Wafer clamping gripper

Abstract

The utility model belongs to the field of semiconductor technology especially, it is a kind of wafer clamping grab, including connecting pipe, the connecting pipe is hollow cylinder structure;Quick connector, the quick connector is integrally formed in one end of the connecting pipe, and the top of quick connector is boss structure;Cylinder, the one end of connecting pipe away from the quick connector integrally formed has cylinder, and the outer surface of cylinder is arc structure;Sucker, the one end of cylinder away from the connecting pipe is provided with sucker, and the outer side wall of cylinder is screw-connected in;Quick connector selects small gap to ensure more accurate clamping;Connecting pipe diameter thickening, ensure the stability of clamping and better stress;The arc of cylinder is thinned, ensures that clamping is accurate and flexible, when cylinder and sucker are connected, outer thread adopts newer and more accurate size, guarantees the convenience of installation.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, specifically relating to a wafer clamping gripper. Background Technology

[0002] In the semiconductor manufacturing industry, spin-drying is a crucial step in removing surface moisture from wafers after cleaning. It achieves efficient dehumidification primarily through a combination of centrifugal force generated by high-speed rotation and auxiliary drying technologies. This process is mainly completed in a spin dryer, which integrates rotation, spraying, and nitrogen purging functions, and is equipped with a resistivity probe for real-time monitoring of chemical residues. The wafer clamping gripper is a key component used to stably hold the wafer during the spin-drying process. The basic principle of the spin-drying process is as follows: The wafer, held in place by a clamping gripper, rotates at a high speed of 3000 to 10000 rpm, using centrifugal force to quickly remove liquid adhering to its surface; simultaneously, hot nitrogen (N2) is used for purging to further accelerate liquid evaporation, thus achieving efficient drying. This process has advantages such as simple equipment structure and high throughput, but it also requires proper control of parameters such as rotation speed to avoid mechanical damage to the wafer or watermark residue. Currently used grippers suffer from short service life in practical applications due to limitations in structural design and material selection. Furthermore, because semiconductor manufacturing processes often involve residual acidic solvents and other corrosive gases, traditional grippers are susceptible to corrosion and wear, thus affecting their long-term stability and gripping effectiveness. To address the aforementioned issues, this application proposes a wafer clamping gripper. Utility Model Content

[0003] To address the problems mentioned in the background section, this invention provides a wafer clamping gripper that is user-friendly and has a long service life.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a wafer clamping gripper, comprising... The connecting pipe is a hollow cylindrical structure; A quick connector, which is integrally formed at one end of the connecting pipe, and the top of the quick connector is a boss structure; The connecting pipe has a column integrally formed at the end away from the quick connector, and the outer surface of the column has an arc structure; A suction cup is provided at one end of the column away from the connecting tube, and the suction cup is threaded to the outer wall of the column.

[0005] As a preferred embodiment of this utility model, the outer side wall of the column is provided with an external thread, the inner side wall of the suction cup is provided with an internal thread, and the column and the suction cup are threadedly connected by the internal thread and the external thread.

[0006] As a preferred embodiment of the present invention, the quick connector, the connecting tube, the column and the suction cup are connected in a manner, and the connecting tube is provided with an air pipe inside. One end of the air pipe is connected to the adsorption element on the surface of the suction cup, and the other end of the air pipe passes through the quick connector and is connected to an air pump located on the outside of the connecting tube.

[0007] Compared with the prior art, the advantages of this utility model are: the quick connector uses a smaller gap to ensure more precise clamping; the connecting tube diameter is thickened to ensure clamping stability and better force distribution; the arc of the column is thinned to ensure precise and flexible clamping; and when the column and suction cup are connected, the external thread adopts a newer and more precise size to ensure ease of installation. Attached Figure Description

[0008] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the structure of this utility model; In the picture: 1. Quick connector; 2. Connecting pipe; 3. Column; 4. Suction cup. Detailed Implementation

[0009] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0010] Example 1 like Figure 1 As shown; A wafer clamping gripper, including Connecting pipe 2, which is a hollow cylindrical structure; Quick connector 1 is integrally formed at one end of connecting pipe 2, and the top of quick connector 1 is a boss structure; The column 3 is integrally formed at the end of the connecting pipe 2 away from the quick connector 1, and the outer surface of the column 3 has an arc structure; Suction cup 4 is provided at one end of the column 3 away from the connecting tube 2, and the suction cup 4 is threaded to the outer wall of the column 3.

[0011] In an optional embodiment, the outer side wall of the column 3 is provided with external threads, and the inner side wall of the suction cup 4 is provided with internal threads. The column 3 and the suction cup 4 are connected by internal and external threads.

[0012] In an optional embodiment, the quick connector 1, connecting tube 2, column 3 and suction cup 4 are connected, and the connecting tube 2 is provided with an air tube inside. One end of the air tube is connected to the adsorption element on the surface of the suction cup 4, and the other end of the air tube passes through the quick connector 1 and is connected to an air pump located outside the connecting tube 2.

[0013] The working principle and usage process of this utility model are as follows: The quick connector 1 is connected by an external clamping component. Because the connecting tube 2 has an internal air tube, one end of the air tube is connected to the adsorption component on the surface of the suction cup 4, and the other end of the air tube passes through the quick connector 1 and is connected to an air pump located on the outside of the connecting tube 2. The operator places the wafer on the suction cup 4, and negative pressure is generated through the air tube, thereby fixing the wafer on the suction cup 4. In this application, the quick connector 1 is selected with a smaller gap to ensure more precise clamping; the diameter of the connecting tube 2 is thickened to ensure clamping stability and better force distribution; the curvature of the column 3 is thinned to ensure precise and flexible clamping; when the column 3 and the suction cup 4 are connected, the external thread adopts a newer and more precise size to ensure the convenience of installation.

[0014] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A wafer clamping gripper, characterized in that: include Connecting pipe (2), wherein the connecting pipe (2) is a hollow column structure; Quick connector (1), the quick connector (1) is integrally formed at one end of the connecting pipe (2), and the top of the quick connector (1) is a boss structure; The column (3) is integrally formed at one end of the connecting pipe (2) away from the quick connector (1), and the outer surface of the column (3) is an arc-shaped structure; A suction cup (4) is provided at one end of the column (3) away from the connecting tube (2), and the suction cup (4) is threadedly connected to the outer wall of the column (3).

2. The wafer clamping gripper according to claim 1, characterized in that: The outer side wall of the column (3) is provided with an external thread, and the inner side wall of the suction cup (4) is provided with an internal thread. The column (3) and the suction cup (4) are connected by the internal thread and the external thread.

3. The wafer clamping gripper according to claim 1, characterized in that: The quick connector (1), the connecting tube (2), the column (3) and the suction cup (4) are connected. The connecting tube (2) is provided with an air tube inside. One end of the air tube is connected to the adsorption element on the surface of the suction cup (4). The other end of the air tube passes through the quick connector (1) and is connected to the air pump located outside the connecting tube (2).

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