Crystal ingot cleaning device

Abstract

The utility model discloses a crystal ingot cleaning device relates to crystal ingot cleaning technical field, including cleaning subassembly, and cleaning subassembly includes cleaning storehouse, and the top of cleaning storehouse is provided with the apron, and the one side of cleaning storehouse is provided with a plurality of groups of first water spray head that arranges in turn, and the one side of first water spray head is provided with second water spray head, and the other side of cleaning storehouse is provided with a plurality of groups of first air jet, and the one side of first air jet is provided with second air jet. The utility model discloses through setting up cleaning subassembly can complete the overall cleaning of crystal ingot through the water flow washing mode to remove the impurity attached to it effectively, avoid the influence of the residual impurity to the subsequent processing, and the cooperation of first air jet and second air jet can blow out high pressure gas to complete drying treatment to crystal ingot after cleaning, and the sweeping through high pressure airflow can realize quick, thorough drying, can avoid the emergence of secondary pollution under the condition of the water stain remaining after cleaning.

Description

Technical Field

[0001] This utility model relates to the field of crystal ingot cleaning technology, and in particular to a crystal ingot cleaning device. Background Technology

[0002] Ingots are core raw materials in semiconductor manufacturing. They are typically cylindrical or rectangular solid silicon single or polycrystalline structures. The manufacturing process involves melting high-purity silicon raw materials at high temperatures and then crystallizing and solidifying them through processes such as the Czochralski method. During the laser-modified cutting and subsequent processing of ingots, various contaminants, such as cutting fluid, ingot powder, and dust, adhere to their surfaces. If cleaning is not thorough, these contaminants can affect the quality of subsequent processing and even lead to wafer defects. Traditional cleaning methods often have low automation levels, requiring ingots to be transferred between multiple workstations, resulting in low efficiency, high risk of secondary contamination, and incomplete drying. Especially for large or fragile ingots, manual handling and cleaning not only increase the risk of wafer breakage but also make it difficult to ensure the uniformity and consistency of the cleaning effect.

[0003] Existing crystal ingot cleaning devices cannot dry the ingots immediately after cleaning. The cleaned ingots are usually removed and allowed to air dry naturally. This method is inefficient and cannot dry the ingots quickly after cleaning, resulting in water residue that causes secondary contamination after removal. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a crystal ingot cleaning device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A crystal ingot cleaning device includes a cleaning assembly. The cleaning assembly includes a cleaning chamber with a cover plate on top. Several sets of first water spray heads are arranged sequentially on one side of the cleaning chamber, and second water spray heads are arranged on one side of the first water spray heads. Several sets of first air jet heads are arranged on the other side of the cleaning chamber, and second air jet heads are arranged on one side of the first air jet heads. A platform fixing base plate is provided on the inner wall of the bottom of the cleaning chamber. Several sets of platform columns are provided on the top of the platform fixing base plate, and a placement platform is provided on the top of the platform columns. A platform lifting cylinder is provided on the top of the platform fixing base plate, and a cleaning platform is provided on the top of the platform lifting cylinder. Several sets of vacuum nozzles are arranged sequentially on the cleaning platform, with a crystal ingot placed on one side of each vacuum nozzle. A clamping assembly for holding the crystal ingot is provided on one side of the cleaning chamber. An opening is provided on one side of the cleaning chamber, and a closing assembly for sealing is provided on another side of the cleaning chamber.

[0006] As a further embodiment of this utility model: the clamping assembly includes a fixed column, a lifting module is provided on one side of the fixed column, a rotary drive motor is provided on one side of the lifting module, a reducer is connected to the bottom of the rotary drive motor, a coupling is connected to the output end of the reducer, a rotary joint is provided at the bottom of the coupling, and several sets of vacuum suction cups are provided at the bottom of the rotary joint, the positions of the vacuum suction cups being adapted to the ingot and the vacuum nozzle.

