Support device and reaction apparatus

Abstract

The application provides a support device and a reaction equipment, the support device is used for supporting a work platform in the reaction equipment, and the support device comprises a stand, a base which is movably arranged on the stand in a preset direction and is used for supporting the work platform, a lifting mechanism which is arranged on the base and is used for driving the base to move in the preset direction, and a triggering assembly which is arranged on the base and comprises at least two triggering pieces. An inductive assembly is arranged on the stand, each inductive assembly comprises at least two inductive pieces which are arranged in parallel, the inductive pieces are arranged in correspondence with the triggering pieces, and when the base moves to a predetermined position, the triggering pieces one-to-one correspond to trigger the inductive pieces. Since the inductive pieces are arranged in parallel, when the base moves to the predetermined position, any inductive piece of the inductive assembly senses the corresponding triggering piece, the inductive assembly can be triggered, the situation that one inductive piece fails and affects feedback is avoided, the inductive capability and sensitivity of the inductive assembly are enhanced, and the safety performance of the support device is improved.

Description

Technical Field

[0001] This application belongs to the field of semiconductor processing technology, and in particular relates to support devices and reaction equipment. Background Technology

[0002] In the field of semiconductor processing technology, reaction equipment is typically used to process workpieces. Workpiece placement is usually automated, requiring a lifting device to raise and lower a work platform within the reaction chamber. Once the work platform reaches a predetermined position, corresponding control actions are performed. Therefore, improving the sensitivity of detecting the lifting position of the work platform is a pressing issue. Utility Model Content

[0003] In view of this, this application provides a support device and a reaction device to solve the problem of how to improve the sensitivity of monitoring the lifting position of the work platform.

[0004] To solve the above-mentioned technical problems, one technical solution adopted in this application is: providing a support device for supporting a working platform in a reaction device, the support device comprising: a column; a base movably disposed on the column along a preset direction, the base supporting the working platform; a lifting mechanism disposed on the base for driving the base to move along the preset direction; a triggering component disposed on the base, including at least two trigger elements; and a sensing component disposed on the column, each group of sensing components including at least two parallelly connected sensing elements, the sensing elements corresponding to the trigger elements, and when the base moves to a predetermined position, the trigger elements trigger the sensing elements one by one.

[0005] According to one embodiment of this application, the projections of the triggering areas of each of the triggering elements in the preset direction do not overlap, and the triggering area of ​​the sensing element is disposed on the movement path corresponding to the triggering element.

[0006] According to one embodiment of this application, the support device includes a guide rail, which is disposed on the column and extends along the preset direction. The sensing component is slidably disposed on the guide rail and is adjustable and fixed on the guide rail.

[0007] According to one embodiment of this application, the triggering component includes a first trigger and a second trigger arranged at intervals. Each group of sensing components includes: a first sensor, slidably disposed on the guide rail, and the first sensor is adjustablely fixed on the guide rail to sense the first trigger when the base moves to the predetermined position; and a second sensor, connected in parallel with the first sensor, slidably disposed on the guide rail, and the second sensor is adjustablely fixed on the guide rail to sense the second trigger when the base moves to the predetermined position.

[0008] According to one embodiment of this application, the guide rail includes: a main guide rail disposed on the column and extending along the preset direction, wherein the first sensing element is adjustablely slidably disposed on the main guide rail; and a secondary guide rail disposed on the main guide rail and extending along the preset direction, wherein the second sensing element is adjustablely slidably disposed on the secondary guide rail.

[0009] According to one embodiment of this application, the first sensing element includes: a first sliding seat, slidably disposed on the main guide rail along the preset direction; a first fastener, threadedly connected to the first sliding seat, for rotating to restrict the sliding of the first sliding seat on the main guide rail or for rotating to unlock the sliding of the first sliding seat on the main guide rail; and a first sensor disposed on the first sliding seat.

