A semiconductor material storage rack and feeding and discharging device

Abstract

The utility model relates to sheet metal cutting technical field, concretely relates to a semiconductor material storage rack and feeding and discharging device. The semiconductor material storage rack, the semiconductor material storage rack includes: the material frame spare, stores material subassembly for storing board material in the opposite two sides of material frame spare, wherein, the storage subassembly includes at least two storage plates, the storage plate is side by side and set up in the side of material frame spare, a plurality of parallel placement grooves are equipped on the storage plate, the both ends of placement groove are equipped with limiting piece respectively, the limiting piece part is protruding from the back of storage plate to the placement groove, and can be up and down elastic telescopic. In the embodiment, the protruding part of limiting piece is made of elastic material, so that the protruding part can realize up and down elastic telescopic relative to the bottom of placement groove, so that the protruding part can realize that the board material is blocked and limited without external force and falls off, and when needing to take and place the board material, the smoothness of board material taking and placing can be ensured.

Description

Technical Field

[0001] This utility model relates to the field of sheet metal cutting technology, specifically to a semiconductor material storage rack and loading / unloading device. Background Technology

[0002] Boards are often substrates produced by processing plants. After purchasing the boards, manufacturers need to redesign and reprocess their dimensions according to the customer's customized needs. The outer frame of the board is cut off (the outer frame is scrap material, and after cutting, it needs to be placed in a scrap box) to obtain a board that meets the customer's customized size requirements. Boards are generally Mini LED modules, PCBA boards or other materials, or PCB boards (such as semiconductor carriers, PCB substrates, etc.).

[0003] In the process of realizing this utility model, the inventors discovered that: Currently, existing feeding devices usually stack the boards side by side in the material storage rack, and the stored boards are prone to falling off the feeding device, causing damage to the boards or threatening the safety of equipment and personnel. Summary of the Invention

[0004] In view of the above problems, this utility model is proposed to provide a semiconductor material storage rack and board cutting and unloading device that overcomes or at least partially solves the above problems.

[0005] In a first aspect, this utility model provides a semiconductor material storage rack, which includes: a material frame; Storage components are located on opposite sides of the material frame and are used to store sheet metal. The storage component includes at least two storage plates, which are arranged side by side on the side of the material frame. The storage plate is provided with multiple parallel placement slots. Each placement slot has a limiting member at both ends. A portion of the limiting member protrudes from the back of the storage plate toward the placement slot and can elastically extend and retract vertically to prevent the product from falling off.

[0006] Furthermore, the limiting member includes a mounting member disposed on the back of the storage plate; An elastic element is provided on the mounting member, and a portion of the elastic element protrudes from the bottom of the placement groove.

[0007] Furthermore, the elastic element includes a fixing part, a first elastic part, and a second elastic part. The fixing part is fixedly connected to the mounting member. The fixing part is connected to one end of the first elastic part, and the other end of the first elastic part is connected to the second elastic part. The end of the second elastic part is at a certain distance from the mounting member. The fixing part protrudes from the connection position of the first elastic part and the second elastic part.

[0008] Furthermore, a transition structure is provided at the connection position between the first projectile and the second projectile.

[0009] Furthermore, the limiting member also includes a sensor, which is disposed on the mounting member and is positioned corresponding to the end of the second spring.

[0010] Furthermore, the placement groove is provided with a through hole near its end.

[0011] Furthermore, the mounting component includes a mounting position, and the mounting component is mounted and connected to one end of the elastic member; The elastic space is used to accommodate the other end of the elastic element, and the elastic element can move up and down.

[0012] The second aspect discloses a semiconductor substrate loading and unloading device, comprising: the aforementioned semiconductor material storage rack for storing the substrate; A frame, wherein a lifting platform is provided within the frame, and the lifting platform can move linearly up and down relative to the frame to drive the semiconductor material storage rack to move linearly. A lifting drive assembly is located on one side of the frame and is used to drive the lifting platform to move up and down. A conveying assembly is provided on the side of the frame near the lifting drive assembly for conveying the semiconductor material storage rack; The conveying assembly includes a first conveying assembly and a second conveying assembly, which are arranged side by side, one above the other.

[0013] The third aspect discloses a semiconductor substrate cutting device, including a cutting device body for cutting and storing substrates; And, the loading and unloading device is located at the loading position and the unloading position of the cutting equipment body.

