Automatic boron nitride spraying device

Abstract

The utility model relates to spraying equipment technical field discloses a kind of boron nitride automatic spraying devices, including spraying chamber and mounting plate, the inside top of spraying chamber is equipped with multiple nozzle adjustable spraying assembly, the inside lower end of spraying chamber is fixedly installed in mounting plate, spraying chamber inside is equipped with double-station switching mechanism and is located on mounting plate, boron nitride spraying tank stores raw materials, is stably conveyed by output pump, positive and negative motor drives screw rod rotation, drives two groups of sliding blocks to slide along sliding slot, straight bar respectively, to further make connecting plate carry multiple high-pressure nozzles transverse movement, expand spraying coverage, three high-pressure nozzles are equipped and are in triangular distribution, match angle adjusting peg and flow control valve, can be flexibly adjusted spraying angle and flow, avoid the limitation of single nozzle fixed angle, effectively reduce the coating thickness difference of substrate edge and center, satisfy high-precision demand;Flexible hose cooperates with limit slot to adapt nozzle movement, improve spraying uniformity.

Description

Technical Field

[0001] This utility model relates to the field of spraying equipment technology, and in particular to an automatic boron nitride spraying device. Background Technology

[0002] Boron nitride coatings, with their superior comprehensive performance, demonstrate indispensable application value in several key fields such as molds and semiconductor components, providing strong support for the high-quality development of related industries. In the mold field, its excellent high-temperature resistance and extremely low coefficient of friction effectively reduce adhesion between the mold and the workpiece during high-temperature molding processes. Whether it's metal die-casting molds, plastic injection molds, or ceramic sintering molds, the application of boron nitride coatings can achieve a dual improvement in production efficiency and product quality. In the semiconductor component field, boron nitride coatings exhibit excellent electrical insulation, thermal conductivity, and chemical stability. They can serve as an insulating protective layer or heat dissipation medium in the semiconductor chip manufacturing process. Furthermore, their good chemical inertness can resist the erosion of various corrosive gases and chemical reagents during semiconductor manufacturing, providing a solid guarantee for the reliable operation of semiconductor components. In addition to these two major fields, boron nitride coatings also have broad application prospects in aerospace, electronic components, and other fields, consistently using their high-performance advantages to help various industries overcome technical bottlenecks and promote industrial upgrading.

[0003] Existing boron nitride spraying equipment has key drawbacks. First, the spraying uniformity is poor, as it often uses a single nozzle at a fixed angle, resulting in a large difference in coating thickness between the edge and center of the substrate, which cannot meet the requirements of high-precision products. Second, the operating efficiency is low, as the single-station design requires waiting for the substrate to dry and cure before the next batch of work can be carried out, resulting in long equipment downtime and seriously affecting the production schedule. To address these issues, we propose an automatic boron nitride spraying device. Utility Model Content

[0004] The purpose of this utility model is to provide an automatic boron nitride spraying device to solve the key defects of existing boron nitride spraying devices. First, the spraying uniformity is poor. Most of them use a single nozzle to spray at a fixed angle, resulting in a large difference in coating thickness between the edge and center of the substrate, which cannot meet the requirements of high-precision products. Second, the operation efficiency is low. The single-station design requires waiting for the substrate to dry and cure before the next batch of work can be carried out, resulting in long equipment idle time and seriously affecting the production progress.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an automatic boron nitride spraying device, comprising a spraying chamber and a mounting plate. The spraying chamber has a multi-nozzle adjustable spraying assembly at its inner top. The mounting plate is fixedly installed at the lower inner end of the spraying chamber. The spraying chamber has a dual-station switching mechanism located on the mounting plate. The multi-nozzle adjustable spraying assembly includes a boron nitride spraying tank, an output pump, a positioning plate, a slider, and multiple high-pressure nozzles. The boron nitride spraying tank is fixedly installed at the top of the spraying chamber and is used to store boron nitride spraying material. The input end of the output pump is connected to the boron nitride spraying tank. Two sets of positioning plates are provided, both fixedly installed at the inner top of the spraying chamber. A forward and reverse motor is fixedly installed on the right outer wall of the spraying chamber. Slide grooves are provided inside both sets of positioning plates, and threaded rods are rotatably connected and straight rods are fixedly connected within the two sets of slide grooves, respectively.