[0010] According to one embodiment of this application, the second sensing element includes: a second sliding seat, slidably disposed on the sub-guide rail along the preset direction; a second fastener, threadedly connected to the second sliding seat, used to rotate to restrict the sliding of the second sliding seat on the second sliding seat or to rotate to unlock the sliding of the second sliding seat on the second sliding seat; and a second sensor disposed on the second sliding seat.

[0011] According to one embodiment of this application, the column has a first end and a second end that are arranged opposite to each other in a preset direction. The predetermined position includes at least a first predetermined position and a second predetermined position located between the first end and the second end. The second predetermined position is closer to the second end than the first predetermined position. At least two sets of sensing components are arranged at corresponding intervals. One set is used to sense the triggering component when the base moves to the first predetermined position, and the other set is used to sense the triggering component when the base moves to the second predetermined position.

[0012] According to one embodiment of this application, the column has a first end and a second end in a preset direction, and the support device includes: a first limiting part formed on the column, which abuts against the first limiting part when the base moves to a first extreme position near the first end; and a second limiting part formed on the column, which is closer to the second end than the first limiting part, and abuts against the second limiting part when the base moves to a second extreme position near the second end.

[0013] To solve the above-mentioned technical problems, another technical solution adopted in this application is to provide a reaction device, including: a reaction chamber, which forms a reaction cavity inside; a working platform disposed in the reaction cavity; and any of the above-mentioned supporting devices for supporting the working platform.

[0014] According to one embodiment of this application, the working platform is a heating plate.

[0015] The beneficial effects of this application are as follows: The support device of this application is equipped with a trigger component and a sensing component. The trigger component is located on the base and moves synchronously with the base. The sensing component is located on the column. The sensing component can promptly and accurately determine the position of the base by sensing the trigger component, and thus determine the position of the working platform, which can be fed back to the lifting mechanism for it to execute corresponding control actions. Furthermore, the support device of this application uses multiple trigger elements to trigger the sensing elements, and the sensing elements are connected in parallel. When the base moves to a predetermined position, any one of the sensing elements of the sensing component senses the corresponding trigger element, and the sensing component is triggered. This avoids the situation where the failure of one sensing element affects the feedback, enhances the sensing capability and sensitivity of the sensing component, and improves the safety performance of the support device. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0017] Figure 1 This is a three-dimensional structural schematic diagram of a support device according to an embodiment of this application;

[0018] Figure 2 This is a front structural diagram of a support device according to an embodiment of this application;

[0019] Figure 3 This is a three-dimensional structural schematic diagram of a reaction apparatus according to an embodiment of this application. Detailed Implementation

[0020] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0021] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0022] Please see Figure 1 and Figure 2 , Figure 1 This is a three-dimensional structural schematic diagram of a support device according to an embodiment of this application; Figure 2 This is a front structural schematic diagram of a support device according to an embodiment of this application.

[0023] One embodiment of this application provides a support device 100. The support device 100 is used to support a reaction apparatus 10 (see...). Figure 3 Work platform 12 in ) (see Figure 3 The support device 100 includes a column 150, a base 110, and a lifting mechanism 151. The base 110 is movably mounted on the column 150 along a preset direction Z. The base 110 supports the work platform 12, thus enabling the work platform 12 to rise and fall along the preset direction Z. The lifting mechanism 151 is mounted on the base 110 and drives the base 110 to move along the preset direction Z. By providing the lifting mechanism 151, the work platform 12 can be raised or lowered within the reaction chamber, facilitating the loading and unloading of workpieces.

[0024] The support device 100 of this application further includes a trigger component 170 and a sensing component 180. The trigger component 170 is disposed on the base 110 and moves synchronously with the base 110. The sensing component 180 is disposed on the column 150. The sensing component 180 can obtain the position of the base 110 in a timely and accurate manner by sensing the trigger component 170, and thus obtain the position of the work platform 12, and can feed back to the lifting mechanism 151 for it to execute corresponding control actions.