[0014] The beneficial effects of the above-mentioned technical solutions provided by the embodiments of this utility model include at least the following: This utility model provides a semiconductor material storage rack. By setting a limiting member at the position corresponding to the placement slot, a part of the limiting member protrudes from the back of the storage plate toward the placement slot. When the material is placed in, the protruding part of the limiting member retracts downward to ensure that the material can be smoothly placed into the placement slot. After the material enters the placement slot, the limiting member springs back, and the protruding part of the limiting member can prevent the material from falling out of the placement slot.

[0015] In this embodiment, the protruding part of the limiting member is made of an elastic material, which ensures that the protruding part can elastically expand and contract relative to the bottom of the placement groove, so that the protruding part can prevent the board from falling off without the action of external force; while ensuring that the board can be picked up and put down smoothly when needed.

[0016] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of this invention can be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings.

[0017] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0019] Figure 1 This is a schematic diagram of a semiconductor substrate cutting equipment; Figure 2 This is a schematic diagram of the loading and unloading device of this utility model; Figure 3 This is a schematic diagram of the semiconductor material storage rack of this utility model; Figure 4 This is a schematic diagram of the material storage plate of this utility model; Figure 5 This is a utility model Figure 3 A diagram from another perspective; Figure 6 This is a schematic diagram of the elastic element of this utility model; Figure 7 This is a schematic diagram of another state of the material storage plate of this utility model; Figure 8 This is a schematic diagram of the cutting device body of this utility model.

[0020] The image shows: 1. Loading and unloading device; 2. Cutting equipment body; 10. Semiconductor material storage rack; 11. Frame; 12. Lifting platform; 13. Conveyor belt; 14. Lifting drive assembly; 15. Conveying assembly; 100. Storage assembly; 101. Material frame; 102. Material storage plate; 103. Placement slot; 104. Elastic element; 105. Mounting component; 106. Sensor; 107. Through hole; 1040. Fixing part; 1041. First projectile part; 1042. Transition structure; 1043. Second projectile part; 150. Installation position; 151. Flexible space. Detailed Implementation

[0021] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are merely illustrative of the present invention and should not be construed as limiting the scope of protection of the present invention.

[0022] It should be noted that, unless otherwise stated, the technical or scientific terms used in this application shall have the ordinary meaning as understood by one of ordinary skill in the art to which this utility model pertains.

[0023] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly defined.

[0025] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] See attached document Figure 1 As shown in the embodiment, the semiconductor substrate cutting equipment is a substrate dicing machine, which can be used to precisely cut Mini / Micro LED substrates. This equipment, through precision cutting technology, can achieve high-precision edge cutting of MLED display panels. In the MLED manufacturing process, the edge cutting process is directly related to the bezel size and overall aesthetics of the display unit, solving problems such as edge chipping and burrs that are easily caused by traditional cutting methods.

[0028] The loading and unloading positions of the semiconductor substrate cutting equipment include loading and unloading devices for automatically feeding the substrate to be cut to the substrate dicing machine and receiving the cut substrate, thereby improving the automation of the cutting equipment and increasing processing efficiency.

[0029] The inventors of this utility model have continued their research on how to effectively solve the safety problem caused by the easy detachment of semiconductor materials from the storage rack in current loading and unloading devices. Their research includes at least: how to install a restraining component on the storage rack to prevent the materials from falling off. This restraining component ensures smooth loading and unloading of the materials and also prevents the materials from falling off. After extensive and repeated research, the inventors have proposed the semiconductor material storage rack, loading and unloading device, and cutting equipment of this application.

[0030] Before describing the embodiments of this utility model in detail, the design concept of this utility model is first outlined below. (Refer to the appendix.) Figure 2As shown, this utility model designs a semiconductor material storage rack, which includes a material frame and a storage component. By setting the storage component on the material frame and setting a limiting component on the storage component, the limiting component effectively prevents the plates stored on it from falling off automatically, causing damage to the plates or injury to personnel.

[0031] See attached document Figure 3 As shown, this utility model embodiment provides a material storage rack 10, which includes: a material frame 101; Storage components 100 are provided on opposite sides of the material frame 101 and are used to store sheet metal. The storage component 100 includes at least two storage plates 102, which are arranged side by side on the side of the material frame 101. The storage plate 102 is provided with a plurality of parallel placement slots 103. Each of the placement slots 103 has a limiting member at both ends. A portion of the limiting member protrudes from the back of the storage plate 102 toward the placement slot 103 and can elastically extend and retract vertically to prevent the product from falling off.

