Dual seal device and vacuum chamber

Abstract

The utility model belongs to vacuum chamber sealing technical field discloses a kind of double sealing device and vacuum chamber, double sealing device is used to seal chamber main body, including support, first drive, second drive and pressure conversion unit, first drive unit includes the first driving element being arranged in support unit, the output end transmission connection of first driving element has upper cover, first driving element is used to drive upper cover sealing chamber main body, second drive unit includes the second driving element being arranged in support unit, pressure conversion unit includes conversion main body, first conversion piece and second conversion piece, conversion main body is set on support unit, cavity is opened in conversion main body, first conversion piece and part second conversion piece are located in cavity, first conversion piece can be transmission connection with second driving element, second conversion piece can abut on upper cover, first conversion piece and second conversion piece transmission connection, the movement direction of first conversion piece and the movement direction of second conversion piece are arranged at angle of inclusion.

Description

Technical Field

[0001] This utility model relates to the field of vacuum chamber sealing technology, and in particular to a double sealing device and a vacuum chamber. Background Technology

[0002] In semiconductor manufacturing, the vacuum chamber is a key component of the core equipment. Its core function is to create and maintain an extremely low-pressure clean environment to eliminate air. The chamber typically has an upper cover and a lower chamber, with a sealing ring located in the lower chamber. Operators secure the chamber by clamping clips between the upper and lower covers. During this process, the sealing ring is compressed by the upper cover, affecting production efficiency and increasing labor intensity. Furthermore, manually sealing the vacuum chamber introduces uncertainty, easily leading to insufficient compression causing vacuum leakage or excessive compression damaging the sealing ring, thus affecting chip quality.

[0003] A related technology provides a cover driving device for a vacuum chamber, including a lifting mechanism, a rotating mechanism, and a locking mechanism. The driving end of the lifting cylinder is connected to the cover and is used to lower the cover to close the opening of the vacuum chamber. The rotating mechanism is connected to the fixed end of the lifting cylinder via a rotating shaft. The rotation of the rotating shaft can move the cover to the top of the vacuum chamber. When the cover is closed, the cover rotates in the plane to the top of the vacuum chamber. Then the cover is lowered and sealed with the vacuum chamber. The locking mechanism fixes the position of the cover after the opening is closed. However, if the lifting cylinder malfunctions when the cover is lowered to seal the vacuum chamber, it will cause vacuum leakage in the vacuum chamber, affecting the quality of the chip inside the vacuum chamber. Utility Model Content

[0004] The purpose of this invention is to provide a double-sealing device and a vacuum chamber. It can form a second seal, preventing vacuum leakage in the chamber body due to malfunction or failure of the first driving component, improving the sealing performance of the chamber body, and enhancing the vacuum retention capability, thus achieving a double-sealing effect.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A double sealing device for sealing the main body of the chamber includes:

[0007] Support unit;

[0008] A first driving unit, the first driving unit includes a first driving member disposed on the support unit, the output end of the first driving member is connected to an upper cover, and the first driving member is used to drive the upper cover to seal the chamber body;

[0009] The second drive unit includes a second drive member disposed on the support unit;

[0010] The pressure conversion unit includes a conversion body, a first conversion component, and a second conversion component. The conversion body is disposed on the support unit and has a cavity. Part of the first conversion component and part of the second conversion component are located in the cavity. The first conversion component can be driven to the second driving component, and the second conversion component can abut against the upper cover. The first conversion component and the second conversion component are driven to each other, and the movement direction of the first conversion component and the movement direction of the second conversion component are set at an angle.

[0011] Preferably, the sidewall of the second conversion member is provided with a first groove along its direction of movement. The pressure conversion unit further includes a first transmission assembly, which is disposed within the cavity. The first transmission assembly includes:

[0012] A connecting rod, which is rotatably connected to the first conversion element located within the cavity;

[0013] The first slider is slidably connected to the first groove, the connecting rod is rotatably connected to the first slider, and the first slider can abut against the first inner wall of the first groove along its extension direction to drive the second conversion component to move.

[0014] Preferably, the first transmission assembly further includes a first elastic element, which is disposed in the first groove along the extending direction of the first groove.

[0015] One end of the first elastic member abuts against the first slider, and the other end of the first elastic member abuts against the second inner wall of the first groove along its extension direction. The second inner wall and the first inner wall are located on the same side of the first slider, and the second inner wall is away from the first slider; or one end of the first elastic member is connected to the first slider, and the other end of the first elastic member is connected to the second inner wall of the first groove along its extension direction. The first inner wall and the second inner wall are located on opposite sides of the first slider.