[0025] The triggering component 170 includes at least two trigger elements 1701. The sensing component 180 includes at least two sensing elements 1801 arranged in parallel. The sensing elements 1801 are correspondingly arranged with the trigger elements 1701. When the base 110 moves to a predetermined position, each trigger element 1701 triggers a corresponding sensing element 1801. By setting multiple trigger elements 1701 to trigger the sensing elements 1801, and with the sensing elements 1801 connected in parallel, when the base 110 moves to the predetermined position, if any one of the sensing elements 1801 in the sensing component 180 senses its corresponding trigger element 1701, the sensing component 180 can be triggered. This avoids the situation where the failure of one sensing element 1801 affects the feedback, enhances the sensing capability and sensitivity of the sensing component 180, and improves the safety performance of the support device 100.

[0026] It should be noted that when the sensing component 180 senses the trigger component 170, it can indicate that the working platform 12 has moved to a specified position and can provide feedback to the lifting mechanism 151. The lifting mechanism 151 can provide corresponding feedback, including but not limited to commands such as driving the base 110 to stop moving or driving the base 110 to decelerate.

[0027] Specifically, the sensing element 1801 may be a photoelectric sensor or other sensors.

[0028] To prevent mis-triggered triggers of the sensor 1801 by non-corresponding triggers 1701, in some embodiments, the projections of the trigger areas of each trigger 1701 in the preset direction Z do not overlap. The trigger area of ​​the sensor 1801 is located on the movement path of the corresponding trigger 1701. Therefore, the sensing area of ​​each sensor 1801 can only sense the trigger area of ​​the corresponding trigger 1701, ensuring that the sensor 1801 senses the trigger 1701 only when the base 110 moves to the predetermined position, avoiding false triggers and enhancing the sensing accuracy of the sensing component 180 in sensing the position of the base 110.

[0029] In some embodiments, the sensing component 180 is adjustable and fixed to the column 150 along a preset direction Z. Since the position of the sensing component 180 is adjustable, it can be adjusted after installation according to installation errors, changes in actual process requirements, etc., so that the sensing component 180 can be adjusted to an accurate position to sensitively detect whether the base 110 has moved to the predetermined position and make corresponding feedback.

[0030] The support device 100 of this application can obtain the position of the base 110 in a timely and accurate manner by setting the sensing component 180. The position of the sensing component 180 in the moving direction of the base 110 is adjustable, which makes it easy to adjust the sensing component 180 to the accurate position, so as to further improve the accuracy and sensitivity of the sensing component 180 in sensing whether the base 110 has moved to the predetermined position.

[0031] In some embodiments, the support device 100 includes a guide rail 190. The guide rail 190 is disposed on the column 150 and extends along a preset direction Z. The sensing component 180 is adjustablely slidably disposed on the guide rail 190. By providing the guide rail 190 on the column 150 and adjustingably slidably disposing of the sensing component 180 on the guide rail 190, it can be ensured that the sensing component 180 is always adjusted along the preset direction Z, ensuring the convenience and accuracy of the adjustment of the sensing component 180.

[0032] Specifically, the trigger assembly 170 includes a first trigger element 171 and a second trigger element 172 spaced apart. Each set of sensing assemblies 180 includes a first sensor element 181 and a second sensor element 182, which are connected in parallel. The first sensor element 181 is slidably disposed on the guide rail 190, and is adjustablely fixed on the guide rail 190 to sense the first trigger element 171 when the base 110 moves to a predetermined position. The second sensor element 182 is slidably disposed on the guide rail 190, and is adjustablely fixed on the guide rail 190 to sense the second trigger element 172 when the base 110 moves to a predetermined position.

[0033] By setting a first sensor 181 to sense the first trigger 171 and a second sensor 182 to sense the second trigger 172, and the first sensor 181 and the second sensor 182 are connected in parallel, when the base 110 moves to a predetermined position, the sensing component 180 can be triggered if either the first sensor 181 or the second sensor 182 senses the corresponding trigger 1701. This avoids the situation where one of the sensors 1801 fails and affects the feedback, enhances the sensing capability and sensitivity of the sensing component 180, and improves the safety performance of the support device 100.

