Purging cleaning device for upper electrode

Abstract

The utility model relates to the technical field of semiconductor manufacturing, provide a kind of blowing cleaning device of upper electrode.The device includes: bearing disc, for bearing the upper electrode, the bearing disc with the position corresponding to the upper electrode has the first opening along the first direction through the bearing disc;Shunt disc, with the bearing disc is connected, the shunt disc with the position corresponding to the upper electrode is opened with multiple micropores;Gas introduction disc, with the side of the shunt disc away from the bearing disc is sealed connection and forms first cavity, the gas introduction disc is provided with gas nozzle, the gas nozzle is used to be connected with the gas pipe of input compressed gas, the first cavity can accommodate the compressed gas input by the gas nozzle, multiple the micropore can be shunted after the compressed gas contained by the first cavity is blown and cleaned the upper electrode.Using the device can effectively bring out the pollutant in the hole of upper electrode, saves manpower, guarantees the cleaning effect.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a blowing and cleaning device for an upper electrode. Background Technology

[0002] The top electrode is a key component in chip manufacturing, primarily used for etching metal coatings to form electronic circuitry on the polysilicon surface. The top electrode is a disc-shaped structure with numerous uniformly distributed pores and a certain thickness. It disperses plasma gas, ensuring uniform bombardment of the wafer surface. With increasingly sophisticated layout designs in very large-scale integrated circuits, current chip manufacturing processes have largely entered the nanometer era, placing extremely high demands on cleanliness throughout the entire process, including the top electrode. The cleanliness of the top electrode is primarily characterized by the absence of significant amounts of particulate matter, metals, and organic contaminants on its surface and within its micropores.

[0003] Currently, cleaning the upper electrode requires wiping the electrode surface clean with a lint-free cloth soaked in isopropyl alcohol (IPA), followed by manually blowing out the pores inside the electrode that cannot be reached by wiping. This blowing process is not only time-consuming and labor-intensive, but also often fails to achieve the desired cleaning effect due to incomplete cleaning. Summary of the Invention

[0004] The technical problem to be solved by this utility model is to provide a blowing and cleaning device for the upper electrode, which can save manpower and ensure cleaning effect.

[0005] To address the aforementioned problems, this utility model provides a purging and cleaning device for an upper electrode, comprising: a support plate for supporting the upper electrode, the support plate having a first opening penetrating the support plate along a first direction at a position corresponding to the upper electrode, the first direction being perpendicular to the support surface of the support plate; a diverting plate connected to the support plate, the diverting plate having multiple micro-holes at a position corresponding to the upper electrode; and a gas inlet plate sealed to the side of the diverting plate away from the support plate to form a first cavity, the gas inlet plate being provided with a nozzle for connecting to a pipe for inputting compressed gas, the first cavity being able to accommodate compressed gas input through the nozzle, and the multiple micro-holes being able to divert the compressed gas contained in the first cavity and then purge and clean the upper electrode.

[0006] In some embodiments, the carrier plate includes a U-shaped annular plate having a second opening on one side of the carrier plate along a second direction, the size of which allows the upper electrode to be placed on the carrier plate along the second direction; wherein the second direction is perpendicular to the first direction.

[0007] In some embodiments, the U-shaped annular plate has a step at the first opening, the shape of which is adapted to the bottom shape of the upper electrode.

[0008] In some embodiments, at least one support is installed on the side of the carrier plate opposite to the diverter plate.

[0009] In some embodiments, a plurality of the micropores are uniformly distributed on the distribution plate.

[0010] In some embodiments, the shunt disk and the upper electrode are in sealed contact by a second sealing ring, the shunt disk has a second recess on the side near the upper electrode, a plurality of micropores are formed in the second recess, and a sealed second cavity is formed between the shunt disk and the upper electrode at the second recess.

[0011] In some embodiments, the device includes a flow divider disk, the size of which is larger than the size of the upper electrode.

[0012] In some embodiments, the device includes a plurality of said shunt disks, each of which is smaller in size than the upper electrode.

[0013] In some embodiments, the gas inlet plate and the diverter plate are sealed together by a first sealing ring, and the gas inlet plate has a first recess on the side near the diverter plate, and a sealed first cavity is formed between the gas inlet plate and the diverter plate at the first recess.

[0014] In some embodiments, the gas inlet plate and the distribution plate are locked together by screws; the distribution plate and the support plate are connected by screws.

