A product probe crimping device

Abstract

The utility model relates to electronic device testing equipment technical field discloses a product probe crimping device, is equipped with multi -angle accurate regulation, accurate positioning, each mechanism collaborative control's function. The utility model discloses a rack, clamping mechanism, including mounting seat and first adjusting assembly, and mounting seat is located at the rack, and first adjusting assembly is used for driving mounting seat to move along x direction, Y direction and rotates around Z direction, objective lens mechanism, is located at the top of mounting seat, crimping mechanism, including probe card, second adjusting assembly and third adjusting assembly, and probe card is located at the rack, and second adjusting assembly is used for driving probe card to rotate around x direction and rotates around Y direction, and third adjusting assembly is used for driving probe card to move along Z direction.

Description

Technical Field

[0001] This utility model relates to the field of electronic device testing equipment technology, and in particular to a product probe crimping device. Background Technology

[0002] With the rapid development of microelectronics technology, the integration level of electronic devices continues to increase, and the electrode / pin spacing is constantly shrinking (reaching the micrometer or even nanometer level), placing extremely stringent requirements on the positioning accuracy, angle adaptability, and visual coordination capabilities of probe crimping devices. However, existing probe crimping devices have the following significant shortcomings in practical applications: Insufficient clamping mechanism adjustment: It can only move the mounting base along the x and Y directions, and lacks rotation adjustment around the Z direction, which makes it difficult to meet the multi-dimensional and precise alignment requirements of precision workpieces, and is prone to crimping failure due to angular deviation. The objective lens mechanism has a single function: it only has basic imaging function, it cannot establish a product coordinate system to assist alignment by recognizing workpiece MARK points, and it cannot pre-screen appearance defects such as pin deformation, which affects the reliability of crimping. The crimping mechanism lacks fine-tuning: the angle adjustment dimension is singular, and it cannot simultaneously achieve multi-dimensional fine-tuning of the probe card swinging left and right around the x-axis and pitching around the y-axis, which is prone to probe misconnection or electrode damage. Poor coordination among mechanisms: Clamping, vision, and pressing mechanisms operate independently, relying on manual intervention or separate control, resulting in low efficiency and difficulty in ensuring consistent accuracy across multiple stages. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a product probe crimping device, which has the functions of multi-angle precise adjustment, precise positioning, and coordinated control of various mechanisms.

[0004] On one hand, the product probe crimping device according to an embodiment of the present invention includes: frame; The clamping mechanism includes a mounting base and a first adjustment component. The mounting base is disposed on the frame, and the first adjustment component is used to drive the mounting base to move along the x-direction and the Y-direction and to rotate about the Z-direction. The objective lens mechanism is located above the mounting base; The crimping mechanism includes a probe card, a second adjustment component, and a third adjustment component. The probe card is mounted on the frame. The second adjustment component is used to drive the probe card to rotate about the x-direction and about the Y-direction. The third adjustment component is used to drive the probe card to move along the Z-direction.

[0005] According to some embodiments of the present invention, the second adjustment component includes: A first support is provided on the frame, and the first support is provided with a first drive arm; The second bracket is rotatably mounted on the first bracket. The second bracket has a first rotating arm and a second driving arm. The first rotating arm is driven to rotate by the first driving arm. The second bracket can rotate around the x-direction based on the first bracket. The third bracket is rotatably mounted on the second bracket. The third bracket has a second rotating arm. The second rotating arm is driven to rotate by the second driving arm. The third bracket can rotate around the Y-direction based on the second bracket. The probe is mounted on the third bracket.

[0006] According to some embodiments of the present invention, the first rotating arm extends a first extension portion from its first rotating axis, and the first driving arm abuts against the end of the first extension portion away from the first rotating axis. The second rotating arm extends a second extension portion from its second rotating axis, and the second driving arm abuts against the end of the second extension portion away from the second rotating axis.

[0007] According to some embodiments of the present invention, the first drive arm includes a first screw, which is threadedly connected to the first bracket, and the first screw can drive the first rotating arm to rotate. The second drive arm includes a second screw, which is threadedly connected to the second bracket, and the second screw can drive the second rotating arm to rotate.

[0008] According to some embodiments of the present invention, the first adjustment component includes a UVW alignment platform, and the mounting base is disposed on the UVW alignment platform.

[0009] According to some embodiments of this utility model, the mounting base is provided with multiple adsorption holes, and the adsorption holes are connected to a negative pressure power component.

