A multi-channel ceramic heating device

Abstract

The utility model relates to the technical field of heater, especially a kind of ceramic heating device of porous channel, including base body and heating circuit, the heating circuit is arranged in base body, the air inlet channel and air outlet channel that are connected are equipped in the base body, the air inlet hole of air inlet channel is located in the lower surface of base body, the air outlet hole of air outlet channel is located in the side of base body, the air blower is equipped in the lower part of base body, the air inlet hole is connected with air blower.The utility model sets up multiple air inlet channels and air outlet channels in the base body of heater, air blower is set at the time in air hole, and heat is exchanged by air flow forced convection, the active heat dissipation of ceramic heater of high power density is realized, the temperature uniformity and stability of ceramic heater are improved, and the porous structure, heating circuit and ceramic base body are integrated, the external bulky radiator is saved, and the miniaturization and light weight of device are realized.

Description

Technical Field

[0001] This utility model relates to the field of heater technology, and in particular to a porous ceramic heating device. Background Technology

[0002] Ceramics have advantages such as high thermal conductivity, good electrical insulation properties, and a thermal expansion coefficient that matches that of silicon, making them ideal heating substrate materials for high-power electronic devices, semiconductor process equipment, lasers, and other fields.

[0003] Traditional ceramic heaters use a thick-film process to print resistance paste onto a ceramic substrate, generating heat through the Joule effect. However, with the advancement of modern technology towards miniaturization, integration, and high power, the requirements for heater power density are increasing. The thermal conductivity of the ceramic substrate alone is no longer sufficient to dissipate heat quickly, leading to several problems, such as:

[0004] 1. Localized overheating: The area directly below the heating circuit has a much higher temperature than other areas, forming a "hot spot";

[0005] 2. Thermal stress cracking: Excessive temperature gradients can generate thermal stress, leading to cracking of the ceramic matrix;

[0006] 3. Limited applications: It cannot be used in precision applications requiring rapid heating and cooling cycles or extremely stable temperatures.

[0007] Therefore, developing a novel ceramic heater structure capable of active and efficient heat dissipation has become a pressing technical challenge in this field. Utility Model Content

[0008] To address the aforementioned problems, the purpose of this invention is to provide a high-performance aluminum nitride heater with a microchannel structure. Through forced convection heat transfer, it achieves active heat dissipation for high-power-density ceramic heaters, thereby improving the temperature uniformity and stability of the ceramic heaters.

[0009] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a multi-channel ceramic heating device, comprising a substrate and a heating circuit, wherein the heating circuit is disposed in the substrate, and the substrate is provided with a connected air inlet channel and an air outlet channel, wherein the air inlet of the air inlet channel is located on the lower surface of the substrate, and the air outlet of the air outlet channel is located on the side of the substrate, wherein a blower is provided at the lower part of the substrate, and the air inlet is connected to the blower.

[0010] In the above technical solution, the substrate is a ceramic material of alumina or aluminum nitride.

[0011] In the above technical solution, the heating circuit is embedded inside the substrate.

[0012] In the above technical solution, the heating circuit is embedded on the surface of the substrate.

[0013] In the above technical solution, the heating circuit is provided with a connector that extends out of the substrate and is connected to an external electrode through the connector.

[0014] In the above technical solution, the air intake channel and the air outlet channel are perpendicular to each other and connected in an "L" shape.

[0015] In the above technical solution, the thickness of the substrate is 2-6 mm.

[0016] In the above technical solution, the air blower is disposed close to the lower part of the substrate, and the upper part of the air blower is provided with an air blowing hole that is consistent with the position of the air inlet.

[0017] In summary, the advantages of the technical solution of this utility model compared with traditional technical means are as follows: This utility model sets multiple sets of air inlet and outlet channels in the heater body, and sets an air blower at the vent. The heat dissipation efficiency is 1 to 2 orders of magnitude higher than that of pure heat conduction, which can support extreme power density at the kilowatt / square centimeter level and heat dissipation is fast.

[0018] By designing the location and size of the microchannels, local heat can be precisely removed, and the temperature uniformity of the entire ceramic heater can be controlled within ΔTMAX < 1℃, resulting in good temperature uniformity.

[0019] By eliminating localized overheating and enormous thermal stress, the risk of material aging and failure is reduced, extending the service life of the heater and greatly improving its reliability.

[0020] By integrating the microfluidic structure, heating circuit, and ceramic substrate into one unit, the bulky external heat sink is eliminated, achieving miniaturization and weight reduction of the device. Attached Figure Description

[0021] The foregoing and other objects, features and advantages of this invention will become apparent from the following detailed description taken in conjunction with the accompanying drawings.