[0016] Preferably, the pressure conversion unit further includes a first guide assembly disposed within the cavity. The first guide assembly includes a first guide member and a second guide member. The first guide member extends along the movement direction of the second conversion member, and the second guide member has a second groove extending along the movement direction of the second conversion member. The first guide member is slidably connected within the second groove. One of the first guide member and the second guide member is connected to the second conversion member, and the other is connected to the inner wall of the cavity.

[0017] Preferably, the first drive unit further includes a second transmission component, one end of which is connected to the output end of the first drive member, and the other end of which is connected to the upper cover.

[0018] Preferably, the second transmission component includes:

[0019] A connector is disposed on the upper cover, and the output end of the first drive unit is connected to the connector;

[0020] An adjusting member is provided along the extension direction of the output end of the first driving member. The adjusting member is fixedly and adjustablely connected to the output end of the first driving member, and the adjusting member can abut against the connecting member.

[0021] Preferably, the support unit includes a first support member and a second support member arranged in parallel, the chamber body is disposed on the first support member, the second driving member is disposed on the second support member, and the second driving unit further includes a third transmission assembly, the third transmission assembly including:

[0022] The fastener is disposed on the second support member;

[0023] A drive wheel, which is coaxially connected to the output end of the second drive component;

[0024] Driven wheel, which is meshed with the driving wheel;

[0025] A threaded rod, which is coaxially fixed to the driven wheel and rotatably connected to the fixing member;

[0026] A first power transmission component is threadedly connected to the threaded rod, and the first power transmission component can abut against the first conversion component.

[0027] Preferably, two pressure conversion units are provided, spaced apart along the movement direction of the first conversion member, and the movement directions of the two first conversion members are opposite. The threaded rod includes a first threaded portion, a rotating portion, and a second threaded portion connected in sequence, with the first threaded portion and the second threaded portion having opposite rotation directions. The rotating portion is rotatably connected to the fixed member. The first power transmission member is threadedly connected to the first threaded portion and can abut against one of the first conversion members. The third transmission assembly further includes:

[0028] The second power transmission component is threadedly connected to the second threaded portion, and the second power transmission component can abut against another of the first conversion components.

[0029] A vacuum chamber, comprising a chamber body, a top cover, and a double sealing device as described above, wherein the output end of the double sealing device is capable of driving the top cover to seal the chamber body.

[0030] Preferably, the end face of the chamber body is provided with a first sealing ring and a second sealing ring, and the upper cover can press the first sealing ring and the second sealing ring together.

[0031] The beneficial effects of this utility model are:

[0032] This utility model provides a double sealing device and a vacuum chamber for sealing the main body of the chamber. The double sealing device includes a support unit, a first driving unit, a second driving unit, and a pressure conversion unit. The first driving unit includes a first driving member disposed on the support unit. The output end of the first driving member is driven to a top cover. The first driving member is used to drive the top cover to seal the main body of the chamber. The second driving unit includes a second driving member disposed on the support unit. The pressure conversion unit includes a conversion body, a first conversion member, and a second conversion member. The conversion body is disposed on the support unit and has a cavity. Part of the first conversion member and part of the second conversion member are located in the cavity. The first conversion member can be driven to the second driving member, and the second conversion member can abut against the top cover. The first conversion member and the second conversion member are driven to each other, and the movement direction of the first conversion member and the movement direction of the second conversion member are set at an angle.

[0033] When sealing the main body of the chamber, the first drive unit first drives the upper cover to seal the main body of the chamber. Then, the second drive unit starts and transmits the power from its output end to the first conversion unit, causing the first conversion unit to move inside the cavity. Since the first and second conversion units are connected by transmission and their movement directions are set at an angle, the first conversion unit transmits the power to the second conversion unit, causing the second conversion unit to move closer to the upper cover inside the cavity. Finally, it presses against the upper cover and applies additional pressure, making the upper cover fit more tightly with the main body of the chamber, forming a second seal. This avoids vacuum leakage in the main body of the chamber caused by failure or malfunction of the first drive unit, improves the sealing performance of the main body of the chamber, and enhances the vacuum retention capability, achieving a double sealing effect. Attached Figure Description

[0034] Figure 1 This is a first isometric view of the double sealing device provided in this embodiment of the utility model;

[0035] Figure 2 This is a first exploded view of the pressure conversion unit provided in this embodiment of the present invention;

[0036] Figure 3 This is a second exploded view of the pressure conversion unit provided in this embodiment of the present invention;

[0037] Figure 4 This is a second isometric view of the double sealing device provided in this embodiment of the present invention;

[0038] Figure 5 This is a cross-sectional view of the vacuum chamber provided in an embodiment of the present invention;

[0039] Figure 6 This is a third isometric view of the double sealing device provided in this embodiment of the utility model.

