A dual micro-positioning imaging device

Abstract

The utility model discloses a kind of double micro-positioning imaging devices, belong to microscopic measurement technical field, including double optical path imaging unit and camera, light emitted by first light source reaches reflector through first light splitting prism, after being reflected by reflector, it is irradiated to first to be measured element through first objective lens, the light reflected by first to be measured element returns to first light splitting prism by original road, after being reflected by first light splitting prism to third light splitting prism, it is imaged by camera again by third light splitting prism reflection;The light emitted by second light source is imaged to pentagonal prism by second light splitting prism reflection, after being reflected by pentagonal prism multiple times, it is irradiated to second to be measured element through second objective lens, the light reflected by second to be measured element returns to second light splitting prism by original road, in turn, it is imaged by camera after passing through second light splitting prism, third light splitting prism reaches. The device is favorable to improve work efficiency and the assembly qualified rate between to be measured element.

Description

Technical Field

[0001] This utility model belongs to the field of microscopic measurement technology, specifically relating to a dual-microscopic alignment imaging device. Background Technology

[0002] In the field of electronic equipment manufacturing, component alignment accuracy is one of the core parameters affecting product quality. Currently, the industry commonly uses manual visual inspection or mechanical positioning devices for component bonding. However, traditional methods often have the following drawbacks: 1) Manual visual inspection is heavily influenced by operator experience, is highly subjective, and prone to fatigue, leading to poor consistency in inspection results; while mechanical positioning devices, although providing basic positioning, cannot provide real-time feedback on actual alignment deviations, making it difficult to meet micron-level accuracy requirements. This results in insufficient bonding accuracy, leading to decreased product yield, such as short circuits or signal interference caused by chip pin misalignment; secondly, repeated bonding causes low production efficiency, with approximately 30% of production time in traditional processes spent on alignment adjustments. These technical bottlenecks severely restrict the large-scale production of high-density electronic devices (such as MEMS sensors and chips), necessitating the development of a non-contact, high-precision, real-time feedback alignment inspection device. Utility Model Content

[0003] The purpose of this invention is to address the above-mentioned problems by proposing a dual-microscopic alignment imaging device, which is beneficial to improving work efficiency and the assembly qualification rate between the components under test.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] This utility model proposes a dual-microscopic alignment imaging device, comprising a dual-optical-path imaging unit and a camera, wherein:

[0006] The dual-light-path imaging unit includes a first light source, a first beam splitter, a mirror group, a first objective lens, a second light source, a second beam splitter, a pentagonal prism, a second objective lens, and a third beam splitter. The mirror group includes a reflector.

[0007] The light emitted by the first light source passes through the first beam splitter and reaches the reflector. After being reflected by the reflector, it passes through the first objective lens and illuminates the first device under test. The light reflected by the first device under test returns to the first beam splitter along the original path, is reflected by the first beam splitter to the third beam splitter, and is then reflected by the third beam splitter to the camera for imaging, thus forming the first light path.

[0008] The light emitted by the second light source is reflected by the second beam splitter to the pentagonal prism. After being reflected multiple times by the pentagonal prism, it passes through the second objective lens and illuminates the second test element. The light reflected by the second test element returns to the second beam splitter along the same path, and then passes through the second beam splitter and the third beam splitter in sequence to reach the camera for imaging, thus forming the second light path.

[0009] Preferably, the dual-beam imaging unit further includes a frame, in which the first beam splitter, the mirror group, the second beam splitter, the pentagonal prism, and the third beam splitter are all built into the frame.

[0010] Preferably, the dual-microscopic alignment imaging device further includes an adjustment unit, which includes a fixed base, a two-axis moving unit, a connecting base, a first ranging probe, and a second ranging probe. The two-axis moving unit is connected to the fixed base and is used to drive the connecting base to move along the optical axis of the second objective lens and the optical axis of the camera. The optical axis of the second objective lens and the optical axis of the camera are perpendicular to each other. The first ranging probe is connected to the fixed base and is used to detect the distance of the first element under test along the optical axis of the first objective lens. The second ranging probe is connected to the connecting base and is used to detect the distance of the second element under test along the optical axis of the second objective lens. The frame is connected to the fixed base.

