Dual-lamp panel detection light source based on prism reflection

Abstract

The utility model discloses a kind of double lamp panel detection light source based on prism reflection, including light source body, the light source body includes base body, first lamp panel is arranged on one side and second lamp panel is arranged on the other side of being equipped with on the base body, the first lamp panel and second lamp panel are mutually perpendicular arrangement, the side of the base body away from second lamp panel is equipped with reflecting prism, the side of the reflecting prism is provided with reflecting surface, the reflecting surface is obliquely arranged, and it is opposite to second lamp panel, the light emitted by second lamp panel is reflected to the area to be detected projection by reflecting surface, and the light of direct irradiation with first lamp panel forms complementary illumination;The utility model provides a kind of detection light source with compact structure, uniform illumination and multiple illumination mode is realized, light is folded by prism reflection, realize the miniaturization integration of multi-angle illumination, improve the coverage and precision of defect detection.

Description

Technical Field

[0001] This utility model relates to the field of detection light source technology, and in particular to a dual-lamp detection light source based on prism reflection. Background Technology

[0002] With the continuous innovation and development of the electronics industry, people's requirements for the quality of semiconductors are also getting higher and higher. Visual inspection is a common inspection method in semiconductor production. It mainly uses the combination of a camera and a light source to acquire images of defects in semiconductor chips, so that the main control unit can make visual judgments on the acquired images.

[0003] However, existing detection light sources generally suffer from problems such as uneven illumination and limited angles. For example, traditional unidirectional vertical light sources are insufficient to highlight three-dimensional defects, such as warped gold lines, while lateral light sources are easily obstructed by mechanical structures. Existing technologies also employ multi-light source coordination to compensate for the shortcomings of a single light source, but this approach increases system complexity and debugging difficulty. Furthermore, multiple light sources occupy a large space, making them difficult to integrate into chip-level detection devices. In addition, intersecting optical paths can easily cause interference and shadow overlap, affecting image clarity. When multiple light sources switch operation, there is a delay in illumination switching, which can easily lead to motion blur during dynamic detection. Utility Model Content

[0004] The purpose of this invention is to overcome the above-mentioned defects in the prior art and provide a dual-lamp detection light source based on prism reflection. This provides a detection light source with a compact structure, uniform illumination, and multiple lighting modes. By folding light through prism reflection, it achieves miniaturized integration of multi-angle illumination, thereby improving the coverage and accuracy of defect detection.

[0005] To achieve the above objectives, this utility model provides a dual-lamp detection light source based on prism reflection, comprising a light source body, the light source body including a base body, on which a first lamp plate disposed on one side and a second lamp plate disposed on the other side are mounted, the first lamp plate and the second lamp plate being perpendicular to each other, a reflecting prism being mounted on the side of the base body away from the second lamp plate, a reflecting surface being provided on one side of the reflecting prism, the reflecting surface being inclined and facing the second lamp plate, the light emitted by the second lamp plate being reflected by the reflecting surface and projected onto the area to be detected, forming complementary illumination with the light directly irradiated by the first lamp plate.

[0006] Preferably, a first power cord is installed on one side of the first lamp panel, the end of the first power cord being electrically connected to the first lamp panel and controlling the first lamp panel to emit light; a second power cord is installed on one side of the second lamp panel, the end of the second power cord being electrically connected to the second lamp panel and controlling the second lamp panel to emit light.

[0007] Preferably, the base body includes a first flat plate, a first vertical plate disposed on one side of the first flat plate, and a second vertical plate disposed on the other side of the first flat plate; an insertion groove is provided between the first vertical plate and the second vertical plate, and the first lamp plate is inserted into the insertion groove and attached to the second attachment surface of the second vertical plate.

[0008] Preferably, the inner side of the first vertical plate is provided with a first attachment surface perpendicular to the second attachment surface, and the second lamp plate is attached to the first attachment surface.

[0009] Preferably, the base body further includes a second plate disposed on one side of the first plate; the first plate and the second plate are stepped, and the height of the second plate is lower than the height of the first plate; a third attachment surface is provided on the second plate, and the reflecting prism is attached to the third attachment surface.