[0034] To prevent the first trigger 171 from mistakenly triggering the second sensor 182, and to prevent the second trigger 172 from mistakenly triggering the first sensor 181, in some embodiments, the projections of the triggering areas of the first trigger 171 and the triggering areas of the second trigger 172 onto a preset direction Z do not overlap. The sensing area of ​​the first sensor 181 is located on the movement path of the triggering area of ​​the first trigger 171, and the sensing area of ​​the second sensor 182 is located on the movement path of the triggering area of ​​the second trigger 172. Therefore, the sensing area of ​​the first sensor 181 can only sense the triggering area of ​​the first trigger 171, and the sensing area of ​​the second sensor 182 can only sense the triggering area of ​​the second trigger 172. This ensures that the first sensor 181 senses the first trigger 171, and the second sensor 182 senses the second trigger 172, only when the base 110 moves to a predetermined position, thus avoiding accidental triggering and enhancing the sensing accuracy of the sensing component 180 in sensing the position of the base 110.

[0035] To ensure that the projections of the triggering areas of the first trigger 171 and the second trigger 172 onto the preset direction Z do not overlap, in some embodiments, the guide rail 190 includes a main guide rail 191 and a secondary guide rail 192. The main guide rail 191 is disposed on the column 150 and extends along the preset direction Z, and the first sensor 181 is adjustablely slidably disposed on the main guide rail 191. The secondary guide rail 192 is disposed on the main guide rail 191 and extends along the preset direction Z, and the second sensor 182 is adjustablely slidably disposed on the secondary guide rail 192.

[0036] By setting the guide rail 190 as a main guide rail 191 and a secondary guide rail 192, and spatially offsetting the main guide rail 191 and the secondary guide rail 192, the sensing areas of the first sensor 181 and the second sensor 182 are offset in the preset direction Z. At this time, with the projections of the trigger areas of the first trigger 171 and the second trigger 172 in the preset direction Z not overlapping, the sensing area of ​​the first sensor 181 can only sense the trigger area of ​​the first trigger 171, and the sensing area of ​​the second sensor 182 can only sense the trigger area of ​​the second trigger 172. This avoids the first trigger 171 mistakenly triggering the second sensor 182, and also avoids the second trigger 172 mistakenly triggering the first sensor 181. Furthermore, since the main guide rail 191 and the secondary guide rail 192 are spatially offset, selecting sensors 1801 of the same specifications for the first sensor 181 and the second sensor 182 can also achieve offset sensing areas. The uniform specifications of the sensors 1801 facilitate assembly.

[0037] In addition, the first sensor 181 is adjustable and slidably disposed on the main guide rail 191, and the second sensor 182 is adjustable and slidably disposed on the secondary guide rail 192, which can ensure that the first sensor 181 and the second sensor 182 of the sensing component 180 are always adjusted along the preset direction Z, ensuring the convenience and accuracy of the adjustment of the sensing component 180.

[0038] The number of secondary guide rails 192 can be set to correspond to the number of sensing components 180. When there are two sets of sensing components 180, there can be two secondary guide rails 192 to realize the movable setting of the two second sensing elements 182.

[0039] Specifically, the secondary guide rail 192 can be fixedly mounted on the main guide rail 191. The secondary guide rail 192 avoids the guide groove on the main guide rail 191 so as not to affect the sliding of the first sensing element 181.

[0040] In other embodiments, in order to coordinate with the non-overlapping projections of the trigger areas on the preset direction Z of each trigger element 1701, it is not necessary to design a multi-layer guide rail. Instead, select sensing elements 1801 of different specifications so that the sensing areas of each sensing element 1801 are staggered and located on the moving path of the corresponding trigger area of ​​the trigger element 1701.