[0007] As a further embodiment of this utility model: the enclosed component includes a connecting frame, which is installed at the bottom of the cleaning chamber. A cleaning door lifting cylinder is provided at the bottom of the connecting frame. The telescopic end of the top of the cleaning door lifting cylinder can slide through the connecting frame. A water receiving frame is provided at the top of the cleaning door lifting cylinder. A cleaning door is provided on one side of the water receiving frame. The size and position of the cleaning door are adapted to the opening of the cleaning chamber.

[0008] As a further improvement of this utility model: an upper air blowing frame is provided at the upper end of the cleaning chamber, and a lower air blowing frame is provided at the lower end of the cleaning chamber.

[0009] As a further improvement of this utility model: two sets of guide grooves are symmetrically arranged on one side of the cleaning chamber, and guide pulleys are symmetrically arranged on both sides of the cleaning door, with the position and size of the guide pulleys matching the guide grooves.

[0010] As a further improvement of this utility model: a limiting pulley is provided on one side of the guide groove, and two sets of limiting pulleys are provided, which are symmetrically arranged in the two sets of guide grooves.

[0011] As a further improvement of this utility model: a transparent observation window is provided on one side of the cleaning door, and the observation window is made of tempered glass.

[0012] The beneficial effects of this utility model are as follows: 1. By setting up a cleaning component, the crystal ingot can be thoroughly cleaned by water rinsing, thereby effectively removing the attached impurities and avoiding the impact of impurity residue on subsequent processing. The first and second jet heads work together to blow out high-pressure gas to dry the crystal ingot after cleaning. The high-pressure airflow can achieve fast and thorough drying, avoiding the occurrence of water stains and secondary pollution after cleaning.

[0013] 2. The upper and lower air blowing frames can respectively blow high-pressure airflow onto the upper and lower surfaces of the crystal ingot. Combined with the side blowing of the second and first air jets, the crystal ingot can be fully covered, thereby further improving the drying efficiency and effect.

[0014] 3. The movement trajectory of the cleaning door can be restricted by the guide pulley sliding within the guide groove, thereby preventing deviation during lifting and lowering. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the crystal ingot cleaning device proposed in this utility model from a frontal perspective. Figure 2 This is a schematic diagram of the lifting part of a crystal ingot cleaning device proposed in this utility model; Figure 3 This is a schematic diagram of the clamping part of a crystal ingot cleaning device proposed in this utility model; Figure 4 This is a schematic diagram of the enclosed part of a crystal ingot cleaning device proposed in this utility model; Figure 5 This is a schematic diagram of the drive section of a crystal ingot cleaning device proposed in this utility model; Figure 6 This is a schematic diagram of the cleaning section of a crystal ingot cleaning device proposed in this utility model. Figure 7 This is a schematic diagram of the structure of the placement part of the crystal ingot cleaning device proposed in this utility model. Figure 8 This is a schematic diagram of the guide section of a crystal ingot cleaning device proposed in this utility model.

[0016] In the diagram: 1. Cleaning chamber; 2. First spray nozzle; 3. Second spray nozzle; 4. Crystal ingot; 5. Cleaning door; 6. Observation window; 7. Cleaning door lifting cylinder; 8. Connecting frame; 9. Water receiving frame; 10. Guide chute; 11. Vacuum suction cup; 12. Rotary joint; 13. Cover plate; 14. Rotary drive motor; 15. Lifting module; 16. Fixed column; 17. Cleaning platform; 18. Vacuum suction nozzle; 19. Platform fixed base plate; 20. Platform column; 21. Placement platform; 22. First air nozzle; 23. Second air nozzle; 24. Coupling; 25. Reducer; 26. Platform lifting cylinder; 27. Upper air blowing frame; 28. Lower air blowing frame; 29. ​​Guide pulley; 30. Limit pulley. Detailed Implementation

[0017] The technical solution of this utility model will be further described in detail below with reference to specific embodiments.

