and scope of the present utility model should be covered within the scope of the claims of the present utility model.

Claims

1. An ultrasonic testing device for ceramic substrates, characterized in that: include An ultrasonic testing mechanism includes a water tank, a scanning testing component, and a scanning moving component that moves the scanning testing component above the water tank. The scanning moving component includes a Y-axis moving module arranged parallel to both sides of the water tank and an X-axis moving module mounted on the Y-axis moving module. A tray used to hold substrates; The material tray feeding line is set along the X direction on one side of the ultrasonic testing mechanism; The material tray unloading line is set along the X direction on the other side of the ultrasonic testing mechanism; A transfer mechanism is used to pick up and place a tray from the tray feeding line into the water tank, and to pick up and place a tray from the water tank into the tray unloading line. The transfer mechanism includes a horizontal moving component, a vertical moving component, a horizontal rotating component, and a gripper component arranged in sequence. An NG marking mechanism is located above the feed line of the tray and is used to mark NG substrates on the feed line of the tray.

2. The ultrasonic testing device for ceramic substrates as described in claim 1, characterized in that: The gripper assembly includes a clamping cylinder and two grippers located below the horizontal rotating assembly. The grippers clamp the material tray from both sides.

3. The ultrasonic testing device for ceramic substrates as described in claim 2, characterized in that: The inner sides of the ends of the two grippers are respectively provided with horizontal support plates, and the two horizontal support plates are arranged opposite to each other.

4. The ultrasonic testing device for ceramic substrates as described in claim 3, characterized in that: The transfer mechanism also includes a limiting component, which is located below the horizontal rotating component. The limiting component rotates synchronously with the gripper component under the drive of the horizontal rotating component. The limiting component includes multiple vertically arranged mounting rods and a buffer pad located at the end of the mounting rods. When the gripper component clamps the material tray, the buffer pad abuts against the upper surface of the material tray.

5. The ultrasonic testing device for ceramic substrates as described in claim 1, characterized in that: There are multiple pools, arranged in a matrix.

6. The ultrasonic testing device for ceramic substrates as described in claim 5, characterized in that: The material trays are placed sequentially along the Y-axis in the water tank, and the length direction of each material tray is set along the X-axis.

7. The ultrasonic testing device for ceramic substrates as described in claim 1, characterized in that: The feed line for the material tray includes two parallel belts, and the length direction of the material tray is perpendicular to the direction of movement of the material tray.

8. The ultrasonic testing device for ceramic substrates as described in claim 1, characterized in that: A linear module is also provided below the material tray feeding line. The linear module is set along the Y-axis to drive the material tray feeding line to move along one side of the water tank.

9. The ultrasonic testing device for ceramic substrates as described in claim 1, characterized in that: The feeding line of the material tray includes two parallel belts, and the length direction of the material tray is perpendicular to the direction of movement of the material tray.

10. The ultrasonic testing device for ceramic substrates as described in claim 1, characterized in that: The NG marking mechanism includes a support, a Y-axis linear module mounted on the support, a CCD positioning camera and a laser assembly mounted on the Y-axis linear module, and the CCD positioning camera and laser assembly move synchronously on the Y-axis linear module.

Images