[0011] Preferably, the connector is further provided with a first through hole, the second objective lens is mounted on the connector and coaxially arranged with the first through hole, and the frame is provided with a second through hole and a third through hole arranged coaxially, the second through hole and the first through hole being coaxially arranged, and the first objective lens is mounted on the frame and coaxially arranged with the third through hole.

[0012] Preferably, the reflector assembly further includes an adjustment seat and a mounting seat. The reflector is connected to the mounting seat, and the adjustment seat is connected to the frame and used to adjust the mounting seat, thereby adjusting the reflection angle of the reflector.

[0013] Preferably, the dual-microscopic alignment imaging device further includes an imaging lens group, which includes a lens mount, a fixed lens tube and a telescopic lens tube arranged coaxially. The lens mount is connected to the frame, and the two ends of the fixed lens tube are respectively connected to the frame and the lens mount. A lens group is also coaxially arranged inside the fixed lens tube. The two ends of the telescopic lens tube are respectively connected to the lens mount and the camera. The light rays emitted from the third beam splitter pass through the fixed lens tube and the telescopic lens tube in sequence to reach the camera.

[0014] Preferably, the telescopic lens barrel includes a first sleeve and a second sleeve connected by threads, the first sleeve being connected to the lens mount and the second sleeve being connected to the camera; the lens group includes a first lens and a second lens glued together.

[0015] Preferably, the first objective lens and the second objective lens are arranged back to back, the light emitted by the first light source and the optical axis of the second objective lens are parallel to each other, and the light emitted by the second light source and the optical axis of the fixed lens tube are parallel to each other.

[0016] Preferably, the dual-beam imaging unit further includes a retaining plate, which is built into the frame and used to abut and limit the first beam splitter and the second beam splitter.

[0017] Preferably, the dual-microscopic alignment imaging device further includes a water-cooling unit and a temperature probe, with the water-cooling unit connected to the frame and the temperature probe built into the frame.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0019] This device utilizes optical microscopy imaging principles to achieve high-precision simultaneous inspection of multiple components under test (DUTs). By incorporating ranging, temperature measurement, and water cooling functions, its practical application scenarios are expanded. It enables high-precision alignment inspection between DUTs requiring bonding, resulting in high work efficiency. Specifically, the ranging probe monitors the distance to the DUTs in real time, achieving automatic focusing for DUT observation and preventing damage to both the DUTs and the device during operation through non-contact methods. It also detects the relative offset angle and displacement between DUTs requiring bonding, significantly improving the assembly pass rate. The combination of a temperature probe and water cooling unit reduces the device's operating temperature, ensuring its lifespan and imaging quality, while also catering to a wider range of working environments, making it versatile. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the dual-microscopic alignment imaging device of this utility model from the first perspective.

[0021] Figure 2 This is a schematic diagram of the second perspective of the dual-microscopic alignment imaging device of this utility model;

[0022] Figure 3 This is a front view of the dual-microscopic alignment imaging device of this utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the adjustment unit of this utility model;

[0024] Figure 5 This is a schematic diagram of the optical path of the dual-microscopic alignment imaging device of this utility model.

[0025] Explanation of reference numerals in the attached drawings: 1. Adjustment unit; 2. Dual-path imaging unit; 3. Imaging lens group; 4. Camera; 5. Water-cooling unit; 6. Temperature probe; 7. First element under test; 8. Second element under test; 9. Contact plate; 11. Fixing base; 12. Two-axis moving unit; 13. Connecting base; 14. First ranging probe; 15. Second ranging probe; 21. Frame; 22. First light source; 23. First beam splitter prism; 24. Reflector group; 25. First objective lens; 26. Second light source; 27. Second beam splitter prism; 28. Pentagonal prism; 29. ​​Second objective lens; 30. Third beam splitter prism; 31. Lens base; 32. Fixed lens tube; 33. Telescopic lens tube; 131. First through hole; 241. Adjustment base; 242. Mounting base; 243. Reflector; 321. Lens group; IMA, Image plane. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0027] It should be noted that when a component is referred to as being "connected" to another component, it can be directly connected to the other component or there may be an intervening component. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application.

