High-temperature furnace tube control system and high-temperature furnace tube

Abstract

The application relates to a high-temperature furnace tube control system and a high-temperature furnace tube, and relates to the field of wafer manufacturing.The high-temperature furnace tube control system comprises a power supply module, a control module and a smoke sensing module; the power supply module is coupled with the control module and the smoke sensing module; the smoke sensing module comprises a smoke sensing detector, a smoke sensing safety relay and an alarm device; the smoke sensing detector is connected with the control module; the smoke sensing safety relay and the alarm device are connected with the control module; the control module outputs an alarm signal after receiving a detection signal of the smoke sensing detector; after receiving the alarm signal, the smoke sensing safety relay is switched to an always-on state, and the alarm device is switched to an alarm state.The application can avoid the problem that the smoke sensing detector of a normal machine is misjudged as a smoke risk due to receiving an interference signal, and then an emergency stop instruction is triggered, and fundamentally solves the technical problem of unstable process stability caused by signal interference in the prior art.

Description

Technical Field

[0001] This application relates to the field of wafer manufacturing, and more particularly to a high-temperature furnace tube control system and a high-temperature furnace tube. Background Technology

[0002] High-temperature vertical furnace tubes are core production equipment in 6-inch and 8-inch silicon carbide wafer production lines, primarily used for critical processes such as high-temperature activation and high-temperature oxidation of silicon carbide wafers. Smoke detectors, as a crucial safety component of the high-temperature vertical furnace tube, function by real-time monitoring of smoke concentration around the equipment. When the smoke concentration reaches a preset threshold, a safety response mechanism is immediately triggered. Specifically, once the smoke detector detects smoke and issues an alarm signal, it directly triggers an emergency stop circuit, halting the machine and forcibly interrupting the current process.

[0003] However, in actual production scenarios, multiple high-temperature vertical wafer foundries are often densely arranged and operating. Smoke alarm signals from adjacent machines are prone to interference. When a high-temperature vertical wafer foundry malfunctions and triggers its smoke alarm, its alarm signal can easily interfere with the smoke detectors of surrounding normally operating machines. Upon receiving the interference signal, the smoke detectors of the normal machines may misjudge the presence of smoke in their environment, thus triggering an emergency stop command. This false triggering not only disrupts the normal wafer fabrication process, causing the silicon carbide wafers being processed to be scrapped due to process interruption and resulting in direct economic losses, but also disrupts the overall scheduling rhythm of the production line, reducing production efficiency. Utility Model Content

[0004] This application provides a high-temperature furnace tube control system and a high-temperature furnace tube to solve the technical problem that in the prior art, when multiple high-temperature vertical furnace tubes are densely arranged, the smoke alarm signals of adjacent machines are prone to mutual interference. After an abnormal alarm of a certain machine, the signal will mislead the smoke detectors of the surrounding normal machines to trigger an emergency stop, which not only interrupts the wafer process flow, causing wafer scrapping and direct economic losses, but also disrupts the production line scheduling rhythm and reduces production efficiency.

[0005] In a first aspect, this application provides a high-temperature furnace tube control system, including a power supply module, a control module, and a smoke detection module; The power module is coupled to the control module and the smoke detector module respectively; The smoke detection module includes a smoke detector, a smoke safety relay, and an alarm device. The smoke detector is connected to the control module; the smoke safety relay and the alarm device are respectively connected to the control module. The control module outputs an alarm signal after receiving the detection signal from the smoke detector; After receiving the alarm signal, the smoke safety relay switches to the normally open state, and the alarm device switches to the alarm state.

[0006] In one optional embodiment, the high-temperature furnace tube control system further includes a working circuit and a host computer, the host computer being connected to the control module; The host computer includes a human-machine interface. After receiving the alarm signal, the host computer outputs alarm information through the human-machine interface. The host computer is configured to output a cut-off signal when the external operation command received by the human-machine interface is received, and the control module is configured to cut off the working circuit according to the cut-off signal.

[0007] In one optional embodiment, the high-temperature furnace tube control system further includes an emergency stop module, which includes an emergency stop safety relay connected in series in the working circuit.

[0008] In one alternative implementation, the alarm device includes a buzzer and / or an alarm light.