[0032] Understandably, the material frame 101 serves as a rack for storing sheet metal, and storage components 100 are provided on both sides inside the material frame 101. Multiple placement slots 103 are evenly distributed on the storage components 100, allowing sheet metal to be placed side-by-side in the placement slots 103, thus enabling stacked storage. This effectively reduces the space required for sheet metal storage.

[0033] To address the issue of boards easily falling off when stored in current physical storage racks, this embodiment incorporates a limiting member at the location corresponding to the placement slot 103. A portion of this limiting member protrudes from the back of the storage plate 102 towards the placement slot 103. When a board is placed in, the protruding portion of the limiting member retracts downwards, ensuring the board can be smoothly placed into the placement slot 103. After the board enters the placement slot 103, the limiting member springs back, and the protruding portion of the limiting member prevents the board from falling out of the placement slot 103.

[0034] In this embodiment, the protruding part of the limiting member is made of an elastic material, which ensures that the protruding part can elastically expand and contract relative to the bottom of the placement groove 103, so that the protruding part can prevent the plate from falling off without the action of external force; while ensuring that the plate can be picked up and put down smoothly when needed.

[0035] See attached document Figure 4 and 5 As shown in the embodiment, the limiting member further includes a mounting member 105 disposed on the back side of the storage plate 102; An elastic element 104 is provided on the mounting member 105, and a portion of the elastic element 104 protrudes from the bottom of the placement groove 103.

[0036] Understandably, to facilitate the installation of the limiting component, the limiting component is configured as two parts: a mounting component 105 and an elastic component 104. The elastic component 104 is made of elastic material, and a portion of the elastic component 104 protrudes upward, with the protruding portion exceeding the bottom of the placement groove 103 by a certain height. The mounting component 105 is provided with a position for installing the elastic component 104 and a position for the elastic component 104 to retract. The mounting component 105 is connected to the back of the storage plate 102, thereby enabling the elastic component 104 to be fitted and installed in the placement groove 103.

[0037] In actual use, the elastic element 104 is connected to the mounting element 105, and then the mounting element 105 is installed and connected to the back of the storage plate 102, so that a part of the elastic element 104 protrudes upward, that is, a part protrudes from the bottom of the placement groove 103, and the protruding part can prevent the plate from falling off.

[0038] See attached document Figure 6 As shown in the embodiment, the elastic member 104 further includes a fixing part 1040, a first elastic part 1041, and a second elastic part 1043. The fixing part 1040 is fixedly connected to the mounting member 105. The fixing part 1040 is connected to one end of the first elastic part 1041, and the other end of the first elastic part 1041 is connected to the second elastic part 1043. The end of the second elastic part 1043 is at a certain distance from the mounting member 105. The connection position between the first elastic part 1041 and the second elastic part 1043 protrudes from the fixing part 1040.

[0039] See attached document Figure 6 As shown in the embodiment, a transition structure 1042 is provided at the connection position between the first projectile 1041 and the second projectile 1043.

[0040] Understandably, in order to allow the sheet material to smoothly enter the placement groove 103, in this embodiment, the connection between the first elastic part 1041 and the second elastic part 1043 is designed as a gradually transitioning structure. In this embodiment, when the sheet material enters the placement groove 103, it touches the transition structure 1042, allowing the extruded protrusion to move downwards smoothly, enabling the elastic element 104 to enter the mounting member 105. Because the smooth transition structure 1042 is a transition structure, it ensures that the sheet material can pass through smoothly.

[0041] In this embodiment, the transition structure 1042 is an arc-shaped structure, that is, the connection position between the first elastic part 1041 and the second elastic part 1043 is provided with a rounded structure. It can also be considered that the first elastic part 1041 and the second elastic part 1043 are obtained by bending, and the connection position of the two is bent to obtain an arc-shaped structure.

[0042] See attached document Figure 5 As shown in the embodiment, the limiting member further includes a sensor 106, which is disposed on the mounting member 105 and is disposed corresponding to the end of the second spring portion 1043.