[0010] According to some embodiments of the present invention, a plurality of the adsorption pore arrays are distributed on the mounting base.

[0011] According to some embodiments of the present invention, the objective lens mechanism includes multiple lenses, and the multiple lenses have different magnifications.

[0012] According to some embodiments of the present invention, the objective lens mechanism further includes a fourth adjustment component, which is used to drive the lens to move along the x-direction or the Y-direction.

[0013] According to some embodiments of the present invention, the clamping mechanism further includes a fifth adjustment component, which is used to drive the mounting base to move closer to or away from the crimping mechanism along the x-direction, or to drive the mounting base to move closer to or away from the crimping mechanism along the Y-direction.

[0014] The embodiments of this utility model have at least the following beneficial effects: The mounting base is used to support precision workpieces such as MicroOLED modules, micro sensor chips, and wafers. The first adjustment component drives it to move along the x and Y directions and rotate around the Z direction, so as to realize the multi-dimensional precise alignment of the workpiece in the spatial coordinate system and build a positioning reference for the subsequent pressing process.

[0015] The objective lens mechanism combines precise alignment with defect screening: Identify workpiece MARK points and establish a product coordinate system to achieve visual-level spatial alignment between the workpiece and the probe card; Imaging product details allows for screening of appearance defects (such as pin deformation and surface scratches) before crimping, providing visual evidence for crimping and subsequent verification.

[0016] The second adjustment component (rotating around the x and Y directions) drives the probe card to achieve fine-tuning of the left-right and pitch swing angles, so that the probe array and the workpiece electrode / pin array are completely aligned in space, avoiding probe misconnection or electrode damage caused by angular misalignment.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the overall structure of the probe crimping device of this utility model embodiment; Figure 2 for Figure 1 An enlarged schematic diagram of part A is shown; Figure 3 for Figure 1 An enlarged schematic diagram of part B is shown; Figure 4 for Figure 1 An enlarged schematic diagram of section C is shown.

[0019] Figure label: Clamping mechanism 200 Second adjustment component 420 Mounting base 210 Second support 422 First adjustment component 220 Second drive arm 422A Fifth adjustment component 230 Third support 423 Objective lens mechanism 300 Second rotating arm 423A crimping mechanism 400 Second extension 423B Detailed Implementation

[0020] The following will describe several embodiments of the present invention, including embodiments corresponding to the accompanying drawings. It should be understood that the drawings are used to assist in understanding the technical features and technical solutions of the present invention, and should not be construed as limiting the scope of protection of the present invention.

[0021] The following will provide a clear and complete description of the concept, specific structure, and technical effects of this utility model in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, solution, and effects of this utility model. It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0022] It should be noted that, unless otherwise explicitly defined, when a feature is referred to as "fixed," "connected," or "installed" on another feature, it can be directly fixed or connected to the other feature, or it can be indirectly fixed or connected to the other feature. The terms "fixed," "connected," and "installed" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0023] It should be noted that the descriptions of orientations or positional relationships indicated by terms such as up, down, left, right, top, bottom, front, back, inside, and outside used in this utility model are based on the orientations or positional relationships indicated by the accompanying drawings or embodiments. They are only for the purpose of facilitating the description of this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] It should be noted that the term "and / or" used in this utility model includes any combination of one or more of the related listed items, "several" means one or more, "multiple" means two or more, "greater than", "less than", "exceeding" are understood to exclude the number itself, and "above", "below", "within" are understood to include the number itself.

[0025] It should be noted that the use of "first" and "second" in this utility model is only for the purpose of distinguishing technical features, and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features indicated, or implicitly indicating the order of the technical features indicated.

[0026] It should be noted that, unless otherwise expressly defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in this specification is for the purpose of describing particular embodiments only and not for limiting the scope of the invention.

[0027] Reference Figures 1-4 The basic embodiment of the first aspect of this utility model provides a product probe crimping device, including: a frame; The clamping mechanism includes a mounting base and a first adjustment component. The mounting base is disposed on the frame, and the first adjustment component is used to drive the mounting base to move along the x-direction and the Y-direction and to rotate about the Z-direction. The objective lens mechanism is located above the mounting base; The crimping mechanism includes a probe card, a second adjustment component, and a third adjustment component. The probe card is mounted on the frame. The second adjustment component is used to drive the probe card to rotate around the x-direction and around the Y-direction. The third adjustment component is used to drive the probe card to move along the Z-direction.