[0009] In an optional embodiment, the alarm device further includes an operation indicator circuit, which is connected to and powered by the power module. The operation indicator circuit includes an operation indicator light and a first safety contact connected in series; The first safety contact is connected to the control module. After receiving the alarm signal, the first safety contact switches to the disconnected state.

[0010] In an optional embodiment, the alarm device further includes an alarm circuit connected to and powered by the power module. The alarm circuit includes a second safety contact, and the buzzer and / or the alarm light are connected in series with the second safety contact; The second safety contact is connected to the control module. After receiving the alarm signal, the second safety contact switches to a closed state.

[0011] In an optional embodiment, the alarm circuit further includes a reset button, wherein when the reset button is pressed and the fault has been cleared, the first safety contact switches to a closed state and the second safety contact switches to an open state.

[0012] In one optional embodiment, the high-temperature furnace tube control system further includes a heating power supply, a power module switch, a smoke detector switch, and a heating power supply switch. The power module switch is connected in series between the power module and the external power supply. The smoke detector switch is connected in series between the power module and the smoke detector. The smoke detector switch, the smoke detector, and the power module are connected in series to form a closed loop. The heating power switch is connected in series between the power module and the heating power source.

[0013] Secondly, this application provides a high-temperature furnace tube, comprising: The aforementioned high-temperature furnace tube control system; Furnace; A hollow detection frame is provided, positioned above the furnace chamber, and a smoke detector is mounted on the hollow detection frame and faces the furnace chamber through the hollow portion of the frame. A driving component is disposed on the detection frame.

[0014] In one alternative embodiment, the drive component is disposed in the middle of the hollow detection frame; The smoke detector is equipped with a connecting line, which is arranged along the side wall of the hollow detection frame.

[0015] The technical solutions provided in this application have the following advantages compared with the prior art: The high-temperature furnace tube control system provided in this application, when an abnormal smoke detection occurs on a certain machine, analyzes the detection result of its smoke detector by the control module, disconnects the smoke safety relay, and simultaneously triggers an alarm on the alarm device. This not only quickly activates safety protection measures but also promptly alerts personnel to intervene. The control system of this application avoids the risk of smoke detectors on normal machines misinterpreting smoke due to receiving interference signals, thus triggering emergency stop commands. It ensures that the process flow is not interrupted when normal machines are performing critical processes such as high-temperature activation and high-temperature oxidation of silicon carbide wafers, fundamentally solving the technical problem of unstable process stability caused by signal interference in existing technologies. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, those skilled in the art can obtain other drawings based on these drawings without creative effort.

[0018] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0019] Figure 1 This is a schematic diagram of the high-temperature furnace tube control system before its improvement, as shown in the embodiments of this application. Figure 2 This is a schematic diagram of the improved high-temperature furnace tube control system in the embodiments of this application; Figure 3 This is a schematic diagram showing the connection of each power switch in the embodiments of this application; Figure 4 This is a diagram showing the relationship between the various modules in the improved embodiments of this application; Figure 5 This is a schematic diagram of one embodiment of a high-temperature furnace tube provided in this application. Figure 6 This is a schematic diagram of one embodiment of a high-temperature furnace tube provided in this application. Figure 7 This is a schematic diagram showing the connection between the emergency stop safety relay interface terminal and the smoke detector safety relay interface terminal provided in an embodiment of this application.

[0020] Explanation of reference numerals in the attached figures: 100. Power supply module; 110. Emergency stop safety relay switch; 120. Smoke detector safety relay switch; 130. Auxiliary switch; 140. Control module switch; 150. Heating power switch; 160. Smoke detector switch; 200. Control module; 300. Emergency stop safety relay; 400. Smoke detector safety relay; 500. Alarm device; 510. Operation indicator circuit; 511. Operation indicator light; 512. First safety contact; 520. Alarm circuit; 521. Warning light; 522. Second safety contact; 523. Reset button; 600. Communication module; 700. Host computer; 800. High-temperature furnace tube; 810. Furnace chamber; 820. Hollow detection frame; 830. Drive assembly; 840. Smoke detector; 841. Connecting line; 900. Heating power supply; 1. Control cabinet. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] The following disclosure provides numerous different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0023] For ease of description, spatial relative terms may be used in the text to describe the relative position or movement of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "front," "back," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure undergoes a positional flip, orientation change, or change of motion, these directional indications will change accordingly. For instance, an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0024] To address the technical problem in existing technologies where multiple high-temperature vertical furnace tubes are densely arranged, causing mutual interference between smoke alarm signals from adjacent machines, and misleading surrounding normal machines to trigger emergency stops after an alarm from one machine, this not only disrupts the wafer fabrication process, leading to wafer scrapping and direct economic losses, but also disrupts production line scheduling and reduces production efficiency, this application provides a high-temperature furnace tube control system and a high-temperature furnace tube. The high-temperature furnace tube control system can avoid the risk of smoke detectors on normal machines misinterpreting smoke due to receiving interference signals, thus triggering emergency stop commands. This ensures that the process flow of normal machines is not interrupted when undertaking critical processes such as high-temperature activation and high-temperature oxidation of silicon carbide wafers, fundamentally solving the technical problem of unstable process stability caused by signal interference in existing technologies.