[0041] Further, the first sensing element 181 includes a first sliding seat 1811, a first fastener 1812, and a first sensor 1813. The first sliding seat 1811 is slidably disposed on the main guide rail 191 along a preset direction Z. The first fastener 1812 is threadedly connected to the first sliding seat 1811 and is used to rotate to limit the sliding of the first sliding seat 1811 on the main guide rail 191, or to rotate to unlock the sliding of the first sliding seat 1811 on the main guide rail 191. The first sensor 1813 is disposed on the first sliding seat 1811.

[0042] By rotating the first fastener 1812, the sliding seat 1811 on the main guide rail 191 is unlocked, allowing the first sliding seat 1811 to slide to the desired position on the main guide rail 191. By rotating the first fastener 1812 again, the sliding seat 1811 on the main guide rail 191 is restricted, and the first sliding seat 1811 can be fixed to the main guide rail 191. The position of the first sensor 1813 is fixed, enabling stable detection of the position of the base 110. The adjustment of the first sensor 181 is convenient and quick.

[0043] Further, the second sensing element 182 includes a second sliding seat 1821, a second fastener 1822, and a second sensor 1823. The second sliding seat 1821 is slidably disposed on the secondary guide rail 192 along a preset direction Z. The second fastener 1822 is threadedly connected to the second sliding seat 1821 and is used to rotate to limit the sliding of the second sliding seat 1821 on the secondary guide rail 192, or to rotate to unlock the sliding of the second sliding seat 1821 on the secondary guide rail 192. The second sensor 1823 is disposed on the second sliding seat 1821.

[0044] By rotating the second fastener 1822, the sliding of the second sliding seat 1821 on the secondary guide rail 192 is unlocked. The second sliding seat 1821 can slide to the desired position on the secondary guide rail 192. By rotating the second fastener 1822 again, the sliding of the second sliding seat 1821 on the secondary guide rail 192 can be restricted, and the second sliding seat 1821 can be fixed to the secondary guide rail 192. The position of the second sensor 1823 is fixed, which can stably monitor the position of the base 110. The adjustment of the second sensor 182 is convenient and quick.

[0045] In some embodiments, the column 150 has a first end 101 and a second end 102 disposed opposite to each other in a preset direction Z. The predetermined positions include at least a first predetermined position 1011 and a second predetermined position 1021 located between the first end 101 and the second end 102. The second predetermined position 1021 is closer to the second end 102 than the first predetermined position 1011. At least two sets of sensing components 180 are correspondingly spaced apart, one set for sensing and triggering component 170 when the base 110 moves to the first predetermined position 1011, and the other set for sensing and triggering component 170 when the base 110 moves to the second predetermined position 1021. By providing multiple sets of sensing components 180, timely sensing and feedback can be provided when the base 110 carries the work platform 12 to different positions.

[0046] Specifically, the first end 101 is located above the second end 102. The first predetermined position 1011 can be the position corresponding to the base 110 when the working platform 12 rises to the reaction position in the reaction chamber; the second predetermined position 1021 can be the position corresponding to the base 110 when the working platform 12 descends to the position for picking up or placing workpieces in the reaction chamber. At this time, the first predetermined position 1011 and the second predetermined position 1021 are the two end points of the automatic lifting stroke of the base 110. By setting these two sets of sensing components 180, the movement stroke of the working platform 12 can be automatically controlled, and excessive movement of the working platform 12 can be avoided, thereby achieving automation while enhancing safety performance.

[0047] To further enhance safety and prevent the base 110 carrying the work platform 12 from moving beyond its travel range due to a malfunction of the sensing component 180, in some embodiments, the support device 100 further includes a first limiting part 152 and a second limiting part 153. The base 110 has a first limit position at its first end 101 near the column 150; this position represents the maximum travel range that the base 110 can move towards the first end 101 while ensuring safe travel. The base 110 has a second limit position at its second end 102 near the column 150; this position represents the maximum travel range that the base 110 can move towards the second end 102 while ensuring safe travel. The first limiting part 152 is formed on the column 150, and when the base 110 moves to the first limit position, the base 110 abuts against the first limiting part 152. The first limiting part 152 prevents the base 110 from continuing to move towards the first end 101 of the column 150, thus preventing the base 110 carrying the work platform 12 from moving beyond its travel range and providing safety protection. The second limiting part 153 is formed on the column 150. When the base 110 moves to the second limit position, the base 110 abuts against the second limiting part 153. The second limiting part 153 can prevent the base 110 from continuing to move towards the second end 102 of the column 150, and prevent the base 110 from carrying the work platform 12 beyond the travel range, thus playing a safety protection role.