[0028] According to embodiments of this utility model, by such a configuration, at least the following effects can be achieved: The mounting base is used to support precision workpieces such as MicroOLED modules, micro sensor chips, and wafers. The first adjustment component drives it to move along the x and Y directions and rotate around the Z direction, so as to realize the multi-dimensional precise alignment of the workpiece in the spatial coordinate system and build a positioning reference for the subsequent pressing process.

[0029] The objective lens mechanism combines precise alignment with defect screening: Identify workpiece MARK points and establish a product coordinate system to achieve visual-level spatial alignment between the workpiece and the probe card; Imaging product details allows for screening of appearance defects (such as pin deformation and surface scratches) before crimping, providing visual evidence for crimping and subsequent verification.

[0030] The second adjustment component (rotating around the x and Y directions) drives the probe card to achieve fine-tuning of the left-right and pitch swing angles, so that the probe array and the workpiece electrode / pin array are completely aligned in space, avoiding probe misconnection or electrode damage caused by angular misalignment.

[0031] The third adjustment component (moving along the Z direction): drives the probe card to complete the crimping action, avoiding overpressure damage to the workpiece or insufficient crimping, and ensuring the consistency and reliability of the electrical connection.

[0032] Through a streamlined collaborative process of "positioning → visual inspection → angle adaptation → crimping execution," various components achieve precise end-to-end control from spatial alignment to electrical connection. This is suitable for ultra-precision applications such as MicroOLEDs, micro-sensors, and wafer fabrication, replacing manual operations and improving crimping yield and efficiency.

[0033] It should be noted that, unless otherwise specified, the power structure in the device is generally a common rotary motor or cylinder structure, and conventional power structures will not be described in detail hereafter.

[0034] In some embodiments, the second regulating component includes: The first support is mounted on the frame, and the first support is equipped with a first drive arm; The second bracket is rotatably mounted on the first bracket. The second bracket is provided with a first rotating arm and a second driving arm. The first rotating arm is driven to rotate by the first driving arm, and the second bracket can rotate around the x-direction based on the first bracket. The third bracket is rotatably mounted on the second bracket. The third bracket is equipped with a second rotating arm, which is driven to rotate by the second drive arm. The third bracket can rotate around the Y direction based on the second bracket, and the probe is mounted on the third bracket.

[0035] In this configuration, the second adjustment component adopts a hierarchical rotation structure of "first bracket - second bracket - third bracket," constructing independent adjustment links around the x and Y directions. This avoids interference from single-axis adjustment on the other axis, enabling independent and coordinated fine calibration of the probe card angle. The first bracket is not shown in the attached diagram, but its connection structure can be referenced from the second and third brackets. The first bracket is fixed to the frame 100, and its rotational connection with the second bracket 422 (e.g., through bearings or rotating shafts) is consistent with the rotational connection structure of the second bracket 422 and the third bracket 423.

[0036] In some embodiments, the first rotating arm extends a first extension from its first rotation axis, and the first driving arm abuts against the end of the first extension away from the first rotation axis. The second rotating arm 423A extends a second extension 423B from its second rotation axis, and the second driving arm 422A abuts against the end of the second extension 423B away from the second rotation axis. The design of the extensions of the first and second rotating arms amplifies the lever arm effect, resulting in a smaller rotation angle for the driving arm over the same moving distance. This effectively "amplifies" the angle adjustment precision, meeting the stringent requirements of micron-level electrode alignment.

[0037] Furthermore, to ensure stable contact between the drive arm and the rotating arm, the output ends of the first and second drive arms can be equipped with magnetic structures. These magnetic structures can attract the corresponding first or second rotating arm, keeping the drive arm and the rotating arm connected. To ensure stable contact between the drive arm and the rotating arm, the first bracket is also equipped with a first elastic reset member. The first drive arm, the first rotating arm, and the first elastic reset member are arranged sequentially along the radial direction of the rotating arm. The first drive arm drives the first rotating arm to rotate, and the first elastic reset member drives the first rotating arm to approach the first drive arm through elastic force, keeping the first drive arm and the first rotating arm in contact. Similarly, the second bracket is also equipped with a second elastic reset member. The second drive arm, the second rotating arm, and the second elastic reset member are arranged sequentially along the radial direction of the second rotating arm, maintaining stable contact between the second drive arm and the second rotating arm through elastic force.

