A semi-automatic hand-held pneumatic photo mask cleaning device

Abstract

The utility model discloses a kind of semi-automatic hand-held pneumatic mask cleaning equipment, belong to the maintenance cleaning technical field of mask. Including the pneumatic motor installed in handle, the output shaft of pneumatic motor extends handle;Connecting seat is fixed at the end of output shaft;Slipper is sleeved on connecting seat, cleaning pad is installed in one end of slipper, cleaning pad is matched with slipper by wedge type structure;Between slipper and connecting seat, elastic member is provided to the direction of cleaning pad direction push slipper, between connecting seat and cleaning pad, connecting piece that relative position of connecting seat and cleaning pad is limited is provided. The utility model's cleaning equipment drive cleaning pad rotation, can remove dirt, scratch in short time, efficiency is obviously improved;Cleaning pad uses floating installation structure, can provide stable, uniform rotation and pressure;Limit by connecting piece, it is convenient to replace different models of cleaning pad, improve cleaning equipment applicability.

Description

Technical Field

[0001] This utility model relates to the field of photomask maintenance and cleaning technology, specifically to a semi-automatic handheld pneumatic photomask cleaning device. Background Technology

[0002] The photomask manufacturing process involves numerous steps and a lengthy cycle. Subsequent inspection, repair, and cutting processes can easily lead to stubborn stains or minor scratches adhering to the photomask surface. Traditional cleaning methods for addressing these localized surface defects involve using cotton swabs dipped in high-purity solvents. The swabs come into physical contact with the photomask surface, and the solvent's dissolving effect, combined with the mechanical force of the cotton fibers, removes contaminants and adsorbs them onto the swab. This is a localized physical cleaning method based on high-purity materials and relying heavily on manual experience. Its effectiveness is directly limited by the operator's skill level, feel, and experience. Furthermore, this method is inefficient, unable to quickly and evenly clean the entire photomask in batches; it is only suitable for spot cleaning and cannot meet the needs of large-scale production. Utility Model Content

[0003] The purpose of this invention is to provide a semi-automatic handheld pneumatic photomask cleaning device to improve the efficiency of photomask cleaning and the product qualification rate.

[0004] This utility model adopts the following technical solution: a semi-automatic handheld pneumatic photomask cleaning device, comprising: A pneumatic motor is installed inside the handle; the output shaft of the pneumatic motor extends out of the handle; A connecting seat is fixed to the end of the output shaft; The sliding sleeve is fitted onto the connecting seat. A cleaning pad is installed at the end of the sliding sleeve away from the connecting seat; the cleaning pad and the sliding sleeve are fitted together by a wedge-shaped structure; Among them, an elastic element is provided between the sliding sleeve and the connecting seat to push the sliding sleeve toward the cleaning pad, and a connecting element is provided between the connecting seat and the cleaning pad to limit the relative position of the connecting seat and the cleaning pad.

[0005] Preferably, the output shaft end has a square segment, which is inserted into the square hole in the center of the connector, and the output shaft end is also threaded with a fastening nut.

[0006] Preferably, the connecting seat has an annular groove on the side away from the pneumatic motor, the sliding sleeve is slidably fitted into the annular groove, and the elastic element is installed at the bottom of the annular groove.

[0007] Preferably, the elastic element is a disc spring.

[0008] Preferably, the connecting seat has multiple sliding grooves, and the inner wall of the sliding sleeve has a sliding strip that cooperates with the sliding grooves.

[0009] Preferably, the cleaning pad has an annular protrusion at one end near the sliding sleeve, and the annular protrusion is fitted onto the end of the sliding sleeve.

[0010] Preferably, the inner wall of the cleaning pad has multiple evenly distributed inclined grooves, and the outer peripheral surface of the sliding sleeve near one end of the cleaning pad has multiple evenly distributed inclined blocks, which are inserted into the inclined grooves.

[0011] Preferably, the connector has a slot. One end of the connector is fixed to the cleaning pad, and the other end of the connector is inserted into the slot; the connector is elongated, and one side of the connector is limited by a step to the inner wall of the slot.

[0012] Preferably, the slot passes through the connector, and the connector has a guide slope at one end located in the slot.

[0013] Preferably, the plurality of the connectors are evenly distributed around the axis of the cleaning pad.

[0014] The beneficial effects of this utility model are as follows: the high-speed rotation of the cleaning pad driven by the cleaning equipment provides strong cutting force, which can remove dirt and scratches in a short time, significantly improving efficiency; the floating cleaning pad installation structure of the cleaning equipment can provide stable and uniform rotation and pressure, which, together with the operator's regular movement, improves the uniformity of cleaning the photomask surface; the use of connecting parts for limiting makes it easy to replace different models of cleaning pads, improving the applicability of the cleaning equipment. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a front view of a semi-automatic handheld pneumatic photomask cleaning device according to an embodiment of the present invention.