[0043] Understandably, to facilitate user awareness of the status of the materials stored in the material storage rack 10, in this embodiment, a sensor 106 is installed on the limiting member, specifically on the mounting member 105. The sensor 106 corresponds to the elastic member 104. When the elastic member 104 contracts, it triggers the sensor 106, which then sends out corresponding information. Alternatively, an indicator light can be provided on the corresponding placement slot 103. When the elastic member 104 triggers the sensor 106, the indicator light for the material's entry position illuminates, indicating that a material is stored; the indicator light goes out, indicating that a material has been removed. The indicator light can be configured according to actual conditions, primarily serving to visually remind staff of the specific material storage status of the material storage rack 10.

[0044] In this embodiment, indicator lights are sequentially positioned at the locations corresponding to the placement slots 103 on the material frame 101. When the sheet material is placed in, it is pressed against the elastic element 104, causing it to retract towards the bottom of the placement slot 103. This causes the free end of the elastic element 104 to press against the corresponding pressure sensor, which sends a corresponding electrical signal, illuminating the indicator light corresponding to the placement slot 103. When the sheet material is removed, it is pressed against the elastic element 104, causing it to retract towards the bottom of the placement slot 103. This causes the free end of the elastic element 104 to press against the corresponding pressure sensor, which sends a corresponding electrical signal, extinguishing the indicator light corresponding to the placement slot 103. Alternatively, a wireless communication module, such as Bluetooth, can be used to send the electrical signals to a server, enabling remote monitoring of the loading and unloading process and notification of personnel.

[0045] It should be noted that in this embodiment, the end of the elastic member 104 is freely suspended. When the plate is pressed against the end, it presses against the corresponding sensor 106. This sensor 106 can be a pressure sensor, which converts the pressure into an electrical signal and sends it to the processor. It should also be noted that commercially available pressure sensor application circuits, including wireless communication modules, power modules, and indicator lights, as well as the electrical connections and communication methods of each module, can refer to existing methods. For example, the power supply powers the various electronic components, and the Bluetooth module is used for communication, etc., which will not be elaborated here.

[0046] See attached document Figure 7 As shown in the embodiment, in a further embodiment, the placement groove 103 is provided with a through hole 107 near the end.

[0047] Understandably, to facilitate the upward extension of the protruding portion of the elastic element 104 from the back of the storage plate 102 to the placement groove 103, in this embodiment, through holes 107 are respectively provided near both ends of the placement groove 103 in the storage plate 102, through which the elastic element 104 can pass. In actual use, the portion of the elastic element 104 made of elastic material that passes through the through hole 107 can extend and retract vertically relative to the placement groove 103, thus preventing the sheet material from falling off.

[0048] See attached document Figure 5 As shown, in a further embodiment of the utility model, the mounting component 105 includes a mounting position 150, and the mounting component 105 is mounted and connected to one end of the elastic member 104. The elastic space is used to accommodate the other end of the elastic member 104, and the elastic member 104 can move up and down.

[0049] Understandably, to facilitate the installation of the elastic element 104, in this embodiment, an installation position 150 and an elastic space are provided on the mounting component 105. One end of the elastic element 104 is connected to the installation position 150, which is fixedly connected by screws in this example. When the elastic element 104 is working, it moves up and down elastically. In order to allow the other end of the elastic element 104 to have a certain amount of room to move, an elastic space is provided, and the other end of the elastic element 104 can move up and down in the elastic space.

[0050] For example, The material storage rack 10 operates as follows: Storage components 100 are arranged opposite each other on both sides of the material frame 101. Each storage component 100 includes at least two storage plates 102, and multiple parallel placement slots 103 are provided on each storage plate 102. Each placement slot 103 has a limiting member at both ends. A portion of the limiting member protrudes from the back of the storage plate 102 towards the placement slot 103 and can elastically extend and retract vertically. When a sheet material needs to be stored in the material frame 101, it is inserted parallel into the placement slots 103 on both sides. When the sheet material touches the protruding part of the limiting member, it retracts downwards. The end of the elastic member 104 triggers a sensor 106, indicating that the placement slot 103 contains a sheet material. During this process, because the protruding part of the elastic member 104 is a transition structure 1042, the sheet material can smoothly enter the placement slot 103. When it is necessary to remove the material, the material is removed from the other side of the material frame 101, and the material trigger sensor 106 indicates that the placement slot 103 does not contain any material.