[0040] In the picture:

[0041] 1. Support unit; 11. First support member; 12. Second support member; 13. Third support member;

[0042] 2. First drive unit; 21. First drive component; 22. Second transmission assembly; 221. Connecting component; 222. Adjusting component;

[0043] 3. Second drive unit; 31. Second drive component; 32. Third transmission assembly; 321. Fixing component; 322. Drive wheel; 323. Driven wheel; 324. Threaded rod; 3241. First threaded part; 3242. Rotating part; 3243. Second threaded part; 325. First power transmission component; 326. Second power transmission component; 33. Second guide assembly; 331. Guide rail; 332. Second slider;

[0044] 4. Pressure conversion unit; 41. Conversion body; 411. Cavity; 412. First body; 413. Second body; 42. First conversion component; 421. Push plate; 422. Third guide component; 423. Push rod; 424. Fourth guide component; 43. Second conversion component; 431. First slide groove; 432. First inner wall; 433. Second inner wall; 44. First transmission assembly; 441. Connecting rod; 442. First slider; 443. First elastic component; 444. Second elastic component; 45. First guide assembly; 451. First guide component; 452. Second guide component; 4521. Second slide groove;

[0045] 5. Casing; 6. Switch; 7. Screen;

[0046] 20. Vacuum chamber; 201. Chamber body; 202. Top cover; 203. First sealing ring; 204. Second sealing ring. Detailed Implementation

[0047] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0048] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0049] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0050] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0051] This embodiment provides a double sealing device for sealing the chamber body 201, such as... Figures 1-3As shown, the double sealing device includes a support unit 1, a first drive unit 2, a second drive unit 3, and a pressure conversion unit 4. The first drive unit 2 includes a first drive member 21 disposed on the support unit 1. The output end of the first drive member 21 is driven to a top cover 202. The first drive member 21 is used to drive the top cover 202 to seal the main body 201 of the chamber. The second drive unit 3 includes a second drive member 31 disposed on the support unit 1. The pressure conversion unit 4 includes a conversion body 41, a first conversion member 42, and a second conversion member 43. The conversion body 41 is disposed on the support unit 1. A cavity 411 is opened in the conversion body 41. Part of the first conversion member 42 and part of the second conversion member 43 are located in the cavity 411. The first conversion member 42 can be driven to the second drive member 31. The second conversion member 43 can abut against the top cover 202. The first conversion member 42 and the second conversion member 43 are driven to each other. The movement direction of the first conversion member 42 and the movement direction of the second conversion member 43 are set at an angle.

[0052] When sealing the main body 201 of the chamber, the first drive member 21 first drives the upper cover 202 to seal the main body 201 of the chamber. Then, the second drive member 31 is activated and transmits the power from its output end to the first conversion member 42, causing the first conversion member 42 to move in the cavity 411. Since the first conversion member 42 and the second conversion member 43 are connected by transmission and their movement directions are set at an angle, the first conversion member 42 transmits the power to the second conversion member 43, causing the second conversion member 43 to move in the cavity 411 towards the upper cover 202. Finally, it presses against the upper cover 202 and applies additional pressure, making the upper cover 202 fit more tightly with the main body 201 of the chamber, forming a second seal. This avoids vacuum leakage in the main body 201 of the chamber caused by failure or malfunction of the first drive member 21, improves the sealing performance of the main body 201 of the chamber, and enhances the vacuum retention capacity, achieving the effect of double sealing.

[0053] Optionally, such as Figure 1 As shown, in this embodiment, the first driving component 21 is a cylinder. In other embodiments, the first driving component 21 is a rotary motor or a linear motor, etc. No limitation is made here.

[0054] Optionally, such as Figure 1 As shown, in this embodiment, the second driving component 31 is a geared motor. In other embodiments, the second driving component 31 is a rotary motor or a rotary cylinder, etc. No limitation is made here.

[0055] Optionally, such as Figure 1As shown, the first drive unit 2 also includes a second transmission assembly 22. One end of the second transmission assembly 22 is connected to the output end of the first drive member 21, and the other end is connected to the upper cover 202. The second transmission assembly 22 can transmit the power of the first drive member 21 to the upper cover 202, thereby sealing the chamber body 201.