[0018] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model. Example

[0019] A crystal ingot cleaning device, such as Figure 1-8As shown, the system includes a cleaning assembly, which includes a cleaning chamber 1. The top of the cleaning chamber 1 is provided with a cover plate 13. Several sets of first water spray heads 2 are arranged in sequence on one side of the cleaning chamber 1. A second water spray head 3 is provided on one side of the first water spray head 2. Several sets of first air spray heads 22 are provided on the other side of the cleaning chamber 1. A second air spray head 23 is provided on one side of the first air spray head 22. A platform fixing base plate 19 is provided on the bottom inner wall of the cleaning chamber 1. Several sets of platform columns 20 are provided on the top of the platform fixing base plate 19. A placement platform 21 is provided on the top of the platform columns 20. A platform lifting cylinder 26 is provided on the top of the platform fixing base plate 19. A cleaning platform 17 is provided on the top of the platform lifting cylinder 26. Several sets of vacuum nozzles 18 are arranged in sequence on the cleaning platform 17. A crystal ingot 4 is provided on one side of the vacuum nozzle 18. A clamping assembly for clamping is provided on one side of the cleaning chamber 1. An opening is provided on one side of the cleaning chamber 1. A closing assembly for closing is provided on one side of the cleaning chamber 1. In use, several sets of installation interfaces are symmetrically opened on both sides of the cleaning chamber 1. The first water spray head 2, the second water spray head 3, the first air jet head 22, and the second air jet head 23 are respectively installed in the several sets of installation interfaces. The opening and closing of the cleaning chamber 1 can be controlled by the sealing component. After the opening of the cleaning chamber 1 is opened, the crystal ingot 4 can be placed into the cleaning chamber 1. When the opening of the cleaning chamber 1 is open, the platform lifting cylinder 26 can control the cleaning platform 17 and the vacuum suction nozzle 18 to rise to the high position. After the crystal ingot 4 is placed into the cleaning chamber 1, it is placed on the vacuum suction nozzle 18. By connecting a negative pressure device to evacuate air, the vacuum nozzle 18 generates suction to adsorb and fix the crystal ingot 4. After adsorption and fixation are completed, the opening of the cleaning chamber 1 can be sealed by the sealing component. After sealing, the vacuum nozzle 18 and the crystal ingot 4 can be lowered by the platform lifting cylinder 26, so that the crystal ingot 4 is placed stably on the placement platform 21. After placement, the crystal ingot 4 can be lifted by the clamping component, so that the crystal ingot 4 is lifted away from the placement platform 21 and begins to rotate. A water supply pipe can be connected through the first water spray head 2 and the second water spray head 3, and water can be supplied by the first water spray head. Water is sprayed from the first spray head 2 and the second spray head 3. The combination of water spraying and rotation allows for comprehensive rinsing of the crystal ingot 4, effectively removing impurities and preventing residue. After rinsing, the first spray head 2 and the second spray head 3 can be stopped. An air supply pipe can be connected to the first air jet head 22 and the second air jet head 23, allowing airflow to be sprayed from these two nozzles to clean the sides of the crystal ingot 4 using high-pressure airflow. It can achieve fast and thorough drying, avoiding secondary pollution caused by water stains after cleaning. After drying, the crystal ingot 4 can be placed back on the placement platform 21 by lowering the clamping component. After being placed, the vacuum nozzle 18 is driven to rise again by the platform lifting cylinder 26. When rising, the crystal ingot 4 is re-adsorbed and fixed. After being fixed, it is lifted away from the placement platform 21 and raised to a high position. After being raised, the crystal ingot can be easily removed through the opening of the cleaning chamber 1. Through the cooperation of various components, automated cleaning can be achieved, making cleaning more convenient and faster. The clamping assembly includes a fixed column 16, a lifting module 15 is provided on one side of the fixed column 16, a rotary drive motor 14 is provided on one side of the lifting module 15, a reducer 25 is connected to the bottom of the rotary drive motor 14, a coupling 24 is connected to the output end of the reducer 25, a rotary joint 12 is provided at the bottom