[0048] By setting the first limiting part 152 and the second limiting part 153, a mechanical limiting function can be achieved, effectively preventing the base 110 from moving the work platform 12 beyond its travel range. The sensing component 180 and the limiting parts provide dual protection.

[0049] It should be noted that the first limiting part 152 may be at the same position as the first predetermined position 1011, or the first limiting part 152 should be closer to the first end 101 relative to the first predetermined position 1011, so as to play a final limiting role on the base 110 when the sensing component 180 fails; the second limiting part 153 may be at the same position as the second predetermined position 1021, or the second limiting part 153 should be closer to the second end 102 relative to the second predetermined position 1021, so as to play a final limiting role on the base 110 when the sensing component 180 fails.

[0050] In some embodiments, the support device 100 further includes a support platform 120, a telescopic tube assembly 14, and a support rod 13 (see [link]). Figure 3 A support platform 120 is mounted on a base 110. One end of a support rod 13 is connected to the support platform 120, and the other end is connected to the working platform 12. The support rod 13 connects the working platform 120 to the support platform 120, allowing the base 110 to move synchronously with the working platform 120, thus enabling the working platform 12 to rise and fall within the reaction chamber. A telescopic tube assembly 14 is fitted over the support rod 13, with one end connected to the support platform 120 and the other end sealed to the bottom of the reaction chamber. The telescopic tube assembly 14 forms a sealed space communicating with the inside of the reaction chamber, effectively maintaining the process environment inside the reaction chamber while coordinating the rising and falling of the support platform 120 and the working platform 12.

[0051] Please see Figure 3 , Figure 3 This is a three-dimensional structural schematic diagram of a reaction apparatus according to an embodiment of this application.

[0052] Another embodiment of this application provides a reaction apparatus 10. The reaction apparatus 10 includes a reaction chamber, a work platform 12, and a support device 100 as described in any of the above embodiments. The reaction chamber forms a reaction cavity, providing space for the processing of a workpiece. The work platform 12 receives the workpiece within the reaction cavity. The support device 100 supports the work platform 12.

[0053] The support device 100 triggers the sensing element 1801 by setting multiple triggers 1701, and the sensing elements 1801 are connected in parallel. When the base 110 moves to a predetermined position, the sensing component 1800 can be triggered if any of the sensing elements 1801 senses the corresponding trigger 1701. This avoids the situation where one of the sensing elements 1801 fails and affects the feedback, enhances the sensing ability and sensitivity of the sensing component 180, and improves the safety performance of the support device 100.

[0054] Specifically, the working platform 12 is a heating plate. The working platform 12 can also be a platform with other functions depending on the type of reaction equipment 10.

[0055] Furthermore, column 150 is also used to support the reaction chamber.

[0056] Specifically, the reaction apparatus 10 can be a semiconductor thin film deposition apparatus or other semiconductor coating apparatus.

[0057] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A support device, characterized in that, For supporting the working platform (12) in the reaction apparatus (10), the support device (100) includes: Column (150); The base (110) is movably disposed on the column (150) along a preset direction (Z), and the base (110) is used to support the working platform (12); A lifting mechanism (151) is provided on the base (110) for driving the base (110) to move along the preset direction (Z); A triggering component (170), disposed on the base (110), includes at least two trigger elements (1701); A sensing component (180) is disposed on the column (150). Each set of sensing components (180) includes at least two sensors (1801) arranged in parallel. The sensors (1801) are correspondingly disposed with the triggers (1701). When the base (110) moves to a predetermined position, the triggers (1701) trigger the sensors (1801) one by one.