[0038] In some embodiments, the first drive arm includes a first screw threadedly connected to a first bracket, and the first screw is capable of driving the first rotating arm to rotate. The second drive arm includes a second screw threadedly connected to a second bracket, and the second screw is capable of driving the second rotating arm to rotate.

[0039] The screw structure can be referenced from the micrometer screw of a micrometer. A micrometer screw is a metal rod with precision threads, and its pitch is usually 0.5 mm or 1 mm. When the screw rotates in the threaded sleeve of the fixed sleeve, it will move forward or backward along the axial direction. For example, if the pitch is 0.5 mm, the axial displacement of the screw is 0.5 mm for each revolution.

[0040] In some embodiments, the first adjustment component includes a UVW alignment platform, on which a mounting base is disposed. The UVW alignment platform is a high-precision three-axis parallel motion mechanism that, through the coordinated control of three linear axes (U, V, W), achieves translation in the X / Y directions and rotation along the θz axis within a plane, flexibly completing rotation and translation in any direction centered at any point. Its core advantages lie in its high precision, high rigidity, and compact structure, making it widely used in fields with stringent positional alignment requirements, such as semiconductors, panel manufacturing, and photovoltaics.

[0041] It should be noted that the first adjustment component may also consist of at least two linear motion power structures (linear motor, telescopic motor or cylinder) and one rotary power structure (rotary motor).

[0042] When the first adjustment component adopts the UVW alignment platform, its three-axis parallel motion structure reduces transmission backlash and improves the synchronization accuracy of X / Y translation and Z-rotation compared to the traditional "multi-power component combination" scheme. Its high rigidity characteristics are more suitable for scenarios with extremely high positioning stability requirements, such as semiconductor and panel manufacturing. The scheme that combines linear and rotary power components provides flexible options for scenarios with different budgets and accuracy requirements. Both schemes can meet the multi-dimensional positioning requirements of precision workpieces, demonstrating the flexibility of the device in adapting to different scenarios.

[0043] In some embodiments, the mounting base is provided with multiple adsorption holes, which are connected to a negative pressure power component. The multiple adsorption holes are arrayed on the mounting base. This arrayed distribution of adsorption holes disperses negative pressure and also accommodates workpieces of different sizes for pressing. The multiple adsorption holes on the mounting base, connected to the negative pressure power component, form a negative pressure adsorption fixing structure, enabling "non-destructive fixing" of thin, easily deformable workpieces such as MicroOLEDs, avoiding workpiece deformation caused by mechanical clamping. The arrayed design of the adsorption holes, on the one hand, evenly distributes the negative pressure force, further improving fixing stability; on the other hand, by selectively opening adsorption holes in different areas, with the adsorption holes connected to the negative pressure power component via partitioned air paths and independently controlling the start and stop of each area with solenoid valves, the adsorption holes in the corresponding areas can be selectively opened according to the workpiece size, adapting to multiple workpiece specifications without changing the mounting base.

[0044] In some embodiments, the objective lens mechanism 300 includes multiple lenses with different magnifications. The objective lens mechanism also includes a fourth adjustment component for driving the lenses to move along the x-direction or the y-direction. The fourth adjustment component can selectively use different lenses to move onto the workpiece. The configuration of multiple magnification lenses allows the objective lens mechanism to flexibly switch according to inspection needs: low-magnification lenses can quickly capture the overall contour of the workpiece, enabling rapid positioning of MARK points; high-magnification lenses can clearly present electrode details, surface scratches, and other minute defects, meeting the layered requirements of "coarse positioning - fine inspection." Furthermore, the fourth adjustment component driving the lenses to move along the X / Y directions enables rapid docking of different magnification lenses with the workpiece inspection area, allowing for full-process inspection without manual lens switching, significantly improving inspection efficiency.

[0045] In some embodiments, the clamping mechanism 200 further includes a fifth adjustment component, which is used to drive the mounting base 210 to move closer to or away from the pressing mechanism 400 in the x-direction, or to drive the mounting base 210 to move closer to or away from the pressing mechanism 400 in the Y-direction. The fifth adjustment component added to the clamping mechanism (distinct from the fifth adjustment component of the pressing mechanism) solves the spatial conflict between "workpiece storage and retrieval" and "pressing positioning" in traditional equipment by driving the mounting base closer to or away from the pressing mechanism: when storing or retrieving the workpiece, driving the mounting base away provides sufficient space for manual or robotic operation, improving operational safety and convenience; when pressing, driving the mounting base closer shortens the stroke for objective lens positioning and probe pressing, improving overall process efficiency. The two mounting position options (frame-first adjustment component-mounting base, or frame-first adjustment component-fifth adjustment component-mounting base) can be flexibly selected according to actual needs such as frame layout and space dimensions, improving the flexibility of structural design without affecting core functions.