[0025] Firstly, Figure 2 and Figure 3 A high-temperature furnace control system provided in this application includes a power supply module 100, a control module 200, and a smoke detection module; The power module 100 is coupled to the control module 200 and the smoke detector module, respectively. The smoke detection module includes a smoke detector 840, a smoke safety relay 300, and an alarm device 500. The smoke detector 840 is connected to the control module 200; the smoke safety relay 300 and the alarm device 500 are respectively connected to the control module 200. After receiving the detection signal from the smoke detector, the control module 200 outputs an alarm signal; After receiving an alarm signal, the smoke safety relay switches to the normally open state, and the alarm device switches to the alarm state.

[0026] Specifically, the power supply module 100 provides stable power to the control module 200 and the smoke detection module, ensuring that each module can operate normally, based on its operating voltage and current requirements. The smoke detector 840 can detect the smoke concentration around the high-temperature vertical furnace tube in real time and transmit the detection results to the control module 200. After receiving the detection results from the smoke detector 840, the control module 200 analyzes and processes the results. When the detection results show that the smoke concentration reaches a preset alarm threshold, the control module 200 is configured to output an alarm signal, which is then output to the smoke safety relay 400 and the alarm device 500.

[0027] Under normal operating conditions, the control module 200 outputs a low level, which de-energizes the coil of the smoke safety relay 200 and keeps the contacts normally closed. In the alarm state, the control module 200 outputs a high level, which energizes the coil of the smoke safety relay 200 and opens the contacts.

[0028] After receiving an alarm signal, the alarm device 500 will issue an alarm. If the alarm signal continues to be output, the alarm device 500 will remain in an alarm state until the control module 200 stops outputting the alarm signal. That is, when there is indeed an abnormal smoke detection on a certain machine, the detection result of the smoke detector 840 is analyzed by the control module 200, and the alarm signal triggers the alarm device 500 to promptly remind the staff to intervene.

[0029] In the actual scenario of multiple high-temperature vertical tube furnaces densely arranged in 6-inch and 8-inch silicon carbide wafer production lines, the control system of this application can enable the alarm device 500 of the faulty machine to issue an alarm, reminding the staff to intervene and handle the situation. It can also avoid the risk of the smoke detector 840 of the normal machine misjudging smoke due to receiving interference signals, thereby triggering an emergency stop command. This ensures that the process flow is not interrupted when the normal machine is undertaking key processes such as high-temperature activation and high-temperature oxidation of silicon carbide wafers, and fundamentally solves the technical problem of unstable process stability caused by signal interference in the prior art.

[0030] Because it effectively prevents accidental emergency shutdowns of normal equipment, silicon carbide wafers undergoing high-temperature activation and oxidation processes in the high-temperature vertical furnace tube do not need to be scrapped due to sudden process interruptions. In the production of 6-inch and 8-inch silicon carbide wafers, the cost of a single silicon carbide wafer is high, and process interruptions can easily lead to irreversible damage such as wafer lattice defects and uneven oxide layers. As the core equipment of 6-inch and 8-inch silicon carbide wafer production lines, the operating status of the high-temperature vertical furnace tube directly affects the scheduling plan of the entire production line. The control system disclosed in this application avoids production interruptions caused by accidental shutdowns of normal equipment, eliminating the need to readjust production schedules, coordinate upstream and downstream processes, and invest additional time in calibrating process parameters after machine restarts.