[0017] Figure 2 This is a perspective view of the cleaning head in an embodiment of this utility model.

[0018] Figure 3 This is a cross-sectional view of the cleaning head in an embodiment of this utility model.

[0019] Figure 4 for Figure 3 Enlarged view of point A in the middle.

[0020] Figure 5 This is an exploded view of the cleaning head in an embodiment of this utility model.

[0021] Figure 6 This is a perspective view of the connecting seat in an embodiment of this utility model.

[0022] Figure 7 This is a perspective view of the sliding sleeve in an embodiment of this utility model.

[0023] Explanation of reference numerals in the attached figures: 1. Handle; 2. Output shaft; 21. Square segment; 22. Fastening nut; 3. Sliding sleeve; 31. Sliding bar; 32. Inclined block; 4. Cleaning pad; 41. Annular protrusion; 411. Angled groove; 5. Elastic components; 6. Connecting parts; 61. Guide slope; 7. Connecting seat; 71. Annular groove; 72. Slide groove; 73. Slot. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Terms such as "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", and "around" indicate the orientation or positional relationship, and are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation.

[0025] Example 1: like Figure 1 , Figure 2 As shown, this utility model provides a semi-automatic handheld pneumatic photomask cleaning device. The pneumatic motor is installed inside the handle 1, and a switch for controlling the pneumatic motor is located on one side of the handle 1. The output shaft 2 of the pneumatic motor extends out of the upper end of the handle 1, and the cleaning head is fixed to the end of the output shaft 2.

[0026] Combination Figures 3 to 7 As shown, the cleaning head includes a connecting seat 7 fixed to the end of the output shaft 2. The connecting seat 7 is disc-shaped, and an annular groove 71 is formed on the side of the connecting seat 7 away from the pneumatic motor. The outer wall of the annular groove 71 is shorter than the inner wall, and the sliding sleeve 3 is slidably fitted in the annular groove 71. Multiple sliding grooves 72 are evenly distributed around the axis of the connecting seat 7 on the inner wall of the annular groove 71, and the sliding grooves 72 are connected to the right end. Multiple evenly distributed sliding strips 31 are provided on the inner wall of the sliding sleeve 3; the sliding strips 31 slide in conjunction with the sliding grooves 72 to restrict the relative rotation of the sliding sleeve 3 and the connecting seat 7.

[0027] The cleaning pad 4 includes a base plate and a sponge bonded to the base plate. The end of the base plate near the sliding sleeve 3 has a ring-shaped protrusion 41, which fits onto the right end of the sliding sleeve 3. Multiple inclined grooves 411, evenly distributed around the axis of the cleaning pad 4, are formed on the inner wall of the ring-shaped protrusion 41. The side of the inclined groove 411 away from the axis is inclined, while the clockwise and counterclockwise sides are straight. The outer circumferential surface of the right end of the sliding sleeve 3 has multiple evenly distributed inclined blocks 32, which are adapted to fit into the inclined grooves 411. The inclined blocks 32 are inserted into the inclined grooves 411, restricting the relative rotation of the sliding sleeve 3 and the cleaning pad 4.

[0028] An elastic element 5, which is a disc spring, is installed at the bottom of the annular groove 71. The elastic element 5 pushes the sliding sleeve 3 towards the cleaning pad 4, causing the inclined block 32 and the inclined groove 411 to abut against each other. A connector 6 is provided between the connecting seat 7 and the cleaning pad 4. The connector 6 is used to prevent the cleaning pad 4 from detaching from the sliding sleeve 3, while maintaining that the cleaning pad 4 can have a certain displacement relative to the connecting seat 7. Combined with the elastic force of the elastic element 5, the cleaning pad 4 has a certain degree of elastic floating.

[0029] Example 2: Based on the above embodiment one, combined with Figures 3 to 5 As shown, two connectors 6 are evenly distributed around the axis of the cleaning pad 4. Connectors 6 are elongated and have a certain degree of elasticity; one end of the connector 6 is fastened to the cleaning pad 4 and fixed with screws, while the other end is inserted into a slot 73 on the connector 7. The slot 73 extends axially through the connector 7, and a step is provided on the inner side of the slot 73 away from the axis. A step is also provided on the side wall of the connector 6 located inside the slot 73. One side of the connector 6 is limited by the step to prevent the cleaning pad 4 from detaching to the right. A guide ramp 61 is also provided on the left end of the connector 6; when the unloading tool is inserted from the left end of the slot 73, the tool presses against the guide ramp 61, pushing the left end of the connector 6 towards the axis, causing the connector 6 to disengage from the step on the inner wall of the slot 73, thereby allowing the cleaning pad 4 to be replaced.