[0028] like Figure 1-5 As shown, a dual-microscopic alignment imaging device includes a dual-optical-path imaging unit 2 and a camera 4, wherein:

[0029] The dual-light-path imaging unit 2 includes a first light source 22, a first beam splitter 23, a mirror group 24, a first objective lens 25, a second light source 26, a second beam splitter 27, a pentagonal prism 28, a second objective lens 29, and a third beam splitter 30. The mirror group 24 includes a reflector 243.

[0030] The light emitted by the first light source 22 passes through the first beam splitter 23 and reaches the reflector 243. After being reflected by the reflector 243, it passes through the first objective lens 25 and illuminates the first test element 7. The light reflected by the first test element 7 returns to the first beam splitter 23 along the original path, and is reflected by the first beam splitter 23 to the third beam splitter 30. Then, it is reflected by the third beam splitter 30 to the camera 4 for imaging, thus forming the first optical path.

[0031] The light emitted by the second light source 26 is reflected by the second beam splitter 27 to the pentagonal prism 28. After being reflected multiple times by the pentagonal prism 28, it passes through the second objective lens 29 and illuminates the second test element 8. The light reflected by the second test element 8 returns to the second beam splitter 27 along the original path, and then passes through the second beam splitter 27 and the third beam splitter 30 in sequence to reach the camera 4 for imaging, forming the second optical path.

[0032] In this embodiment, the orientation description refers to... Figure 3With the optical axis of the first objective lens 25 as the Z-direction (vertical direction) and the optical axis of the camera lens 4 as the X-direction (horizontal direction), and the Y-direction (front-back direction) perpendicular to both the X and Z directions, the first objective lens 25 and the second objective lens 29 are positioned vertically. For example, the first objective lens 25 may be located below the second objective lens 29, and the first objective lens 25 and the second objective lens 29 may be positioned back-to-back. The first element under test 7 may be located below the first objective lens 25, and the second element under test 8 may be located above the second objective lens 29. The specific orientation can be adjusted according to actual needs.

[0033] This dual-microscopic alignment imaging device can be used in fields such as electronic equipment manufacturing and processing, such as pin bonding between electronic components. Specifically, the first device under test (DUT) 7 and the second DUT 8 can be different electronic chips that need to be bonded. The first light source 22 and the second light source 26 can be coaxial LED light sources, or they can be adjusted according to actual needs. The pentagonal prism 28 can be an independent pentagonal prism, or it can be covered with a light-shielding shell. Only the surface of the light-shielding shell facing the second objective lens 29 and the second beam splitter 27 has a clearance hole to allow light to pass smoothly. The light emitted by the second light source 26 is reflected by the second beam splitter 27 to the pentagonal prism 28, undergoes two reflections within the pentagonal prism 28, and then passes through the second objective lens 29 to illuminate the second DUT 8. The specific light path of this device is as follows: Figure 5 As shown, IMA stands for image plane (the imaging plane of camera 4). Figure 5 The solid line represents the first optical path, and the dashed line represents the second optical path. For the overlapping light rays reaching the camera 4 from the third beam splitter 30, solid lines are used. In one embodiment, the dual-optical-path imaging unit 2 further includes a frame 21, in which the first beam splitter 23, the mirror group 24, the second beam splitter 27, the pentagonal prism 28, and the third beam splitter 30 are all housed.

[0034] Among them, frame 21 can be a rectangular frame diagram with a light-shielding environment ( Figure 1 (Only the frame with the cover plate removed is shown in the image). The first beam splitter 23, the reflector group 24, the second beam splitter 27, the pentagonal prism 28, and the third beam splitter 30 are all housed within the frame 21, which helps ensure image quality. The light-shielding shell covering the pentagonal prism 28 can be fixedly connected to the frame 21. The first beam splitter 23, the second beam splitter 27, and the third beam splitter 30 are fixedly connected to the frame 21 via beam splitter mounting brackets. For example, the first beam splitter 23, the reflector group 24, the second beam splitter 27, the pentagonal prism 28, and the third beam splitter 30 are all mounted on the inner rear wall of the frame 21.