[0010] Preferably, a third vertical plate and a fourth vertical plate are provided on one side of the second plate. The third vertical plate and the fourth vertical plate are connected together and perpendicular to each other. The third vertical plate and the fourth vertical plate are in close contact with the two right-angled sides of the reflecting prism and are attached to each other.

[0011] Preferably, the second vertical plate and the third vertical plate are connected to each other and integrally formed; the second vertical plate also limits the end of the first lamp plate.

[0012] Preferably, both the first plate and the second plate are provided with countersunk mounting holes for fixed installation and positioning pin holes for positioning.

[0013] Preferably, a baffle is installed on the upper part of the base body. The baffle is connected and fixed to the base body and limits the position of the first plate, the second plate and the reflecting prism.

[0014] Preferably, the reflective surface of the reflective prism is coated with a reflective film, which is a silver-plated film with a reflectivity >98%. The two right-angled sides of the reflective prism are non-reflective surfaces, and their surfaces are coated with a matte varnish with a light absorption rate >99.5%.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0016] In this invention, the first and second lamp panels are arranged perpendicularly to each other. A reflecting prism is positioned opposite the second lamp panel, with its reflecting surface facing the second lamp panel and arranged at an angle. This allows the light emitted from the second lamp panel to be reflected by the reflecting surface and projected onto the area to be inspected, forming complementary illumination with the light directly irradiated by the first lamp panel. This achieves multi-angle, shadow-free, and uniform illumination of the area to be inspected, effectively eliminating dark areas and reflections caused by a single light source. Furthermore, the light is folded by the reflection of the reflecting surface on the reflecting prism, achieving miniaturized integration of multi-angle illumination and improving the coverage and accuracy of defect detection. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a dual-lamp detection light source based on prism reflection provided by this utility model;

[0019] Figure 2 This is an exploded view of a dual-lamp detection light source based on prism reflection provided by this utility model;

[0020] Figure 3 This is a schematic diagram of the structure of a dual-lamp detection light source for removing baffles based on prism reflection provided by this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the base body provided by this utility model;

[0022] Figure 5 This is a schematic diagram of the structure of the reflecting prism provided by this utility model.

[0023] The diagram includes:

[0024] 1. Light source body; 2. Base body; 3. First lamp panel; 4. Second lamp panel; 5. Reflecting prism; 51. Reflecting surface; 31. First power cord; 41. Second power cord; 21. First flat plate; 22. First vertical plate; 23. Second vertical plate; 24. Insertion groove; 231. Second attachment surface; 221. First attachment surface; 25. Second flat plate; 251. Third attachment surface; 28. Third vertical plate; 29. ​​Fourth vertical plate; 26. Countersunk mounting hole; 27. Positioning pin hole; 6. Baffle. Detailed Implementation

[0025] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are one embodiment of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] Please refer to Figures 1 to 5 This invention provides a dual-lamp detection light source based on prism reflection.

[0027] like Figure 1 As shown, the light source body 1 includes a base body 2, on which a first lamp plate 3 is disposed on one side and a second lamp plate 4 is disposed on the other side. The first lamp plate 3 and the second lamp plate 4 are arranged perpendicular to each other, thereby forming two orthogonal light projection directions.

[0028] In this system, the first light panel 3 emits light directly into the area to be detected, while the light from the second light panel 4 is indirectly projected onto the same detection area by being folded and reflected at a 90-degree angle by the reflective surface 51 on the reflective prism 5. This achieves dual-angle composite lighting.

[0029] Specifically, a reflecting prism 5 is installed on the side of the base body 2 away from the second lamp panel 4. The reflecting prism 5 is a right-angle prism structure, with a reflecting surface 51 on one side and two right-angled side surfaces on the other side. The reflecting surface 51 is inclined and faces the second lamp panel 4. The inclination angle of the reflecting surface 51 can be adjusted and optimized according to actual application conditions to ensure the accuracy and uniformity of the light reflection angle. The angle between the reflecting surface 51 and the second lamp panel 4 is between 30° and 60°, and perpendicular light projection can be achieved at 45°.

[0030] Furthermore, the second lamp panel 4 emits light from the other side toward the area to be detected, which is reflected by the reflective surface 51 of the reflective prism 5 and projected toward the area to be detected, forming complementary illumination with the light directly irradiated by the first lamp panel 3, thereby enhancing the uniformity and coverage of the illumination in the detection area.