[0031] In some embodiments, the high-temperature furnace tube control system further includes a working circuit and a host computer 700, which is connected to the control module 200. The host computer 700 includes a human-machine interface. After receiving an alarm signal, the host computer 700 outputs alarm information through the human-machine interface. The host computer 700 is configured to output a cut-off signal based on the external operation commands received by the human-machine interface, and the control module 200 is configured to cut off the working circuit accordingly.

[0032] The working circuit is directly coupled to the core working components of the high-temperature vertical furnace tube via a cable. The alarm information output by the human-machine interface of the host computer 700 can be such as smoke concentration. Manual operation components such as emergency stop buttons can be set on the human-machine interface. After receiving the alarm information on the human-machine interface, the operator checks the alarm machine and, based on the check, chooses whether to press the emergency stop button. If the emergency stop button is pressed, it outputs a cut-off signal. The control module 200 cuts off the working circuit according to the cut-off signal, thereby stopping the machine and forcibly interrupting the current process to achieve emergency protection for the equipment and production process.

[0033] In some embodiments, the high-temperature furnace control system further includes a communication module 600, which is connected to the control module 200. The communication module 600 receives an alarm signal and transmits the alarm signal to the host computer 700.

[0034] Specifically, in this embodiment, such as Figure 2 and 3As shown, the communication module 600 uses the MAX485 chip as its core and is electrically connected to the control module 200 via signal wires. When the smoke detector 840 detects abnormal smoke and the control module 200 outputs an alarm signal, the signal input pins of the communication module 600, using the MAX485 chip, synchronously output different level signals to ensure that the alarm information is transmitted to the host computer 700 without delay. Addressing the electromagnetic radiation generated by the high-temperature vertical furnace tubes in 6-inch and 8-inch silicon carbide wafer production lines, as well as the signal interference caused by the dense arrangement of multiple devices, the communication module 600 using the MAX485 chip can prevent the alarm signal from being distorted or lost during transmission, ensuring that the alarm signal can still be stably transmitted to the host computer 700 even in environments with high electromagnetic interference.

[0035] In some embodiments, the high-temperature furnace tube control system further includes an emergency stop module, which includes an emergency stop safety relay 300 connected in series in the working circuit.

[0036] When the operator presses the emergency stop button, the control module 200 outputs a cut-off signal. This signal is sent to the emergency stop safety relay 300, causing the coil of the relay to engage and the contacts to open, thus cutting off the operating circuit and stopping the malfunctioning machine. The emergency stop safety relay 300 is also connected to the power module 100. An emergency stop safety relay switch 110 is connected in series between the relay and the power module 100. This switch allows for manual disconnection of the operating circuit, suitable for hazardous scenarios where the emergency stop safety relay 300 fails.

[0037] In some embodiments, the alarm device 500 includes a buzzer and / or an alarm light.

[0038] The equipment on 6-inch and 8-inch silicon carbide wafer production lines is densely packed and the environment is noisy. Buzzers can transmit alarm information through sound, penetrating the noise of equipment operation in the production environment to ensure that personnel at a distance can clearly detect abnormalities. Alarm lights can transmit information through visual warnings, using warning colors that meet industrial safety standards and operating in a flashing mode. Even in environments with multiple machines obstructing the view or alternating light and dark conditions, personnel can still quickly detect alarm signals, avoiding delays in alarm information recognition due to environmental interference.

[0039] When a high-temperature vertical furnace tube triggers a smoke alarm, the visual warning from the alarm light helps staff quickly locate the abnormal machine among densely packed machines, eliminating the need to check the status of each smoke detector 840. When combined with the sound guidance of a buzzer, staff can use auditory assistance to further improve location efficiency. This faster anomaly location allows for timely handling of smoke anomalies, preventing the spread of risk, such as smoke affecting surrounding machines, thus gaining crucial time and minimizing the impact of the anomaly on the production line.

[0040] In some embodiments, the alarm device 500 further includes an operation indicator circuit 510, which is connected to and powered by the power module 100. The operation indicator circuit 510 includes an operation indicator light 511 and a first safety contact 512 connected in series; The first safety contact 512 is connected to the control module 200. After receiving an alarm signal, the first safety contact 512 switches to the disconnected state.