[0056] Specifically, such as Figure 1 As shown, in this embodiment, the second transmission assembly 22 includes a connector 221 and an adjusting member 222. The connector 221 is disposed on the upper cover 202, and the output end of the first driving member 21 is connected to the connector 221. Along the extending direction of the output end of the first driving member 21, the adjusting member 222 is fixedly and adjustablely connected to the output end of the first driving member 21, and the adjusting member 222 can abut against the connector 221. Since the adjusting member 222 can abut against the connector 221, by changing the fixed position of the adjusting member 222 at the output end of the first driving member 21, the stroke of the upper cover 202 can be changed, thereby achieving the effect of adjustable sealing of the upper cover 202 and the chamber body 201. In other embodiments, the second transmission assembly 22 can also be a combination of gear and rack, with the gear coaxially connected to the output end of the first driving member 21, and the rack connected to the upper cover 202, and the rack meshing with the gear.

[0057] Specifically, such as Figure 1 As shown, in this embodiment, the output end of the first driving member 21 is threadedly connected to the connecting member 221, and the adjusting member 222 is threadedly connected to the output end of the first driving member 21. In other embodiments, the output end of the first driving member 21 is snap-fitted to the connecting member 221, and the adjusting member 222 is clamp-fitted to the output end of the first driving member 21, etc. No limitation is made here. It should be noted that in this embodiment, the adjusting member 222 is a nut. In other embodiments, the adjusting member 222 is a snap-fit ​​sleeve, etc. No limitation is made here.

[0058] Optionally, such as Figure 1 As shown, the support unit 1 includes a support frame and a first support member 11, a second support member 12 and a third support member 13 arranged in parallel. The third support member 13, the first support member 11 and the second support member 12 are arranged sequentially from top to bottom. The chamber body 201 is disposed on the first support member 11, the second drive member 31 is disposed on the second support member 12 and the first drive member 21 is disposed on the third support member 13.

[0059] Specifically, such as Figure 2 and Figure 3As shown, in this embodiment, the movement direction of the first conversion member 42 is perpendicular to the movement direction of the second conversion member 43. The perpendicular arrangement of the first and second conversion members 42 and 43 increases space utilization and improves the spatial adaptability of the double sealing device. In other embodiments, the movement direction of the first conversion member 42 is at an angle of 120°, 60°, 45°, or 30° to the movement direction of the second conversion member 43, etc. No limitation is made here. It should be noted that the movement direction of the first conversion member 42 is horizontal, that is... Figure 2 and Figure 3 In the X direction, the movement direction of the second conversion component 43 is vertical, that is... Figure 2 and Figure 3 The Z direction in the equation.

[0060] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, the conversion body 41 includes a first body 412 and a second body 413. The second body 413 is detachably connected to the upper cover 202, and the first body 412 is detachably connected to the second body 413. The first body 412 and the second body 413, when connected, form a cavity 411. It should be noted that in this embodiment, the first body 412 is snap-fitted to the upper cover 202, and the second body 413 is plugged into the first body 412. In other embodiments, the first body 412 is threaded onto the upper cover 202, and the second body 413 is magnetically connected to the first body 412, etc. No limitations are imposed here.

[0061] Specifically, such as Figure 2 and Figure 3 As shown, the first conversion member 42 includes an integrally connected push plate 421, a third guide member 422, and a fourth guide member 424. Both the third guide member 422 and the fourth guide member 424 extend horizontally toward the second main body 413. The output end of the second drive member 31 can abut against the push plate 421, and the third guide member 422 and the fourth guide member 424 can be slidably connected to the cavity 411. The two guide members provide guidance for the movement of the push plate 421, ensuring stable horizontal movement of the push plate 421.

[0062] Specifically, such as Figure 2 and Figure 3 As shown, the second conversion element 43 is a cylindrical structure. In other embodiments, the second conversion element 43 is a block structure or a square column structure, etc. No limitation is made here.

[0063] Optionally, such as Figure 2 and Figure 3As shown, the side wall of the second conversion member 43 is provided with a first groove 431 along its movement direction. The pressure conversion unit 4 also includes a first transmission assembly 44, which is disposed in the cavity 411. The first transmission assembly 44 includes a connecting rod 441 and a first slider 442. The connecting rod 441 is rotatably connected to the first conversion member 42 located in the cavity 411. The first slider 442 is slidably connected to the first groove 431. The connecting rod 441 is rotatably connected to the first slider 442, and the first slider 442 can abut against the first inner wall 432 of the first groove 431 along its extension direction to drive the second conversion member 43 to move.