[0051] Based on the same inventive concept, and referring to the appendix Figure 2 As shown, the second aspect discloses a semiconductor substrate loading and unloading device 1, including: the material storage rack 10 described above, for storing the substrate; A frame 11 is provided, and a lifting platform 12 is provided inside the frame 11. The lifting platform 12 can move vertically relative to the frame 11 to drive the material storage rack 10 to move linearly. The lifting drive assembly 14 is located on one side of the frame 11 and is used to drive the lifting platform 12 to move up and down. A conveying assembly 15 is provided on the side of the frame 11 near the lifting drive assembly 14, for conveying the material storage rack 10; The conveying assembly 15 includes a first conveying assembly 15 and a second conveying assembly 15, which are arranged side by side, one above the other.

[0052] Understandably, a lifting drive assembly 14 is provided on the side of the frame 11. The lifting drive assembly 14 drives the lifting platform 12 inside the frame 11, so that the lifting platform 12 moves vertically in a straight line inside the frame 11. On one side of the frame 11, a conveying assembly 15 is provided for conveying the material storage rack 10, and the other side is connected to the loading position of the cutting equipment body 2.

[0053] The loading and unloading device 1 includes a second conveying assembly 15 for transporting the material storage rack 10, a first conveying assembly 15 disposed above the second conveying assembly 15, a lifting platform 12 disposed between the second conveying assembly 15 and the frame 11 and disposed within the frame 11 for placing the material storage rack 10, and a lifting drive assembly 14. During operation, one end of the lifting platform 12 is equipped with a push cylinder for pushing the topmost plate in the material storage rack 10 onto the cutting equipment body 2. Through the push cylinder in conjunction with the lifting platform 12, the plates in the material storage rack 10 can be supplied one by one to the cutting equipment body 2.

[0054] Based on the same inventive concept, and referring to the appendix Figure 1 and 8 As shown, the third aspect discloses a semiconductor substrate cutting device, including a cutting device body 2 for cutting the substrate; And the loading and unloading device 1, which is located at the loading position and the unloading position of the cutting equipment body 2.

[0055] It should be noted that the cutting equipment body 2 mentioned above is a conventional plate cutting equipment available on the market. In one embodiment, the cutting equipment includes a machine base and a first slide module mounted on the machine base. A worktable for placing the plate is slidably connected to the first slide module. A second slide module, orthogonally arranged to the first slide module, is mounted on one side of the first slide module. A first lifting drive module is slidably connected to the second slide module. A cutting module for cutting the outer frame of the plate is mounted on the first lifting drive module. Clamping components for pressing the outer frame of the plate are mounted on both sides of the worktable. A clamping and transferring component for clamping and removing the outer frame of the plate is mounted on one side of the worktable. Additionally, a CCD imaging module is mounted on the first lifting drive module, and the CCD imaging module is mounted on one side of the cutting module.

[0056] The cutting equipment body 2 is provided with loading and unloading devices 1 at the loading and unloading positions, which are used for loading and unloading respectively, as described in detail below.

[0057] The loading and unloading device 1 located at the loading position of the cutting equipment body 2 includes a second conveying component 15 for transporting the material storage rack 10, a first conveying component 15 installed above the second conveying component 15, a lifting platform 12 installed between the second conveying component 15 and the cutting equipment body 2 for placing the material storage rack 10, and a lifting drive component 14. One end of the lifting platform 12 is provided with a push cylinder for pushing the topmost plate in the material storage rack 10 onto the cutting equipment body 2.

[0058] The working principle of the loading and unloading device 1 is as follows: the second conveying component 15 transports the material storage racks 10 arranged in sequence. The material storage racks 10 include boards stacked in the placement slots 103. Then, the second conveying component 15 sends the first material storage rack 10 at the front into the lifting platform 12. The lifting drive component 14 drives the lifting platform 12 to move up and down repeatedly. When the material storage rack 10 reaches the lifting platform 12, it moves upward. Whenever the cylinder pushes the top board in the material storage rack 10 on the lifting platform 12 onto the cutting equipment body 2, the sensor 106 at the discharge position of the placement slot 103 is triggered and sends an electrical signal. The indicator light shows that the placement slot 103 is empty. The same applies to the following. At the same time, the lifting drive component 14 drives the lifting platform 12 to rise one level. This cycle continues until all the boards in the material storage rack 10 are loaded. Then, the material storage rack 10 is recycled by the first conveying component 15. Then, the lifting platform 12 moves downward to receive other material storage racks 10.