[0041] like Figure 2 and 3 As shown, for scenarios with multiple machines densely arranged in 6-inch and 8-inch silicon carbide wafer production lines, the operation indicator light 511 connected in series in the operation indicator circuit 510 can serve as a direct indication of the normal operating status of the machine. Under normal operating conditions, the first safety contact 512 is closed, the operation indicator circuit 510 is turned on, and the operation indicator light 511 lights up. Workers can quickly confirm that the machine is in a normal monitoring state through inspection. When the smoke detector module triggers an alarm, the control module 200 outputs an alarm signal to open the first safety contact 512, disconnecting the operation indicator circuit 510 and turning off the operation indicator light 511. This on-off state change can convey information about machine malfunctions, avoiding the problem of workers only noticing an alarm but being unable to quickly locate which machine has entered the alarm state. This is especially suitable for scenarios where multiple machines are operating simultaneously, significantly improving the efficiency of anomaly identification and location.

[0042] In some embodiments, the alarm device 500 further includes an alarm circuit 520, which is coupled to the power module 100 and powered by the power module 100. The alarm circuit 520 includes a second safety contact 522, and the honey maker and / or alarm light 521 are connected in series with the second safety contact 522; The second safety contact 522 is connected to the control module 200. After receiving an alarm signal, the second safety contact 522 switches to the closed state.

[0043] like Figure 2 and 3As shown, the buzzer and / or warning light 521 connected in series in the alarm circuit 520 and the second safety contact 522 form complementary logic with the operation indicator light 511 connected in series in the previous operation indicator circuit 510 and the first safety contact 512. That is, under normal operating conditions, the first safety contact 512 is closed, the second safety contact 522 is open, the operation indicator light 511 is lit to indicate that the machine is operating normally, the buzzer is not triggered, and the warning light 521 is off. When the smoke alarm is triggered, the control module 200 outputs an alarm signal, which simultaneously causes the first safety contact 512 to open, the operation indicator light 511 to go out, the second safety contact 522 to close, the buzzer to be triggered, and the warning light 521 to light up. With the clear status switching of the operation indicator light 511, warning light 521, and damper, the staff can intuitively judge whether the machine has switched from normal operation to alarm abnormality, avoiding misjudgment caused by a single light signal or ambiguous status, such as mistakenly taking the normal operation indicator light 511 as an alarm signal, or not noticing that the warning light 521 has not been activated. It is especially suitable for 6-inch and 8-inch silicon carbide wafer production lines with multiple machines densely arranged, improving the efficiency of status identification.

[0044] The second safety contact 522 and the first safety contact 512 can both be directly coupled and controlled by the control module 200. This means that when an alarm signal is triggered, their actions are synchronized. This ensures that there is no time difference between the operation indicator light 511 turning off and the buzzer triggering and the warning light 521 illuminating, preventing contradictory states such as the operation indicator light 511 being on while the warning light 521 is already lit. It also avoids signal confusion caused by asynchronous contact actions, such as the machine alarming but the operation indicator light 511 remaining lit, misleading staff into believing the machine is normal. Simultaneously, the second safety contact 522 only closes when receiving an alarm signal from the control module 200, remaining open when there is no signal. This prevents false alarms caused by accidental contact closure of the warning light 521, further improving the reliability of the alarm signal and meeting the safety monitoring requirements of key processes in high-temperature vertical furnace tubes.

[0045] In some embodiments, the alarm circuit 520 further includes a reset button 523. When the reset button 523 is pressed and the fault has been cleared, the first safety contact 512 switches to a closed state and the second safety contact 522 switches to an open state.

[0046] like Figure 2 and 3As shown, the reset button 523 can be directly coupled and controlled by the control module 200 and is located in the human-machine interface of the host computer 700. When the smoke detector 840 detects the smoke concentration around the high-temperature vertical furnace tube and transmits the detection result to the control module 200, the control module 200 analyzes the result and outputs an alarm signal, which is simultaneously transmitted to the first safety contact 512 and the second safety contact 522. After receiving the alarm signal, the first safety contact 512 and the second safety contact 522 switch to alarm status. After the staff has investigated and eliminated the smoke anomaly, they press the reset button 523. The control module 200 detects the trigger signal of the reset button 523 and confirms that the smoke concentration reported by the smoke detector 840 has decreased to below the preset threshold. It then outputs a reset command and transmits it to the first safety contact 512 and the second safety contact 522. The first safety contact 512 and the second safety contact 522 switch to the normal state, the operation indicator 511 lights up, the warning light 521 goes out, and the staff releases the reset button 523, which also switches to the normal state.