[0015] The above technical solution involves placing the upper electrode to be cleaned between the distribution plate and the carrier plate, and introducing compressed gas into the sealed first cavity between the gas inlet plate and the distribution plate through the air nozzle on the gas inlet plate. The gas is then diverted through multiple micro-holes on the distribution plate and flows out through the holes on the upper electrode, which can carry out the contaminants in the holes of the upper electrode. This eliminates the need for manual cleaning of the holes on the upper electrode with a gas spray gun, saves manpower, avoids the possibility of incomplete cleaning, and ensures the cleaning effect. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A cross-sectional schematic diagram showing the assembly process of the purging and cleaning device for the upper electrode provided in an embodiment of this utility model; Figure 2 A top view of a carrier plate provided in an embodiment of the present utility model; Figure 3 This is a bottom view of a flow divider provided in an embodiment of the present invention.

[0018] Explanation of reference numerals in the attached figures: 10. Upper electrode; 19. Trachea; 11. Support plate; 111. First opening; 112. Second opening; 113. Step; 114. Support component; 115. Third screw hole; 12. Diverter plate; 121. Micropore; 122. Second recess; 123. First screw hole; 124. Second screw hole; 13. Gas inlet plate; 131. Gas nozzle; 132. First recess; 141. First cavity; 142. Second cavity; 151. First sealing ring; 152. Second sealing ring; 181. First screw; 182. Second screw. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0020] Please refer to the following: Figures 1-2 ,in, Figure 1 A cross-sectional schematic diagram showing the assembly process of the purging and cleaning device for the upper electrode provided in an embodiment of this utility model; Figure 2 A top view of a carrier plate provided in an embodiment of the present utility model; Figure 3 This is a bottom view of a flow divider provided in an embodiment of the present invention.

[0021] like Figure 1 As shown, the cleaning device for the upper electrode described in this embodiment includes: a support plate 11, a diversion plate 12, and a gas inlet plate 13.

[0022] Specifically, the support plate 11 is used to support the upper electrode 10, and the support plate 11 has a first opening 111 extending through the support plate along a first direction D1 at a position corresponding to the upper electrode 10. The first direction D1 is perpendicular to the support surface of the support plate 11 (i.e., the surface supporting the upper electrode 10). The first opening 111 can be used to discharge contaminants such as particles, metals, and organic matter blown off during the cleaning of the upper electrode 10, preventing contaminants from accumulating at the bottom of the upper electrode 10. In some embodiments, the support plate 11 may also have a receiving section below the first opening 111 to collect blown-off contaminants such as particles, metals, and organic matter, preventing contaminants from polluting the working environment.

[0023] Specifically, the diversion plate 12 is connected to the carrier plate 11, and the diversion plate 12 has multiple micro-holes 121 at positions corresponding to the upper electrode 10. These micro-holes 121 can be used to divert the compressed gas input during the cleaning of the upper electrode 10 and then blow it onto the upper electrode 10 for cleaning. Since the upper electrode 10 has a large number of pores, these pores cannot be wiped with an isopropyl alcohol-soaked lint-free cloth, requiring manual cleaning with a gas spray gun. This is not only time-consuming and labor-intensive, but also often fails to achieve the desired cleaning effect due to incomplete cleaning. In this embodiment, by opening multiple micro-holes 121 on the diversion plate 12 to divert the input compressed gas, the diverted compressed gas flows out through the pores on the upper electrode 10. This process can carry away contaminants from the pores of the upper electrode 10, achieving a better cleaning effect.

[0024] Specifically, the gas inlet plate 13 and the diverter plate 12 are sealed together on the side opposite to the support plate 11, forming a first cavity 141. The gas inlet plate 13 is equipped with a nozzle 131, which is used to connect to the gas pipe 19 for input compressed gas. The first cavity 141 can accommodate the compressed gas input through the nozzle 131. Multiple micropores 121 can divert the compressed gas contained in the first cavity 141 and then purge and clean the upper electrode 10. The sealed connection between the gas inlet plate 13 and the diverter plate 12 prevents leakage of the input compressed gas. The sealed first cavity 141 formed between the gas inlet plate 13 and the diverter plate 12 facilitates the diversion of the input compressed gas to the multiple micropores 121 of the diverter plate 12.