[0006] As a preferred embodiment, the slider is provided in two sets, which are respectively threaded to the circumferential surface of the threaded rod and slidably connected to the circumferential surface of the straight rod. The slider is slidably connected to the inside of the groove. The output end of the forward and reverse motor is fixedly connected to one end of the threaded rod. The surfaces of the two sets of sliders are fixedly connected to a connecting plate. Multiple high-pressure nozzles are arranged on the connecting plate.

[0007] As a preferred embodiment, the output end of the output pump is fixedly connected to a telescopic hose, and the top of the spraying chamber is provided with a limiting groove to facilitate the sliding of the telescopic hose. The end of the telescopic hose away from the output pump passes through the connecting plate and is connected to multiple high-pressure nozzles through multiple branch pipes.

[0008] As a preferred embodiment, the high-pressure nozzles are provided in three triangular arrangements, and the high-pressure nozzles are connected to the bottom of the connecting plate by angle adjustment bolts, and the high-pressure nozzles are equipped with flow control valves.

[0009] As a preferred embodiment, glass doors are fixedly installed on both the front and rear sides of the spraying chamber, and an opening and closing door is provided on the left side of the spraying chamber. Stable feet are fixedly installed at the four corners of the bottom of the spraying chamber.

[0010] As a preferred embodiment, the dual-station switching mechanism includes a drive motor, a driving bevel gear, a rotating column, a driven bevel gear, a rotary table, and two sets of substrate placement seats. The drive motor is fixedly installed at the bottom of the spraying chamber and its output shaft is fixedly connected to the driving bevel gear. The driving bevel gear meshes with the driven bevel gear. The driven bevel gear is fixedly installed on the circumferential surface of the rotating column. The rotating column is fixedly installed at the bottom axis of the rotary table, and the bottom of the rotating column is rotatably connected to the bottom of the spraying chamber. The two sets of substrate placement seats are fixedly arranged on the surface of the rotary table, and a limiting annular groove is formed on the surface of the mounting plate.

[0011] As a preferred embodiment, the dual-station switching mechanism further includes multiple limiting support rods, which are evenly distributed at the bottom of the rotary table, and the bottom of the limiting support rods is slidably connected to the inside of the limiting annular groove. A partition is fixedly installed on the surface of the rotary table between the two sets of substrate placement seats.

[0012] The technical effects and advantages of this utility model are as follows: 1. By setting up a multi-nozzle adjustable spraying assembly, the boron nitride spraying tank stores the raw materials, which are stably delivered by the output pump. The forward and reverse motors drive the threaded rod to rotate, which drives two sets of sliders to slide along the slide groove and the straight rod respectively. This causes the connecting plate to move laterally with multiple high-pressure nozzles, expanding the spraying coverage area. There are three high-pressure nozzles arranged in a triangular pattern. With the help of the angle adjustment plug and the flow control valve, the spraying angle and flow can be flexibly adjusted, avoiding the limitation of a single nozzle with a fixed angle. This effectively reduces the difference in coating thickness between the edge and center of the substrate, meeting the high precision requirements. At the same time, the telescopic hose and the limiting groove adapt to the movement of the nozzles, ensuring stable material delivery and further improving the uniformity of spraying. 2. By setting up a dual-station switching mechanism, the drive motor drives the active bevel gear to rotate, which in turn drives the rotating column to rotate the rotary table via the driven bevel gear. This allows two sets of substrate placement seats to alternately enter the spraying station. While one station is being sprayed, the other set can complete the loading and unloading of substrates at the opening and closing door, eliminating the need to wait for drying and curing, thus significantly reducing equipment downtime. The limit support rod slides along the limit annular groove to ensure stable operation of the rotary table. The partition can isolate the two stations to avoid mutual interference. In addition, the glass door of the spraying chamber allows for real-time observation of the operation status, and the stable base enhances the overall stability of the device. All components work together to achieve continuous and efficient operation of the equipment, effectively solving the problem of low operating efficiency caused by the single-station design. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a front cross-sectional view of the present invention. Figure 3 This is a rear-view three-dimensional structural diagram of the present invention; Figure 4 This is a schematic diagram of the rear planar structure of this utility model; Figure 5 This is one of the schematic diagrams of the multi-nozzle adjustable spraying assembly structure of this utility model; Figure 6 This is the second schematic diagram of the multi-nozzle adjustable spraying assembly structure of this utility model; Figure 7 This is a schematic diagram of the dual-station switching mechanism of this utility model.