[0064] When the first conversion component 42 moves horizontally, it drives the connecting rod 441 to rotate, which in turn drives the first slider 442 to slide vertically within the first groove 431. When the first slider 442 abuts against the first inner wall 432 during its movement, the first conversion component 42 continues to move horizontally. This abuts against the first inner wall 432, causing the second conversion component 43 to move vertically towards the upper cover 202, thus sealing the upper cover 202 and the main body 201 of the chamber. By providing a connecting rod-shaped first transmission assembly 44, a reliable motion connection is provided for the force transmission between the first conversion component 42 and the second conversion component 43. Furthermore, the connecting rod-shaped first transmission assembly 44 has a compact structure and high transmission efficiency. Specifically, the connecting rod 441 is rotatably connected to the third guide component 422.

[0065] Specifically, in this embodiment, the first slider 442 is a cylindrical slider, and the outer surface of the cylindrical slider facing the first inner wall 432 has an abutment plane. In other embodiments, the first slider 442 is a cube or a cylindrical block, etc. No limitation is made here.

[0066] Optionally, such as Figure 2 and Figure 3As shown, in this embodiment, the first transmission assembly 44 further includes a first elastic member 443. The first elastic member 443 is disposed in the first slide groove 431 along the extending direction of the first slide groove 431. One end of the first elastic member 443 abuts against the first slider 442, and the other end of the first elastic member 443 abuts against the second inner wall 433 of the first slide groove 431 along its extending direction. The second inner wall 433 and the first inner wall 432 are located on the same side of the first slider 442, and the second inner wall 433 is away from the first slider 442. When the first slider 442 slides within the first groove 431, the first elastic element 443 is compressed, providing a certain buffering force for the first slider 442. The compression of the first elastic element 443 also generates a restoring force. When the second driving element 31 removes the force on the first conversion element 42, the first elastic element 443 simultaneously exerts a reverse force on the first slider 442 along the first groove 431, causing the first slider 442 and connecting rod 441 to return to their initial positions. This achieves automatic repositioning of the mechanical structure after the driving force is removed, ensuring the repeatability and accuracy of the pressure conversion unit 4. In other embodiments, the first elastic element 443 is disposed within the first groove 431 along its extension direction. One end of the first elastic element 443 is connected to the first slider 442, and the other end is connected to the second inner wall 433 of the first groove 431 along its extension direction. The first inner wall 432 and the second inner wall 433 are located on opposite sides of the first slider 442. It should be noted that in this embodiment, the first elastic element 443 is a first spring. In other embodiments, the first elastic element 443 is a first helical spring or a first bellows, etc. No limitation is made here. Specifically, one end of the first elastic element 443 abuts against the abutment plane.

[0067] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, two first slide grooves 431 are provided, respectively located on the first and second sidewalls of the second conversion member 43. The first and second sidewalls are arranged opposite to each other. Two first transmission components 44 are provided, with two connecting rods 441 rotatably connected to the third guide member 422 and the fourth guide member 424, respectively. Two first sliders 442 are slidably connected within the two first slide grooves 431. The provision of two first transmission components 44 makes the force conversion between the first conversion member 42 and the second conversion member 43 smoother. In other embodiments, one or three first transmission components 44 may be provided, and correspondingly, one or three first slide grooves 431 may be provided. No limitation is made here. It should be noted that the first and second sidewalls are arranged opposite to each other along the Y direction, and the X, Y, and Z directions are perpendicular to each other.

[0068] Specifically, such as Figure 2 and Figure 3As shown, in this embodiment, the second main body 413 has a recessed hole (not shown) on the side facing the first conversion member 42, and the recessed hole extends along the movement direction of the first conversion member 42. The first conversion member 42 also includes a push rod 423 connected to the push plate 421. The push rod 423 extends horizontally toward the second main body 413. The first transmission assembly 44 also includes a second elastic member 444. One end of the second elastic member 444 abuts against the push rod 423, and the other end of the second elastic member 444 abuts against the bottom wall of the recessed hole along its extension direction. The provision of the second elastic member 444 can provide a certain buffering force for the push rod 423. When the second elastic member 31 removes the force on the push plate 421, the second elastic member 444 simultaneously exerts a reverse force on the push rod 423 along the extension direction of the recessed hole, so that the first conversion member 42 returns to its initial position, further ensuring the repeatability and accuracy of the pressure conversion unit 4.