of the coupling 24, and several sets of vacuum suction cups 11 are provided at the bottom of the rotary joint 12. The position of the vacuum suction cups 11 is adapted to the crystal ingot 4 and the vacuum nozzle 18. In use, the lifting module 15 can be fixed and supported by the fixed column 16. The rotary joint 12 can be slidably connected to the cleaning chamber 1. The lifting module 15 can control the vacuum suction cup 11 to lift and lower. After the vacuum suction cup 11 descends and contacts the crystal ingot 4, it can suck up the crystal ingot 4 and fix it. After fixing, the rotary joint 12 can be moved upward to synchronously control the crystal ingot 4 to move upward. The crystal ingot 4 can be moved to a position that matches the second water spray head 3 and the second air spray head 23. After it is moved into place, the rotary drive motor 14 can be started to control the coupling 24 and the rotary joint 12 to rotate, thereby synchronously controlling the vacuum suction cup 11 and the crystal ingot 4 to rotate. The rotation can facilitate rinsing and cleaning and blowing and drying. After drying, the crystal ingot 4 can be put down and placed on the placement table 21 for easy removal. The enclosed assembly includes a connecting frame 8, which is installed at the bottom of the cleaning chamber 1. A cleaning door lifting cylinder 7 is provided at the bottom of the connecting frame 8. The telescopic end of the top of the cleaning door lifting cylinder 7 can slide through the connecting frame 8. A water receiving frame 9 is provided at the top of the cleaning door lifting cylinder 7. A cleaning door 5 is provided on one side of the water receiving frame 9. The size and position of the cleaning door 5 are adapted to the opening of the cleaning chamber 1. During use, the water receiving rack 9 and cleaning door 5 can be raised or lowered by starting the cleaning door lifting cylinder 7. When it is necessary to put in or take out the crystal ingot 4, the cleaning door lifting cylinder 7 can be used to control the cleaning door 5 to move down and open the opening of the cleaning chamber 1. After opening, the crystal ingot 4 can be easily taken out or put in. During cleaning and drying, the cleaning door 5 can be controlled to move up to close the opening of the cleaning chamber 1, which can prevent water from splashing out. At the same time, a closed space can be formed for automated cleaning, which can prevent contaminants from entering and contaminating the crystal ingot 4. In order to dry the top and bottom surfaces of ingot 4, such as Figure 4 , 6 As shown in Figures 7 and 8, an upper air blowing frame 27 is provided at the upper end of the cleaning chamber 1, and a lower air blowing frame 28 is provided at the lower end of the cleaning chamber 1. When in use, after the upper air blowing frame 27 and the lower air blowing frame 28 are installed, they face the top and bottom of the crystal ingot 4 respectively. The air blowing from the upper air blowing frame 27 and the lower air blowing frame 28 can blow high-pressure airflow onto the upper and lower surfaces of the crystal ingot 4 respectively. Combined with the side blowing from the second jet head 23 and the first jet head 22, the crystal ingot 4 can be fully covered, thereby further increasing the drying efficiency and effect. To guide the cleaning door 5 as it rises or falls, such as Figure 1 , 4 As shown in Figures 5 and 8, two sets of guide chutes 10 are symmetrically arranged on one side of the cleaning chamber 1, and guide pulleys 29 are symmetrically arranged on both sides of the cleaning door 5. The position and size of the guide pulleys 29 are adapted to the guide chutes 10. In use, the guide pulley 29 can be slidably installed in the guide groove 10. When controlling the lifting and lowering of the cleaning door 5, the movement trajectory of the cleaning door 5 can be restricted by the guide pulley 29 sliding in the guide groove 10, thereby avoiding deviation during lifting and lowering. To prevent the guide pulley 29 from dislodging during descent, such as Figure 8 As shown, a limiting pulley 30 is provided on one side of the guide slide 10. There are two sets of limiting pulleys 30, which are symmetrically arranged in the two sets of guide slide 10. When in use, the limiting pulley 30 is at the bottom of the guide groove 10. When the cleaning door 5 is controlled to descend, the limiting pulley 30 at the bottom can limit the guide pulley 29. By limiting it, the cleaning door 5 can be limited at the same time, which can prevent the guide pulley 29 from coming out of the guide groove 10 when the cleaning door 5 moves down, thus affecting normal use. Example