[0031] The combination of the first lamp board 3, the second lamp board 4, and the reflecting prism 5, with the light emitted from the second lamp board 4 featuring a folded design, reduces the overall volume of the light source, significantly decreasing the space occupied in the length direction, measured from 80mm to 46mm; the overall thickness is controlled within 35mm, making it suitable for wafer-level micro-inspection equipment, such as packaging inspection modules with a thickness ≤50mm. This resolves the contradiction between multi-angle illumination requirements and space constraints in the miniaturization process of semiconductor inspection equipment, providing a hardware foundation for online inspection systems. This light source structure, through the orthogonal layout of the dual lamp boards and the prism reflection coupling design, achieves multi-angle illumination in a compact space, effectively avoiding the volume expansion problem caused by increasing the illumination direction in traditional solutions. The introduction of the reflecting prism 5 not only optimizes the light path but also improves the maintainability and assembly accuracy of the system.

[0032] In this embodiment, a first power line 31 is installed on one side of the first lamp panel 3, and the end of the first power line 31 is electrically connected to the first lamp panel 3 to control the first lamp panel 3 to emit light; a second power line 41 is installed on one side of the second lamp panel 4, and the end of the second power line 41 is electrically connected to the second lamp panel 4 to control the second lamp panel 4 to emit light.

[0033] The first power line 31 and the second power line 41 are independently controlled, and the lighting timing and light intensity parameters of the first lamp board 3 and the second lamp board 4 can be independently adjusted according to the detection requirements to achieve dynamic lighting mode switching. By controlling the dual light source to turn on and off in a time-division manner, mutual interference can be eliminated and the signal-to-noise ratio can be improved. The lighting of the first lamp board 3 and the second lamp board 4 can be controlled to achieve multiple working modes such as single-sided vertical illumination, side-reflected light illumination, and double-sided mixed light illumination to meet the detection requirements of different surface morphologies and materials. The brightness or intensity of the first lamp board 3 and the second lamp board 4 can also be controlled, and can be precisely adjusted between full darkness and full brightness to achieve gradient lighting effects and realize three-dimensional morphology restoration under multi-level brightness ratios. Combined with preset lighting strategies, the corresponding power line control timing and light intensity parameters can be manually adjusted.

[0034] During the inspection process, for the identification of solder pad contamination, the first light board 3 is used first for vertical illumination to highlight surface particles and residues; for the identification of gold wire warping, the second light board 4 is used first in conjunction with the reflecting prism 5 for lateral oblique illumination to enhance the highlight features of the gold wire edges and highlight its three-dimensional warping shape; for the identification of abnormal solder ball height, the coordinated illumination of the first light board 3 and the second light board 4 is required. By superimposing vertical light and lateral reflected light, a composite illumination with directional differences is formed. By utilizing the spatial correspondence between shadow distribution and highlight areas, the surface contour of the solder ball is accurately reconstructed. Then, the height change features are extracted through image processing algorithms to achieve non-contact three-dimensional dimension measurement. This light source system can improve the overall defect detection rate to 99.2%, while the detection rate of traditional single light source solutions is ≤75%.

[0035] like Figure 4 As shown, the base body 2 includes a first flat plate 21, a first vertical plate 22 disposed on one side of the first flat plate 21, and a second vertical plate 23 disposed on the other side of the first flat plate 21; the first vertical plate 22 and the second vertical plate 23 are arranged perpendicular to each other, and an insertion groove 24 is provided between the first vertical plate 22 and the second vertical plate 23. The first lamp plate 3 is inserted into the insertion groove 24 and attached to the second attachment surface 231 on the second vertical plate 23.

[0036] In addition, the inner side of the first vertical plate 22 is provided with a first attachment surface 221 perpendicular to the second attachment surface 231, and the second lamp plate 4 is attached to the first attachment surface 221; thus realizing the vertical installation of the first lamp plate 3 and the second lamp plate 4; furthermore, for heat dissipation, thermally conductive silicone can be installed between the first attachment surface 221 and the second lamp plate 4, and between the first lamp plate 3 and the second attachment surface 231, effectively improving heat dissipation efficiency and ensuring the stability and lifespan of the light source during continuous operation. The thermally conductive silicone fills the tiny gaps between the lamp plate and the attachment surface, enhancing the heat conduction capacity and avoiding light intensity attenuation or component damage caused by local overheating.