[0025] like Figure 2As shown, in this embodiment, the carrier plate 11 includes a U-shaped annular plate with a second opening 112 along a second direction D2 on one side of the carrier plate 11. The size of the second opening 112 allows the upper electrode 10 to be placed onto the carrier plate 11 along the second direction D2. The second direction D2 is perpendicular to the first direction D1; that is, the first direction D1 is perpendicular to the bearing surface of the carrier plate 11 (i.e., the surface bearing the upper electrode 10), and the second direction D2 is parallel to the bearing surface of the carrier plate 11. Through the second opening 112, the upper electrode 10 can be easily inserted into the carrier plate 11 from the side. Thus, the carrier plate 11, the diversion plate 12, and the gas inlet plate 13 can be pre-assembled, and then the upper electrode 10 to be cleaned can be placed onto the carrier plate 11 through the second opening 112, effectively improving cleaning efficiency. The pre-assembled cleaning device for the upper electrode has a certain amount of space to facilitate the placement of the upper electrode 10 that needs to be cleaned, and the cleaning device for the pre-assembled upper electrode can be further tightened as needed after the upper electrode 10 is placed.

[0026] Please continue reading. Figure 2 In this embodiment, the U-shaped annular plate has a step 113 at the first opening 111, and the shape of the step 113 is adapted to the bottom shape of the upper electrode 10. That is, for the upper electrode 10 with an inverted stepped bottom, the first step surface of the step 113, which is away from the flow divider 12, extends outward to support the recessed bottom of the upper electrode 10, and the upper part of the upper electrode 10 can be supported on the second step surface of the step 113, which is close to the flow divider 12; thus, while supporting the upper electrode 10 well, damage to the outer surface of the upper electrode 10 is avoided.

[0027] Please refer to the following: Figure 1 In this embodiment, at least one support member 114 is installed on the side of the carrier plate 11 opposite to the diverter plate 12. In this embodiment, three support members 114 are installed on the side of the carrier plate 11 opposite to the diverter plate 12; in other embodiments, one, two, or more than three support members 114 may also be installed on the side of the carrier plate 11 opposite to the diverter plate 12. The support members 114 allow contaminants discharged through the first opening 111 to fall off completely, preventing contaminants from accumulating at the bottom of the upper electrode 10. In some embodiments, the carrier plate 11 may also have a receiving section below the first opening 111 to collect blown-off particles, metals, organic matter, and other contaminants, preventing contaminants from polluting the working environment.

[0028] like Figure 3As shown, in this embodiment, the multiple micropores 121 are evenly distributed on the distribution plate 12. The compressed gas entering the first cavity 141 is evenly distributed by the micropores 121 on the distribution plate 12, and when it flows through the holes of the upper electrode 10 itself, the gas is basically evenly distributed to each hole, thereby achieving a basically the same cleaning effect and effectively improving the cleaning effect.

[0029] Please refer to the following: Figure 1 In this embodiment, the diverter disk 12 and the upper electrode 10 are in sealed contact via a second sealing ring 152. The diverter disk 12 has a second recess 122 on the side near the upper electrode 10, and a plurality of micropores 121 are formed in the second recess 122. A sealed second cavity 142 is formed between the diverter disk 12 and the upper electrode 10 at the second recess 122. The sealed contact between the diverter disk 12 and the upper electrode 10 can prevent leakage of the input compressed gas. The sealed second cavity 142 formed between the diverter disk 12 and the upper electrode 10 facilitates the continued diversion of the compressed gas after being diverted by the plurality of micropores 121 into the various holes of the upper electrode 10 itself.

[0030] like Figure 1 As shown, in this embodiment, the device includes a flow divider 12, the size of which is larger than the size of the upper electrode 10. In other embodiments, the device includes multiple flow dividers, each smaller than the size of the upper electrode. That is, if the upper electrode is large, a single flow divider may not be sufficient to uniformly distribute the gas, and multiple flow dividers can be used.

[0031] Please continue reading. Figure 1 In this embodiment, the gas inlet disk 13 and the diverter disk 12 are sealed together by a first sealing ring 151. The gas inlet disk 13 has a first recess 132 on the side near the diverter disk 12, and a sealed first cavity 141 is formed between the gas inlet disk 13 and the diverter disk 12 at the first recess 132. The sealing ring can improve the sealing effect and prevent leakage of the input compressed gas; the sealed first cavity 141 facilitates the diversion of compressed gas to the multiple micropores 121 of the diverter disk 12.

