Anti-static finger cots for wafer handling

Abstract

The utility model discloses a special anti -static finger -stall of wafer handling, specifically relates to the technical field of finger -stall, including the finger -stall main part, the finger -stall main part is made of natural latex material, the one end of finger -stall main part is open and the other end of finger -stall main part is the hollow capsule cavity structure of closed, the inside of finger -stall main part is provided with anti -static mechanism, and anti -static mechanism includes the multiple carbon powder particles of fixed setting in the inner wall of finger -stall main part, the inside fixed setting of finger -stall main part has multiple conductive fibers, the surface fixed setting of finger -stall main part has nylon fiber net, and one side fixed setting of nylon fiber net has anti -static coating. The utility model can high -efficiently dredge static charge, avoid static damage wafer, and surface nylon fiber net enhances structural strength, and anti -static coating forms effective shielding, and overall design gives consideration to anti -static performance and structural stability, provides reliable protection for wafer handling.

Description

Technical Field

[0001] This utility model relates to the field of finger sleeve technology, and more specifically, to anti-static finger sleeves for wafer handling. Background Technology

[0002] In the wafer manufacturing and handling process, static electricity is a key factor affecting product quality and production yield. Static electricity generated by human activity may damage wafers through direct contact or electrostatic induction. As an important protective item for operators who have direct contact with wafers, finger cots play a crucial role in the anti-static process. In existing institutions, the gloves worn by people are usually regular fiber gloves, which are prone to static electricity when performing electrical or live electrical work, posing a safety hazard. A search revealed that Chinese patent CN207754585U discloses an antistatic cleanroom finger sleeve. This structure involves laying an antistatic wire between the outer side of the antistatic layer and the inner side of the cleanroom layer, and connecting it to a pointed discharge block on the outer side of the electrostatic discharge ring. The antistatic wire draws out the static electricity from the antistatic layer and further draws out the static electricity from the human body to the pointed discharge block. By utilizing the principle of pointed discharge to discharge into the air, the static electricity inside the finger sleeve and the static electricity from the human body are dissipated in turn, effectively conducting away the static electricity from both places and achieving a dual antistatic effect.

[0003] However, in actual use, this structure dissipates static electricity by connecting the tip discharge block to the static elimination wire using the tip discharge principle. It is easily affected by environmental humidity, air pressure and cleanliness, which makes it impossible to conduct static charge evenly and continuously, and easily causes local static electricity accumulation. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, this utility model provides anti-static finger sleeves for wafer handling, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: Anti-static finger sleeves for wafer handling include a finger sleeve body made of natural latex material. One end of the finger sleeve body is open and the other end is a closed hollow cavity structure. An anti-static mechanism is provided inside the finger sleeve body. The antistatic mechanism includes multiple carbon powder particles fixedly disposed on the inner wall of the finger sleeve body, multiple conductive fibers fixedly disposed inside the finger sleeve body, a nylon fiber mesh fixedly disposed on the surface of the finger sleeve body, an antistatic coating fixedly disposed on one side of the nylon fiber mesh, and an anti-slip texture fixedly disposed on the surface of the antistatic coating.

[0006] By adopting the above technical solution: the main body of the finger cot made of natural latex material, combined with the carbon powder particles on the inner wall and the internal conductive fibers, can efficiently conduct static charge and avoid electrostatic damage to the wafer. Moreover, the surface nylon fiber mesh enhances the structural strength, and the antistatic coating forms an effective shield to prevent external electrostatic interference.

[0007] As a further description of the above technical solution: the conductive fibers are evenly distributed in the inner layer of the finger sleeve body, the nylon fiber mesh is woven from nylon monofilaments into a honeycomb grid, and the antistatic coating is made of antistatic polyurethane material; One end of the main body of the finger sleeve is fixedly set as an arc-shaped surface, and the anti-slip texture is a fine mesh.

[0008] By adopting the above technical solution: conductive fibers are evenly distributed in the inner layer, which can evenly conduct static charge; the honeycomb mesh of nylon monofilaments strengthens the structural toughness and wear resistance; and the antistatic coating of antistatic polyurethane material provides stable electrostatic shielding effect. In addition, the arc-shaped curved surface design fits the fingertips, and the anti-slip texture increases friction, which not only prevents the wafer from slipping but also reduces contact damage. Overall, it takes into account antistatic properties, structural stability, and safety of use.