[0037] like Figure 4 As shown, in order to install the reflecting prism 5, the base body 2 also includes a second plate 25 disposed on one side of the first plate 21; the first plate 21 and the second plate 25 are stepped, and the height of the second plate 25 is lower than the height of the first plate 21; a third attachment surface 251 is provided on the second plate 25, and the reflecting prism 5 is attached to the third attachment surface 251.

[0038] To precisely position and fix the reflecting prism 5, a third vertical plate 28 and a fourth vertical plate 29 are provided on one side of the second plate 25. The third vertical plate 28 and the fourth vertical plate 29 are connected together and perpendicular to each other. The third vertical plate 28 and the fourth vertical plate 29 are in close contact with the two right-angled sides of the reflecting prism 5 and are attached to each other. The vertical limiting structure of the third vertical plate 28 and the fourth vertical plate 29 ensures that the position of the reflecting prism 5 remains unchanged during use, avoiding optical path deviation due to vibration or movement.

[0039] In this embodiment, the second vertical plate 23 and the third vertical plate 28 are connected to each other and integrally formed; the second vertical plate 23 also limits the end of the first lamp plate 3.

[0040] To further enhance the stability of the optical path, the reflective surface 51 of the reflecting prism 5 is coated with a reflective film, which is a silver-plated film with a reflectivity >98%, thereby enhancing the reflectivity of light and reducing light energy loss. Simultaneously, the two right-angled sides of the reflecting prism 5 are non-reflective surfaces coated with a matte varnish with an absorbency >99.5%. The matte varnish effectively absorbs stray light and prevents parasitic reflections from occurring on the non-reflective surfaces, thus ensuring a pure optical path.

[0041] To securely mount the light source body 1, both the first plate 21 and the second plate 25 are provided with several countersunk mounting holes 26 for fixing and positioning pin holes 27 for positioning. Connecting bolts are installed inside the countersunk mounting holes 26 to firmly fix the base body 2 to the external mounting structure. The connecting bolts do not protrude, preventing light obstruction and ensuring a compact overall structure without affecting the optical path. The positioning pin holes 27 cooperate with the positioning pins of the external mounting base to achieve precise positioning of the base body 2, avoiding optical path deviation caused by assembly errors.

[0042] Through the synergistic effect of the countersunk mounting hole 26 and the positioning pin hole 27, the base body 2 achieves both high precision and high stability during installation, effectively reducing the impact of accumulated errors on the optical system. The combination of the silver-plated reflective film and the high-absorption matte varnish not only improves the effective light energy utilization rate but also physically suppresses stray light interference, making the output light spot more concentrated and clear.

[0043] like Figure 1 As shown, in this embodiment, a baffle 6 is installed on the upper part of the base body 2. The baffle 6 is connected and fixed to the base body 2, and limits the first plate 21, the second plate 25 and the reflecting prism 5. The baffle 6 limits, protects and shields the first plate 21, the second plate 25 and the reflecting prism 5 to prevent external dust and stray light from entering the optical path.

[0044] Assembly steps of the light source body 1:

[0045] Step S1: The first lamp board 3 is inserted into the insertion groove 24 and attached to the second attachment surface 231 on the second vertical plate 23; the first power cord 31 passes through the insertion groove 24;

[0046] Step S2: A second lamp plate 4 is attached to the first adhesive surface 221; the first lamp plate 3 and the second lamp plate 4 are perpendicular to each other;

[0047] Step S3: The reflecting prism 5 is attached to the third attachment surface 251. The reflecting surface 51 of the reflecting prism 5 is opposite to the second lamp plate 4. The two right-angled sides of the reflecting prism 5 are respectively attached to the third vertical plate 28 and the fourth vertical plate 29.

[0048] Step S4: The baffle 6 is connected and fixed to the base body 2, and limits, protects and shields the first plate 21, the second plate 25 and the reflecting prism 5; thereby completing the assembly of the light source body 1;

[0049] Step S5: The positioning pin hole 27 engages with the positioning pin of the external mounting base, and the countersunk mounting hole 26 is fitted with a connecting bolt, which securely fixes the base body 2 to the external mounting structure, thereby fixing the light source body 1.