[0032] Please refer to the following: Figures 1-3In this embodiment, the gas inlet plate 13 and the diverter plate 12 are locked together by a first screw 181; the diverter plate 12 and the support plate 11 are connected by a second screw 182. Specifically, the diverter plate 12 is provided with a first screw hole 123, and the gas inlet plate 13 and the diverter plate 12 are also provided with screw holes at their relative positions, and the gas inlet plate 13 and the diverter plate 12 are locked together by the first screw 181. The diverter plate 12 is also provided with a second screw hole 124, and the support plate 11 and the diverter plate 12 are also provided with a third screw hole 115 at their relative positions, and the support plate 11 and the diverter plate 12 are connected by the second screw 182. In other embodiments, the screw holes on the gas inlet plate 13, the diverter plate 12, and the support plate 11 can be correspondingly arranged, so that the three are connected by a single screw.

[0033] In the above embodiment, the upper electrode cleaning device is used by placing the upper electrode to be cleaned between the distribution plate and the support plate, and tightening the screws to secure it. Compressed gas enters the sealed first cavity between the gas inlet plate and the distribution plate through the nozzle on the gas inlet plate, and then flows out through the holes on the upper electrode after being divided by multiple micro-holes on the distribution plate. In this process, contaminants in the holes of the upper electrode can be carried out. Using the upper electrode cleaning device described in this embodiment eliminates the need for manual cleaning of the holes on the upper electrode with a gas spray gun, saving manpower and avoiding the possibility of incomplete cleaning, thus ensuring the cleaning effect.

[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "also includes a…" does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0035] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of protection of this utility model. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. A purging and cleaning device for the upper electrode, characterized in that, include: A support plate for supporting the upper electrode, wherein the support plate has a first opening at a position corresponding to the upper electrode, the first direction being perpendicular to the support surface of the support plate; A flow divider is connected to the support plate, and multiple micro-holes are formed on the flow divider at positions corresponding to the upper electrode. A gas inlet plate is sealed to the side of the flow divider away from the support plate and forms a first cavity. An air nozzle is provided on the gas inlet plate, which is used to connect to a gas pipe for inputting compressed gas. The first cavity can accommodate the compressed gas input through the air nozzle. The multiple micro-holes can divert the compressed gas contained in the first cavity and then blow it to clean the upper electrode.

2. The purging and cleaning device for the upper electrode according to claim 1, characterized in that, The carrier plate includes a U-shaped annular plate having a second opening on one side of the carrier plate along a second direction, the size of which allows the upper electrode to be placed on the carrier plate along the second direction; wherein the second direction is perpendicular to the first direction.

3. The purging and cleaning device for the upper electrode according to claim 2, characterized in that, The U-shaped annular plate has a step at the first opening, and the shape of the step is adapted to the bottom shape of the upper electrode.

4. The purging and cleaning device for the upper electrode according to claim 1 or 2, characterized in that, At least one support is installed on the side of the bearing plate opposite to the diverter plate.

5. The purging and cleaning device for the upper electrode according to claim 1, characterized in that, The micropores are evenly distributed on the distribution plate.

6. The purging and cleaning device for the upper electrode according to claim 1, characterized in that, The flow divider and the upper electrode are in sealed contact through a second sealing ring. The flow divider has a second recess on the side near the upper electrode, and a plurality of micropores are formed in the second recess. A sealed second cavity is formed between the flow divider and the upper electrode at the second recess.

7. The purging and cleaning device for the upper electrode according to claim 1, characterized in that, The device includes a flow divider, the size of which is larger than the size of the upper electrode.

8. The purging and cleaning device for the upper electrode according to claim 1, characterized in that, The device includes a plurality of the flow dividers, each of which is smaller than the size of the upper electrode.

9. The purging and cleaning device for the upper electrode according to claim 1, characterized in that, The gas inlet plate and the distribution plate are sealed together by a first sealing ring. The gas inlet plate has a first recess on the side near the distribution plate. A sealed first cavity is formed between the gas inlet plate and the distribution plate at the first recess.

10. The purging and cleaning device for the upper electrode according to claim 1, characterized in that, The gas inlet plate and the distribution plate are locked together by screws; the distribution plate and the support plate are connected by screws.

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