[0035] In one embodiment, the dual-microscopic alignment imaging device further includes an adjustment unit 1. The adjustment unit 1 includes a fixed base 11, a two-axis moving unit 12, a connecting base 13, a first ranging probe 14, and a second ranging probe 15. The two-axis moving unit 12 is connected to the fixed base 11 and is used to drive the connecting base 13 to move along the optical axis of the second objective lens 29 and the optical axis of the camera 4. The optical axis of the second objective lens 29 and the optical axis of the camera 4 are perpendicular to each other. The first ranging probe 14 is connected to the fixed base 11 and is used to detect the distance of the first element under test 7 along the optical axis of the first objective lens 25. The second ranging probe 15 is connected to the connecting base 13 and is used to detect the distance of the second element under test 8 along the optical axis of the second objective lens 29. The frame 21 is connected to the fixed base 11. The first ranging probe 14 and the second ranging probe 15 can be infrared ranging probes, or they can be replaced with other ranging probes in the prior art.

[0036] The adjustment unit 1 can be installed on the robotic arm, which drives the dual-microscopic alignment imaging device to move and dock with the first test element 7 and the second test element 8 for detection.

[0037] In one embodiment, the connecting seat 13 is further provided with a first through hole 131, the second objective lens 29 is mounted on the connecting seat 13 and is coaxially arranged with the first through hole 131, the frame 21 is provided with a second through hole and a third through hole coaxially arranged, the second through hole and the first through hole 131 are coaxially arranged, and the first objective lens 25 is mounted on the frame 21 and is coaxially arranged with the third through hole.

[0038] In one embodiment, the reflector assembly 24 further includes an adjustment seat 241 and a mounting seat 242. The reflector 243 is connected to the mounting seat 242, and the adjustment seat 241 is connected to the frame 21 and used to adjust the mounting seat 242, thereby adjusting the reflection angle of the reflector 243. The adjustment seat 241 may consist of a connecting plate and several screws. The screws are threadedly connected to the connecting plate, and the adjusting screws abut against the mounting seat 242 to achieve fine-tuning, thereby adjusting the relative angle between the optical axes of the reflector 243 and the first objective lens 25. Alternatively, the adjustment seat 241 can be replaced with any adjustment mechanism in the prior art, with the reflector 243 perpendicular to the rear wall of the frame 21.

[0039] In one embodiment, the dual-microscopic alignment imaging device further includes an imaging lens group 3, which includes a lens base 31, a fixed lens tube 32 and a telescopic lens tube 33 arranged coaxially. The lens base 31 is connected to the frame 21. The two ends of the fixed lens tube 32 are respectively connected to the frame 21 and the lens base 31. A lens group 321 is also coaxially arranged inside the fixed lens tube 32. The two ends of the telescopic lens tube 33 are respectively connected to the lens base 31 and the camera 4. The light rays emitted from the third beam splitter 30 pass through the fixed lens tube 32 and the telescopic lens tube 33 in sequence to reach the camera 4.

[0040] The lens mount 31 is connected and fixed to the frame 21 to improve the installation stability of the fixed lens barrel 32 and the telescopic lens barrel 33, thereby ensuring the structural stability of the camera 4.

[0041] In one embodiment, the telescopic lens barrel 33 includes a first sleeve and a second sleeve connected by threads, the first sleeve being connected to the lens mount 31 and the second sleeve being connected to the camera 4; the lens group 321 includes a first lens and a second lens glued together.

[0042] The telescopic lens barrel 33 allows for fine-tuning of the focal length to ensure image quality and adapt to different cameras 4.

[0043] In one embodiment, the first objective lens 25 and the second objective lens 29 are arranged back to back, the light emitted by the first light source 22 and the optical axis of the second objective lens 29 are parallel to each other, and the light emitted by the second light source 26 and the optical axis of the fixed lens barrel 32 are parallel to each other.

[0044] The first objective lens 25 and the second objective lens 29 are arranged back to back, that is, both the first objective lens 25 and the second objective lens 29 face outwards, respectively for observing the first test element 7 and the second test element 8. The light emitted by the first light source 22 and the optical axis of the second objective lens 29 are parallel to each other, and the light emitted by the second light source 26 and the optical axis of the fixed lens tube 32 are parallel to each other. The specific distribution positions can be adjusted according to actual needs.

[0045] In one embodiment, the dual-optical-path imaging unit 2 further includes a retaining plate 9, which is built into the frame 21 and used to abut and limit the first beam splitter 23 and the second beam splitter 27.