[0009] As a further description of the above technical solution: the open end of the finger sleeve body is provided with a fixing structure, the fixing structure includes an elastic band embedded in one end of the finger sleeve body, the surface of the elastic band is covered with medical silicone, and the surface of the medical silicone is provided with a polyurethane layer. The conductive fiber can be made of carbon fiber. The conductive fiber is distributed in an interwoven pattern in the inner layer of the finger sleeve body. Both ends of the conductive fiber extend to the open end of the finger sleeve body and are connected to the elastic band. The surface of both the finger sleeve body and the antistatic coating is provided with a plurality of micropores evenly distributed therein, and each of the micropores is covered with a layer of polytetrafluoroethylene breathable membrane.

[0010] By adopting the above technical solution: the uniformly distributed conductive fibers in the inner layer can evenly conduct static charge, the honeycomb nylon fiber mesh enhances the structural toughness and wear resistance, and the antistatic polyurethane coating ensures stable electrostatic shielding, thus achieving multiple effects of antistatic, structural stability, and safe use.

[0011] The technical effects and advantages of this utility model are as follows: 1. By setting up an anti-static mechanism, compared with existing technologies, the carbon powder particles on the inner wall and the conductive fibers woven in the inner layer work together to efficiently conduct and release static charge from fingers. The connection with the elastic band realizes charge conduction, avoids local static accumulation, and prevents electrostatic breakdown of the wafer. Moreover, the nylon fiber mesh on the surface enhances structural stability and wear resistance. The anti-static coating on one side forms an electrostatic shield to prevent external static interference to the wafer. The anti-slip texture on the surface of the anti-static coating increases the friction with the wafer. Combined with the arc-shaped curved surface design, it not only prevents the wafer from slipping but also reduces contact pressure to avoid physical damage. At the same time, the micropores and polytetrafluoroethylene breathable membrane ensure breathability and comfort. Overall, it takes into account anti-static, protection and comfort, which greatly improves the reliability and safety of wafer handling. 2. By setting up a fixed structure, compared with existing technologies, the elastic band naturally contracts and fits the base of the finger when worn, ensuring that the finger cot is stable and does not slip off, while also facilitating easy insertion and removal of the finger. The medical-grade silicone covering its surface provides a soft touch, improving wearing comfort and avoiding local pressure discomfort. Secondly, the elastic band is connected to conductive fibers, which can conduct static electricity through the elastic band, helping the overall static discharge system to operate efficiently. The outer polyurethane layer enhances the structure's wear resistance and stain resistance, reducing stain adhesion and facilitating cleaning. Combined with the elastic band's elastic recovery force, the finger cot is easy to organize and store after removal, improving the convenience of reuse. At the same time, it ensures that the fixing effect and anti-static performance remain stable after multiple uses, enhancing overall practicality and economy. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0013] Figure 2 This is a schematic diagram of the overall frontal cross-sectional structure of this utility model.

[0014] Figure 3 This is a schematic diagram of the antistatic mechanism of this utility model.

[0015] Figure 4 For the present utility model Figure 3 Enlarged view of point A in the middle.

[0016] Figure 5 This is a cross-sectional schematic diagram of the fixed structure of this utility model.

[0017] The attached diagram is labeled as follows: 1. Finger sleeve body; 2. Carbon powder particles; 3. Conductive fiber; 4. Nylon fiber mesh; 5. Antistatic coating; 6. Anti-slip texture; 7. Elastic band; 8. Medical silicone; 9. Polyurethane layer; 10. Micropores; 11. Polytetrafluoroethylene breathable membrane. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] The embodiments disclosed in this application are as follows: Figure 1-5 The wafer handling antistatic finger sleeve shown includes a finger sleeve body 1, which is made of natural latex material. One end of the finger sleeve body 1 is open and the other end of the finger sleeve body 1 is a closed hollow cavity structure. An antistatic mechanism is provided inside the finger sleeve body 1. The antistatic mechanism includes multiple carbon powder particles 2 fixedly disposed on the inner wall of the finger sleeve body 1, multiple conductive fibers 3 fixedly disposed inside the finger sleeve body 1, a nylon fiber mesh 4 fixedly disposed on the surface of the finger sleeve body 1, an antistatic coating 5 fixedly disposed on one side of the nylon fiber mesh 4, and an anti-slip texture 6 fixedly disposed on the surface of the antistatic coating 5. After the finger is fully inserted into the hollow cavity of the finger sleeve body 1, the fingertip naturally fits the arc-shaped surface of the closed end, ensuring that the fingertip is in close contact with the inner wall of the closed end of the finger sleeve body 1. At this time, the carbon powder particles 2 on the inner wall form a conductive path with the finger skin, initially dissipating the static charge on the finger surface. Then, as the fingers move, the conductive fibers 3 in the inner layer of the finger sleeve body 1 deform and adapt due to the interwoven structure. The connection between its two ends and the elastic band 7 allows static charge to be conducted to the elastic band 7 through the conductive fibers 3. At the same time, the carbon powder particles 2 further assist in the dispersion of charge and avoid local static electricity accumulation. Next, the nylon fiber mesh 4 on the surface of the finger sleeve body 1 forms a structural support, and its honeycomb mesh enhances the overall wear resistance. When the antistatic coating 5 on one side of the nylon fiber mesh 4 comes into contact with the wafer, it forms an electrostatic shield through the surface resistance characteristics to prevent external electrostatic interference to the wafer.