[0030] Example 3: Based on the above embodiment one, combined with Figures 2 to 6 As shown, the right end of the output shaft 2 has a square segment 21, and the right end of the square segment 21 has a stud. The center of the connecting seat 7 has a square hole, and the right end of the square hole has a countersunk groove. The square segment 21 is inserted into the square hole in the center of the connecting seat 7, and a fastening nut 22 is installed on the stud; the fastening nut 22, together with the step on the left end of the square segment 21, clamps the connecting seat 7, and the square segment 21 restricts the relative rotation of the output shaft 2 and the connecting seat 7.

[0031] Working principle: Apply an appropriate amount of abrasive evenly to the area of ​​the photomask that needs cleaning; Start the cleaning equipment. The output shaft of the pneumatic motor drives the connecting seat, sliding sleeve and cleaning pad to rotate. Gently place the cleaning pad on the surface of the photomask to ensure that the cleaning pad is in full contact with the surface. Move the cleaning equipment slowly and smoothly over the surface of the workpiece. The path of the cleaning pad should overlap with the previous one by about 50% each time to ensure even cleaning without any omissions. Allow the weight of the cleaning equipment itself to provide most of the pressure; only a slight downward pressure is needed. In addition, if the pressure is too high, the elastic element will rebound under pressure, which can prevent damage to the photomask within a certain range. After cleaning, lift the cleaning equipment and turn it off.

[0032] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These embodiments are selected and specifically described in this specification to better explain the principles and practical applications of the present utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A semi-automatic handheld pneumatic photomask cleaning device, characterized in that, include: A pneumatic motor is installed inside the handle; the output shaft of the pneumatic motor extends out of the handle; A connecting seat is fixed to the end of the output shaft; The sliding sleeve is fitted onto the connecting seat. A cleaning pad is installed at the end of the sliding sleeve away from the connecting seat; the cleaning pad and the sliding sleeve are fitted together by a wedge-shaped structure; Among them, an elastic element is provided between the sliding sleeve and the connecting seat to push the sliding sleeve toward the cleaning pad, and a connecting element is provided between the connecting seat and the cleaning pad to limit the relative position of the connecting seat and the cleaning pad.

2. The semi-automatic handheld pneumatic photomask cleaning device according to claim 1, characterized in that: The output shaft end has a square section, which is inserted into the square hole in the center of the connector. The output shaft end is also threaded with a fastening nut.

3. The semi-automatic handheld pneumatic photomask cleaning device according to claim 1, characterized in that: The connecting seat has an annular groove on the side away from the pneumatic motor, the sliding sleeve is slidably fitted into the annular groove, and the elastic element is installed at the bottom of the annular groove.

4. A semi-automatic handheld pneumatic photomask cleaning device according to claim 3, characterized in that: The elastic element is a disc spring.

5. A semi-automatic handheld pneumatic photomask cleaning device according to claim 1, characterized in that: The connecting seat has multiple sliding grooves, and the inner wall of the sliding sleeve has a sliding strip that cooperates with the sliding grooves.

6. A semi-automatic handheld pneumatic photomask cleaning device according to claim 1, characterized in that: The cleaning pad has a ring-shaped protrusion at one end near the sliding sleeve, and the ring-shaped protrusion is fitted onto the end of the sliding sleeve.

7. A semi-automatic handheld pneumatic photomask cleaning device according to claim 6, characterized in that: The inner wall of the cleaning pad has multiple evenly distributed inclined grooves, and the outer peripheral surface of the sliding sleeve near the cleaning pad has multiple evenly distributed inclined blocks, which are inserted into the inclined grooves.

8. A semi-automatic handheld pneumatic photomask cleaning device according to claim 1, characterized in that: The connector is provided with a slot; One end of the connector is fixed to the cleaning pad, and the other end of the connector is inserted into the slot; the connector is elongated, and one side of the connector is limited by a step to the inner wall of the slot.

9. A semi-automatic handheld pneumatic photomask cleaning device according to claim 8, characterized in that: The slot passes through the connector, and the connector has a guide slope at one end located in the slot.

10. A semi-automatic handheld pneumatic photomask cleaning device according to claim 8, characterized in that: The plurality of the connectors are evenly distributed around the axis of the cleaning pad.

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