[0069] Optionally, such as Figure 2 and Figure 3 As shown, the pressure conversion unit 4 also includes a first guide assembly 45, which is disposed within the cavity 411. The first guide assembly 45 includes a first guide member 451 and a second guide member 452. The first guide member 451 extends along the movement direction of the second conversion member 43, and the second guide member 452 has a second groove 4521 extending along the movement direction of the second conversion member 43. The first guide member 451 is slidably connected within the second groove 4521. One of the first guide member 451 and the second guide member 452 is connected to the second conversion member 43, and the other is connected to the inner wall of the cavity 411. Through the sliding engagement of the first guide member 451 and the second groove 4521, the movement range of the second conversion member 43 is strictly limited in the vertical direction, preventing lateral deviation, jamming, or stuckness during pressure conversion, ultimately ensuring the working accuracy and stability of the pressure conversion unit 4. It should be noted that in this embodiment, the first guide member 451 is a first guide bar, and the second guide member 452 is a guide block. In other embodiments, the first guide member 451 is a first guide post, the second guide member 452 is a guide frame, etc. No limitations are imposed here.

[0070] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, the first guide member 451 is connected to the second conversion member 43, and the second guide member 452 is connected to the inner wall of the cavity 411. In other embodiments, the second guide member 452 is connected to the second conversion member 43, and the first guide member 451 is connected to the inner wall of the cavity 411. No limitations are imposed here.

[0071] Specifically, such as Figure 2 and Figure 3As shown, in this embodiment, two first guide components 45 are provided. Two first guide members 451 are connected to the third and fourth sidewalls of the second conversion member 43. The third and fourth sidewalls are arranged opposite to each other, and the first, third, second, and fourth sidewalls are connected sequentially. In other embodiments, the two first guide members 451 are connected to the first and second sidewalls of the second conversion member 43, etc. No limitation is made here. It should be noted that the third and fourth sidewalls are arranged opposite to each other along the X-direction.

[0072] Specifically, such as Figure 1 and Figure 4 As shown, the support unit 1 includes a first support member 11 and a second support member 12 arranged in parallel. The chamber body 201 is disposed on the first support member 11, and the second drive member 31 is disposed on the second support member 12. The second drive unit 3 also includes a third transmission assembly 32. The third transmission assembly 32 includes a fixing member 321, a driving wheel 322, a driven wheel 323, a threaded rod 324, and a first power transmission member 325. The fixing member 321 is disposed on the second support member 12. The driving wheel 322 is coaxially connected to the output end of the second drive member 31. The driven wheel 323 is meshed with the driving wheel 322. The threaded rod 324 is coaxially fixed to the driven wheel 323 and rotatably connected to the fixing member 321. The first power transmission member 325 is threadedly connected to the threaded rod 324 and can abut against the first conversion member 42.

[0073] When the second driving member 31 drives the first conversion member 42, the second driving member 31 starts and outputs rotational power, which in turn drives the coaxial driving wheel 322 to rotate. The driving wheel 322 drives the driven wheel 323 to rotate through meshing. Then, the driven wheel 323 drives the coaxial threaded rod 324 to rotate. When the threaded rod 324 rotates, the first power transmission member 325, which is threaded to it, moves linearly along the axial direction of the threaded rod 324. After the first power transmission member 325 moves, it abuts against and pushes the first conversion member 42, completing the final transmission of power. The setting of the third transmission assembly 32 realizes the transmission of power between the second driving member 31 and the first conversion member 42. It should be noted that in this embodiment, the first power transmission member 325 is a first power transmission plate. In other embodiments, the first power transmission member 325 is a first power transmission rod, etc. No limitation is made here. Specifically, such as Figure 4 As shown, the fastener 321 is a bearing housing.

[0074] Specifically, such as Figure 4 As shown, the second drive unit 3 also includes a second guide component 33, which includes a guide rail 331 and a second slider 332 that are slidably connected. The guide rail 331 is fixedly connected to the second support member 12, and the second slider 332 is fixedly connected to the first power transmission member 325.