[0014] In the diagram: 1. Spray booth; 2. Stable base; 3. Multi-nozzle adjustable spray assembly; 4. Dual-station switching mechanism; 5. Mounting plate; 6. Limiting groove; 7. Opening and closing door; 301. Boron nitride spray tank; 302. Telescopic hose; 303. Output pump; 304. Positioning plate; 305. Slide groove; 306. Slider; 307. Connecting plate; 308. Forward and reverse motor; 309. Threaded rod; 310. Straight rod; 311. High-pressure nozzle; 401. Drive motor; 402. Limiting annular groove; 403. Driving bevel gear; 404. Rotating column; 405. Driven bevel gear; 406. Rotary table; 407. Limiting support rod; 408. Partition plate; 409. Substrate placement seat. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Please see the appendix Figure 1 - Appendix Figure 6 An automatic boron nitride spraying device includes a spraying chamber 1 and a mounting plate 5. A multi-nozzle adjustable spraying assembly 3 is located at the top of the interior of the spraying chamber 1. The mounting plate 5 is fixedly installed at the lower interior of the spraying chamber 1. A dual-station switching mechanism 4 is located inside the spraying chamber 1 and situated on the mounting plate 5. The multi-nozzle adjustable spraying assembly 3 includes a boron nitride spraying tank 301, an output pump 303, a positioning plate 304, a slider 306, and multiple high-pressure nozzles 311. The boron nitride spraying tank 301 is fixedly installed at the top of the spraying chamber 1 and is used to store boron nitride spraying material. The input end of the output pump 303 is connected to the boron nitride spraying tank 301. Two sets of positioning plates 304 are provided, both fixedly installed within the spraying chamber. Inside the top of the spray chamber 1, a forward and reverse motor 308 is fixedly installed on the right outer wall. The interior of the two sets of positioning plates 304 is provided with a sliding groove 305, and the two sets of sliding grooves 305 are respectively rotatably connected to a threaded rod 309 and fixedly connected to a straight rod 310. This structural design allows the multi-nozzle adjustable spraying component 3 to accurately align with the substrate located on the dual-station switching mechanism 4. The mounting plate 5 provides stable support for the dual-station switching mechanism 4. The cooperation between the boron nitride spraying tank 301 and the output pump 303 can ensure a stable supply of raw materials. The two sets of positioning plates 304 and the internal threaded rods 309 and straight rods 310 provide guidance for the movement of the slider 306, laying the foundation for subsequent uniform spraying.

[0017] Two sets of sliders 306 are provided, one threadedly connected to the circumferential surface of the threaded rod 309 and the other slidably connected to the circumferential surface of the straight rod 310. The sliders 306 are slidably connected inside the slide groove 305. The output end of the forward / reverse motor 308 is fixedly connected to one end of the threaded rod 309. A connecting plate 307 is fixedly connected to the surfaces of both sets of sliders 306. Multiple high-pressure nozzles 311 are mounted on the connecting plate 307. A telescopic hose 302 is fixedly connected to the output end of the output pump 303. The top of the spray chamber 1 has an opening for easy access to the telescopic hose 302. 2. The sliding limiting groove 6, the end of the telescopic hose 302 away from the output pump 303 passes through the connecting plate 307 and is connected to multiple high-pressure nozzles 311 through multiple branch pipes. The connection method of the two sets of sliders 306 with the threaded rod 309 and the straight rod 310 respectively can not only achieve the smooth movement of the connecting plate 307 by driving the forward and reverse motors 308, but also prevent the connecting plate 307 from deviating. The cooperation between the telescopic hose 302 and the limiting groove 6 can adapt to the connecting plate 307 to drive the high-pressure nozzles 311 to move, ensuring that the raw materials are continuously delivered to the high-pressure nozzles 311.