[0020] Reference Figure 2-3 As shown, conductive fibers 3 are evenly distributed in the inner layer of the finger sleeve body 1, nylon fiber mesh 4 is woven from nylon monofilaments into a honeycomb mesh, and antistatic coating 5 is made of antistatic polyurethane material. One end of the finger sleeve body 1 is fixedly set as an arc-shaped curved surface, and the anti-slip texture 6 is a fine mesh; When a finger touches the wafer, the anti-slip texture 6 on the surface of the antistatic coating 5 forms a fine grid to increase friction with the wafer surface, preventing the wafer from slipping during handling. At the same time, the curved surface design reduces the contact pressure between the fingertip and the wafer, avoiding physical damage.

[0021] Reference Figure 4-5As shown, the finger sleeve body 1 has a fixing structure at its open end. The fixing structure includes an elastic band 7 embedded in one end of the finger sleeve body 1. The surface of the elastic band 7 is covered with medical silicone 8, and the surface of the medical silicone 8 is covered with a polyurethane layer 9. The conductive fiber 3 can be made of carbon fiber. The conductive fiber 3 is distributed in an interwoven pattern in the inner layer of the finger sleeve body 1. Both ends of the conductive fiber 3 extend to the opening end of the finger sleeve body 1 and are connected to the elastic band 7. The surface of the finger sleeve body 1 and the antistatic coating 5 are provided with a plurality of micropores 10 evenly distributed, and each of the micropores 10 is covered with a layer of polytetrafluoroethylene breathable membrane 11. After the operator cleans their hands, they align their fingers with the opening of the finger sleeve body 1. At this time, the elastic band 7 in the fixing structure is in a natural contraction state due to its own elasticity. The medical silicone 8 and the outer polyurethane layer 9 covering its surface form a soft contact interface, which makes it easy for the fingers to be inserted smoothly. Moreover, the micropores 10 on the surface of the finger sleeve body 1 allow for air circulation during wear. The polytetrafluoroethylene breathable membrane 11 inside the micropores 10 prevents external particles from entering, while expelling sweat and moisture generated by the fingers, thus maintaining wearing comfort. After the wafer is transported, the finger cot is removed from the wafer. The accumulated static charge is eventually conducted to the human body through the conductive fiber 3 and the elastic band 7, ensuring that there is no residual static electricity on the surface of the finger cot body 1 before the next use. When the operator removes the finger cot from the opening end, the elastic recovery force of the elastic band 7 makes it return to the contracted state, which facilitates the removal of the finger cot as a whole. In addition, the stain-resistant properties of the polyurethane layer 9 reduce the adhesion of stains, which is conducive to subsequent cleaning and reuse.