[0075] Optionally, such as Figure 1 and Figure 4 As shown, there are two pressure conversion units 4, which are spaced apart along the movement direction of the first conversion member 42, and the movement directions of the two first conversion members 42 are opposite. The threaded rod 324 includes a first threaded part 3241, a rotating part 3242, and a second threaded part 3243 connected in sequence. The first threaded part 3241 and the second threaded part 3243 have opposite rotation directions. The rotating part 3242 is rotatably connected to the fixed member 321. The first power transmission member 325 is threadedly connected to the first threaded part 3241 and can abut against one of the first conversion members 42. The third transmission assembly 32 also includes a second power transmission member 326, which is threadedly connected to the second threaded part 3243 and can abut against the other first conversion member 42. When the second drive member 31 outputs rotational force, since the first power transmission member 325 is threadedly engaged with the first threaded portion 3241 and the second power transmission member 326 is threadedly engaged with the second threaded portion 3243, when the threaded rod 324 rotates, since the threads on both sides of the rotating portion 3242 rotate in opposite directions, the first power transmission member 325 and the second power transmission member 326 will generate opposite linear motion, thereby pushing the two first conversion members 42.

[0076] Specifically, such as Figure 4 As shown, the second drive unit 3 includes two second guide components 33. The guide rails 331 in the two second guide components 33 are fixedly connected to the second support member 12. One of the two second guide components 33, the second slider 332, is fixedly connected to the first power transmission member 325, and the other is fixedly connected to the second power transmission member 326.

[0077] Specifically, such as Figure 1 and Figure 4 As shown, in this embodiment, there are four pressure conversion units 4. The four pressure conversion units 4 are arranged in pairs. The two groups of pressure conversion units 4 are arranged at intervals along the movement direction perpendicular to the first conversion member 42. The two pressure conversion units 4 in each group are arranged at intervals along the movement direction of the first conversion member 42, and the movement directions of the two first conversion members 42 are opposite. There are two second drive units 3. The two third transmission components 32 are arranged at intervals along the movement direction perpendicular to the first conversion member 42.

[0078] This embodiment also provides a vacuum chamber 20, such as Figure 5As shown, the vacuum chamber 20 includes a chamber body 201, a top cover 202, and a double sealing device. The output end of the double sealing device can drive the top cover 202 to seal the chamber body 201. By applying the double sealing device, vacuum leakage in the chamber body 201 caused by failure or malfunction of the first driving component 21 is avoided, the sealing performance of the chamber body 201 is enhanced, and the vacuum retention capability is improved, thus achieving the effect of double sealing.

[0079] Specifically, such as Figure 1 and Figure 5 As shown, in this embodiment, one end of the upper cover 202 is rotatably connected to the chamber body 201. In other embodiments, the upper cover 202 is slidably connected to the chamber body 201, etc. No limitations are imposed here.

[0080] Optionally, such as Figure 5 As shown, a first sealing ring 203 and a second sealing ring 204 are embedded on the end face of the chamber body 201, and the upper cover 202 can press the first sealing ring 203 and the second sealing ring 204 tightly. The two sealing rings can better ensure the airtightness of the vacuum chamber 20.

[0081] Specifically, such as Figure 5 As shown, the first sealing ring 203 is an O-ring, and the second sealing ring 204 is a multi-surface sealing ring. In other embodiments, the first sealing ring 203 is a planar sealing ring, and the second sealing ring 204 is a U-ring, etc. No limitations are imposed here.

[0082] Optionally, such as Figure 1 and Figure 6 As shown, the double sealing device also includes a housing 5, which surrounds the support unit 1, the first drive unit 2, the second drive unit 3, and the pressure conversion unit 4. The housing 5 provides physical protection against damage to the internal structure from the external environment.

[0083] Optionally, such as Figure 1 and Figure 6 As shown, the double sealing device also includes multiple switches 6, screens 7 and a controller. The multiple switches 6 and screens 7 are all electrically connected to the controller, and the first drive unit 21 and the second drive unit 31 are electrically connected to the controller.

[0084] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A double sealing device for sealing the main body of a chamber (201), characterized in that, include: Support unit (1); The first driving unit (2) includes a first driving member (21) disposed on the support unit (1). The output end of the first driving member (21) is connected to the upper cover (202). The first driving member (21) is used to drive the upper cover (202) to seal the chamber body (201). The second drive unit (3) includes a second drive member (31) disposed on the support unit (1); The pressure conversion unit (4) includes a conversion body (41), a first conversion component (42), and a second conversion component (43). The conversion body (41) is disposed on the support unit (1). A cavity (411) is provided in the conversion body (41). Part of the first conversion component (42) and part of the second conversion component (43) are located in the cavity (411). The first conversion component (42) can be connected to the second driving component (31) for transmission. The second conversion component (43) can abut against the upper cover (202). The first conversion component (42) and the second conversion component (43) are connected for transmission. The movement direction of the first conversion component (42) and the movement direction of the second conversion component (43) are set at an angle.