[0050] The above embodiments are preferred embodiments of the present utility model, but the embodiments of the present utility model are not limited to the above embodiments. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of the present utility model shall be considered equivalent substitutions and shall be included within the protection scope of the present utility model.

Claims

1. A dual-lamp detection light source based on prism reflection, characterized in that: The light source body (1) includes a base body (2). The base body (2) is equipped with a first lamp plate (3) on one side and a second lamp plate (4) on the other side. The first lamp plate (3) and the second lamp plate (4) are arranged perpendicular to each other. A reflecting prism (5) is installed on the side of the base body (2) away from the second lamp plate (4). A reflecting surface (51) is provided on one side of the reflecting prism (5). The reflecting surface (51) is inclined and opposite to the second lamp plate (4). The light emitted by the second lamp plate (4) is reflected by the reflecting surface (51) and projected onto the area to be detected, forming complementary illumination with the light directly irradiated by the first lamp plate (3).

2. The dual-lamp detection light source based on prism reflection according to claim 1, characterized in that: A first power line (31) is installed on one side of the first lamp panel (3), and the end of the first power line (31) is electrically connected to the first lamp panel (3) and controls the first lamp panel (3) to emit light; a second power line (41) is installed on one side of the second lamp panel (4), and the end of the second power line (41) is electrically connected to the second lamp panel (4) and controls the second lamp panel (4) to emit light.

3. The dual-lamp detection light source based on prism reflection according to claim 2, characterized in that: The base body (2) includes a first flat plate (21), a first vertical plate (22) disposed on one side of the first flat plate (21), and a second vertical plate (23) disposed on the other side of the first flat plate (21); an insertion groove (24) is provided between the first vertical plate (22) and the second vertical plate (23), and the first lamp plate (3) is inserted from the insertion groove (24) and attached to the second attachment surface (231) on the second vertical plate (23).

4. The dual-lamp detection light source based on prism reflection according to claim 3, characterized in that: The inner side of the first vertical plate (22) is provided with a first attachment surface (221) that is perpendicular to the second attachment surface (231), and a second lamp plate (4) is attached to the first attachment surface (221).

5. A dual-lamp detection light source based on prism reflection according to claim 3, characterized in that: The base body (2) also includes a second plate (25) disposed on one side of the first plate (21); the first plate (21) and the second plate (25) are stepped, and the height of the second plate (25) is lower than the height of the first plate (21); a third attachment surface (251) is provided on the second plate (25), and the reflecting prism (5) is attached to the third attachment surface (251).

6. A dual-lamp detection light source based on prism reflection according to claim 5, characterized in that: The second plate (25) has a third vertical plate (28) and a fourth vertical plate (29) on one side. The third vertical plate (28) and the fourth vertical plate (29) are connected together and perpendicular to each other. The third vertical plate (28) and the fourth vertical plate (29) are in close contact with the two right-angled sides of the reflecting prism (5) and are attached to each other.

7. A dual-lamp detection light source based on prism reflection according to claim 6, characterized in that: The second vertical plate (23) is connected to the third vertical plate (28) and is integrally formed; the second vertical plate (23) also limits the end of the first lamp plate (3).

8. A dual-lamp detection light source based on prism reflection according to claim 5, characterized in that: The first plate (21) and the second plate (25) are both provided with countersunk mounting holes (26) for fixed installation and positioning pin holes (27) for positioning.

9. A dual-lamp detection light source based on prism reflection according to claim 1, characterized in that: The base body (2) is equipped with a baffle (6) on its upper part. The baffle (6) is connected and fixed to the base body (2) and limits the first plate (21), the second plate (25) and the reflecting prism (5).

10. A dual-lamp detection light source based on prism reflection according to claim 6, characterized in that: The reflective surface (51) of the reflective prism (5) is coated with a reflective film, which is a silver-plated film with a reflectivity >98%. The two right-angled sides of the reflective prism (5) are non-reflective surfaces, and the surfaces are coated with a matte varnish with a light absorption rate >99.5%.

Images