[0047] In some embodiments, the main operating circuit includes a fuse configured to blow when the current in the operating circuit exceeds a preset fusing threshold.

[0048] When the high-temperature vertical furnace tube begins the activation and oxidation process of silicon carbide crystalline silicon, the working circuit provides a stable power supply to each core working component of the high-temperature vertical furnace tube, and the actual current of the circuit remains stable within the rated range. When an abnormality occurs in the working circuit, causing the current to rise and exceed the preset fusing threshold of the fuse, the fuse wire inside the fuse reaches its melting point and melts, directly cutting off the power supply path of the working circuit and preventing excessive current from passing through the core working components.

[0049] If the working circuit lacks mains protection, excessive current may cause the insulation layer of the line to overheat and burn, or even cause smoke and fire. This could not only damage a single machine, but also spread to the surrounding densely arranged high-temperature vertical furnace tubes, causing a chain of safety accidents. The fuse's melting action can cut off the overcurrent circuit from the source, prevent the line from overheating and catching fire, provide a safety barrier for the equipment and personnel on the production line, and reduce safety risks.

[0050] In some embodiments, such as Figure 4 As shown, the high-temperature furnace control system also includes a heating power supply 900, a power module switch, a smoke detector switch 160, and a heating power supply switch 150. The power module switch is connected in series between the power module 100 and the external power supply. The smoke detector switch 160 is connected in series between the power module 100 and the smoke detector 840. The smoke detector switch 160, the smoke detector 840 and the power module 100 are connected in series to form a closed loop. The heating power switch 150 is connected in series between the power module 100 and the heating power supply 900.

[0051] Secondly, this application provides a high-temperature furnace tube, comprising: The aforementioned high-temperature furnace control system; Furnace 810; A hollow detection frame 820 is positioned above the furnace 810. A smoke detector 840 is mounted on the hollow detection frame 820 and faces the furnace 810 through the hollow portion of the frame. The driver component 830 is mounted on the detection frame.

[0052] like Figure 5 and Figure 6 As shown, the hollow detection frame 820 has a rectangular frame structure adapted to the opening size of the furnace 810. A hollow area matching the diameter of the furnace 810 is reserved in the middle of the hollow detection frame 820. It is installed on the furnace body support above the furnace 810, ensuring precise alignment and no offset between the hollow detection frame 820 and the furnace 810 opening after installation. The smoke detector 840 is fixed to the inner edge of the hollow detection frame 820. The detection probe of the smoke detector 840 faces the hollow area of ​​the hollow detection frame 820. After position calibration, the probe can directly face the interior of the furnace 810 through the hollow area, forming a straight detection path of smoke detector 840 - hollow area - furnace 810, without any structural obstruction of smoke propagation.

[0053] The high-temperature furnace control system is integrated into control cabinet 1. The aforementioned smoke detection safety relay 400 and emergency stop smoke detection safety relay 400 are both fixedly installed on the mounting plate inside control cabinet 1. Figure 7 As shown, the emergency stop safety relay 300 has a first interface terminal 13, a second interface terminal 14, a third interface terminal 23 and a fourth interface terminal 24, and the smoke detector safety relay 400 has a fifth interface terminal 14 and a sixth interface terminal 24.

[0054] like Figure 1 and Figure 7As shown, in the prior art, a smoke detection safety relay switch 120 is connected in series between the smoke detection safety relay 400 and the power module 100. The smoke detection safety relay switch 120 allows manual disconnection of the safety relay 400. An auxiliary switch 130 is also connected in series in the circuit of the smoke detection safety relay 400, which assists the emergency stop safety relay switch in cutting off the circuit. In the prior art, to achieve linkage between smoke alarm and emergency stop, the first interface terminal 13 of the emergency stop safety relay 300 is connected to the fifth interface terminal 14 of the smoke detection safety relay 400, and the third interface terminal 23 of the emergency stop safety relay 300 is connected to the sixth interface terminal 24 of the smoke detection safety relay 400, forming a direct transmission of the alarm signal from the smoke alarm module to the emergency stop module. This design ensures that once the smoke detector 840 triggers an alarm, the signal is directly transmitted to the emergency stop safety relay 300, thereby triggering the emergency stop module to operate and causing the machine to stop.