[0046] The first beam splitter 23 and the second beam splitter 27 are fixedly connected to the frame 21, and can be further abutted and limited by the abutment plate 9 to improve the installation accuracy.

[0047] In one embodiment, the dual-microscopic alignment imaging device further includes a water-cooling unit 5 and a temperature probe 6. The water-cooling unit 5 is connected to the frame 21, and the temperature probe 6 is built into the frame 21.

[0048] The temperature probe 6 is installed inside the frame 21, preferably near the rear wall of the frame 21. The water cooling unit 5 is preferably located between the frame 21 and the adjustment unit 1, also near the rear wall of the frame 21, to maximize contact with the frame 21 and improve heat dissipation efficiency. When the detected temperature exceeds the preset threshold, the water cooling device 5 is activated.

[0049] Working principle:

[0050] The first light source 22 and the second light source 26 are connected to a computer via a light source controller. The camera 4, water-cooling unit 5, temperature probe 6, and infrared ranging probe are also connected to the computer. The computer adjusts the brightness and on / off status of the first light source 22 and the second light source 26 via the light source controller, and receives real-time data from the camera 4, water-cooling unit 5, temperature probe 6, and infrared ranging probe. During operation, the infrared ranging probe is activated to monitor the distance between the dual-microscopic alignment imaging device and the first and second measured elements 7 and 8, and collects distance data in real time. The dual-microscopic alignment imaging device stops moving when a preset distance is reached. At this time, the computer turns on the first light source 22 and the second light source 26 through the light source controller, illuminating the first test element 7 and the second test element 8. That is, the light emitted by the first light source 22 passes through the first beam splitter 23 and reaches the reflector 243. After being reflected by the reflector 243, it passes through the first objective lens 25 and illuminates the first test element 7. The light reflected by the first test element 7 returns to the first beam splitter 23 and is reflected by the first beam splitter 23 to the third beam splitter 30. Then, it is reflected by the third beam splitter 30 to the camera 4 for imaging. The light emitted by the second light source 26 is reflected by the second beam splitter 27 to the pentagonal prism 28. After being reflected multiple times by the pentagonal prism 28, it passes through the second objective lens 29 and illuminates the second test element 8. The light reflected by the second test element 8 returns to the second beam splitter 27 and passes through the second beam splitter 27 and the third beam splitter 30 in sequence to reach the camera 4 for imaging. Imaging is performed using a microscope objective, and the first and second components under test (DUTs) 7 and 8 are observed in real time on a computer. Detection parameters such as rotation angle and center position of DUTs 7 and 8 are recorded, allowing a robotic arm to adjust their alignment and bonding based on these parameters. In high-temperature environments, DUTs 7 and 8, along with their associated equipment (such as welding machines), continuously release heat. Since these components are primarily optical, they are highly susceptible to environmental temperature fluctuations, potentially causing irreversible damage and affecting the device's measurement accuracy. A temperature probe monitors the device's operating temperature in real time. When the set operating temperature is exceeded, a water-cooling unit activates to lower the operating temperature, ensuring lifespan and imaging quality, thereby guaranteeing high assembly accuracy for DUTs 7 and 8.

[0051] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0052] The embodiments described above are merely specific and detailed examples of the embodiments described in this application, and should not be construed as limiting the scope of the application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these modifications and improvements all fall within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the appended claims.

Claims

1. A dual-microscopic alignment imaging device, characterized in that: It includes a dual-optical-path imaging unit (2) and a camera (4), wherein: The dual-light-path imaging unit (2) includes a first light source (22), a first beam splitter (23), a mirror group (24), a first objective lens (25), a second light source (26), a second beam splitter (27), a pentagonal prism (28), a second objective lens (29), and a third beam splitter (30). The mirror group (24) includes a reflector (243). The light emitted by the first light source (22) passes through the first beam splitter (23) and reaches the reflector (243). After being reflected by the reflector (243), it passes through the first objective lens (25) and illuminates the first test element (7). The light reflected by the first test element (7) returns to the first beam splitter (23) along the original path, and is reflected by the first beam splitter (23) to the third beam splitter (30). Then, it is reflected by the third beam splitter (30) to the camera (4) for imaging, forming the first optical path. The light emitted by the second light source (26) is reflected by the second beam splitter (27) to the pentagonal prism (28). After being reflected multiple times by the pentagonal prism (28), the light passes through the second objective lens (29) and illuminates the second test element (8). The light reflected by the second test element (8) returns to the second beam splitter (27) along the original path and then passes through the second beam splitter (27) and the third beam splitter (30) in sequence to reach the camera (4) for imaging, forming the second optical path.