[0022] Working principle of this utility model: This utility model is a special anti-static finger sleeve for wafer handling. When using this device, after the operator cleans their hands, they align their fingers with the opening end of the finger sleeve body 1. At this time, the elastic band 7 in the fixing structure is in a natural contraction state due to its own elasticity. The medical silicone 8 and the outer polyurethane layer 9 covering its surface form a soft contact interface, which makes it easy for the fingers to be inserted smoothly. After the finger is fully inserted into the hollow cavity of the finger sleeve body 1, the fingertip naturally fits the arc-shaped surface of the closed end, ensuring that the fingertip is in close contact with the inner wall of the closed end of the finger sleeve body 1. At this time, the carbon powder particles 2 on the inner wall form a conductive path with the finger skin, initially dissipating the static charge on the finger surface. Then, as the fingers move, the conductive fibers 3 in the inner layer of the finger sleeve body 1 deform and adapt due to the interwoven structure. The connection between its two ends and the elastic band 7 allows static charge to be conducted to the elastic band 7 through the conductive fibers 3. At the same time, the carbon powder particles 2 further assist in the dispersion of charge and avoid local static electricity accumulation. Next, the nylon fiber mesh 4 on the surface of the finger sleeve body 1 forms a structural support, and its honeycomb mesh enhances the overall wear resistance. When the antistatic coating 5 on one side of the nylon fiber mesh 4 comes into contact with the wafer, it forms an electrostatic shield through the surface resistance characteristics to prevent external electrostatic interference to the wafer. When a finger touches the wafer, the anti-slip texture 6 on the surface of the antistatic coating 5 forms a fine grid to increase friction with the wafer surface, preventing the wafer from slipping during handling. At the same time, the curved surface design reduces the contact pressure between the fingertip and the wafer, avoiding physical damage. Moreover, the micropores 10 on the surface of the finger sleeve body 1 allow for air circulation during wear. The polytetrafluoroethylene breathable membrane 11 inside the micropores 10 prevents external particles from entering, while expelling sweat and moisture generated by the fingers, thus maintaining wearing comfort. After the wafer is transported, the finger cot is removed from the wafer. The accumulated static charge is eventually conducted to the human body through the conductive fiber 3 and the elastic band 7, ensuring that there is no residual static electricity on the surface of the finger cot body 1 before the next use. When the operator removes the finger cot from the opening end, the elastic recovery force of the elastic band 7 makes it return to the contracted state, which facilitates the removal of the finger cot as a whole. In addition, the stain-resistant properties of the polyurethane layer 9 reduce the adhesion of stains, which is conducive to subsequent cleaning and reuse.

[0023] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An anti-static finger cot for wafer handling, comprising a finger cot body (1), characterized in that: The finger sleeve body (1) is made of natural latex material. One end of the finger sleeve body (1) is open and the other end of the finger sleeve body (1) is a closed hollow cavity structure. An anti-static mechanism is provided inside the finger sleeve body (1). The antistatic mechanism includes multiple carbon powder particles (2) fixedly disposed on the inner wall of the finger sleeve body (1), multiple conductive fibers (3) fixedly disposed inside the finger sleeve body (1), a nylon fiber mesh (4) fixedly disposed on the surface of the finger sleeve body (1), an antistatic coating (5) fixedly disposed on one side of the nylon fiber mesh (4), and an anti-slip texture (6) fixedly disposed on the surface of the antistatic coating (5).

2. The anti-static finger sleeve for wafer handling according to claim 1, characterized in that: The conductive fibers (3) are evenly distributed in the inner layer of the finger sleeve body (1), the nylon fiber mesh (4) is woven from nylon monofilaments into a honeycomb mesh, and the antistatic coating (5) is made of antistatic polyurethane material.

3. The anti-static finger sleeve for wafer handling according to claim 1, characterized in that: One end of the finger sleeve body (1) is fixedly set as an arc-shaped curved surface, and the anti-slip texture (6) is a fine mesh.

4. The anti-static finger sleeve for wafer handling according to claim 1, characterized in that: The finger sleeve body (1) has a fixing structure at its open end. The fixing structure includes an elastic band (7) embedded at one end of the finger sleeve body (1). The surface of the elastic band (7) is covered with medical silicone (8), and the surface of the medical silicone (8) is covered with a polyurethane layer (9).

5. The anti-static finger sleeve for wafer handling according to claim 4, characterized in that: The conductive fiber (3) can be made of carbon fiber. The conductive fiber (3) is distributed in an interlaced woven pattern in the inner layer of the finger sleeve body (1). Both ends of the conductive fiber (3) extend to the open end of the finger sleeve body (1) and are connected to the elastic band (7).

6. The anti-static finger sleeve for wafer handling according to claim 1, characterized in that: The surface of the finger sleeve body (1) and the antistatic coating (5) are provided with a plurality of micropores (10) that are evenly distributed, and each of the plurality of micropores (10) is covered with a layer of polytetrafluoroethylene breathable membrane (11).

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