[0055] In addition, the high-temperature furnace control system also has a control module switch 140, which is connected in series between the power supply module 100 and the control module 200.

[0056] When improving the control system, first turn off all the power module switches, smoke detector switches 160, control module switches 140, and heating power switches 150 in the control cabinet to completely cut off the power supply to each core module of the control system, avoiding the risk of short circuits or electric shocks caused by live operation during wiring and plugging / unplugging. Figure 7 As shown, firstly, disconnect the original wires from the second interface terminal 14 and the fourth interface terminal 24 of the emergency stop safety relay 300, and tightly wrap the ends of the disconnected wires with insulating tape to prevent the exposed metal contacts from contacting other lines or terminals and causing a short circuit. Next, disconnect the wires originally connected to the emergency stop safety relay 300 from the fifth interface terminal 14 and the sixth interface terminal 24 of the smoke detector safety relay 400, and then plug these two interface terminals back into the second interface terminal 14 and the fourth interface terminal 24 of the emergency stop safety relay 300, completing the wiring reconfiguration. Through this improvement, the alarm signal transmission path of the smoke detector safety relay 400 is precisely cut off, and signals are no longer transmitted to the emergency stop safety relay 300 and subsequent emergency stop modules, thereby achieving interlocking and shielding between the smoke detector safety relay 400 and the emergency stop safety relay 300.

[0057] Firstly, this improvement solves the technical problem in existing smoke detector alarms, especially the issue of false alarms directly triggering emergency stops. Previously, when the smoke detector 840 was interfered with and triggered a false alarm, the signal would be directly transmitted to the emergency stop module, causing the high-temperature furnace tube 800 to suddenly stop during critical processes such as high-temperature activation and oxidation of silicon carbide wafers, resulting in wafer scrap. After the improvement, the smoke alarm signal only affects the alarm device 500 and no longer triggers an emergency stop, ensuring the continuity of core processes from a hardware wiring perspective and effectively improving product yield and production line stability. Simultaneously, the improved operation is based on a power-off premise, and the exposed ends are treated with insulating tape, minimizing the risk of short circuits and electric shocks during maintenance and ensuring the safety of personnel and equipment.

[0058] Furthermore, this improvement requires no new hardware, such as additional relays. Functional optimization can be achieved simply by reconnecting and insulating existing wiring. This significantly reduces the economic cost of retrofitting and simplifies the operation process. On-site maintenance personnel can complete the task quickly without specialized programming or soldering skills, making it suitable for mass retrofitting and promoting on production lines. In addition, this improvement is reversible. If subsequent production needs require restoring the smoke detector and emergency stop interlocking, simply reverse the process to turn off all switches, disconnect the wiring back to the original interface terminals, and remove the insulating tape. This accommodates flexible adjustment needs in different scenarios.

[0059] Finally, this improvement only blocked the signal transmission from the smoke detector to the emergency stop, without affecting the core functions of the two relays. The smoke safety relay 400 can still receive the signal from the smoke detector 840 and drive the alarm device 500 normally. The emergency stop safety relay 300 can also independently respond to the external emergency stop button or the command of the control module 200 to cut off the main working circuit, ensuring that the two core safety functions of smoke alarm and emergency stop protection are not lost, and achieving a balance between safety protection and process stability.

[0060] In some embodiments, the drive component 830 is disposed in the middle of the hollow detection frame 820; The smoke detector 840 is equipped with a connecting line 841, which is arranged along the side wall of the hollow detection frame 820.

[0061] like Figure 5 and Figure 6 As shown, the hollow detection frame can be moved by the drive component 830, and the smoke detector 840 is correspondingly set at one of the four corners of the hollow detection frame 820. Therefore, in order to avoid motion interference or wire entanglement between the connecting line 841 of the smoke detector 840 and the drive component 830, the connecting line 841 is arranged along the side wall of the hollow detection frame 820. Figure 5 and Figure 6Two applicable implementation methods are provided. Meanwhile, the sidewall wiring method of the hollow detection frame 820 allows for compact adaptation of functional components within the limited space of the hollow detection frame 820. This avoids compressing the detection coverage of the smoke detector 840 due to the excessive area occupied by the drive component 830 or the connecting line 841, and also allows the connecting line 841 to be fixed to the sidewall of the hollow detection frame 820, reducing the probability of it rubbing against or wearing down other structures during the movement of the hollow detection frame 820, effectively extending the service life of the connecting line 841.