2. The dual-microscopic alignment imaging device as described in claim 1, characterized in that: The dual-beam imaging unit (2) also includes a frame (21), in which the first beam splitter (23), the mirror group (24), the second beam splitter (27), the pentagonal prism (28), and the third beam splitter (30) are all built into the frame (21).

3. The dual-microscopic alignment imaging device as described in claim 2, characterized in that: The dual-microscopic alignment imaging device further includes an adjustment unit (1), which includes a fixed base (11), a two-axis moving unit (12), a connecting base (13), a first ranging probe (14), and a second ranging probe (15). The two-axis moving unit (12) is connected to the fixed base (11) and is used to drive the connecting base (13) to move along the optical axis of the second objective lens (29) and the optical axis of the camera (4). The optical axis of the second objective lens (29) and the optical axis of the camera (4) are perpendicular to each other. The first ranging probe (14) is connected to the fixed base (11) and is used to detect the distance of the first test element (7) along the optical axis of the first objective lens (25). The second ranging probe (15) is connected to the connecting base (13) and is used to detect the distance of the second test element (8) along the optical axis of the second objective lens (29). The frame (21) is connected to the fixed base (11).

4. The dual-microscopic alignment imaging device as described in claim 3, characterized in that: The connecting seat (13) is also provided with a first through hole (131). The second objective lens (29) is mounted on the connecting seat (13) and coaxially arranged with the first through hole (131). The frame (21) is provided with a second through hole and a third through hole arranged coaxially. The second through hole and the first through hole (131) are coaxially arranged. The first objective lens (25) is mounted on the frame (21) and coaxially arranged with the third through hole.

5. The dual-microscopic alignment imaging device as described in claim 2, characterized in that: The reflector assembly (24) further includes an adjustment seat (241) and a mounting seat (242). The reflector (243) is connected to the mounting seat (242). The adjustment seat (241) is connected to the frame (21) and is used to adjust the mounting seat (242), thereby adjusting the reflection angle of the reflector (243).

6. The dual-microscopic alignment imaging device as described in claim 2, characterized in that: The dual-microscopic alignment imaging device further includes an imaging lens group (3), which includes a lens mount (31), a fixed lens tube (32) and a telescopic lens tube (33) arranged coaxially. The lens mount (31) is connected to the frame (21). The two ends of the fixed lens tube (32) are connected to the frame (21) and the lens mount (31) respectively. A lens group (321) is also coaxially arranged inside the fixed lens tube (32). The two ends of the telescopic lens tube (33) are connected to the lens mount (31) and the camera (4) respectively. The light rays emitted from the third beam splitter (30) pass through the fixed lens tube (32) and the telescopic lens tube (33) in sequence to reach the camera (4).

7. The dual-microscopic alignment imaging device as described in claim 6, characterized in that: The telescopic lens tube (33) includes a first sleeve and a second sleeve connected by threads. The first sleeve is connected to the lens mount (31), and the second sleeve is connected to the camera (4). The lens group (321) includes a first lens and a second lens glued together.

8. The dual-microscopic alignment imaging device as described in claim 6, characterized in that: The first objective lens (25) and the second objective lens (29) are arranged back to back. The light emitted by the first light source (22) is parallel to the optical axis of the second objective lens (29), and the light emitted by the second light source (26) is parallel to the optical axis of the fixed lens tube (32).

9. The dual-microscopic alignment imaging device as described in claim 2, characterized in that: The dual-optical-path imaging unit (2) also includes a retaining plate (9), which is built into the frame (21) and is used to abut and limit the first beam splitter (23) and the second beam splitter (27).

10. The dual-microscopic alignment imaging device as described in claim 2, characterized in that: The dual-microscopic alignment imaging device also includes a water-cooling unit (5) and a temperature probe (6). The water-cooling unit (5) is connected to the frame (21), and the temperature probe (6) is built into the frame (21).

Images