[0059] The loading and unloading device 1 located at the unloading position of the cutting equipment body 2 includes a lifting platform 12, a material storage rack 10 installed on the lifting platform 12 for receiving material above the unloading platform, a lifting drive assembly 14 installed at one end of the lifting platform 12, a first conveying assembly 15 installed at one end of the lifting platform 12 for transporting the material storage rack 10, and a second conveying assembly 15 installed below the first conveying assembly 15.

[0060] The working principle of the loading and unloading device 1 is as follows: Similarly, after the discharge belt of the cutting equipment body 2 transports the processed board to the material storage rack 10 on the lifting platform 12, the board is pushed into the placement slot 103. The sensor 106 at the discharge position of the placement slot 103 is triggered to send a trigger message, which indicates that the placement slot 103 has a board. Similarly, the lifting drive component 14 drives the lifting platform 12 to descend one level. When the material storage rack 10 is full of processed boards, the material storage rack 10 is transported away by the second conveying component 15. Next, a new empty material storage rack 10 will enter the lifting platform 12 from the descending belt.

[0061] The loading and unloading device 1 can also be used in other board processing equipment for feeding or unloading, such as defoaming machines and laminating machines.

[0062] For specific examples and explanations of the beneficial effects of the method described in this embodiment, please refer to the above description of the saturated absorber, which will not be repeated here.

[0063] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. This disclosure is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this disclosure is limited only by the appended claims. Thus, if such modifications and variations of this utility model fall within the scope of the claims of this utility model and their equivalents, this utility model is also intended to include such modifications and variations.

Claims

1. A semiconductor material storage rack, characterized in that: The semiconductor material storage rack includes: a material frame component; Storage components are located on opposite sides of the material frame and are used to store sheet metal. The storage component includes at least two storage plates, which are arranged side by side on the side of the material frame. The storage plate is provided with multiple parallel placement slots. Each placement slot has a limiting member at both ends. A portion of the limiting member protrudes from the back of the storage plate toward the placement slot and can elastically extend and retract vertically to prevent the product from falling off.

2. The semiconductor material storage rack according to claim 1, characterized in that, The limiting component includes a mounting component disposed on the back of the storage plate; An elastic element is provided on the mounting member, and a portion of the elastic element protrudes from the bottom of the placement groove.

3. The semiconductor material storage rack according to claim 2, characterized in that, The elastic element includes a fixing part, a first elastic part, and a second elastic part. The fixing part is fixedly connected to the mounting member. The fixing part is connected to one end of the first elastic part, and the other end of the first elastic part is connected to the second elastic part. The end of the second elastic part is a certain distance away from the mounting member. The fixing part protrudes from the connection position of the first elastic part and the second elastic part.

4. The semiconductor material storage rack according to claim 3, characterized in that, A transition structure is provided at the connection position between the first projectile and the second projectile.

5. The semiconductor material storage rack according to claim 2, characterized in that, The limiting component also includes a sensor, which is disposed on the mounting component and is positioned corresponding to the end of the second spring.

6. The semiconductor material storage rack according to claim 1, characterized in that, The placement slot has a through hole near its end.

7. The semiconductor material storage rack according to claim 2, characterized in that, The mounting component includes a mounting position, and the mounting component is mounted and connected to one end of the elastic member; The elastic space is used to accommodate the other end of the elastic element, and the elastic element can move up and down.

8. A loading and unloading device, characterized in that, include: The semiconductor material storage rack according to any one of claims 1-6 is used to store substrates; A frame, wherein a lifting platform is provided within the frame, and the lifting platform can move linearly up and down relative to the frame to drive the semiconductor material storage rack to move linearly. A lifting drive assembly is located on one side of the frame and is used to drive the lifting platform to move up and down. A conveying assembly is provided on the side of the frame near the lifting drive assembly for conveying the semiconductor material storage rack; The conveying assembly includes a first conveying assembly and a second conveying assembly, which are arranged side by side, one above the other.

9. A semiconductor substrate cutting device, characterized in that, Includes the cutting equipment body, used for cutting sheet metal; And, the loading and unloading device according to claim 8, wherein the loading and unloading device is provided at the loading position and the unloading position of the cutting equipment body.

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