2. The support device according to claim 1, characterized in that, The projections of the trigger areas of each trigger (1701) on the preset direction (Z) do not overlap, and the trigger area of ​​the sensing element (1801) is disposed on the movement path corresponding to the trigger (1701).

3. The support device according to claim 1 or 2, characterized in that, The support device (100) includes a guide rail (190), which is disposed on the column (150) and extends along the preset direction (Z). The sensing component (180) is slidably disposed on the guide rail (190) and is adjustable and fixed on the guide rail (190).

4. The support device according to claim 3, characterized in that, The triggering component (170) includes a first trigger (171) and a second trigger (172) spaced apart, and each group of the sensing components (180) includes: The first sensing element (181) is slidably disposed on the guide rail (190), and the first sensing element (181) is adjustable and fixed on the guide rail (190) to sense the first trigger element (171) when the base (110) moves to the predetermined position. The second sensor (182) is connected in parallel with the first sensor (181). The second sensor (182) is slidably disposed on the guide rail (190), and the second sensor (182) is adjustable and fixed on the guide rail (190) to sense the second trigger (172) when the base (110) moves to the predetermined position.

5. The support device according to claim 4, characterized in that, The guide rail (190) includes: A main guide rail (191) is disposed on the column (150) and extends along the preset direction (Z), and the first sensing element (181) is adjustablely slidably disposed on the main guide rail (191). A secondary guide rail (192) is disposed on the main guide rail (191) and extends along the preset direction (Z), and the second sensing element (182) is adjustablely slidably disposed on the secondary guide rail (192).

6. The support device according to claim 5, characterized in that, The first sensing element (181) includes: The first sliding seat (1811) is slidably disposed on the main guide rail (191) along the preset direction (Z); The first fastener (1812) is threadedly connected to the first sliding seat (1811) and is used to rotate to limit the sliding of the first sliding seat (1811) on the main guide rail (191) or to rotate to unlock the sliding of the first sliding seat (1811) on the main guide rail (191). The first sensor (1813) is disposed on the first sliding seat (1811).

7. The support device according to claim 5, characterized in that, The second sensing element (182) includes: The second sliding seat (1821) is slidably disposed on the sub-guide rail (192) along the preset direction (Z); The second fastener (1822) is threadedly connected to the second sliding seat (1821) and is used to rotate to restrict the sliding of the second sliding seat (1821) in the second sliding seat (1821) or to rotate to unlock the sliding of the second sliding seat (1821) in the second sliding seat (1821); The second sensor (1823) is disposed on the second sliding seat (1821).

8. The support device according to claim 1, characterized in that, The column (150) has a first end (101) and a second end (102) arranged opposite to each other in the preset direction (Z). The predetermined position includes at least a first predetermined position (1011) and a second predetermined position (1021) located between the first end (101) and the second end (102). The second predetermined position (1021) is closer to the second end (102) than the first predetermined position (1011). The sensing components (180) are arranged in at least two sets at corresponding intervals. One set is used to sense the trigger component (170) when the base (110) moves to the first predetermined position (1011), and the other set is used to sense the trigger component (170) when the base (110) moves to the second predetermined position (1021).

9. The support device according to claim 1, characterized in that, The column (150) has a first end (101) and a second end (102) in the preset direction (Z), and the support device (100) includes: A first limiting part (152) is formed on the column (150), and when the base (110) moves to a first extreme position close to the first end (101), the base (110) abuts against the first limiting part (152). A second limiting part (153) is formed on the column (150). The second limiting part (153) is closer to the second end (102) than the first limiting part (152). When the base (110) moves to the second extreme position close to the second end (102), the base (110) abuts against the second limiting part (153).

10. A reaction apparatus, characterized in that, include: The reaction chamber has a reaction cavity inside; The working platform (12) is located inside the reaction chamber; The support device (100) as described in any one of claims 1-9 is used to support the work platform (12).

11. The reaction apparatus (10) according to claim 10, characterized in that, The working platform (12) is a heating plate.

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