[0020] To facilitate observation of the operation, refer to Figure 4 A crystal ingot cleaning device, the present embodiment makes the following improvements compared with embodiment 1: a transparent observation window 6 is provided on one side of the cleaning door 5, and the material of the observation window 6 is tempered glass; During use, the observation window 6 made of transparent tempered glass allows observation of the internal cleaning process when the cleaning door 5 closes the cleaning chamber 1. It also allows observation of whether each component is operating normally, thus enabling timely detection and handling of problems.

[0021] The above description is only a preferred embodiment of the present utility model. For parts that do not require creative effort in circuit control, signal control and transmission, please refer to the prior art. However, the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the scope of the technology disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A crystal ingot cleaning apparatus, characterized in that, The cleaning assembly includes a cleaning chamber (1), a cover plate (13) on the top of the cleaning chamber (1), several sets of first water spray heads (2) arranged in sequence on one side of the cleaning chamber (1), a second water spray head (3) on one side of the first water spray head (2), several sets of first air jet heads (22) on the other side of the cleaning chamber (1), a second air jet head (23) on one side of the first air jet head (22), a platform fixing base plate (19) on the bottom inner wall of the cleaning chamber (1), and several sets of first air jet heads (23) on the top of the platform fixing base plate (19). A platform column (20) is provided with a placement platform (21) on top of the platform column (20). A platform lifting cylinder (26) is provided on top of the platform fixing base plate (19). A cleaning platform (17) is provided on top of the platform lifting cylinder (26). Several sets of vacuum nozzles (18) are arranged in sequence on the cleaning platform (17). A crystal ingot (4) is provided on one side of the vacuum nozzle (18). A clamping component for clamping is provided on one side of the cleaning chamber (1). An opening is provided on one side of the cleaning chamber (1). A sealing component for closing is provided on one side of the cleaning chamber (1).

2. The ingot cleaning apparatus according to claim 1, characterized in that, The clamping assembly includes a fixed column (16), a lifting module (15) is provided on one side of the fixed column (16), a rotary drive motor (14) is provided on one side of the lifting module (15), a reducer (25) is connected to the bottom of the rotary drive motor (14), a coupling (24) is connected to the output end of the reducer (25), a rotary joint (12) is provided at the bottom of the coupling (24), and a number of vacuum suction cups (11) are provided at the bottom of the rotary joint (12). The position of the vacuum suction cups (11) is adapted to the ingot (4) and the vacuum nozzle (18).

3. The ingot cleaning apparatus according to claim 1, characterized in that, The enclosed assembly includes a connecting frame (8), which is installed at the bottom of the cleaning chamber (1). A cleaning door lifting cylinder (7) is provided at the bottom of the connecting frame (8). The telescopic end of the top of the cleaning door lifting cylinder (7) can slide through the connecting frame (8). A water receiving frame (9) is provided at the top of the cleaning door lifting cylinder (7). A cleaning door (5) is provided on one side of the water receiving frame (9). The size and position of the cleaning door (5) are adapted to the opening of the cleaning chamber (1).

4. The ingot cleaning apparatus according to claim 1, characterized in that, The cleaning chamber (1) is provided with an upper air blowing frame (27) at the upper end and a lower air blowing frame (28) at the lower end.

5. The ingot cleaning apparatus according to claim 3, characterized in that, Two sets of guide grooves (10) are symmetrically arranged on one side of the cleaning chamber (1), and guide pulleys (29) are symmetrically arranged on both sides of the cleaning door (5). The position and size of the guide pulleys (29) are adapted to the guide grooves (10).

6. The ingot cleaning apparatus according to claim 5, characterized in that, The guide groove (10) is provided with a limiting pulley (30) on one side. There are two sets of limiting pulleys (30), which are symmetrically arranged in the two sets of guide grooves (10).

7. The ingot cleaning apparatus according to claim 3, characterized in that, A transparent observation window (6) is provided on one side of the cleaning door (5), and the observation window (6) is made of tempered glass.

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