[0046] It should be noted that in this specification, terms such as "one embodiment", "some embodiments", "basic embodiment", and "extended embodiment" may be used to describe several embodiments of the present invention, and the specific features, structures, materials or characteristics of the several embodiments may be combined in accordance with the principles and spirit of the present invention.

[0047] Although some embodiments of the present utility model have been shown and described in this specification, the present utility model should not be limited to the above embodiments. As long as they achieve the technical effects of the present utility model by the same or equivalent means, any changes, modifications, equivalent substitutions and equivalent variations of these embodiments within the spirit and principles disclosed in the present utility model, without departing from the principles and purpose of the present utility model, should be included within the scope of protection disclosed in the present utility model and should be considered to fall within the protection scope of the present utility model.

Claims

1. A product probe crimping device, characterized in that, include: Rack (100); The clamping mechanism (200) includes a mounting base (210) and a first adjustment component (220). The mounting base (210) is disposed on the frame (100), and the first adjustment component (220) is used to drive the mounting base (210) to move along the x direction and the Y direction and rotate about the Z direction. The objective lens mechanism (300) is located above the mounting base (210); The crimping mechanism (400) includes a probe card (410), a second adjustment component (420), and a third adjustment component. The probe card (410) is disposed on the frame (100). The second adjustment component (420) is used to drive the probe card (410) to rotate about the x-direction and about the Y-direction. The third adjustment component is used to drive the probe card (410) to move along the Z-direction.

2. The product probe crimping device according to claim 1, characterized in that: The second adjustment component (420) includes: A first support is provided on the frame (100), and the first support is provided with a first drive arm; The second bracket (422) is rotatably mounted on the first bracket. The second bracket (422) is provided with a first rotating arm and a second driving arm (422A). The first rotating arm is driven to rotate by the first driving arm. The second bracket (422) can rotate around the x-direction based on the first bracket. The third bracket (423) is rotatably mounted on the second bracket (422). The third bracket (423) is provided with a second rotating arm (423A), which is driven to rotate by the second driving arm (422A). The third bracket (423) can rotate around the Y direction based on the second bracket (422). The probe card (410) is mounted on the third bracket (423).

3. The product probe crimping device according to claim 2, characterized in that: The first rotating arm extends a first extension from its first rotating axis, and the first driving arm abuts against the end of the first extension away from the first rotating axis. The second rotating arm (423A) extends a second extension (423B) from its second rotating axis, and the second driving arm (422A) abuts against the end of the second extension (423B) away from the second rotating axis.

4. The product probe crimping device according to claim 2, characterized in that: The first drive arm includes a first screw, which is threadedly connected to the first bracket. The first screw can drive the first rotating arm to rotate. The second drive arm (422A) includes a second screw, which is threadedly connected to the second bracket (422). The second screw can drive the second rotating arm (423A) to rotate.

5. The product probe crimping device according to claim 1, characterized in that: The first adjustment component (220) includes a UVW alignment platform, and the mounting base (210) is disposed on the UVW alignment platform.

6. The product probe crimping device according to claim 1, characterized in that: The mounting base (210) is provided with multiple adsorption holes, which are connected to a negative pressure power component.

7. The product probe crimping device according to claim 6, characterized in that: Multiple adsorption pore arrays are distributed on the mounting base (210).

8. The product probe crimping device according to claim 1, characterized in that: The objective lens mechanism (300) includes multiple lenses, each having a different magnification.

9. The product probe crimping device according to claim 8, characterized in that: The objective lens mechanism (300) further includes a fourth adjustment component, which is used to drive the lens to move along the x-direction or the Y-direction.

10. The product probe crimping device according to claim 1, characterized in that: The clamping mechanism (200) further includes a fifth adjustment component, which is used to drive the mounting base (210) to move closer to or away from the crimping mechanism (400) in the x direction, or to drive the mounting base (210) to move closer to or away from the crimping mechanism (400) in the Y direction.

Images