2. The double sealing device according to claim 1, characterized in that, The second conversion component (43) has a first groove (431) on its side wall along its direction of movement. The pressure conversion unit (4) further includes a first transmission assembly (44), which is disposed in the cavity (411). The first transmission assembly (44) includes: Linkage (441), which is rotatably connected to the first conversion element (42) located in the cavity (411); The first slider (442) is slidably connected to the first groove (431), the connecting rod (441) is rotatably connected to the first slider (442), and the first slider (442) can abut against the first inner wall (432) of the first groove (431) along its extension direction to drive the second conversion member (43) to move.

3. The double sealing device according to claim 2, characterized in that, The first transmission assembly (44) further includes a first elastic element (443), which is disposed in the first slide groove (431) along the extending direction of the first slide groove (431); One end of the first elastic member (443) abuts against the first slider (442), and the other end of the first elastic member (443) abuts against the second inner wall (433) of the first groove (431) along its extension direction. The second inner wall (433) and the first inner wall (432) are located on the same side of the first slider (442), and the second inner wall (433) is away from the first slider (442); or one end of the first elastic member (443) is connected to the first slider (442), and the other end of the first elastic member (443) is connected to the second inner wall (433) of the first groove (431) along its extension direction. The first inner wall (432) and the second inner wall (433) are located on opposite sides of the first slider (442).

4. The double sealing device according to claim 1, characterized in that, The pressure conversion unit (4) further includes a first guide assembly (45), which is disposed in the cavity (411). The first guide assembly (45) includes a first guide member (451) and a second guide member (452). The first guide member (451) extends along the movement direction of the second conversion member (43), and the second guide member (452) has a second groove (4521) extending along the movement direction of the second conversion member (43). The first guide member (451) is slidably connected in the second groove (4521). One of the first guide member (451) and the second guide member (452) is connected to the second conversion member (43), and the other is connected to the inner wall of the cavity (411).

5. The double sealing device according to any one of claims 1-4, characterized in that, The first drive unit (2) further includes a second transmission component (22), one end of which is connected to the output end of the first drive member (21), and the other end is connected to the upper cover (202).

6. The double sealing device according to claim 5, characterized in that, The second transmission assembly (22) includes: A connector (221) is disposed on the upper cover (202), and the output end of the first drive member (21) is connected to the connector (221); An adjusting member (222) is attached to the output end of the first driving member (21) along the extension direction of the output end of the first driving member (21). The adjusting member (222) is fixedly and adjustablely connected to the output end of the first driving member (21), and the adjusting member (222) can abut against the connecting member (221).

7. The double sealing device according to any one of claims 1-4, characterized in that, The support unit (1) includes a first support member (11) and a second support member (12) arranged in parallel. The chamber body (201) is disposed on the first support member (11), and the second drive member (31) is disposed on the second support member (12). The second drive unit (3) further includes a third transmission assembly (32), which includes: A fastener (321) is disposed on the second support member (12); A drive wheel (322) is coaxially connected to the output end of the second drive member (31); Driven wheel (323), which is meshed with the driving wheel (322); A threaded rod (324) is coaxially fixed to the driven wheel (323), and the threaded rod (324) is rotatably connected to the fixing member (321); A first power transmission component (325) is threadedly connected to the threaded rod (324), and the first power transmission component (325) can abut against the first conversion component (42).

8. The double sealing device according to claim 7, characterized in that, Two pressure conversion units (4) are provided, and the two pressure conversion units (4) are spaced apart along the movement direction of the first conversion member (42), and the movement directions of the two first conversion members (42) are opposite. The threaded rod (324) includes a first threaded part (3241), a rotating part (3242), and a second threaded part (3243) connected in sequence. The first threaded part (3241) and the second threaded part (3243) have opposite rotation directions. The rotating part (3242) is rotatably connected to the fixed member (321). The first power transmission member (325) is threadedly connected to the first threaded part (3241). The first power transmission member (325) can abut against one of the first conversion members (42). The third transmission assembly (32) further includes: The second power transmission member (326) is threadedly connected to the second threaded portion (3243) and is capable of abutting against another of the first conversion members (42).

9. A vacuum chamber, characterized in that, The vacuum chamber includes a chamber body (201), a top cover (202), and a double sealing device as described in any one of claims 1-8, wherein the output end of the double sealing device is capable of driving the top cover (202) to seal the chamber body (201).

10. The vacuum chamber according to claim 9, characterized in that, The end face of the chamber body (201) is provided with a first sealing ring (203) and a second sealing ring (204), and the upper cover (202) can press the first sealing ring (203) and the second sealing ring (204) together.

Images