[0022] Figure 1 This is a three-dimensional schematic diagram of the substrate in this utility model;

[0023] Figure 2 for Figure 1 Cross-sectional view of the central air intake and exhaust channels;

[0024] Figure 3 for Figure 1 Another sectional view;

[0025] Figure 4 for Figure 1 A side view diagram;

[0026] Figure 5 This is a front view schematic diagram of the air blowing port side of the air blowing machine;

[0027] The following labels are used: 100, substrate; 200, heating circuit; 210, connector; 300, air inlet channel; 310, air inlet; 400, air outlet channel; 410, air outlet; 500, air blower; 510, air blowing hole. Detailed Implementation

[0028] Based on the preferred embodiments of this utility model, and through the following description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

[0029] The present invention will be further described with reference to the following figures:

[0030] like Figures 1-5 As shown, a porous ceramic heating device includes a base 100 and a heating circuit 200. The heating circuit 200 is disposed in the base 100. The base 100 has a connected air inlet channel 300 and an air outlet channel 400. The air inlet 310 of the air inlet channel 300 is located on the lower surface of the base 100, and the air outlet 410 of the air outlet channel 400 is located on the side of the base 100. A blower 500 is provided at the lower part of the base 100, and the air inlet 310 is connected to the blower 500.

[0031] The substrate 100 is made of alumina or aluminum nitride ceramic material, providing structural support, electrical insulation, and basic thermal conductivity.

[0032] The heating circuit 200 is embedded inside the substrate 100 or disposed on its surface.

[0033] The heating circuit 200 is provided with a connector 210 extending out of the substrate 100 and is connected to an external electrode through the connector 210.

[0034] The air intake channel 300 and the air outlet channel 400 are perpendicular to each other and connected in an "L" shape.

[0035] The thickness of the substrate 100 is 2-6 mm, while the thickness of the substrate 100 in the prior art is 1-5 mm. Therefore, the thickness needs to be increased in order to set the channels.

[0036] The air blower 500 is disposed close to the lower part of the substrate, and the upper part of the air blower 500 is provided with an air blowing hole 510 that is aligned with the position of the air inlet 310.

[0037] The preparation method of this utility model is as follows:

[0038] S1 casting: Aluminum nitride or aluminum oxide powder, sintering aid, binder and plasticizer are mixed into a slurry and then cast to prepare a ceramic tape.

[0039] S2 graphical processing:

[0040] On some green ceramic strips, an air inlet channel 300 is prepared by laser etching or precision die stamping. On some green ceramic strips, a resistive paste is prepared into a specific pattern by screen printing or inkjet printing technology to initially form a heating circuit 200. An air outlet channel 410 is prepared by laser etching or precision die stamping.

[0041] S3 stacking: The green ceramic strip with an air inlet channel 310, the green ceramic strip with a heating circuit 200 and an air outlet channel 410, and the complete green ceramic strip as a ceramic substrate are stacked in a preset order.

[0042] S4 isostatic pressing: After lamination, cold isostatic pressing is performed to make each layer of green ceramic tape dense and firmly bonded together.

[0043] S5 Debinding and Co-firing: In a protective atmosphere, the isostatically pressed multilayer green ceramic strip is placed in an atmosphere furnace and heated to initially remove the organic binder. Then, it is sintered at a high temperature of 1600℃~1850℃ to densify the ceramic matrix and co-fire it with the internal heating circuit 200 and the air inlet channel 310 into a solid whole.

[0044] S6 Post-processing: After sintering, the intake channel 310 is precision machined, and the electrode positions of the heating circuit 200 are metallized. External electrodes are welded for power supply.

[0045] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A porous ceramic heating device, comprising a substrate and a heating circuit, wherein the heating circuit is disposed in the substrate, characterized in that: The substrate has an air inlet channel and an air outlet channel that are connected to each other. The air inlet of the air inlet channel is located on the lower surface of the substrate, and the air outlet of the air outlet channel is located on the side of the substrate. An air blower is provided at the lower part of the substrate, and the air inlet is connected to the air blower.

2. The porous ceramic heating device according to claim 1, characterized in that: The substrate is a ceramic material of alumina or aluminum nitride.

3. The porous ceramic heating device according to claim 1, characterized in that: The heating circuit is embedded inside the substrate.

4. The porous ceramic heating device according to claim 1, characterized in that: The heating circuit is embedded on the surface of the substrate.

5. The porous ceramic heating device according to claim 1, characterized in that: The heating circuit is provided with a connector that extends out of the substrate and is connected to an external electrode through the connector.

6. The porous ceramic heating device according to claim 1, characterized in that: The air intake channel and the air outlet channel are perpendicular to each other and connected in an "L" shape.

7. The porous ceramic heating device according to claim 1, characterized in that: The thickness of the substrate is 2 to 6 mm.

8. The porous ceramic heating device according to claim 1, characterized in that: The air blower is positioned close to the lower part of the substrate, and the upper part of the air blower has an air blowing hole that is aligned with the position of the air inlet.

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