[0062] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0063] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0064] The above description is merely a specific embodiment of the present invention, enabling those skilled in the art to understand or implement the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A high-temperature furnace tube control system, characterized in that, It includes a power module (100), a control module (200), and a smoke detector module; The power module (100) is coupled to the control module and the smoke detector module respectively; The smoke detection module includes a smoke detector (840), a smoke safety relay (400), and an alarm device (500). The smoke detector (840) is connected to the control module (200). The smoke safety relay (400) and the alarm device (500) are respectively connected to the control module (200). The control module (200) outputs an alarm signal after receiving the detection signal from the smoke detector (840); After receiving the alarm signal, the smoke safety relay (400) switches to the normally open state, and the alarm device (500) switches to the alarm state.

2. The high-temperature furnace tube control system according to claim 1, characterized in that, The high-temperature furnace tube control system also includes a working circuit and a host computer (700), which is connected to the control module (200); The host computer (700) includes a human-machine interface. After receiving the alarm signal, the host computer (700) outputs alarm information through the human-machine interface. The host computer (700) is configured to output a cut-off signal upon receiving external operation commands from the human-machine interface, and the control module (200) is configured to cut off the working circuit according to the cut-off signal.

3. The high-temperature furnace tube control system according to claim 2, characterized in that, The high-temperature furnace tube control system also includes an emergency stop module, which includes an emergency stop safety relay (300) connected in series in the working circuit.

4. The high-temperature furnace tube control system according to claim 1, characterized in that, The alarm device (500) includes a buzzer and / or an alarm light (521).

5. The high-temperature furnace tube control system according to claim 4, characterized in that, The alarm device (500) also includes an operation indicator circuit (510), which is connected to the power module (100) and powered by the power module (100); The operation indicator circuit (510) includes an operation indicator light (511) connected in series and a first safety contact (512). The first safety contact (512) is connected to the control module (200). After receiving the alarm signal, the first safety contact (512) switches to the disconnected state.

6. The high-temperature furnace tube control system according to claim 5, characterized in that, The alarm device (500) further includes an alarm circuit (520), which is connected to the power module (100) and powered by the power module (100); The alarm circuit (520) includes a second safety contact (522), and the buzzer and / or the alarm light (521) are connected in series with the second safety contact (522); The second safety contact (522) is connected to the control module (200). After receiving the alarm signal, the second safety contact (522) switches to the closed state.

7. The high-temperature furnace tube control system according to claim 6, characterized in that, The alarm circuit (520) also includes a reset button (523). When the reset button (523) is pressed and the fault has been cleared, the first safety contact (512) switches to the closed state and the second safety contact (522) switches to the open state.

8. The high-temperature furnace tube control system according to claim 1, characterized in that, The high-temperature furnace tube control system also includes a heating power supply (900), a power module switch, a smoke detector switch (160), and a heating power supply switch (150). The power module switch is connected in series between the power module (100) and the external power supply; The smoke detector switch (160) is connected in series between the power module (100) and the smoke detector (840). The smoke detector switch (160), the smoke detector (840) and the power module (100) are connected in series to form a closed loop. The heating power switch (150) is connected in series between the power module (100) and the heating power supply (900).

9. A high-temperature furnace tube, characterized in that, include: The high-temperature furnace tube control system according to any one of claims 1-8; Furnace (810); A hollow detection frame (820) is disposed above the furnace (810), and a smoke detector (840) is disposed on the hollow detection frame (820) and faces the furnace (810) through the hollow position of the hollow detection frame (820). as well as A driving component (830) is disposed on the detection frame.

10. The high-temperature furnace tube according to claim 9, characterized in that, The drive assembly (830) is disposed in the middle of the hollow detection frame (820); The smoke detector (840) is equipped with connecting lines arranged along the sidewall of the hollow detection frame (820).

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