[0018] Three high-pressure nozzles 311 are provided and arranged in a triangular pattern. The high-pressure nozzles 311 are connected to the bottom of the connecting plate 307 through angle adjustment bolts, and the high-pressure nozzles 311 are equipped with flow control valves. The three high-pressure nozzles 311 arranged in a triangular pattern can spray the substrate from different angles. The angle adjustment bolts can flexibly adjust the nozzle angle, and the flow control valves can accurately control the spraying flow. The combination of the three effectively solves the problem of poor uniformity caused by spraying at a fixed angle with a single nozzle, and meets the spraying needs of different substrates.

[0019] Specifically, addressing the issue of poor coating uniformity in existing boron nitride spraying devices, the multi-nozzle adjustable spraying assembly 3 achieves uniform spraying through multi-structure collaboration. The boron nitride spraying tank 301 stores the raw material, the output pump 303 delivers it stably, and the forward and reverse motors 308 drive the threaded rod 309 to rotate, causing two sets of sliders 306 to slide along the slide groove 305 and the straight rod 310 respectively. This, in turn, causes the connecting plate 307 to move multiple high-pressure nozzles 311 laterally, expanding the spraying range. The high-pressure nozzles 311 are arranged in a triangular pattern, and with the help of the angle adjustment plug and the flow control valve, the spraying angle and flow rate can be flexibly adjusted, avoiding the limitations of spraying at a fixed angle with a single nozzle. This effectively reduces the difference in coating thickness between the edge and center of the substrate, meeting the requirements of high-precision products. At the same time, the telescopic hose 302 and the limiting groove 6 adapt to the movement of the nozzles, ensuring a stable supply of raw materials and further improving the coating uniformity.

[0020] Please see the appendix Figure 1 - Appendix Figure 4 and appendix Figure 7Glass doors are fixedly installed on both the front and rear sides of the spraying chamber 1, and an opening and closing door 7 is opened on the left side of the spraying chamber 1. Stable feet 2 are fixedly installed at the four corners of the bottom of the spraying chamber 1. The glass doors on the front and rear sides of the spraying chamber 1 allow the staff to observe the spraying status inside in real time. The opening and closing door 7 on the left side facilitates the loading and unloading of substrates. The stable feet 2 at the four corners of the bottom can enhance the overall stability of the device during operation and reduce the impact of device shaking on the spraying accuracy.

[0021] The dual-station switching mechanism 4 includes a drive motor 401, a driving bevel gear 403, a rotating column 404, a driven bevel gear 405, a rotary table 406, and two sets of substrate placement seats 409. The drive motor 401 is fixedly installed at the bottom of the interior of the spraying chamber 1, and its output shaft is fixedly connected to the driving bevel gear 403. The driving bevel gear 403 meshes with the driven bevel gear 405. The driven bevel gear 405 is fixedly installed on the circumferential surface of the rotating column 404, and the rotating column 404 is fixedly installed on the bottom shaft of the rotary table 406. At the center, the bottom of the rotating column 404 is rotatably connected to the bottom of the spraying chamber 1. Two sets of substrate placement seats 409 are fixedly installed on the surface of the rotating table 406. A limiting annular groove 402 is opened on the surface of the mounting plate 5. The drive motor 401 drives the rotating column 404 to rotate through the bevel gear transmission, thereby causing the rotating table 406 to drive the two sets of substrate placement seats 409 to alternately enter the spraying station. The limiting annular groove 402 on the mounting plate 5 provides installation positioning for the dual-station switching mechanism 4, ensuring that the dual-station switching is carried out in an orderly manner.

[0022] The dual-station switching mechanism 4 also includes multiple limiting support rods 407, which are evenly distributed at the bottom of the rotary table 406. The bottom of the limiting support rods 407 is slidably connected to the inside of the limiting annular groove 402. A partition plate 408 is fixedly installed on the surface of the rotary table 406 between the two sets of substrate placement seats 409. The sliding cooperation between the multiple limiting support rods 407 and the limiting annular groove 402 can effectively prevent the rotary table 406 from tilting during rotation. The partition plate 408 can prevent the substrates on the two sets of substrate placement seats 409 from interfering with each other during spraying or loading and unloading, further improving the stability and orderliness of the device operation.

[0023] Specifically, to address the issue of low operating efficiency in existing equipment, the dual-station switching mechanism 4, in conjunction with other components, significantly improves efficiency. In the dual-station switching mechanism 4, the drive motor 401 drives the active bevel gear 403 to rotate, which in turn drives the rotating column 404 to rotate the rotary table 406 via the driven bevel gear 405. Two sets of substrate placement seats 409 alternately enter the spraying station. While one station is being sprayed, the other station can load and unload substrates at the opening and closing door 7, eliminating the need to wait for drying and curing, thus reducing equipment downtime. The limiting support rod 407 slides along the limiting annular groove 402 to ensure the stable operation of the rotary table 406. The partition 408 prevents the two stations from interfering with each other. In addition, the glass door of the spraying chamber 1 facilitates observation of the operating status, and the sturdy base 2 enhances the overall stability of the equipment. The collaboration of all components enables the equipment to operate continuously and efficiently, solving the problem of low efficiency caused by the single-station design.

[0024] Working principle of this utility model: This utility model is an automatic boron nitride spraying device. When the device is in operation, the substrate to be sprayed is first fixed onto one of the substrate placement seats 409 of the dual-station switching mechanism 4 through the opening / closing door 7 on the left side of the spraying chamber 1. Then, the spraying parameters are set in the control module. After starting the device, the drive motor 401 of the dual-station switching mechanism 4 drives the active bevel gear 403 to rotate. The active bevel gear 403 meshes with the driven bevel gear 405, causing the rotation... The column 404 drives the rotary table 406 to rotate, while the limiting support rod 407 slides along the limiting annular groove 402 on the surface of the mounting plate 5 to ensure the stable operation of the rotary table 406. The substrate placement seat 409 containing the substrate is rotated to the spraying station below the multi-nozzle adjustable spraying assembly 3. The partition 408 isolates the two stations to prevent mutual interference. Then, the multi-nozzle adjustable spraying assembly 3 starts to work. The raw material in the boron nitride spraying tank 301 is transported to the telescopic hose 302 by the output pump 303. The material moves along the limiting groove 6 at the top of the spraying chamber 1. The material enters multiple high-pressure nozzles 311 through the branch pipe. At the same time, the forward and reverse motors 308 drive the threaded rod 309 to rotate, which drives two sets of sliders 306 to slide along the sliding groove 305 and straight rod 310 in the positioning plate 304, respectively. This causes the connecting plate 307 to drive the triangularly distributed high-pressure nozzles 311 to move laterally. During this process, the spraying angle and flow rate can be adjusted by the angle adjustment plug and flow control valve on the high-pressure nozzles 311 to achieve uniform spraying of the substrate. During the spraying process at this station, the next substrate to be sprayed can be fixed on another set of substrate placement seats 409 through the opening and closing door 7. After the current substrate is sprayed, the rotary table 406 rotates again to turn out the sprayed substrate and turn the substrate placement seat 409 with the new substrate into the spraying station. This cycle is repeated to achieve continuous operation. During the operation, the operation status can be observed through the glass doors on the front and rear sides of the spraying chamber 1. The stable feet 2 at the bottom of the device ensure the overall stability of the operation. At this point, the entire process is completed.

[0025] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An automatic boron nitride spraying device, comprising a spraying chamber (1) and a mounting plate (5), characterized in that: The spray chamber (1) is equipped with a multi-nozzle adjustable spraying assembly (3) at its top interior. The mounting plate (5) is fixedly installed at the lower interior of the spray chamber (1). The spray chamber (1) is equipped with a dual-station switching mechanism (4) located on the mounting plate (5). The multi-nozzle adjustable spraying assembly (3) includes a boron nitride spray tank (301), an output pump (303), a positioning plate (304), a slider (306), and multiple high-pressure nozzles (311). The boron nitride spray tank (301) is fixedly installed in the spray chamber (1). The top of the spraying chamber (1) is used to store boron nitride spraying material. The input end of the output pump (303) is connected to the boron nitride spraying tank (301). Two sets of positioning plates (304) are provided and are fixedly installed at the top of the inside of the spraying chamber (1). A forward and reverse motor (308) is fixedly installed on the right outer wall of the spraying chamber (1). The interior of the two sets of positioning plates (304) is provided with a sliding groove (305). A threaded rod (309) is rotatably connected to the two sets of sliding grooves (305) and a straight rod (310) is fixedly connected to them.

2. The automatic boron nitride spraying device according to claim 1, characterized in that: The slider (306) is provided with two sets, which are respectively threaded to the circumferential surface of the threaded rod (309) and slidably connected to the circumferential surface of the straight rod (310). The slider (306) is slidably connected to the inside of the slide groove (305). The output end of the forward and reverse motor (308) is fixedly connected to one end of the threaded rod (309). The surfaces of the two sets of sliders (306) are fixedly connected to a connecting plate (307). Multiple high-pressure nozzles (311) are provided on the connecting plate (307).

3. The automatic boron nitride spraying device according to claim 2, characterized in that: The output end of the output pump (303) is fixedly connected to a telescopic hose (302). The top of the spraying chamber (1) is provided with a limiting groove (6) to facilitate the sliding of the telescopic hose (302). The end of the telescopic hose (302) away from the output pump (303) passes through the connecting plate (307) and is connected to multiple high-pressure nozzles (311) through multiple branch pipes.

4. The automatic boron nitride spraying device according to claim 3, characterized in that: The high-pressure nozzle (311) is provided in three parts and arranged in a triangular pattern. The high-pressure nozzle (311) is connected to the bottom of the connecting plate (307) by an angle adjustment bolt, and a flow control valve is provided on the high-pressure nozzle (311).

5. The automatic boron nitride spraying device according to claim 1, characterized in that: Glass doors are fixedly installed on both the front and rear sides of the spraying chamber (1), and an opening and closing door (7) is provided on the left side of the spraying chamber (1). Stable feet (2) are fixedly installed at the four corners of the bottom of the spraying chamber (1).

6. The automatic boron nitride spraying device according to claim 1, characterized in that: The dual-station switching mechanism (4) includes a drive motor (401), an active bevel gear (403), a rotating column (404), a driven bevel gear (405), a rotary table (406), and two sets of substrate placement seats (409). The drive motor (401) is fixedly installed at the bottom of the inside of the spraying chamber (1), and its output shaft is fixedly connected to the active bevel gear (403). The active bevel gear (403) meshes with the driven bevel gear (405). The driven bevel gear (405) is fixedly installed on the circumferential surface of the rotating column (404). The rotating column (404) is fixedly installed at the bottom axis of the rotary table (406), and the bottom of the rotating column (404) is rotatably connected to the bottom of the inside of the spraying chamber (1). The two sets of substrate placement seats (409) are fixedly arranged on the surface of the rotary table (406). A limiting annular groove (402) is opened on the surface of the mounting plate (5).

7. The automatic boron nitride spraying device according to claim 6, characterized in that: The dual-station switching mechanism (4) also includes multiple limiting support rods (407), which are evenly distributed at the bottom of the rotary table (406). The bottom of the limiting support rods (407) is slidably connected to the inside of the limiting annular groove (402). A partition (408) is fixedly installed on the surface of the rotary table (406) between the two sets of substrate placement seats (409).

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